{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,12]],"date-time":"2026-08-12T23:29:53Z","timestamp":1786577393493,"version":"build-2736575974"},"reference-count":44,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-017"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-012"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-004"}],"funder":[{"DOI":"10.13039\/501100004763","name":"Inner Mongolia Autonomous Region Natural Science Foundation","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100004763","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Communications in Nonlinear Science and Numerical Simulation"],"published-print":{"date-parts":[[2026,11]]},"DOI":"10.1016\/j.cnsns.2026.110532","type":"journal-article","created":{"date-parts":[[2026,7,9]],"date-time":"2026-07-09T20:19:31Z","timestamp":1783628371000},"page":"110532","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":0,"special_numbering":"P2","title":["Enhancing the performance of a nonlinear mode-localized MEMS accelerometer based on electrostatically coupled resonators"],"prefix":"10.1016","volume":"163","author":[{"given":"Ming","family":"Lyu","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhikun","family":"Zha","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yanmin","family":"Zhang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shengjie","family":"Zhou","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuheng","family":"Quan","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Feixuan","family":"Wei","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jian","family":"Zhao","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Najib","family":"Kacem","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"78","reference":[{"key":"10.1016\/j.cnsns.2026.110532_bib0001","series-title":"Frontiers of nanobiotechnology: microfluidic devices and bioMEMS for the future","first-page":"35","article-title":"Exploring microelectromechanical systems (MEMS) and their manufacturing processes","author":"Naghib","year":"2025"},{"key":"10.1016\/j.cnsns.2026.110532_bib0002","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1007\/s10404-025-02806-7","article-title":"Current advances in biocompatibility assessment for MEMS in biomedical applications","volume":"29","author":"Zainal Abidin","year":"2025","journal-title":"Microfluid Nanofluidics"},{"key":"10.1016\/j.cnsns.2026.110532_bib0003","series-title":"Micro- and Nano-systems in 21st-century: designs, developments, applications and perspective","first-page":"71","article-title":"MEMS in twenty-first-century healthcare","author":"Noushin","year":"2025"},{"key":"10.1016\/j.cnsns.2026.110532_bib0004","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1108\/SR-05-2013-678","article-title":"Recent developments in MEMS sensors: a review of applications, markets and technologies","volume":"33","author":"Bogue","year":"2013","journal-title":"Sens Rev"},{"key":"10.1016\/j.cnsns.2026.110532_bib0005","doi-asserted-by":"crossref","first-page":"887","DOI":"10.24425\/ijet.2024.152074","article-title":"MEMS modelling in the context of inertial navigation","author":"Demkowicz","year":"2024","journal-title":"Int J Electron Telecommun"},{"key":"10.1016\/j.cnsns.2026.110532_bib0006","doi-asserted-by":"crossref","first-page":"63","DOI":"10.1038\/s41378-020-0170-2","article-title":"Programmable synchronization enhanced MEMS resonant accelerometer","volume":"6","author":"Xu","year":"2020","journal-title":"Microsyst Nanoeng"},{"key":"10.1016\/j.cnsns.2026.110532_bib0007","doi-asserted-by":"crossref","first-page":"5819","DOI":"10.1109\/JSEN.2020.3037700","article-title":"Using electrostatic spring softening effect to enhance sensitivity of MEMS resonant accelerometers","volume":"21","author":"Xiong","year":"2021","journal-title":"IEEE Sens J"},{"key":"10.1016\/j.cnsns.2026.110532_bib0008","doi-asserted-by":"crossref","first-page":"126","DOI":"10.1016\/j.sna.2016.12.019","article-title":"A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism","volume":"254","author":"Wang","year":"2017","journal-title":"Sens Actuators A: Phys"},{"key":"10.1016\/j.cnsns.2026.110532_bib0009","doi-asserted-by":"crossref","first-page":"21277","DOI":"10.1109\/JSEN.2021.3101219","article-title":"A novel trapezoidal ScAlN\/AlN-based MEMS piezoelectric accelerometer","volume":"21","author":"Hu","year":"2021","journal-title":"IEEE Sens J"},{"key":"10.1016\/j.cnsns.2026.110532_bib0010","doi-asserted-by":"crossref","first-page":"831","DOI":"10.1007\/s12206-013-0133-8","article-title":"Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer","volume":"27","author":"Zhao","year":"2013","journal-title":"J Mech Sci Technol"},{"key":"10.1016\/j.cnsns.2026.110532_bib0011","doi-asserted-by":"crossref","first-page":"26477","DOI":"10.1109\/JSEN.2025.3575523","article-title":"Design and fabrication of a dual-range MEMS capacitive accelerometer with a novel dual-flexural suspension system","volume":"25","author":"Koochaksaraie","year":"2025","journal-title":"IEEE Sens J"},{"key":"10.1016\/j.cnsns.2026.110532_bib0012","doi-asserted-by":"crossref","DOI":"10.1016\/j.rineng.2026.110159","article-title":"Enhanced sensitivity in capacitive micro-machined ultrasound transducers using hydrogel soft dielectric materials for implantable biomedical applications","volume":"30","author":"Asadi","year":"2026","journal-title":"Results Eng"},{"key":"10.1016\/j.cnsns.2026.110532_bib0013","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1007\/s40430-025-06253-x","article-title":"High-sensitivity capacitive sensors with porous dielectrics: theory, simulation, and design framework","volume":"48","author":"Ahmadi","year":"2026","journal-title":"J Braz Soc Mech Sci Eng"},{"key":"10.1016\/j.cnsns.2026.110532_bib0014","doi-asserted-by":"crossref","DOI":"10.1007\/s43994-025-00300-y","article-title":"Nonlinear mechanics and parametric sensitivity of a displacement-dependent soft porous PDMS-based rectangular capacitive sensor: instability analysis","author":"Tebaan Hassan","year":"2026","journal-title":"Jumm Al-Qura Univ Appll Sci"},{"key":"10.1016\/j.cnsns.2026.110532_bib0015","doi-asserted-by":"crossref","DOI":"10.1016\/j.measurement.2025.119161","article-title":"Measurement and nonlinear analysis of an inertial sensor with micropillar gap filler under voltage modulation","volume":"258","author":"Ghanbari","year":"2026","journal-title":"Measurement"},{"key":"10.1016\/j.cnsns.2026.110532_bib0016","doi-asserted-by":"crossref","first-page":"58","DOI":"10.1038\/s41378-023-00522-2","article-title":"Frequency unlocking-based MEMS bifurcation sensors","volume":"9","author":"Qiao","year":"2023","journal-title":"Microsyst Nanoeng"},{"key":"10.1016\/j.cnsns.2026.110532_bib0017","doi-asserted-by":"crossref","first-page":"19259","DOI":"10.1007\/s11071-025-11188-y","article-title":"Exploiting a novel perturbation structure to overcome manufacturing defect and modal overlap in mode localization MEMS gyroscope","volume":"113","author":"Zhang","year":"2025","journal-title":"Nonlinear Dyn"},{"key":"10.1016\/j.cnsns.2026.110532_bib0018","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1007\/s10483-025-3211-6","article-title":"Recent advancements of nonlinear dynamics in mode coupled microresonators: a review","volume":"46","author":"Wang","year":"2025","journal-title":"Appl Math Mech"},{"key":"10.1016\/j.cnsns.2026.110532_bib0019","doi-asserted-by":"crossref","first-page":"42","DOI":"10.1038\/s41378-022-00375-1","article-title":"Micromechanical mode-localized electric current sensor","volume":"8","author":"Li","year":"2022","journal-title":"Microsyst Nanoeng"},{"key":"10.1016\/j.cnsns.2026.110532_bib0020","doi-asserted-by":"crossref","DOI":"10.1016\/j.ymssp.2021.107781","article-title":"Computational investigation of high-order mode localization in electrostatically coupled microbeams with distributed electrodes for high sensitivity mass sensing","volume":"158","author":"Lyu","year":"2021","journal-title":"Mech Syst Signal Process"},{"key":"10.1016\/j.cnsns.2026.110532_bib0021","doi-asserted-by":"crossref","first-page":"1492","DOI":"10.1103\/PhysRev.109.1492","article-title":"Absence of diffusion in certain random lattices","volume":"109","author":"Anderson","year":"1958","journal-title":"Phys Rev"},{"key":"10.1016\/j.cnsns.2026.110532_bib0022","series-title":"2019 IEEE SENSORS","first-page":"1","article-title":"Drive dependence of output amplitude stabilities in weakly coupled MEMS resonators","author":"Zhang","year":"2019"},{"key":"10.1016\/j.cnsns.2026.110532_bib0023","doi-asserted-by":"crossref","DOI":"10.1063\/5.0019296","article-title":"Amplitude-modulated resonant accelerometer employing parametric pump","volume":"117","author":"Zhang","year":"2020","journal-title":"Appl Phys Lett"},{"key":"10.1016\/j.cnsns.2026.110532_bib0024","series-title":"2015 Transducers - 2015 18th international conference on solid-state sensors, actuators and microsystems (TRANSDUCERS)","first-page":"1073","article-title":"A novel resonant accelerometer based on mode localization of weakly coupled resonators","author":"Zhang","year":"2015"},{"key":"10.1016\/j.cnsns.2026.110532_bib0025","doi-asserted-by":"crossref","first-page":"286","DOI":"10.1109\/JMEMS.2015.2514092","article-title":"An acceleration sensing method based on the mode localization of weakly coupled resonators","volume":"25","author":"Zhang","year":"2016","journal-title":"J Microelectromech Syst"},{"key":"10.1016\/j.cnsns.2026.110532_bib0026","doi-asserted-by":"crossref","first-page":"937","DOI":"10.1109\/JMEMS.2016.2598780","article-title":"A high-sensitivity micromechanical electrometer based on mode localization of two degree-of-freedom weakly coupled resonators","volume":"25","author":"Zhang","year":"2016","journal-title":"J Microelectromech Syst"},{"key":"10.1016\/j.cnsns.2026.110532_bib0027","doi-asserted-by":"crossref","first-page":"38","DOI":"10.1109\/JMEMS.2015.2490204","article-title":"A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity","volume":"25","author":"Zhao","year":"2016","journal-title":"J Microelectromech Syst"},{"key":"10.1016\/j.cnsns.2026.110532_bib0028","doi-asserted-by":"crossref","first-page":"1560","DOI":"10.1109\/LED.2020.3020527","article-title":"A high-performance mode-localized accelerometer employing a quasi-rigid coupler","volume":"41","author":"Zhang","year":"2020","journal-title":"IEEE Electron Device Lett"},{"key":"10.1016\/j.cnsns.2026.110532_bib0029","doi-asserted-by":"crossref","DOI":"10.1103\/PhysRevApplied.12.044005","article-title":"Toward high-resolution inertial sensors employing parametric modulation in coupled micromechanical resonators","volume":"12","author":"Zhao","year":"2019","journal-title":"Phys Rev Appl"},{"key":"10.1016\/j.cnsns.2026.110532_bib0030","doi-asserted-by":"crossref","DOI":"10.1016\/j.ijnonlinmec.2020.103455","article-title":"Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators","volume":"121","author":"Lyu","year":"2020","journal-title":"Int J Non Linear Mech"},{"key":"10.1016\/j.cnsns.2026.110532_bib0031","doi-asserted-by":"crossref","first-page":"108980","DOI":"10.1109\/ACCESS.2019.2933485","article-title":"Design and experiments for a kind of capacitive type sensor measuring air flow and pressure differential","volume":"7","author":"Guo","year":"2019","journal-title":"IEEE Access"},{"key":"10.1016\/j.cnsns.2026.110532_bib0032","doi-asserted-by":"crossref","first-page":"4393","DOI":"10.1109\/JSEN.2024.3516002","article-title":"Tuning the nonlinear dynamics of electrostatically coupled micromechanical resonators to enhance the sensitivity of mode-localized sensors","volume":"25","author":"Lyu","year":"2025","journal-title":"IEEE Sens J"},{"key":"10.1016\/j.cnsns.2026.110532_bib0033","doi-asserted-by":"crossref","DOI":"10.1063\/5.0007446","article-title":"Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization","volume":"117","author":"Rabenimanana","year":"2020","journal-title":"Appl Phys Lett"},{"key":"10.1016\/j.cnsns.2026.110532_bib0034","doi-asserted-by":"crossref","DOI":"10.1016\/j.cnsns.2021.105960","article-title":"Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation","volume":"103","author":"Lyu","year":"2021","journal-title":"Commun Nonlinear Sci Numer Simul"},{"key":"10.1016\/j.cnsns.2026.110532_bib0035","doi-asserted-by":"crossref","first-page":"130","DOI":"10.1016\/j.ijmecsci.2016.11.030","article-title":"Investigation of modal interactions and their effects on the nonlinear dynamics of a periodic coupled pendulums chain","volume":"127","author":"Bitar","year":"2017","journal-title":"Int J Mech Sci"},{"key":"10.1016\/j.cnsns.2026.110532_bib0036","doi-asserted-by":"crossref","DOI":"10.1063\/5.0188029","article-title":"Experimental characterization of a mode-localized acceleration sensor integrating electrostatically coupled resonators","volume":"135","author":"Lyu","year":"2024","journal-title":"J Appl Phys"},{"key":"10.1016\/j.cnsns.2026.110532_bib0037","series-title":"TRANSDUCERS 2009 - 2009 international solid-state sensors, actuators and microsystems conference","first-page":"2350","article-title":"Enhancing parametric sensitivity using mode localization in electrically coupled MEMS resonators","author":"Thiruvenkatanathan","year":"2009"},{"key":"10.1016\/j.cnsns.2026.110532_bib0038","doi-asserted-by":"crossref","first-page":"1","DOI":"10.5194\/jsss-6-1-2017","article-title":"A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators","volume":"6","author":"Zhao","year":"2017","journal-title":"J Sens Sens Syst"},{"key":"10.1016\/j.cnsns.2026.110532_bib0039","series-title":"2010 IEEE international frequency control symposium","first-page":"91","article-title":"Ultrasensitive mode-localized micromechanical electrometer","author":"Thiruvenkatanathan","year":"2010"},{"key":"10.1016\/j.cnsns.2026.110532_bib0040","doi-asserted-by":"crossref","DOI":"10.1088\/0957-4484\/20\/27\/275501","article-title":"Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors","volume":"20","author":"Kacem","year":"2009","journal-title":"Nanotechnology"},{"key":"10.1016\/j.cnsns.2026.110532_bib0041","doi-asserted-by":"crossref","first-page":"1141","DOI":"10.1007\/s12206-014-0102-x","article-title":"Nonlinear behavior of capacitive micro-beams based on strain gradient theory","volume":"28","author":"Fathalilou","year":"2014","journal-title":"J Mech Sci Technol"},{"key":"10.1016\/j.cnsns.2026.110532_bib0042","doi-asserted-by":"crossref","first-page":"265","DOI":"10.1007\/s10999-019-09469-7","article-title":"A non-local fractional stress\u2013strain gradient theory","volume":"16","author":"Rahimi","year":"2020","journal-title":"Int J Mech Mater Des"},{"key":"10.1016\/j.cnsns.2026.110532_bib0043","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1016\/j.ymssp.2019.02.060","article-title":"Modeling and experimental characterization of squeeze film effects in nonlinear capacitive circular microplates","volume":"127","author":"Jallouli","year":"2019","journal-title":"Mech Syst Signal Process"},{"key":"10.1016\/j.cnsns.2026.110532_bib0044","doi-asserted-by":"crossref","first-page":"357","DOI":"10.1007\/s10999-014-9285-7","article-title":"Thermo-elastic damping in a functionally graded piezoelectric micro-resonator","volume":"11","author":"Azizi","year":"2015","journal-title":"Int J Mech Mater Des"}],"container-title":["Communications in Nonlinear Science and Numerical Simulation"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S1007570426008865?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S1007570426008865?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2026,8,12]],"date-time":"2026-08-12T23:25:03Z","timestamp":1786577103000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S1007570426008865"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,11]]},"references-count":44,"alternative-id":["S1007570426008865"],"URL":"https:\/\/doi.org\/10.1016\/j.cnsns.2026.110532","relation":{},"ISSN":["1007-5704"],"issn-type":[{"value":"1007-5704","type":"print"}],"subject":[],"published":{"date-parts":[[2026,11]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"Enhancing the performance of a nonlinear mode-localized MEMS accelerometer based on electrostatically coupled resonators","name":"articletitle","label":"Article Title"},{"value":"Communications in Nonlinear Science and Numerical Simulation","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/j.cnsns.2026.110532","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"article","name":"content_type","label":"Content Type"},{"value":"\u00a9 2026 Elsevier B.V. All rights are reserved, including those for text and data mining, AI training, and similar technologies.","name":"copyright","label":"Copyright"}],"article-number":"110532"}}