{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T05:12:26Z","timestamp":1777871546226,"version":"3.51.4"},"reference-count":45,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-017"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-012"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-004"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["2024QCY-KXJ-014"],"award-info":[{"award-number":["2024QCY-KXJ-014"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["23KGDW0011"],"award-info":[{"award-number":["23KGDW0011"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["23TSPT0002"],"award-info":[{"award-number":["23TSPT0002"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62371388"],"award-info":[{"award-number":["62371388"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["23KGDW0011,2024QCY-KXJ-014"],"award-info":[{"award-number":["23KGDW0011,2024QCY-KXJ-014"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Knowledge-Based Systems"],"published-print":{"date-parts":[[2026,6]]},"DOI":"10.1016\/j.knosys.2026.115896","type":"journal-article","created":{"date-parts":[[2026,3,28]],"date-time":"2026-03-28T00:43:22Z","timestamp":1774658602000},"page":"115896","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":0,"special_numbering":"C","title":["Real-time edge micro-defect detection for semiconductor wafers under complex backgrounds: a hybrid approach combining optical topography and deep learning"],"prefix":"10.1016","volume":"342","author":[{"ORCID":"https:\/\/orcid.org\/0009-0003-2877-5131","authenticated-orcid":false,"given":"Tingyang","family":"Jiao","sequence":"first","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0009-0008-2539-2481","authenticated-orcid":false,"given":"Chenyan","family":"Wu","sequence":"additional","affiliation":[]},{"given":"Qing","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Wei","family":"Yang","sequence":"additional","affiliation":[]},{"given":"Yujun","family":"Li","sequence":"additional","affiliation":[]},{"given":"Youmin","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Jing","family":"Xin","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"issue":"9","key":"10.1016\/j.knosys.2026.115896_bib0001","doi-asserted-by":"crossref","first-page":"10651","DOI":"10.1007\/s10462-023-10438-y","article-title":"An efficient lightweight convolutional neural network for industrial surface defect detection","volume":"56","author":"Zhang","year":"2023","journal-title":"Artif. Intell. Rev."},{"issue":"6","key":"10.1016\/j.knosys.2026.115896_bib0002","doi-asserted-by":"crossref","first-page":"1657","DOI":"10.1109\/TIP.2010.2044957","article-title":"A completed modeling of local binary pattern operator for texture classification","volume":"19","author":"Guo","year":"2010","journal-title":"IEEE Trans. on Image Process."},{"issue":"12","key":"10.1016\/j.knosys.2026.115896_bib0003","first-page":"1620","article-title":"On-line detection technique of surface cracks for continuous casting slabs based on linear lasers","volume":"31","author":"Ke","year":"2009","journal-title":"J. Univ. Sci. Technol. Beijing"},{"issue":"8","key":"10.1016\/j.knosys.2026.115896_bib0004","doi-asserted-by":"crossref","first-page":"1703","DOI":"10.2355\/isijinternational.ISIJINT-2019-464","article-title":"An adaptive selection of filter parameters: defect detection in steel image using wavelet reconstruction method","volume":"60","author":"Ryu","year":"2020","journal-title":"ISIJ Int."},{"key":"10.1016\/j.knosys.2026.115896_bib0005","doi-asserted-by":"crossref","DOI":"10.1016\/j.micpro.2020.103807","article-title":"Machine vision based online detection of PCB defect","volume":"82","author":"Liu","year":"2021","journal-title":"Microprocess. Microsyst."},{"key":"10.1016\/j.knosys.2026.115896_bib0006","series-title":"2020 12th International Conference on Measuring Technology and Mechatronics Automation (ICMTMA), February","first-page":"45","article-title":"Defect inspection algorithm of metal surface based on machine vision","author":"Zhou","year":"2020"},{"issue":"6","key":"10.1016\/j.knosys.2026.115896_bib0007","doi-asserted-by":"crossref","first-page":"5211","DOI":"10.1021\/acsnano.2c12606","article-title":"Technology roadmap for flexible sensors","volume":"17","author":"Luo","year":"2023","journal-title":"ACS Nano"},{"issue":"20","key":"10.1016\/j.knosys.2026.115896_bib0008","article-title":"CNN variants for computer vision: history, architecture, application, challenges and future scope","volume":"10","author":"Bhatt","year":"2021","journal-title":"Electron. (Basel)"},{"issue":"3","key":"10.1016\/j.knosys.2026.115896_bib0009","doi-asserted-by":"crossref","first-page":"581","DOI":"10.1049\/cit2.12180","article-title":"Deep learning: applications, architectures, models, tools, and frameworks: a comprehensive survey","volume":"8","author":"Gheisari","year":"2023","journal-title":"CAAI Trans. Intell. Technol."},{"issue":"5","key":"10.1016\/j.knosys.2026.115896_bib0010","doi-asserted-by":"crossref","DOI":"10.1136\/bmjgh-2022-010435","article-title":"Threats by artificial intelligence to human health and human existence","volume":"8","author":"Federspiel","year":"2023","journal-title":"BMJ Glob. Health"},{"issue":"11","key":"10.1016\/j.knosys.2026.115896_bib0011","doi-asserted-by":"crossref","first-page":"16211","DOI":"10.1109\/TNNLS.2023.3292512","article-title":"A dynamic weights-based wavelet attention neural network for defect detection","volume":"35","author":"Liu","year":"2024","journal-title":"IEEE Trans. Neural Netw. Learn. Syst."},{"key":"10.1016\/j.knosys.2026.115896_bib0012","series-title":"2017 IEEE International Conference on Computer Vision (ICCV), October","first-page":"2980","article-title":"Mask R-CNN","author":"He","year":"2017"},{"key":"10.1016\/j.knosys.2026.115896_bib0013","series-title":"2015 IEEE International Conference on Computer Vision (ICCV), December","first-page":"1440","article-title":"Fast R-CNN","author":"Girshick","year":"2015"},{"issue":"6","key":"10.1016\/j.knosys.2026.115896_bib0014","doi-asserted-by":"crossref","first-page":"1137","DOI":"10.1109\/TPAMI.2016.2577031","article-title":"Faster R-CNN: towards real-time object detection with region proposal networks","volume":"39","author":"Ren","year":"2017","journal-title":"IEEE Trans. Pattern. Anal. Mach. Intell."},{"key":"10.1016\/j.knosys.2026.115896_bib0015","series-title":"Lecture Notes in Computer Science","doi-asserted-by":"crossref","first-page":"21","DOI":"10.1007\/978-3-319-46448-0_2","article-title":"SSD: single shot MultiBox detector","volume":"9905","author":"Liu","year":"2016"},{"issue":"11","key":"10.1016\/j.knosys.2026.115896_bib0016","doi-asserted-by":"crossref","first-page":"9198","DOI":"10.1109\/TNNLS.2022.3156907","article-title":"Research on obstacle detection and avoidance of autonomous underwater vehicle based on forward-looking sonar","volume":"34","author":"Cao","year":"2023","journal-title":"IEEE Trans. Neural Netw. Learning Syst."},{"key":"10.1016\/j.knosys.2026.115896_bib0017","series-title":"arXiv preprint","article-title":"What is YOLOv5: a deep look into the internal features of the popular object detector","author":"Khanam","year":"2024"},{"key":"10.1016\/j.knosys.2026.115896_bib0018","series-title":"arXiv preprint","article-title":"YOLOv6: a single-stage object detection framework for industrial applications","author":"Li","year":"2022"},{"key":"10.1016\/j.knosys.2026.115896_bib0019","series-title":"2023 IEEE\/CVF Conference on Computer Vision and Pattern Recognition (CVPR), June","first-page":"7464","article-title":"YOLOv7: trainable bag-of-freebies sets new State-of-the-art for real-time object detectors","author":"Wang","year":"2023"},{"key":"10.1016\/j.knosys.2026.115896_bib0020","series-title":"2024 International Conference on Advances in Data Engineering and Intelligent Computing Systems (ADICS), April","first-page":"1","article-title":"YOLOv8: a novel object detection algorithm with enhanced performance and robustness","author":"Varghese","year":"2024"},{"key":"10.1016\/j.knosys.2026.115896_bib0021","doi-asserted-by":"crossref","DOI":"10.1016\/j.eswa.2023.121346","article-title":"MOD-YOLO: rethinking the YOLO architecture at the level of feature information and applying it to crack detection","volume":"237","author":"Su","year":"2024","journal-title":"Expert. Syst. Appl."},{"key":"10.1016\/j.knosys.2026.115896_bib0022","doi-asserted-by":"crossref","DOI":"10.1016\/j.aei.2022.101824","article-title":"Sim-YOLOv5s: a method for detecting defects on the end face of lithium battery steel shells","volume":"55","author":"Hu","year":"2023","journal-title":"Adv. Eng. Informat."},{"key":"10.1016\/j.knosys.2026.115896_bib0023","doi-asserted-by":"crossref","DOI":"10.1016\/j.engappai.2023.107392","article-title":"Modified YOLO network model for metaphase cell detection in antinuclear antibody images","volume":"127","author":"Chang","year":"2024","journal-title":"Eng. Appl. Artif. Intell."},{"key":"10.1016\/j.knosys.2026.115896_bib0024","doi-asserted-by":"crossref","DOI":"10.1016\/j.engappai.2022.105665","article-title":"Nuts&bolts: YOLO-v5 and image processing based component identification system","volume":"118","author":"Mushtaq","year":"2023","journal-title":"Eng. Appl. Artif. Intell."},{"issue":"1","key":"10.1016\/j.knosys.2026.115896_bib0025","doi-asserted-by":"crossref","first-page":"898","DOI":"10.3389\/fpls.2020.00898","article-title":"Tomato diseases and pests detection based on improved Yolo V3 convolutional neural network","volume":"11","author":"Liu","year":"2020","journal-title":"Front. Plant Sci."},{"key":"10.1016\/j.knosys.2026.115896_bib0026","doi-asserted-by":"crossref","DOI":"10.1016\/j.knosys.2024.112520","article-title":"LiFSO-Net: a lightweight feature screening optimization network for complex-scale flat metal defect detection","volume":"304","author":"Zhong","year":"2024","journal-title":"Knowl. Based. Syst."},{"key":"10.1016\/j.knosys.2026.115896_bib0027","series-title":"2022 IEEE 24th International Workshop on Multimedia Signal Processing (MMSP) September","first-page":"1","article-title":"An improved faster R-CNN for steel surface defect detection","author":"Shi","year":"2022"},{"key":"10.1016\/j.knosys.2026.115896_bib0028","series-title":"2018 Chinese Automation Congress (CAC), November","first-page":"2173","article-title":"Slighter faster R-CNN for real-time detection of steel strip surface defects","author":"Ren","year":"2018"},{"issue":"5","key":"10.1016\/j.knosys.2026.115896_bib0029","article-title":"Surface defects recognition of wheel hub based on improved faster R-CNN","volume":"8","author":"Sun","year":"2019","journal-title":"Electron. (Basel)"},{"issue":"1","key":"10.1016\/j.knosys.2026.115896_bib0030","article-title":"Improved faster R-CNN based surface defect detection algorithm for plates","volume":"2022","author":"Xia","year":"2022","journal-title":"Comput. Intell. Neurosci."},{"issue":"2","key":"10.1016\/j.knosys.2026.115896_bib0031","doi-asserted-by":"crossref","first-page":"2217","DOI":"10.1007\/s10586-023-04087-7","article-title":"Real-time data fusion for intrusion detection in industrial control systems based on cloud computing and big data techniques","volume":"27","author":"Abid","year":"2024","journal-title":"Cluster. Comput."},{"key":"10.1016\/j.knosys.2026.115896_bib0032","doi-asserted-by":"crossref","first-page":"465","DOI":"10.1016\/j.eswa.2018.08.011","article-title":"A deep learning approach for real-time detection of atrial fibrillation","volume":"115","author":"Andersen","year":"2019","journal-title":"Expert. Syst. Appl."},{"key":"10.1016\/j.knosys.2026.115896_bib0033","series-title":"Computer Vision \u2013 ECCV 2018, vol. 11211","first-page":"3","article-title":"CBAM: convolutional block attention module","volume":"11211","author":"Woo","year":"2018"},{"key":"10.1016\/j.knosys.2026.115896_bib0034","doi-asserted-by":"crossref","DOI":"10.1016\/j.rcim.2022.102470","article-title":"Deep learning based online metallic surface defect detection method for wire and arc additive manufacturing","volume":"80","author":"Li","year":"2023","journal-title":"Robot. Comput. Integr. Manuf."},{"issue":"7","key":"10.1016\/j.knosys.2026.115896_bib0035","doi-asserted-by":"crossref","first-page":"5963","DOI":"10.3390\/su15075963","article-title":"PCB-YOLO: an improved detection algorithm of PCB surface defects based on YOLOv5","volume":"15","author":"Tang","year":"2023","journal-title":"Sustainability."},{"key":"10.1016\/j.knosys.2026.115896_bib0036","doi-asserted-by":"crossref","DOI":"10.1016\/j.eswa.2022.118698","article-title":"A comprehensive study towards high-level approaches for weapon detection using classical machine learning and deep learning methods","volume":"212","author":"Yadav","year":"2023","journal-title":"Expert. Syst. Appl."},{"issue":"10","key":"10.1016\/j.knosys.2026.115896_bib0037","doi-asserted-by":"crossref","first-page":"14131","DOI":"10.1007\/s10586-024-04611-3","article-title":"Lattice-based ring signcryption scheme for smart healthcare management","volume":"27","author":"Sourav","year":"2024","journal-title":"Cluster. Comput."},{"issue":"2","key":"10.1016\/j.knosys.2026.115896_bib0038","doi-asserted-by":"crossref","first-page":"77","DOI":"10.1007\/s10586-024-04798-5","article-title":"Dynamic load balancing of traffic in the IoT edge computing environment using a clustering approach based on deep learning and genetic algorithms","volume":"28","author":"Merah","year":"2024","journal-title":"Cluster. Comput."},{"issue":"8","key":"10.1016\/j.knosys.2026.115896_bib0039","doi-asserted-by":"crossref","first-page":"3215","DOI":"10.1007\/s10845-022-01994-1","article-title":"Advances in machine learning and deep learning applications towards wafer map defect recognition and classification: a review","volume":"34","author":"Kim","year":"2023","journal-title":"J. Intell. Manuf."},{"key":"10.1016\/j.knosys.2026.115896_bib0040","doi-asserted-by":"crossref","first-page":"39969","DOI":"10.1109\/ACCESS.2022.3166512","article-title":"Wafer defect localization and classification using deep learning techniques","volume":"10","author":"Shinde","year":"2022","journal-title":"IEEE Access."},{"key":"10.1016\/j.knosys.2026.115896_bib0041","doi-asserted-by":"crossref","DOI":"10.1016\/j.knosys.2024.112882","article-title":"A Multi-scale neighbourhood feature interaction network for photovoltaic cell defect detection","volume":"309","author":"Liu","year":"2025","journal-title":"Knowl. Based. Syst."},{"key":"10.1016\/j.knosys.2026.115896_bib0042","series-title":"2020 IEEE\/CVF Conference on Computer Vision and Pattern Recognition (CVPR), June","first-page":"11027","article-title":"Dynamic convolution: attention over convolution kernels","author":"Chen","year":"2020"},{"key":"10.1016\/j.knosys.2026.115896_bib0043","series-title":"IEEE\/CVF Conference on Computer Vision and Pattern Recognition (CVPR)","first-page":"10781","article-title":"EfficientDet: scalable and efficient object detection","author":"Tan","year":"2020"},{"key":"10.1016\/j.knosys.2026.115896_bib0044","series-title":"Proceedings of the IEEE Conference on Computer Vision and Pattern Recognition (CVPR)","first-page":"8759","article-title":"Path aggregation Network for instance segmentation","author":"Liu","year":"2018"},{"key":"10.1016\/j.knosys.2026.115896_bib0045","unstructured":"H. Zhang, C. Xu, and S. Zhang, \u201cInner-IoU: more effective intersection over union loss with auxiliary bounding box,\u201d November 14, 2023, arXiv preprint. doi: 10.48550\/arXiv.2311.02877."}],"container-title":["Knowledge-Based Systems"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0950705126006222?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0950705126006222?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2026,4,30]],"date-time":"2026-04-30T17:19:38Z","timestamp":1777569578000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0950705126006222"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,6]]},"references-count":45,"alternative-id":["S0950705126006222"],"URL":"https:\/\/doi.org\/10.1016\/j.knosys.2026.115896","relation":{},"ISSN":["0950-7051"],"issn-type":[{"value":"0950-7051","type":"print"}],"subject":[],"published":{"date-parts":[[2026,6]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"Real-time edge micro-defect detection for semiconductor wafers under complex backgrounds: a hybrid approach combining optical topography and deep learning","name":"articletitle","label":"Article Title"},{"value":"Knowledge-Based Systems","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/j.knosys.2026.115896","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"article","name":"content_type","label":"Content Type"},{"value":"\u00a9 2026 Elsevier B.V. All rights are reserved, including those for text and data mining, AI training, and similar technologies.","name":"copyright","label":"Copyright"}],"article-number":"115896"}}