{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,3,28]],"date-time":"2022-03-28T23:07:40Z","timestamp":1648508860200},"reference-count":16,"publisher":"Elsevier BV","issue":"2","license":[{"start":{"date-parts":[[2001,2,1]],"date-time":"2001-02-01T00:00:00Z","timestamp":980985600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Microelectronics Reliability"],"published-print":{"date-parts":[[2001,2]]},"DOI":"10.1016\/s0026-2714(00)00098-6","type":"journal-article","created":{"date-parts":[[2002,10,14]],"date-time":"2002-10-14T18:58:33Z","timestamp":1034621913000},"page":"179-184","source":"Crossref","is-referenced-by-count":9,"title":["Investigation of the surface silica layer on porous poly-Si thin films"],"prefix":"10.1016","volume":"41","author":[{"given":"H","family":"Wong","sequence":"first","affiliation":[]},{"given":"P.G","family":"Han","sequence":"additional","affiliation":[]},{"given":"M.C","family":"Poon","sequence":"additional","affiliation":[]},{"given":"Y","family":"Gao","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0026-2714(00)00098-6_BIB1","first-page":"23","article-title":"A glow future for silicon","volume":"4","author":"Canham","year":"1993","journal-title":"New Science"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB2","doi-asserted-by":"crossref","first-page":"457","DOI":"10.1016\/S0026-2714(99)00021-9","article-title":"XPS study of light-emitting porous polysilicon thin films","volume":"39","author":"Han","year":"1999","journal-title":"Microelectron Reliab"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB3","doi-asserted-by":"crossref","first-page":"1832","DOI":"10.1116\/1.581899","article-title":"Porous polycrystalline silicon conductivity sensor","volume":"17","author":"Han","year":"1999","journal-title":"J Vac Sci Technol A"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB4","doi-asserted-by":"crossref","first-page":"715","DOI":"10.1016\/S0026-2714(99)00036-0","article-title":"Catholuminescence and photoluminescence of amorphous silicon oxynitride","volume":"39","author":"Gritsenko","year":"1999","journal-title":"Microelectron Reliab"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB5","doi-asserted-by":"crossref","first-page":"317","DOI":"10.1016\/S0040-6090(96)09437-0","article-title":"Porous silicon layers used for gas sensor applications","volume":"297","author":"Foucaran","year":"1997","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB6","doi-asserted-by":"crossref","first-page":"415","DOI":"10.1016\/S0924-4247(97)80298-1","article-title":"The effect of additives on the adsorption properties of porous silicon","volume":"61","author":"O\u2019Halloran","year":"1997","journal-title":"Sensors and Actuators A"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB7","doi-asserted-by":"crossref","first-page":"840","DOI":"10.1126\/science.278.5339.840","article-title":"A porous silicon-based optical interferometric biosensor","volume":"278","author":"Lin","year":"1997","journal-title":"Science"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB8","doi-asserted-by":"crossref","first-page":"96","DOI":"10.1016\/0040-6090(94)05629-R","article-title":"Growth and luminescence of n-type porous polycrystalline silicon","volume":"255","author":"Joubert","year":"1995","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB9","doi-asserted-by":"crossref","first-page":"824","DOI":"10.1116\/1.588722","article-title":"Study of luminescent porous polycrystalline silicon thin films","volume":"14","author":"Han","year":"1996","journal-title":"J Vac Sci Technol B"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB10","doi-asserted-by":"crossref","first-page":"10","DOI":"10.1109\/84.285719","article-title":"Porous polycrystalline silicon: a new material for MEMS","volume":"3","author":"Anderson","year":"1994","journal-title":"J Microelectromech Syst"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB11","doi-asserted-by":"crossref","unstructured":"Kozlowski F, Steiner P, Lang W. Micro Raman investigations and a structure model for electroluminescent porous n-silicon. In: Feng ZC, Tsu R, editors. Porous silicon. Singapore: World Scientific; 1994. p. 149\u201371","DOI":"10.1142\/9789812812995_0008"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB12","doi-asserted-by":"crossref","first-page":"1152","DOI":"10.1063\/1.108772","volume":"62","author":"Xiao","year":"1993","journal-title":"Appl Phys Lett"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB13","doi-asserted-by":"crossref","first-page":"27","DOI":"10.1063\/1.107097","article-title":"Raman analysis of light-emitting porous silicon","volume":"60","author":"Sui","year":"1992","journal-title":"Appl Phys Lett"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB14","doi-asserted-by":"crossref","first-page":"1004","DOI":"10.1063\/1.106503","volume":"60","author":"Vasquez","year":"1992","journal-title":"Appl Phys Lett"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB15","doi-asserted-by":"crossref","unstructured":"Fathauer RW, George T, Ksendzov A, Lin TL, Pike WT, Vasquez RP, Wu ZC. In: Iyer SS, et al., editors. Mater Res Soc Symp Proc, vol. 256. Pittsburgh: MRS; 1992. p. 165","DOI":"10.1557\/PROC-256-165"},{"key":"10.1016\/S0026-2714(00)00098-6_BIB16","doi-asserted-by":"crossref","first-page":"16","DOI":"10.1016\/0040-6090(94)05623-L","article-title":"Post-treatment effects on electrical conduction in porous silicon","volume":"255","author":"Moller","year":"1995","journal-title":"Thin Solid Films"}],"container-title":["Microelectronics Reliability"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271400000986?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271400000986?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2020,1,9]],"date-time":"2020-01-09T08:45:51Z","timestamp":1578559551000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0026271400000986"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2001,2]]},"references-count":16,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2001,2]]}},"alternative-id":["S0026271400000986"],"URL":"https:\/\/doi.org\/10.1016\/s0026-2714(00)00098-6","relation":{},"ISSN":["0026-2714"],"issn-type":[{"value":"0026-2714","type":"print"}],"subject":[],"published":{"date-parts":[[2001,2]]}}}