{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,5,23]],"date-time":"2025-05-23T06:44:41Z","timestamp":1747982681916,"version":"3.40.3"},"publisher-location":"Cham","reference-count":103,"publisher":"Springer International Publishing","isbn-type":[{"type":"print","value":"9783030126919"},{"type":"electronic","value":"9783030126926"}],"license":[{"start":{"date-parts":[[2019,1,1]],"date-time":"2019-01-01T00:00:00Z","timestamp":1546300800000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2019]]},"DOI":"10.1007\/978-3-030-12692-6_6","type":"book-chapter","created":{"date-parts":[[2019,5,3]],"date-time":"2019-05-03T08:06:38Z","timestamp":1556870798000},"page":"119-144","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Advances in Fs-Laser Micromachining Towards the Development of Optofluidic Devices"],"prefix":"10.1007","author":[{"given":"Jo\u00e3o M.","family":"Maia","sequence":"first","affiliation":[]},{"given":"V\u00edtor A.","family":"Amorim","sequence":"additional","affiliation":[]},{"given":"D.","family":"Alexandre","sequence":"additional","affiliation":[]},{"given":"P. V. S.","family":"Marques","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2019,5,4]]},"reference":[{"issue":"7101","key":"6_CR1","doi-asserted-by":"publisher","first-page":"368","DOI":"10.1038\/nature05058","volume":"442","author":"GM Whitesides","year":"2006","unstructured":"G.M. Whitesides, Nature 442(7101), 368\u2013373 (2006)","journal-title":"Nature"},{"issue":"3","key":"6_CR2","doi-asserted-by":"publisher","first-page":"210","DOI":"10.1038\/nrd1985","volume":"5","author":"PS Dittrich","year":"2006","unstructured":"P.S. Dittrich, A. Manz, Nat. Rev. Drug Discov. 5(3), 210\u2013218 (2006)","journal-title":"Nat. Rev. Drug Discov."},{"issue":"3","key":"6_CR3","doi-asserted-by":"publisher","first-page":"977","DOI":"10.1103\/RevModPhys.77.977","volume":"77","author":"TM Squires","year":"2005","unstructured":"T.M. Squires, S.R. Quake, Rev. Mod. Phys. 77(3), 977\u20131026 (2005)","journal-title":"Rev. Mod. Phys."},{"issue":"7101","key":"6_CR4","doi-asserted-by":"publisher","first-page":"412","DOI":"10.1038\/nature05064","volume":"442","author":"P Yager","year":"2006","unstructured":"P. Yager, T. Edwards, E. Fu, K. Helton, K. Nelson, M.R. Tam, B.H. Weigl, Nature 442(7101), 412\u2013418 (2006)","journal-title":"Nature"},{"key":"6_CR5","doi-asserted-by":"crossref","unstructured":"J. Wu, M. Gu, J. Biomed. Opt 16(8), (2011)","DOI":"10.1117\/1.3607430"},{"issue":"12","key":"6_CR6","doi-asserted-by":"publisher","first-page":"7610","DOI":"10.1364\/OE.15.007610","volume":"15","author":"K Vos De","year":"2007","unstructured":"K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, R. Baets, Opt. Express 15(12), 7610\u20137615 (2007)","journal-title":"Opt. Express"},{"issue":"7","key":"6_CR7","first-page":"12","volume":"3","author":"S Suzuki","year":"2005","unstructured":"S. Suzuki, A. Sugita, NTT Tech. Rev. 3(7), 12\u201316 (2005)","journal-title":"NTT Tech. Rev."},{"issue":"23","key":"6_CR8","doi-asserted-by":"publisher","first-page":"4974","DOI":"10.1021\/ac980656z","volume":"70","author":"David C. Duffy","year":"1998","unstructured":"D.C. Duffy, J.C. McDonald, O.J.A. Schueller, G.M. Whitesides, Anal. Chem. 70(23), 4974\u20134984 (1998)","journal-title":"Analytical Chemistry"},{"issue":"2","key":"6_CR9","doi-asserted-by":"publisher","first-page":"267","DOI":"10.1016\/S0039-9140(01)00594-X","volume":"56","author":"H Becker","year":"2002","unstructured":"H. Becker, L.E. Locascio, Talanta 56(2), 267\u2013287 (2002)","journal-title":"Talanta"},{"key":"6_CR10","doi-asserted-by":"publisher","first-page":"154","DOI":"10.1016\/j.pmatsci.2015.09.002","volume":"75","author":"D Tan","year":"2016","unstructured":"D. Tan, K.N. Sharafudeen, Y. Yue, J. Qiu, Prog. Mater Sci. 75, 154\u2013228 (2016)","journal-title":"Prog. Mater Sci."},{"issue":"21","key":"6_CR11","doi-asserted-by":"publisher","first-page":"1729","DOI":"10.1364\/OL.21.001729","volume":"21","author":"KM Davis","year":"1996","unstructured":"K.M. Davis, K. Miura, N. Sugimoto, K. Hirao, Opt. Lett. 21(21), 1729\u20131731 (1996)","journal-title":"Opt. Lett."},{"issue":"23","key":"6_CR12","doi-asserted-by":"publisher","first-page":"4608","DOI":"10.1039\/c3lc50962a","volume":"13","author":"J Xu","year":"2013","unstructured":"J. Xu, D. Wu, Y. Hanada, C. Chen, S. Wu, Y. Cheng, K. Sugioka, K. Midorikawa, Lab Chip 13(23), 4608\u20134616 (2013)","journal-title":"Lab Chip"},{"issue":"5","key":"6_CR13","doi-asserted-by":"publisher","first-page":"277","DOI":"10.1364\/OL.26.000277","volume":"26","author":"A Marcinkevi\u010dius","year":"2001","unstructured":"A. Marcinkevi\u010dius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, Opt. Lett. 26(5), 277\u2013279 (2001)","journal-title":"Opt. Lett."},{"issue":"18","key":"6_CR14","doi-asserted-by":"publisher","first-page":"3447","DOI":"10.1039\/C4LC00548A","volume":"14","author":"K Sugioka","year":"2014","unstructured":"K. Sugioka, J. Xu, D. Wu, Y. Hanada, Z. Wang, Y. Cheng, K. Midorikawa, Lab Chip 14(18), 3447\u20133458 (2014)","journal-title":"Lab Chip"},{"issue":"5","key":"6_CR15","doi-asserted-by":"publisher","first-page":"4679","DOI":"10.1364\/OE.18.004679","volume":"18","author":"N Bellini","year":"2010","unstructured":"N. Bellini, K.C. Vishnubhatla, F. Bragheri, L. Ferrara, P. Minzioni, R. Ramponi, I. Cristiani, R. Osellame, Opt. Express 18(5), 4679\u20134688 (2010). \n                  https:\/\/doi.org\/10.1364\/OE.18.004679","journal-title":"Opt. Express"},{"issue":"9","key":"6_CR16","doi-asserted-by":"publisher","first-page":"1167","DOI":"10.1039\/B920062B","volume":"10","author":"A Crespi","year":"2010","unstructured":"A. Crespi, Y. Gu, B. Ngamsom, H.J.W.M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H.H. Van Den Vlekkert, P. Watts, G. Cerullo, R. Osellame, Lab Chip 10(9), 1167\u20131173 (2010). \n                  https:\/\/doi.org\/10.1039\/B920062B","journal-title":"Lab Chip"},{"issue":"1","key":"6_CR17","doi-asserted-by":"publisher","first-page":"5","DOI":"10.1007\/s00339-011-6675-7","volume":"106","author":"S Ho","year":"2012","unstructured":"S. Ho, P.R. Herman, J.S. Aitchison, Appl. Phys. A 106(1), 5\u201313 (2012)","journal-title":"Appl. Phys. A"},{"issue":"8","key":"6_CR18","doi-asserted-by":"publisher","first-page":"620","DOI":"10.1557\/mrs2006.159","volume":"31","author":"K Itoh","year":"2006","unstructured":"K. Itoh, W. Watanabe, S. Nolte, C.B. Schaffer, MRS Bull. 31(8), 620\u2013625 (2006)","journal-title":"MRS Bull."},{"issue":"21","key":"6_CR19","doi-asserted-by":"publisher","first-page":"1726","DOI":"10.1364\/OL.26.001726","volume":"26","author":"JW Chan","year":"2001","unstructured":"J.W. Chan, T. Huser, S. Risbud, D.M. Krol, Opt. Lett. 26(21), 1726\u20131728 (2001)","journal-title":"Opt. Lett."},{"issue":"1\u20132","key":"6_CR20","doi-asserted-by":"publisher","first-page":"166","DOI":"10.1016\/S0022-3093(96)00542-X","volume":"209","author":"A Agarwal","year":"1997","unstructured":"A. Agarwal, M. Tomozawa, J. Non-Cryst. Solids 209(1\u20132), 166\u2013174 (1997)","journal-title":"J. Non-Cryst. Solids"},{"issue":"1\u20133","key":"6_CR21","doi-asserted-by":"publisher","first-page":"91","DOI":"10.1016\/S0022-3093(98)00755-8","volume":"239","author":"K Hirao","year":"1998","unstructured":"K. Hirao, K. Miura, J. Non-Cryst. Solids 239(1\u20133), 91\u201395 (1998)","journal-title":"J. Non-Cryst. Solids"},{"key":"6_CR22","unstructured":"T. Fukuda, S. Ishikawa, T. Fujii, K. Sakuma, H. Hosoya, Photon processing in microelectronics and photonics III, in Proceedings of SPIE, vol. 5339, 15 July 2004"},{"issue":"7","key":"6_CR23","doi-asserted-by":"publisher","first-page":"723","DOI":"10.1364\/OL.30.000723","volume":"30","author":"Y Nasu","year":"2005","unstructured":"Y. Nasu, M. Kohtoku, Y. Hibino, Opt. Lett. 30(7), 723\u2013725 (2005)","journal-title":"Opt. Lett."},{"issue":"18","key":"6_CR24","doi-asserted-by":"publisher","first-page":"11691","DOI":"10.1364\/OE.15.011691","volume":"15","author":"RR Thomson","year":"2007","unstructured":"R.R. Thomson, H.T. Bookey, N.D. Psaila, A. Fender, S. Campbell, W.N. MacPherson, J.S. Barton, D.T. Reid, A.K. Kar, Opt. Express 15(18), 11691\u201311697 (2007)","journal-title":"Opt. Express"},{"key":"6_CR25","doi-asserted-by":"publisher","first-page":"4708","DOI":"10.1364\/OPEX.13.004708","volume":"13","author":"SM Eaton","year":"2005","unstructured":"S.M. Eaton, H. Zhang, P.R. Herman, Opt. Express 13, 4708\u20134716 (2005)","journal-title":"Opt. Express"},{"issue":"15","key":"6_CR26","doi-asserted-by":"publisher","first-page":"5676","DOI":"10.1364\/OPEX.13.005676","volume":"13","author":"M Ams","year":"2005","unstructured":"M. Ams, G.D. Marshall, D.J. Spence, M.J. Withford, Opt. Express 13(15), 5676\u20135681 (2005)","journal-title":"Opt. Express"},{"issue":"11\u201313","key":"6_CR27","doi-asserted-by":"publisher","first-page":"2387","DOI":"10.1016\/j.jnoncrysol.2010.11.082","volume":"357","author":"SM Eaton","year":"2011","unstructured":"S.M. Eaton, M.L. Ng, R. Osellame, P.R. Herman, J. Non-Cryst. Solids 357(11\u201313), 2387\u20132391 (2011)","journal-title":"J. Non-Cryst. Solids"},{"key":"6_CR28","unstructured":"M. Ams, P. Dekker, S. Gross, M.J. Withford, Nanophotonics (to be published) (2017)"},{"issue":"12","key":"6_CR29","doi-asserted-by":"publisher","first-page":"2289","DOI":"10.1364\/OL.37.002289","volume":"37","author":"JR Grenier","year":"2012","unstructured":"J.R. Grenier, L.A. Fernandes, J.S. Aitchison, P.V.S. Marques, P.R. Herman, Opt. Lett. 37(12), 2289\u20132291 (2012)","journal-title":"Opt. Lett."},{"issue":"13","key":"6_CR30","doi-asserted-by":"publisher","first-page":"2354","DOI":"10.1364\/OL.38.002354","volume":"38","author":"P Zeil","year":"2013","unstructured":"P. Zeil, C. Voigtl\u00e4nder, J. Thomas, D. Richter, S. Nolte, Opt. Lett. 38(13), 2354\u20132356 (2013)","journal-title":"Opt. Lett."},{"issue":"19","key":"6_CR31","doi-asserted-by":"publisher","first-page":"18294","DOI":"10.1364\/OE.19.018294","volume":"19","author":"LA Fernandes","year":"2011","unstructured":"L.A. Fernandes, J.R. Grenier, P.R. Herman, J.S. Aitchison, P.V.S. Marques, Opt. Express 19(19), 18294\u201318301 (2011)","journal-title":"Opt. Express"},{"issue":"11","key":"6_CR32","doi-asserted-by":"publisher","first-page":"2349","DOI":"10.1109\/LPT.2005.858101","volume":"17","author":"I-B Sohn","year":"2005","unstructured":"I.-B. Sohn, M.-S. Lee, J. Chung, IEEE Photon. Technol. Lett. 17(11), 2349\u20132351 (2005)","journal-title":"IEEE Photon. Technol. Lett."},{"issue":"4\u20136","key":"6_CR33","doi-asserted-by":"publisher","first-page":"315","DOI":"10.1016\/j.optcom.2005.04.082","volume":"253","author":"J Liu","year":"2005","unstructured":"J. Liu, Z. Zhang, S. Chang, C. Flueraru, C.P. Grover, Opt. Commun. 253(4\u20136), 315\u2013319 (2005)","journal-title":"Opt. Commun."},{"issue":"7","key":"6_CR34","doi-asserted-by":"publisher","first-page":"619","DOI":"10.1109\/LPT.2017.2675858","volume":"29","author":"VA Amorim","year":"2017","unstructured":"V.A. Amorim, J.M. Maia, D. Alexandre, P.V.S. Marques, I.E.E.E. Photon, Technol. Lett 29(7), 619\u2013622 (2017)","journal-title":"Technol. Lett"},{"issue":"6","key":"6_CR35","doi-asserted-by":"publisher","first-page":"2335","DOI":"10.1364\/OE.14.002335","volume":"14","author":"K Suzuki","year":"2006","unstructured":"K. Suzuki, V. Sharma, J.G. Fujimoto, E.P. Ippen, Y. Nasu, Opt. Express 14(6), 2335\u20132343 (2006)","journal-title":"Opt. Express"},{"issue":"15","key":"6_CR36","doi-asserted-by":"publisher","first-page":"11470","DOI":"10.1364\/OE.16.011470","volume":"16","author":"W-J Chen","year":"2008","unstructured":"W.-J. Chen, S.M. Eaton, H. Zhang, P.R. Herman, Opt. Express 16(15), 11470\u201311480 (2008)","journal-title":"Opt. Express"},{"issue":"21","key":"6_CR37","doi-asserted-by":"publisher","first-page":"2888","DOI":"10.1364\/OL.30.002888","volume":"30","author":"W Watanabe","year":"2005","unstructured":"W. Watanabe, Y. Note, K. Itoh, Opt. Lett. 30(21), 2888\u20132890 (2005)","journal-title":"Opt. Lett."},{"issue":"7","key":"6_CR38","doi-asserted-by":"publisher","first-page":"2500","DOI":"10.1088\/0256-307X\/25\/7\/046","volume":"25","author":"D-Y Liu","year":"2008","unstructured":"D.-Y. Liu, Y. Li, Y.-P. Dou, H.-C. Guo, H. Yang, Q.-H. Gong, Chin. Phys. Lett. 25(7), 2500\u20132503 (2008)","journal-title":"Chin. Phys. Lett."},{"issue":"17","key":"6_CR39","doi-asserted-by":"publisher","first-page":"3615","DOI":"10.1109\/JLT.2017.2715118","volume":"35","author":"VA Amorim","year":"2017","unstructured":"V.A. Amorim, J.M. Maia, D. Alexandre, P.V.S. Marques, J. Lightwave Technol. 35(17), 3615\u20133621 (2017)","journal-title":"J. Lightwave Technol."},{"key":"6_CR40","doi-asserted-by":"crossref","unstructured":"G. Douglass, F. Dreisow, S. Gross, S. Nolte, M.J. Withford, Rapid prototyping of arrayed waveguide gratings, Paper presented at Photonic and Fiber Technology 2016, Sydney, Australia, 5\u20138 Sept 2016","DOI":"10.1364\/ACOFT.2016.AM5C.2"},{"issue":"24","key":"6_CR41","doi-asserted-by":"publisher","first-page":"23958","DOI":"10.1364\/OE.19.023958","volume":"19","author":"S-L Li","year":"2011","unstructured":"S.-L. Li, P. Han, M. Shi, Y. Yao, B. Hu, M. Wang, X. Zhu, Opt. Express 19(24), 23958\u201323964 (2011)","journal-title":"Opt. Express"},{"issue":"1","key":"6_CR42","doi-asserted-by":"publisher","first-page":"127","DOI":"10.1007\/s00339-007-4152-0","volume":"89","author":"J Burghoff","year":"2007","unstructured":"J. Burghoff, S. Nolte, A. T\u00fcnnermann, Appl. Phys. A 89(1), 127\u2013132 (2007). \n                  https:\/\/doi.org\/10.1007\/s00339-007-4152-0","journal-title":"Appl. Phys. A"},{"issue":"17","key":"6_CR43","doi-asserted-by":"publisher","first-page":"2248","DOI":"10.1364\/OL.30.002248","volume":"30","author":"AG Okhrimchuk","year":"2005","unstructured":"A.G. Okhrimchuk, A.V. Shestakov, I. Khrushchev, J. Mitchell, Opt. Lett. 30(17), 2248\u20132250 (2005)","journal-title":"Opt. Lett."},{"issue":"13","key":"6_CR44","doi-asserted-by":"publisher","first-page":"15522","DOI":"10.1364\/OE.21.015522","volume":"21","author":"Ming-Ming Dong","year":"2013","unstructured":"M.-M. Dong, C.-W. Wang, Z.-X. Wu, Y. Zhang, H,-H. Pan, Q.-Z. Zhao, Opt. Express 21(13), 15522\u201315529 (2013)","journal-title":"Optics Express"},{"issue":"1","key":"6_CR45","doi-asserted-by":"publisher","first-page":"17","DOI":"10.1007\/s00339-008-4644-6","volume":"93","author":"R. Osellame","year":"2008","unstructured":"R. Osellame, G. Della Valle, N. Chiodo, S. Taccheo, P. Laporta, O. Svelto, G. Cerullo, Appl. Phys. A 93(1), 17\u201326 (2008)","journal-title":"Applied Physics A"},{"issue":"6","key":"6_CR46","doi-asserted-by":"publisher","first-page":"827","DOI":"10.1002\/lpor.201300195","volume":"8","author":"D Choudhury","year":"2014","unstructured":"D. Choudhury, J.R. Macdonald, A.K. Kar, Laser Photon. Rev. 8(6), 827\u2013846 (2014)","journal-title":"Laser Photon. Rev."},{"issue":"13","key":"6_CR47","doi-asserted-by":"publisher","first-page":"12503","DOI":"10.1364\/OE.19.012503","volume":"19","author":"C Zhang","year":"2011","unstructured":"C. Zhang, N. Dong, J. Yang, F. Chen, J.R.V. De Aldana, Q. Lu, Opt. Express 19(13), 12503\u201312508 (2011)","journal-title":"Opt. Express"},{"issue":"14","key":"6_CR48","doi-asserted-by":"publisher","first-page":"17413","DOI":"10.1364\/OE.21.017413","volume":"21","author":"G Palmer","year":"2013","unstructured":"G. Palmer, S. Gross, A. Fuerbach, D.G. Lancaster, M.J. Withford, Opt. Express 21(14), 17413\u201317420 (2013)","journal-title":"Opt. Express"},{"issue":"6","key":"6_CR49","doi-asserted-by":"publisher","first-page":"3190","DOI":"10.1364\/OE.15.003190","volume":"15","author":"G. Della Valle","year":"2007","unstructured":"G. Della Valle, S. Taccheo, R. Osellame, A. Festa, G. Cerullo, P. Laporta, Opt. Express 15(6), 3190\u20133194 (2007)","journal-title":"Optics Express"},{"issue":"9","key":"6_CR50","doi-asserted-by":"publisher","first-page":"1418","DOI":"10.1364\/OL.37.001418","volume":"37","author":"B McMillen","year":"2012","unstructured":"B. McMillen, B. Zhang, K.P. Chen, A. Benayas, D. Jaque, Opt. Lett. 37(9), 1418\u20131420 (2012)","journal-title":"Opt. Lett."},{"issue":"7","key":"6_CR51","doi-asserted-by":"publisher","first-page":"1370","DOI":"10.1364\/JOSAB.26.001370","volume":"26","author":"MA Hughes","year":"2009","unstructured":"M.A. Hughes, W. Yang, D.W. Hewak, J. Opt. Soc. Am. B 26(7), 1370\u20131378 (2009)","journal-title":"J. Opt. Soc. Am. B"},{"issue":"24","key":"6_CR52","doi-asserted-by":"publisher","first-page":"15776","DOI":"10.1364\/OE.15.015776","volume":"15","author":"ND Psaila","year":"2007","unstructured":"N.D. Psaila, R.R. Thomson, H.T. Bookey, S. Shen, N. Chiodo, R. Osellame, G. Cerullo, A. Jha, A.K. Kar, Opt. Express 15(24), 15776\u201315781 (2007)","journal-title":"Opt. Express"},{"issue":"12","key":"6_CR53","doi-asserted-by":"publisher","first-page":"892","DOI":"10.1109\/LPT.2007.897534","volume":"19","author":"HT Bookey","year":"2007","unstructured":"H.T. Bookey, R.R. Thomson, N.D. Psaila, A.K. Kar, N. Chiodo, R. Osellame, G. Cerullo, I.E.E.E. Photon, Technol. Lett. 19(12), 892\u2013894 (2007)","journal-title":"Technol. Lett."},{"issue":"24","key":"6_CR54","doi-asserted-by":"publisher","first-page":"26922","DOI":"10.1364\/OE.20.026922","volume":"20","author":"W Horn","year":"2012","unstructured":"W. Horn, S. Kroesen, J. Herrmann, J. Imbrock, C. Denz, Opt. Express 20(24), 26922\u201326928 (2012)","journal-title":"Opt. Express"},{"issue":"1\u20132","key":"6_CR55","doi-asserted-by":"publisher","first-page":"26","DOI":"10.1002\/lpor.200710031","volume":"2","author":"R Taylor","year":"2008","unstructured":"R. Taylor, C. Hnatovsky, E. Simova, Laser Photon. Rev 2(1\u20132), 26\u201346 (2008)","journal-title":"Laser Photon. Rev"},{"key":"6_CR56","unstructured":"A.A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, J.R. Mabesa Jr., Photon processing in microelectronics and photonics III, in Proceedings of SPIE, vol. 5339, 15 July 2004"},{"key":"6_CR57","unstructured":"B. Fisette, M. Meunier, Photonics north 2004: photonic applications in astronomy, biomedicine, imaging, materials processing, and education, in Proceedings of SPIE, vol. 5578, 9 Dec 2004"},{"issue":"1","key":"6_CR58","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1007\/s00339-005-3225-1","volume":"81","author":"K Sugioka","year":"2005","unstructured":"K. Sugioka, Y. Cheng, K. Midorikawa, Appl. Phys. A 81(1), 1\u201310 (2005)","journal-title":"Appl. Phys. A"},{"issue":"1\u20132","key":"6_CR59","doi-asserted-by":"publisher","first-page":"99","DOI":"10.1007\/s00339-006-3603-3","volume":"84","author":"S Matsuo","year":"2006","unstructured":"S. Matsuo, Y. Tabuchi, T. Okada, S. Juodkazis, H. Misawa, Appl. Phys. A 84(1\u20132), 99\u2013102 (2006)","journal-title":"Appl. Phys. A"},{"issue":"3","key":"6_CR60","doi-asserted-by":"publisher","first-page":"1517","DOI":"10.1364\/OE.16.001517","volume":"16","author":"D Wortmann","year":"2008","unstructured":"D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle, Opt. Express 16(3), 1517\u20131522 (2008)","journal-title":"Opt. Express"},{"key":"6_CR61","doi-asserted-by":"crossref","unstructured":"D. Choudhury, A. Rodenas, L. Paterson, F. D\u00edaz, D. Jaque, A.K. Kar, Appl. Phys. Lett 103(4) (2013)","DOI":"10.1063\/1.4816338"},{"issue":"10","key":"6_CR62","doi-asserted-by":"publisher","first-page":"2120","DOI":"10.1364\/OPEX.12.002120","volume":"12","author":"Y Bellouard","year":"2004","unstructured":"Y. Bellouard, A. Said, M. Dugan, P. Bado, Opt. Express 12(10), 2120\u20132129 (2004)","journal-title":"Opt. Express"},{"key":"6_CR63","unstructured":"Y. Bellouard, A.A. Said, M. Dugan, P. Bado, Commercial and biomedical applications of ultrafast lasers VI, in Proceedings of SPIE, vol. 6108, 28 Feb 2006"},{"issue":"14","key":"6_CR64","doi-asserted-by":"publisher","first-page":"1867","DOI":"10.1364\/OL.30.001867","volume":"30","author":"C Hnatovsky","year":"2005","unstructured":"C. Hnatovsky, R.S. Taylor, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, Opt. Lett. 30(14), 1867\u20131869 (2005)","journal-title":"Opt. Lett."},{"key":"6_CR65","unstructured":"J.M. Maia, V.A. Amorim, D. Alexandre, P.V.S. Marques, in Proceedings of the 5th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS 2017), 27 Feb\u20131 Mar 2017"},{"issue":"21","key":"6_CR66","doi-asserted-by":"publisher","first-page":"24942","DOI":"10.1364\/OE.21.024942","volume":"21","author":"A Champion","year":"2013","unstructured":"A. Champion, M. Beresna, P. Kazansky, Y. Bellouard, Opt. Express 21(21), 24942\u201324951 (2013)","journal-title":"Opt. Express"},{"issue":"2","key":"6_CR67","doi-asserted-by":"publisher","first-page":"379","DOI":"10.1007\/s00340-011-4520-5","volume":"105","author":"F He","year":"2011","unstructured":"F. He, J. Lin, Y. Cheng, Appl. Phys. B 105(2), 379\u2013384 (2011)","journal-title":"Appl. Phys. B"},{"issue":"10","key":"6_CR68","doi-asserted-by":"publisher","first-page":"8685","DOI":"10.1364\/OE.17.008685","volume":"17","author":"KC Vishnubhatla","year":"2009","unstructured":"K.C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, R. Osellame, Opt. Express 17(10), 8685\u20138695 (2009)","journal-title":"Opt. Express"},{"issue":"27","key":"6_CR69","doi-asserted-by":"publisher","first-page":"11560","DOI":"10.1021\/jp900915r","volume":"113","author":"S Kiyama","year":"2009","unstructured":"S. Kiyama, S. Matsuo, S. Hashimoto, Y. Morihira, J. Phys. Chem. C 113(27), 11560\u201311566 (2009)","journal-title":"J. Phys. Chem. C"},{"key":"6_CR70","doi-asserted-by":"publisher","first-page":"156","DOI":"10.1016\/j.mee.2014.10.013","volume":"132","author":"Y Temiz","year":"2015","unstructured":"Y. Temiz, R.D. Lovchik, G.V. Kaigala, E. Delamarche, Microelectron. Eng. 132, 156\u2013175 (2015)","journal-title":"Microelectron. Eng."},{"issue":"5","key":"6_CR71","doi-asserted-by":"publisher","first-page":"857","DOI":"10.1007\/s00339-002-1937-z","volume":"76","author":"M Masuda","year":"2003","unstructured":"M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, K. Midorikawa, Appl. Phys. A 76(5), 857\u2013860 (2003)","journal-title":"Appl. Phys. A"},{"issue":"7","key":"6_CR72","doi-asserted-by":"publisher","first-page":"1033","DOI":"10.1007\/s00542-012-1695-6","volume":"19","author":"K Liu","year":"2013","unstructured":"K. Liu, Q. Yang, S. He, F. Chen, Y. Zhao, X. Fan, L. Li, C. Shan, H. Bian, Microsyst. Technol. 19(7), 1033\u20131040 (2013)","journal-title":"Microsyst. Technol."},{"issue":"23","key":"6_CR73","doi-asserted-by":"publisher","first-page":"1912","DOI":"10.1364\/OL.26.001912","volume":"26","author":"Y Li","year":"2001","unstructured":"Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang, Opt. Lett. 26(23), 1912\u20131914 (2001)","journal-title":"Opt. Lett."},{"issue":"7","key":"6_CR74","doi-asserted-by":"publisher","first-page":"1292","DOI":"10.1016\/j.cap.2013.03.028","volume":"13","author":"Y Li","year":"2013","unstructured":"Y. Li, S. Qu, Curr. Appl. Phys. 13(7), 1292\u20131295 (2013)","journal-title":"Curr. Appl. Phys."},{"issue":"6","key":"6_CR75","doi-asserted-by":"publisher","first-page":"631","DOI":"10.1016\/j.progpolymsci.2008.01.001","volume":"33","author":"K-S Lee","year":"2008","unstructured":"K.-S. Lee, R.H. Kim, D.-Y. Yang, S.H. Park, Prog. Polym. Sci. 33(6), 631\u2013681 (2008)","journal-title":"Prog. Polym. Sci."},{"issue":"15","key":"6_CR76","doi-asserted-by":"publisher","first-page":"1993","DOI":"10.1039\/C003264F","volume":"10","author":"J Wang","year":"2010","unstructured":"J. Wang, Y. He, H. Xia, L.-G. Niu, R. Zhang, Q.-D. Chen, Y. Zhang, Y.-F. Li, S.-J. Zeng, J.-H. Qin, B.-C. Lin, H.-B. Sun, Lab Chip 10(15), 1993\u20131996 (2010). \n                  https:\/\/doi.org\/10.1039\/C003264F","journal-title":"Lab Chip"},{"issue":"6","key":"6_CR77","doi-asserted-by":"publisher","first-page":"1135","DOI":"10.1039\/c2lc21116e","volume":"12","author":"L Amato","year":"2012","unstructured":"L. Amato, Y. Gu, N. Bellini, S.M. Eaton, G. Cerullo, R. Osellame, Lab Chip 12(6), 1135\u20131142 (2012)","journal-title":"Lab Chip"},{"issue":"1","key":"6_CR78","doi-asserted-by":"publisher","first-page":"100","DOI":"10.1039\/C005325M","volume":"11","author":"TW Lim","year":"2011","unstructured":"T.W. Lim, Y. Son, Y.J. Jeong, D.-Y. Yang, H.-J. Kong, K.-S. Lee, D.-P. Kim, Lab Chip 11(1), 100\u2013103 (2011). \n                  https:\/\/doi.org\/10.1039\/C005325M","journal-title":"Lab Chip"},{"issue":"3","key":"6_CR79","doi-asserted-by":"publisher","first-page":"458","DOI":"10.1002\/lpor.201400005","volume":"8","author":"D Wu","year":"2014","unstructured":"D. Wu, S.-Z. Wu, J. Xu, L.-G. Niu, K. Midorikawa, K. Sugioka, Laser Photon. Rev. 8(3), 458\u2013467 (2014)","journal-title":"Laser Photon. Rev."},{"issue":"3","key":"6_CR80","doi-asserted-by":"publisher","first-page":"422","DOI":"10.1039\/B512576F","volume":"6","author":"RW Applegate Jr","year":"2006","unstructured":"R.W. Applegate Jr., J. Squier, T. Vestad, J. Oakey, D.W.M. Marr, P. Bado, M.A. Dugan, A.A. Said, Lab Chip 6(3), 422\u2013426 (2006). \n                  https:\/\/doi.org\/10.1039\/B512576F","journal-title":"Lab Chip"},{"issue":"2","key":"6_CR81","doi-asserted-by":"publisher","first-page":"385","DOI":"10.1007\/s00339-009-5210-6","volume":"96","author":"DJ Hwang","year":"2009","unstructured":"D.J. Hwang, M. Kim, K. Hiromatsu, H. Jeon, C.P. Grigoropoulos, Appl. Phys. A 96(2), 385\u2013390 (2009). \n                  https:\/\/doi.org\/10.1007\/s00339-009-5210-6","journal-title":"Appl. Phys. A"},{"issue":"2","key":"6_CR82","doi-asserted-by":"publisher","first-page":"311","DOI":"10.1039\/B808366E","volume":"9","author":"M Kim","year":"2009","unstructured":"M. Kim, D.J. Hwang, H. Jeon, K. Hiromatsu, C.P. Grigoropoulos, Lab Chip 9(2), 311\u2013318 (2009). \n                  https:\/\/doi.org\/10.1039\/B808366E","journal-title":"Lab Chip"},{"issue":"4","key":"6_CR83","doi-asserted-by":"publisher","first-page":"234","DOI":"10.1002\/jbio.201000011","volume":"3","author":"F Bragheri","year":"2010","unstructured":"F. Bragheri, L. Ferrara, N. Bellini, K.C. Vishnubhatla, P. Minzioni, R. Ramponi, R. Osellame, I. Cristiani, J. Biophotonics 3(4), 234\u2013243 (2010)","journal-title":"J. Biophotonics"},{"issue":"19","key":"6_CR84","doi-asserted-by":"publisher","first-page":"3779","DOI":"10.1039\/c2lc40705a","volume":"12","author":"F. Bragheri","year":"2012","unstructured":"F. Bragheri, P. Minzioni, R. Martinez Vazquez, N. Bellini, P. Pai\u00e8, C. Mondello, R. Ramponi, I. Cristiani, R. Osellame, Lab Chip 12(19), 3779\u20133784 (2012). \n                  https:\/\/doi.org\/10.1039\/c2lc40705a","journal-title":"Lab on a Chip"},{"issue":"5","key":"6_CR85","doi-asserted-by":"publisher","first-page":"1262","DOI":"10.1039\/C4LC01496K","volume":"15","author":"T Yang","year":"2015","unstructured":"T. Yang, P. Pai\u00e8, G. Nava, F. Bragheri, R.M. Vazquez, P. Minzioni, M. Veglione, M. Di Tano, C. Mondello, R. Osellame, I. Cristiani, Lab Chip 15(5), 1262\u20131266 (2015)","journal-title":"Lab Chip"},{"issue":"1","key":"6_CR86","doi-asserted-by":"publisher","first-page":"91","DOI":"10.1039\/B808360F","volume":"9","author":"RM Vazquez","year":"2009","unstructured":"R.M. Vazquez, R. Osellame, D. Nolli, C. Dongre, H. Van Den Vlekkert, R. Ramponi, M. Pollnau, G. Cerullo, Lab Chip 9(1), 91\u201396 (2009)","journal-title":"Lab Chip"},{"issue":"21","key":"6_CR87","doi-asserted-by":"publisher","first-page":"2503","DOI":"10.1364\/OL.33.002503","volume":"33","author":"C Dongre","year":"2008","unstructured":"C. Dongre, R. Dekker, H.J.W.M. Hoekstra, M. Pollnau, R. Martinez-Vazquez, R. Osellame, G. Cerullo, R. Ramponi, R. Van Weeghel, G.A.J. Besselink, H.H. Van Den Vlekkert, Opt. Lett. 33(21), 2503\u20132505 (2008). \n                  https:\/\/doi.org\/10.1364\/OL.33.002503","journal-title":"Opt. Lett."},{"issue":"15","key":"6_CR88","doi-asserted-by":"publisher","first-page":"2584","DOI":"10.1002\/elps.201000126","volume":"31","author":"C Dongre","year":"2010","unstructured":"C. Dongre, J. Van Weerd, G.A.J. Besselink, R. Van Weeghel, R.M. Vazquez, R. Osellame, G. Cerullo, M. Cretich, M. Chiari, H.J.W.M. Hoekstra, M. Pollnau, Electrophoresis 31(15), 2584\u20132588 (2010)","journal-title":"Electrophoresis"},{"issue":"14","key":"6_CR89","doi-asserted-by":"publisher","first-page":"11719","DOI":"10.1364\/OE.17.011719","volume":"17","author":"V Maselli","year":"2009","unstructured":"V. Maselli, J.R. Grenier, S. Ho, P.R. Herman, Opt. Express 17(14), 11719\u201311729 (2009)","journal-title":"Opt. Express"},{"issue":"11","key":"6_CR90","doi-asserted-by":"publisher","first-page":"2291","DOI":"10.1109\/JLT.2017.2678604","volume":"35","author":"JM Maia","year":"2017","unstructured":"J.M. Maia, V.A. Amorim, D. Alexandre, P.V.S. Marques, J. Lightwave Technol. 35(11), 2291\u20132298 (2017)","journal-title":"J. Lightwave Technol."},{"issue":"19","key":"6_CR91","doi-asserted-by":"publisher","first-page":"3688","DOI":"10.1039\/C2LC40377C","volume":"12","author":"Y Hanada","year":"2012","unstructured":"Y. Hanada, K. Sugioka, K. Midorikawa, Lab Chip 12(19), 3688\u20133693 (2012). \n                  https:\/\/doi.org\/10.1039\/C2LC40377C","journal-title":"Lab Chip"},{"issue":"9","key":"6_CR92","doi-asserted-by":"publisher","first-page":"10212","DOI":"10.1364\/OE.20.010212","volume":"20","author":"J Lin","year":"2012","unstructured":"J. Lin, S. Yu, Y. Ma, W. Fang, F. He, L. Qiao, L. Tong, Y. Cheng, Z. Xu, Opt. Express 20(9), 10212\u201310217 (2012). \n                  https:\/\/doi.org\/10.1364\/OE.20.010212","journal-title":"Opt. Express"},{"key":"6_CR93","doi-asserted-by":"crossref","unstructured":"Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, Q. Gong, Appl. Phys. Lett 97(21) (2010)","DOI":"10.1063\/1.3517493"},{"issue":"12","key":"6_CR94","doi-asserted-by":"publisher","first-page":"11451","DOI":"10.1364\/OE.19.011451","volume":"19","author":"T Grossmann","year":"2011","unstructured":"T. Grossmann, S. Schleede, M. Hauser, T. Beck, M. Thiel, G. Von Freymann, T. Mappes, H. Kalt, Opt. Express 19(12), 11451\u201311456 (2011)","journal-title":"Opt. Express"},{"issue":"12","key":"6_CR95","doi-asserted-by":"publisher","first-page":"14792","DOI":"10.1364\/OE.22.014792","volume":"22","author":"J Song","year":"2014","unstructured":"J. Song, J. Lin, J. Tang, Y. Liao, F. He, Z. Wang, L. Qiao, K. Sugioka, Y. Cheng, Opt. Express 22(12), 14792\u201314802 (2014). \n                  https:\/\/doi.org\/10.1364\/OE.22.014792","journal-title":"Opt. Express"},{"issue":"15","key":"6_CR96","doi-asserted-by":"publisher","first-page":"2871","DOI":"10.1364\/OL.36.002871","volume":"36","author":"J-F Ku","year":"2011","unstructured":"J.-F. Ku, Q.-D. Chen, R. Zhang, H.-B. Sun, Opt. Lett. 36(15), 2871\u20132873 (2011)","journal-title":"Opt. Lett."},{"issue":"9","key":"6_CR97","doi-asserted-by":"publisher","first-page":"1458","DOI":"10.1364\/OL.38.001458","volume":"38","author":"J Lin","year":"2013","unstructured":"J. Lin, Y. Xu, J. Song, B. Zeng, F. He, H. Xu, K. Sugioka, W. Fang, Y. Cheng, Opt. Lett. 38(9), 1458\u20131460 (2013)","journal-title":"Opt. Lett."},{"issue":"19","key":"6_CR98","doi-asserted-by":"publisher","first-page":"3347","DOI":"10.1039\/C1LC20397E","volume":"11","author":"B-B Xu","year":"2011","unstructured":"B.-B. Xu, Z.-C. Ma, L. Wang, R. Zhang, L.-G. Niu, Z. Yang, Y.-L. Zhang, W.-H. Zheng, B. Zhao, Y. Xu, Q.-D. Chen, H. Xia, H.-B. Sun, Lab Chip 11(19), 3347\u20133351 (2011). \n                  https:\/\/doi.org\/10.1039\/C1LC20397E","journal-title":"Lab Chip"},{"issue":"8","key":"6_CR99","doi-asserted-by":"publisher","first-page":"1472","DOI":"10.1364\/BOE.4.001472","volume":"4","author":"M Haque","year":"2013","unstructured":"M. Haque, N.S. Zacharia, S. Ho, P.R. Herman, Biomed. Opt. Express 4(8), 1472\u20131485 (2013). \n                  https:\/\/doi.org\/10.1364\/BOE.4.001472","journal-title":"Biomed. Opt. Express"},{"issue":"10","key":"6_CR100","doi-asserted-by":"publisher","first-page":"1682","DOI":"10.1364\/OL.37.001682","volume":"37","author":"S Ho","year":"2012","unstructured":"S. Ho, M. Haque, P.R. Herman, J.S. Aitchison, Opt. Lett. 37(10), 1682\u20131684 (2012). \n                  https:\/\/doi.org\/10.1364\/OL.37.001682","journal-title":"Opt. Lett."},{"issue":"2","key":"6_CR101","doi-asserted-by":"publisher","first-page":"40","DOI":"10.3390\/mi8020040","volume":"8","author":"Felix Sima","year":"2017","unstructured":"F. Sima, J. Xu, D. Wu, K. Sugioka, Micromachines 8(2), (2017)","journal-title":"Micromachines"},{"issue":"12","key":"6_CR102","doi-asserted-by":"publisher","first-page":"745","DOI":"10.1016\/j.tcb.2011.09.005","volume":"21","author":"D Huh","year":"2011","unstructured":"D. Huh, G.A. Hamilton, D.E. Ingber, Trends Cell Biol. 21(12), 745\u2013754 (2011)","journal-title":"Trends Cell Biol."},{"issue":"18","key":"6_CR103","doi-asserted-by":"publisher","first-page":"3447","DOI":"10.1039\/c3lc90080k","volume":"13","author":"DJ Beebe","year":"2013","unstructured":"D.J. Beebe, D.E. Ingber, J. Den Toonder, Lab Chip 13(18), 3447\u20133448 (2013)","journal-title":"Lab Chip"}],"container-title":["Springer Series in Optical Sciences","Optics, Photonics and Laser Technology 2017"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-030-12692-6_6","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,10,10]],"date-time":"2019-10-10T14:10:43Z","timestamp":1570716643000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-030-12692-6_6"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2019]]},"ISBN":["9783030126919","9783030126926"],"references-count":103,"URL":"https:\/\/doi.org\/10.1007\/978-3-030-12692-6_6","relation":{},"ISSN":["0342-4111","1556-1534"],"issn-type":[{"type":"print","value":"0342-4111"},{"type":"electronic","value":"1556-1534"}],"subject":[],"published":{"date-parts":[[2019]]},"assertion":[{"value":"4 May 2019","order":1,"name":"first_online","label":"First Online","group":{"name":"ChapterHistory","label":"Chapter History"}}]}}