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The relationship between the precursor concentration in the feed and in the resulting films was studied by energy-dispersive X-ray spectroscopy, suggesting that the efficiency of doping is quantitative and that this method could potentially impart exquisite control over dopant levels. All SnO<jats:sub>2<\/jats:sub> films were in tetragonal structure as confirmed by powder X-ray diffraction measurements. X-ray photoelectron spectroscopy characterisation indicated for the first time that Mo ions were in mixed valence states of Mo(VI) and Mo(V) on the surface. Incorporation of Mo<jats:sup>6+<\/jats:sup> resulted in the lowest resistivity of <jats:inline-formula><jats:alternatives><jats:tex-math>$$7.3 \\times 10^{{ - 3}} \\Omega \\,{\\text{cm}}$$<\/jats:tex-math><mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\">\n                  <mml:mrow>\n                    <mml:mn>7.3<\/mml:mn>\n                    <mml:mo>\u00d7<\/mml:mo>\n                    <mml:msup>\n                      <mml:mn>10<\/mml:mn>\n                      <mml:mrow>\n                        <mml:mo>-<\/mml:mo>\n                        <mml:mn>3<\/mml:mn>\n                      <\/mml:mrow>\n                    <\/mml:msup>\n                    <mml:mi>\u03a9<\/mml:mi>\n                    <mml:mspace\/>\n                    <mml:mtext>cm<\/mml:mtext>\n                  <\/mml:mrow>\n                <\/mml:math><\/jats:alternatives><\/jats:inline-formula>, compared to pure SnO<jats:sub>2<\/jats:sub> films with resistivities of <jats:inline-formula><jats:alternatives><jats:tex-math>$$4.3\\left( 0 \\right) \\times 10^{{ - 2}} \\Omega \\,{\\text{cm}}$$<\/jats:tex-math><mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\">\n                  <mml:mrow>\n                    <mml:mn>4.3<\/mml:mn>\n                    <mml:mfenced>\n                      <mml:mn>0<\/mml:mn>\n                    <\/mml:mfenced>\n                    <mml:mo>\u00d7<\/mml:mo>\n                    <mml:msup>\n                      <mml:mn>10<\/mml:mn>\n                      <mml:mrow>\n                        <mml:mo>-<\/mml:mo>\n                        <mml:mn>2<\/mml:mn>\n                      <\/mml:mrow>\n                    <\/mml:msup>\n                    <mml:mi>\u03a9<\/mml:mi>\n                    <mml:mspace\/>\n                    <mml:mtext>cm<\/mml:mtext>\n                  <\/mml:mrow>\n                <\/mml:math><\/jats:alternatives><\/jats:inline-formula>. Meanwhile, a high transmittance of 83% in the visible light range was also acquired. This work presents a comprehensive investigation into impact of Mo doping on SnO<jats:sub>2<\/jats:sub> films synthesised by AACVD for the first time and establishes the potential for scalable deposition of SnO<jats:sub>2<\/jats:sub>:Mo thin films in TCO manufacturing.<\/jats:p>\n                <jats:p><jats:bold>Graphical abstract<\/jats:bold><\/jats:p>","DOI":"10.1007\/s10853-021-06269-3","type":"journal-article","created":{"date-parts":[[2021,7,12]],"date-time":"2021-07-12T20:02:47Z","timestamp":1626120167000},"page":"15921-15936","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["A novel and potentially scalable CVD-based route towards SnO2:Mo thin films as transparent conducting oxides"],"prefix":"10.1007","volume":"56","author":[{"given":"Tianlei","family":"Ma","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Marek","family":"Nikiel","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andrew G.","family":"Thomas","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mohamed","family":"Missous","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5950-1350","authenticated-orcid":false,"given":"David J.","family":"Lewis","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2021,7,12]]},"reference":[{"issue":"12","key":"6269_CR1","doi-asserted-by":"publisher","first-page":"809","DOI":"10.1038\/nphoton.2012.282","volume":"6","author":"K Ellmer","year":"2012","unstructured":"Ellmer K (2012) Past achievements and future challenges in the development of optically transparent electrodes. 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