{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,26]],"date-time":"2026-03-26T21:08:22Z","timestamp":1774559302875,"version":"3.50.1"},"reference-count":19,"publisher":"Springer Science and Business Media LLC","issue":"1-2","license":[{"start":{"date-parts":[[2020,2,1]],"date-time":"2020-02-01T00:00:00Z","timestamp":1580515200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"},{"start":{"date-parts":[[2020,2,1]],"date-time":"2020-02-01T00:00:00Z","timestamp":1580515200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["J Low Temp Phys"],"published-print":{"date-parts":[[2020,4]]},"abstract":"<jats:title>Abstract<\/jats:title><jats:p>To cope with the foreseen demand for tungsten-based TESs in the current and future phases of the CRESST experiment, we investigated the possibility to implement a reliable, simple and reproducible fabrication method using sputtering. In this contribution, we present the method under development for tungsten deposition using conventional magnetron sputtering with xenon as sputtering gas. TESs with transition temperatures (<jats:inline-formula><jats:alternatives><jats:tex-math>$$T_c$$<\/jats:tex-math><mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><mml:msub><mml:mi>T<\/mml:mi><mml:mi>c<\/mml:mi><\/mml:msub><\/mml:math><\/jats:alternatives><\/jats:inline-formula>) down to 15\u00a0mK have been obtained with transition widths smaller than 1\u00a0mK. We also give a first assessment on the reproducibility of the process and present the potential for tuning of the <jats:inline-formula><jats:alternatives><jats:tex-math>$$T_c$$<\/jats:tex-math><mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\"><mml:msub><mml:mi>T<\/mml:mi><mml:mi>c<\/mml:mi><\/mml:msub><\/mml:math><\/jats:alternatives><\/jats:inline-formula>.<\/jats:p>","DOI":"10.1007\/s10909-020-02357-x","type":"journal-article","created":{"date-parts":[[2020,2,1]],"date-time":"2020-02-01T08:02:30Z","timestamp":1580544150000},"page":"401-407","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":14,"title":["Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors"],"prefix":"10.1007","volume":"199","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-7646-5005","authenticated-orcid":false,"given":"A. H.","family":"Abdelhameed","sequence":"first","affiliation":[]},{"given":"G.","family":"Angloher","sequence":"additional","affiliation":[]},{"given":"P.","family":"Bauer","sequence":"additional","affiliation":[]},{"given":"A.","family":"Bento","sequence":"additional","affiliation":[]},{"given":"E.","family":"Bertoldo","sequence":"additional","affiliation":[]},{"given":"L.","family":"Canonica","sequence":"additional","affiliation":[]},{"given":"D.","family":"Fuchs","sequence":"additional","affiliation":[]},{"given":"D.","family":"Hauff","sequence":"additional","affiliation":[]},{"given":"N. Ferreiro","family":"Iachellini","sequence":"additional","affiliation":[]},{"given":"M.","family":"Mancuso","sequence":"additional","affiliation":[]},{"given":"F.","family":"Petricca","sequence":"additional","affiliation":[]},{"given":"F.","family":"Pr\u00f6bst","sequence":"additional","affiliation":[]},{"given":"J.","family":"Riesch","sequence":"additional","affiliation":[]},{"given":"J.","family":"Rothe","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2020,2,1]]},"reference":[{"key":"2357_CR1","doi-asserted-by":"crossref","unstructured":"K.D. Irwin, G.C. Hilton, in Cryogenic Particle Detection (Springer, Berlin, Heidelberg, 2005), pp. 63\u2013150","DOI":"10.1007\/10933596_3"},{"issue":"1","key":"2357_CR2","doi-asserted-by":"publisher","first-page":"25","DOI":"10.1140\/epjc\/s10052-016-3877-3","volume":"76","author":"G Angloher","year":"2016","unstructured":"G. Angloher et al., Eur. Phys. J. C 76(1), 25 (2016)","journal-title":"Eur. Phys. J. C"},{"issue":"4","key":"2357_CR3","doi-asserted-by":"publisher","first-page":"270","DOI":"10.1016\/j.astropartphys.2009.02.007","volume":"31","author":"G Angloher","year":"2009","unstructured":"G. Angloher et al., Astropart. Phys. 31(4), 270\u2013276 (2009)","journal-title":"Astropart. Phys."},{"issue":"6","key":"2357_CR4","doi-asserted-by":"publisher","first-page":"1428","DOI":"10.1103\/PhysRev.95.1428","volume":"95","author":"J Rayne","year":"1954","unstructured":"J. Rayne, M. Mamor, F. Meyer, Phys. Rev. 95(6), 1428 (1954)","journal-title":"Phys. Rev."},{"key":"2357_CR5","unstructured":"S. Roth, Diploma Thesis Technische Universit\u00e4t M\u00fcnchen (2007). http:\/\/www.e15.physik.tumuenchen.de. Accessed 28 Jan 2020"},{"issue":"2","key":"2357_CR6","doi-asserted-by":"publisher","first-page":"3528","DOI":"10.1109\/TASC.2005.849033","volume":"15","author":"AE Lita","year":"2005","unstructured":"A.E. Lita et al., IEEE Trans. Appl. Supercond. 15(2), 3528\u20133531 (2005)","journal-title":"IEEE Trans. Appl. Supercond."},{"key":"2357_CR7","doi-asserted-by":"crossref","unstructured":"E. Lassner, W.D. Schubert, Tungsten: Properties, Chemistry, Technology of the Element, Alloys, and Chemical Compounds (1999)","DOI":"10.1007\/978-1-4615-4907-9"},{"issue":"4","key":"2357_CR8","doi-asserted-by":"publisher","first-page":"884","DOI":"10.1103\/PhysRev.89.884","volume":"89","author":"GF Hardy","year":"1953","unstructured":"G.F. Hardy, J.K. Hulm, Phys. Rev. 89(4), 884 (1953)","journal-title":"Phys. Rev."},{"issue":"1","key":"2357_CR9","doi-asserted-by":"publisher","first-page":"25","DOI":"10.1063\/1.1754239","volume":"7","author":"RH Willens","year":"1965","unstructured":"R.H. Willens, E. Buehler, Appl. Phys. Lett. 7(1), 25\u201326 (1965)","journal-title":"Appl. Phys. Lett."},{"issue":"1","key":"2357_CR10","doi-asserted-by":"publisher","first-page":"107","DOI":"10.1116\/1.568734","volume":"12","author":"FM Kilbane","year":"1975","unstructured":"F.M. Kilbane, P.S. Habig, J. Vac. Sci. Technol. 12(1), 107\u2013109 (1975)","journal-title":"J. Vac. Sci. Technol."},{"issue":"11","key":"2357_CR11","doi-asserted-by":"publisher","first-page":"115022","DOI":"10.1088\/0953-2048\/21\/11\/115022","volume":"21","author":"Ali E Aliev","year":"2008","unstructured":"Ali E. Aliev, Supercond. Sci. Technol. 21(11), 115022 (2008)","journal-title":"Supercond. Sci. Technol."},{"issue":"1\u20132","key":"2357_CR12","doi-asserted-by":"publisher","first-page":"296","DOI":"10.1016\/S0168-9002(99)01400-X","volume":"444","author":"BA Young","year":"2000","unstructured":"B.A. Young et al., Nuclear Instrum. Methods Phys. Res. Sect. A Accel. Spectrom. Detectors Assoc. Equip. 444(1\u20132), 296\u2013299 (2000)","journal-title":"Nuclear Instrum. Methods Phys. Res. Sect. A Accel. Spectrom. Detectors Assoc. Equip."},{"issue":"1","key":"2357_CR13","doi-asserted-by":"publisher","first-page":"5","DOI":"10.1016\/0040-6090(89)90030-8","volume":"171","author":"John A Thornton","year":"1989","unstructured":"John A. Thornton, D.W. Hoffman, Thin Solid Films 171(1), 5\u201331 (1989)","journal-title":"Thin Solid Films"},{"issue":"26","key":"2357_CR14","doi-asserted-by":"publisher","first-page":"1769","DOI":"10.1103\/PhysRevLett.42.1769","volume":"42","author":"B Stritzker","year":"1979","unstructured":"B. Stritzker, Phys. Rev. Lett. 42(26), 1769 (1979)","journal-title":"Phys. Rev. Lett."},{"issue":"8","key":"2357_CR15","doi-asserted-by":"publisher","first-page":"2471","DOI":"10.1063\/1.1714513","volume":"36","author":"PM Hall","year":"1965","unstructured":"P.M. Hall, J. Appl. Phys. 36(8), 2471\u20132475 (1965)","journal-title":"J. Appl. Phys."},{"key":"2357_CR16","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1103\/PhysRev.61.74","volume":"61","author":"FC Nix","year":"1942","unstructured":"F.C. Nix, D. MacNair, Phys. Rev. 61, 1\u20132 (1942)","journal-title":"Phys. Rev."},{"key":"2357_CR17","doi-asserted-by":"publisher","first-page":"159","DOI":"10.1016\/0038-1098(72)90371-7","volume":"10.1","author":"Jayant S Shah","year":"1972","unstructured":"Jayant S. Shah, M.E. Straumanis, Solid State Commun. 10.1, 159\u2013162 (1972)","journal-title":"Solid State Commun."},{"issue":"1\u20134","key":"2357_CR18","doi-asserted-by":"publisher","first-page":"342","DOI":"10.1016\/0169-4332(95)00142-5","volume":"91","author":"M Mamor","year":"1995","unstructured":"M. Mamor et al., Appl. Surf. Sci. 91(1\u20134), 342\u2013346 (1995)","journal-title":"Appl. Surf. Sci."},{"key":"2357_CR19","unstructured":"G. Wendin, V.S. Shumeiko, arXiv preprint arXiv:cond-mat\/0508729 (2005)"}],"container-title":["Journal of Low Temperature Physics"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s10909-020-02357-x.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s10909-020-02357-x\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s10909-020-02357-x.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,1,31]],"date-time":"2021-01-31T00:13:16Z","timestamp":1612051996000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s10909-020-02357-x"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020,2,1]]},"references-count":19,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[2020,4]]}},"alternative-id":["2357"],"URL":"https:\/\/doi.org\/10.1007\/s10909-020-02357-x","relation":{},"ISSN":["0022-2291","1573-7357"],"issn-type":[{"value":"0022-2291","type":"print"},{"value":"1573-7357","type":"electronic"}],"subject":[],"published":{"date-parts":[[2020,2,1]]},"assertion":[{"value":"19 August 2019","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"17 January 2020","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"1 February 2020","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}]}}