{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,20]],"date-time":"2026-05-20T04:00:28Z","timestamp":1779249628587,"version":"3.51.4"},"reference-count":39,"publisher":"Elsevier BV","issue":"8","license":[{"start":{"date-parts":[[2003,8,1]],"date-time":"2003-08-01T00:00:00Z","timestamp":1059696000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Microelectronics Reliability"],"published-print":{"date-parts":[[2003,8]]},"DOI":"10.1016\/s0026-2714(03)00169-0","type":"journal-article","created":{"date-parts":[[2003,8,1]],"date-time":"2003-08-01T01:57:13Z","timestamp":1059703033000},"page":"1175-1184","source":"Crossref","is-referenced-by-count":27,"title":["Critical reliability challenges in scaling SiO2-based dielectric to its limit"],"prefix":"10.1016","volume":"43","author":[{"given":"E.Y.","family":"Wu","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"J.","family":"Su\u00f1\u00e9","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"W.","family":"Lai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Vayshenker","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"E.","family":"Nowak","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"D.","family":"Harmon","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"78","reference":[{"key":"10.1016\/S0026-2714(03)00169-0_BIB1","first-page":"215","author":"Taur","year":"1997","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB2","doi-asserted-by":"crossref","first-page":"758","DOI":"10.1038\/21602","volume":"399","author":"Muller","year":"1999","journal-title":"Nature"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB3","first-page":"96","author":"Hu","year":"1996","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB4","first-page":"167","author":"Stathis","year":"1998","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB5","author":"Degreave","year":"1999","journal-title":"WoDiM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB6","doi-asserted-by":"crossref","first-page":"4364","DOI":"10.1063\/1.322440","volume":"47","author":"Klein","year":"1976","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB7","doi-asserted-by":"crossref","first-page":"3367","DOI":"10.1063\/1.352936","volume":"73","author":"DiMaria","year":"1993","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB8","doi-asserted-by":"crossref","first-page":"669","DOI":"10.1063\/1.97563","volume":"74","author":"Chen","year":"1986","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB9","doi-asserted-by":"crossref","first-page":"1513","DOI":"10.1063\/1.368217","volume":"84","author":"McPherson","year":"1998","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB10","first-page":"54","author":"Wu","year":"2000","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB11","first-page":"94","author":"Stathis","year":"2000","journal-title":"VLSI Technol."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB12","doi-asserted-by":"crossref","first-page":"455","DOI":"10.1088\/0268-1242\/15\/5\/304","volume":"15","author":"Weir","year":"2000","journal-title":"Semicond. Sci. Technol."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB13","first-page":"380","author":"Takayananagi","year":"2001","journal-title":"IRPS"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB14","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/S0167-9317(01)00657-8","volume":"59","author":"Alam","year":"2001","journal-title":"Microelec. Eng."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB15","doi-asserted-by":"crossref","first-page":"149","DOI":"10.1016\/S0167-9317(01)00658-X","volume":"59","author":"Su\u00f1\u00e9","year":"2001","journal-title":"Microelectron Eng."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB16","doi-asserted-by":"crossref","first-page":"287","DOI":"10.1147\/rd.462.0287","volume":"46","author":"Wu","year":"2002","journal-title":"IBM J. Res. Dev."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB17","doi-asserted-by":"crossref","first-page":"462","DOI":"10.1088\/0268-1242\/15\/5\/305","volume":"115","author":"McPherson","year":"2000","journal-title":"Semi. Sci. Technol."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB18","first-page":"866","author":"Degraeve","year":"1995","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB19","first-page":"904","volume":"86","author":"Stathis","year":"1998","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB20","doi-asserted-by":"crossref","first-page":"296","DOI":"10.1109\/55.924847","volume":"22","author":"Su\u00f1\u00e9","year":"2001","journal-title":"IEEE Elec. Dev. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB21","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1016\/0040-6090(90)90098-X","volume":"185","author":"Su\u00f1\u00e9","year":"1990","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB22","doi-asserted-by":"crossref","first-page":"1752","DOI":"10.1063\/1.123677","volume":"74","author":"DiMaria","year":"1999","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB23","first-page":"52","author":"Cheung","year":"1999","journal-title":"IRPS"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB24","first-page":"125","author":"Wu","year":"2001","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB25","doi-asserted-by":"crossref","first-page":"2141","DOI":"10.1109\/TED.2002.805603","volume":"49","author":"Wu","year":"2002","journal-title":"IEEE Tran. Elec. Dev."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB26","doi-asserted-by":"crossref","first-page":"2708","DOI":"10.1063\/1.118999","volume":"70","author":"DiMaria","year":"1997","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB27","doi-asserted-by":"crossref","first-page":"3004","DOI":"10.1063\/1.116678","volume":"68","author":"DiMaria","year":"1996","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB28","first-page":"179","author":"Bude","year":"1998","journal-title":"IEDM"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB29","first-page":"7","author":"Nicollian","year":"2000","journal-title":"IRPS"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB30","first-page":"16","author":"McKenna","year":"2000","journal-title":"IRPS"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB31","doi-asserted-by":"crossref","first-page":"33","DOI":"10.1109\/TNANO.2003.808515","volume":"2","author":"McMahon","year":"2003","journal-title":"IEEE Trans. Nanotechnol."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB32","doi-asserted-by":"crossref","first-page":"1590","DOI":"10.1126\/science.268.5217.1590","volume":"268","author":"Shen","year":"1995","journal-title":"Science"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB33","doi-asserted-by":"crossref","first-page":"4269","DOI":"10.1063\/1.469474","volume":"102","author":"Guyot-Sionnest","year":"1995","journal-title":"J. Chem. Phys."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB34","doi-asserted-by":"crossref","first-page":"1514","DOI":"10.1109\/16.848301","volume":"47","author":"Kaczer","year":"2000","journal-title":"IEEE Tran. Elec. Dev"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB35","first-page":"59","author":"Degraeve","year":"1999","journal-title":"VLSI Symp."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB36","doi-asserted-by":"crossref","first-page":"362","DOI":"10.1109\/55.847381","volume":"21","author":"Wu","year":"2000","journal-title":"IEEE Elec. Dev. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB37","first-page":"33","author":"Suehle","year":"2000","journal-title":"IRPS"},{"key":"10.1016\/S0026-2714(03)00169-0_BIB38","doi-asserted-by":"crossref","first-page":"603","DOI":"10.1109\/55.974592","volume":"22","author":"Wu","year":"2001","journal-title":"IEEE Elec. Dev. Lett."},{"key":"10.1016\/S0026-2714(03)00169-0_BIB39","doi-asserted-by":"crossref","first-page":"1787","DOI":"10.1016\/S0038-1101(02)00151-X","volume":"46","author":"Wu","year":"2002","journal-title":"Solid-State Electronics"}],"container-title":["Microelectronics Reliability"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271403001690?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0026271403001690?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,17]],"date-time":"2019-03-17T04:56:06Z","timestamp":1552798566000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0026271403001690"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,8]]},"references-count":39,"journal-issue":{"issue":"8","published-print":{"date-parts":[[2003,8]]}},"alternative-id":["S0026271403001690"],"URL":"https:\/\/doi.org\/10.1016\/s0026-2714(03)00169-0","relation":{},"ISSN":["0026-2714"],"issn-type":[{"value":"0026-2714","type":"print"}],"subject":[],"published":{"date-parts":[[2003,8]]}}}