{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,3,29]],"date-time":"2022-03-29T20:33:57Z","timestamp":1648586037369},"reference-count":6,"publisher":"Elsevier BV","issue":"6","license":[{"start":{"date-parts":[[2003,6,1]],"date-time":"2003-06-01T00:00:00Z","timestamp":1054425600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Microelectronics Reliability"],"published-print":{"date-parts":[[2003,6]]},"DOI":"10.1016\/s0026-2714(03)00069-6","type":"journal-article","created":{"date-parts":[[2003,4,23]],"date-time":"2003-04-23T22:32:29Z","timestamp":1051137149000},"page":"845-851","source":"Crossref","is-referenced-by-count":2,"title":["Reliability of 100 nm silicon nitride capacitors in an InP HEMT MMIC process"],"prefix":"10.1016","volume":"43","author":[{"given":"William J.","family":"Rowe","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Bruce M.","family":"Paine","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Adele E.","family":"Schmitz","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Robert H.","family":"Walden","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Michael J.","family":"Delaney","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"78","reference":[{"key":"10.1016\/S0026-2714(03)00069-6_BIB1","doi-asserted-by":"crossref","first-page":"939","DOI":"10.1109\/16.662807","article-title":"Assessing the reliability of silicon nitride capacitors in a GaAs IC process","volume":"45","author":"Yeats","year":"1998","journal-title":"IEEE Trans. Electron Devices"},{"issue":"2","key":"10.1016\/S0026-2714(03)00069-6_BIB2","first-page":"479","article-title":"A reliability model for time dependent dielectric breakdown (TDDB) in silicon nitride capacitors","volume":"98","author":"Scarpulla","year":"1998","journal-title":"Electrochem. Soc. Proc."},{"key":"10.1016\/S0026-2714(03)00069-6_BIB3","doi-asserted-by":"crossref","unstructured":"Cramer H, Oliver J, Dix G. MMIC capacitor dielectric reliability. In: Proc GaAs Reliability Workshop, 1998. p. 46\u201351","DOI":"10.1109\/GAASRW.1998.768035"},{"key":"10.1016\/S0026-2714(03)00069-6_BIB4","doi-asserted-by":"crossref","first-page":"1115","DOI":"10.1016\/S0026-2714(01)00083-X","article-title":"Ka-band InP high electron mobility transistor monolithic microwave integrated circuit reliability","volume":"41","author":"Paine","year":"2001","journal-title":"Microelectron. Reliab."},{"key":"10.1016\/S0026-2714(03)00069-6_BIB5","doi-asserted-by":"crossref","unstructured":"Berman A. Time-zero dielectric reliability test by a ramp method. In: Proc International Reliability Physics Symposium, 1982. p. 204\u20139","DOI":"10.1109\/IRPS.1981.362997"},{"key":"10.1016\/S0026-2714(03)00069-6_BIB6","series-title":"Physics of semiconductor devices","author":"Sze","year":"1983"}],"container-title":["Microelectronics Reliability"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271403000696?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271403000696?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2020,3,19]],"date-time":"2020-03-19T10:09:06Z","timestamp":1584612546000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0026271403000696"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,6]]},"references-count":6,"journal-issue":{"issue":"6","published-print":{"date-parts":[[2003,6]]}},"alternative-id":["S0026271403000696"],"URL":"https:\/\/doi.org\/10.1016\/s0026-2714(03)00069-6","relation":{},"ISSN":["0026-2714"],"issn-type":[{"value":"0026-2714","type":"print"}],"subject":[],"published":{"date-parts":[[2003,6]]}}}