{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,8]],"date-time":"2025-10-08T16:28:08Z","timestamp":1759940888447},"reference-count":7,"publisher":"Elsevier BV","issue":"6","license":[{"start":{"date-parts":[[1982,11,1]],"date-time":"1982-11-01T00:00:00Z","timestamp":404956800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Automatica"],"published-print":{"date-parts":[[1982,11]]},"DOI":"10.1016\/0005-1098(82)90055-3","type":"journal-article","created":{"date-parts":[[2003,3,14]],"date-time":"2003-03-14T08:27:27Z","timestamp":1047630447000},"page":"665-673","source":"Crossref","is-referenced-by-count":10,"title":["Adaptive control to a dry etch process by microcomputer"],"prefix":"10.1016","volume":"18","author":[{"given":"H.","family":"Boehm","sequence":"first","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/0005-1098(82)90055-3_BIB1","doi-asserted-by":"crossref","first-page":"185","DOI":"10.1016\/0005-1098(73)90073-3","article-title":"On self-tuning regulators","volume":"9","author":"\u00c5str\u00f6m","year":"1973","journal-title":"Automatica"},{"key":"10.1016\/0005-1098(82)90055-3_BIB2","series-title":"5th IFAC\/IFIP Conference on digital computer applications to process control","first-page":"159","article-title":"Experiences with discrete optimized control algorithms applied to solid state processes","author":"Boehm","year":"1977"},{"key":"10.1016\/0005-1098(82)90055-3_BIB3","first-page":"1503","article-title":"Design of digital controllers for randomly disturbed systems","volume":"188","author":"Clarke","year":"1971"},{"key":"10.1016\/0005-1098(82)90055-3_BIB4","author":"Isermann","year":"1974"},{"key":"10.1016\/0005-1098(82)90055-3_BIB5","author":"Isermann","year":"1977"},{"key":"10.1016\/0005-1098(82)90055-3_BIB6","series-title":"6th IFAC World Congress","first-page":"11.3","article-title":"Method for on-line process identification in closed loop","author":"Kurz","year":"1975"},{"key":"10.1016\/0005-1098(82)90055-3_BIB7","article-title":"A comparative study of recursive identification methods","author":"S\u00f6derstr\u00f6m","year":"1974"}],"container-title":["Automatica"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0005109882900553?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0005109882900553?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,26]],"date-time":"2019-03-26T18:56:36Z","timestamp":1553626596000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/0005109882900553"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1982,11]]},"references-count":7,"journal-issue":{"issue":"6","published-print":{"date-parts":[[1982,11]]}},"alternative-id":["0005109882900553"],"URL":"https:\/\/doi.org\/10.1016\/0005-1098(82)90055-3","relation":{},"ISSN":["0005-1098"],"issn-type":[{"value":"0005-1098","type":"print"}],"subject":[],"published":{"date-parts":[[1982,11]]}}}