{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,13]],"date-time":"2026-02-13T12:53:00Z","timestamp":1770987180386,"version":"3.50.1"},"reference-count":88,"publisher":"Elsevier","isbn-type":[{"value":"9780120121021","type":"print"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[1961]]},"DOI":"10.1016\/s0065-2458(08)60142-4","type":"book-chapter","created":{"date-parts":[[2011,1,19]],"date-time":"2011-01-19T05:56:15Z","timestamp":1295416575000},"page":"135-293","source":"Crossref","is-referenced-by-count":60,"title":["Microelectronics Using Electron-Beam-Activated Machining Techniques"],"prefix":"10.1016","author":[{"given":"Kenneth R.","family":"Shoulders","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"78","reference":[{"key":"10.1016\/S0065-2458(08)60142-4_bib1","doi-asserted-by":"crossref","first-page":"711","DOI":"10.1063\/1.1748661","article-title":"New method of recording electrons.","volume":"1","author":"Carr","year":"1930","journal-title":"Rev. Sci. Instr."},{"key":"10.1016\/S0065-2458(08)60142-4_bib2","first-page":"336","article-title":"The point projection X-ray microscope as a point source for microbeam X-ray diffraction","author":"Nixon","year":"1957"},{"key":"10.1016\/S0065-2458(08)60142-4_bib3","first-page":"269","article-title":"X-ray microprojector","author":"Rovinsky","year":"1957"},{"key":"10.1016\/S0065-2458(08)60142-4_bib4","unstructured":"Powers, D.A. Von Hippel, A., Progress reports show consistent breakdown strengths between 50 and 200 megavolts per centimeter for film thicknesses between 700 and 4000 angstroms using alumino silicate glass. Massachusetts Inst. of Technol. Lab. for Insulation Research Cambridge, Massachusetts"},{"key":"10.1016\/S0065-2458(08)60142-4_bib5","first-page":"202","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib6","first-page":"153","article-title":"Field emission.","volume":"8","author":"Dyke","year":"1956","journal-title":"Advances in Electronics and Electron Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib7","unstructured":"Gnaedigner, R. J., Some aspects of vacuum deposition of metals in transistor fabrication, in Trans. 5th Natl. Symposium on Vacuum Technology 1958, p. 235."},{"key":"10.1016\/S0065-2458(08)60142-4_bib7a","first-page":"251","article-title":"On microelectronic components, interconnections, and system fabrication","author":"Shoulders","year":"1960","journal-title":"Proc. Western Joint Computer Conf."},{"key":"10.1016\/S0065-2458(08)60142-4_bib8","doi-asserted-by":"crossref","first-page":"48","DOI":"10.1103\/PhysRev.50.48","article-title":"Thin film field emission.","volume":"50","author":"Malter","year":"1936","journal-title":"Phys. Rev."},{"key":"10.1016\/S0065-2458(08)60142-4_bib9","unstructured":"Firth, B.G. Investigation in Utilization of Self-Sustained Field Emission, Contract DA-36\u2013039 SC-73051, DA Project No. 3-99-13-022, Signal Corps Project No. 112B. U.S. Army, 1957"},{"key":"10.1016\/S0065-2458(08)60142-4_bib10","first-page":"353","article-title":"Electroluminescence in zinc sulphide type phosphors.","volume":"11","author":"Zalm","year":"1956","journal-title":"Philips Research Rep."},{"key":"10.1016\/S0065-2458(08)60142-4_bib11","unstructured":"Mott, N.F. Gurney, R.W. Electronic Processes in Ionic Crystals 2nd Ed. 267 Oxford University Press Clarendon London and New York"},{"key":"10.1016\/S0065-2458(08)60142-4_bib12","unstructured":"Charbonnier, F.M. Brock, E.G. Sleeth, J.D. Dyke, W.P. The application of field emission to millimeter-wave oscillators and amplifiers, Final Report, Contract DA-36\u2013039 SC-72377, DA Project No. 3-99-13-022, Signal Corps Project No. 112B. U.S. Army, 1958"},{"key":"10.1016\/S0065-2458(08)60142-4_bib13","series-title":"Research on Field Emission Cathodes, WADC Tech.","author":"Martin","year":"1959"},{"key":"10.1016\/S0065-2458(08)60142-4_bib13a","series-title":"Field emission cathode ray tube development, WADC Tech.","author":"Griffith","year":"1958"},{"key":"10.1016\/S0065-2458(08)60142-4_bib14","series-title":"Paper presented at Field Emission Symposium","article-title":"Experimental determination of the total energy distribution of field emitted electrons","author":"Young","year":"1958"},{"key":"10.1016\/S0065-2458(08)60142-4_bib15","first-page":"109","article-title":"Field emission.","volume":"8","author":"Dyke","year":"1956","journal-title":"Advances in Electronics and Electron Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib15a","unstructured":"Hansen, W.W. Applied Research in Microminiature Field Emission Tubes, Contract DA-36\u2013039 SC-84526, Task No. 3A99-13-001-01, Signal Corps. Research and Development Lab. Quart. Progress Report Nos. 1\u20134. U.S. Army, 1960."},{"key":"10.1016\/S0065-2458(08)60142-4_bib16","series-title":"Paper presented at 20th Ann. Conf. on Physical Electronics.","article-title":"Field ion microscopy of damage in tungsten by bombardment with alpha particles and cathode sputtering.","author":"Mueller","year":"1960"},{"key":"10.1016\/S0065-2458(08)60142-4_bib17","first-page":"158","article-title":"Field emission.","volume":"8","author":"Dyke","year":"1956","journal-title":"Advances in Electronics and Electron Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib18","first-page":"27","author":"Holm","year":"1958"},{"issue":"6","key":"10.1016\/S0065-2458(08)60142-4_bib19","doi-asserted-by":"crossref","first-page":"720","DOI":"10.1063\/1.1722078","article-title":"Electrical breakdown in high vacuum.","volume":"26","author":"Boyle","year":"1955","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib20","first-page":"213","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib21","first-page":"212","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib22","first-page":"158","article-title":"Field emission.","volume":"8","author":"Dyke","year":"1956","journal-title":"Advances in Electronics and Electron Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib23","first-page":"80","article-title":"The use of classical macroscopic concepts in surface energy problems","author":"Herring","year":"1953"},{"key":"10.1016\/S0065-2458(08)60142-4_bib24","first-page":"218","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib25","first-page":"202","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib26","first-page":"37","author":"Powell","year":"1955"},{"key":"10.1016\/S0065-2458(08)60142-4_bib27","first-page":"452","article-title":"Fundamental Researches for observing specimens in gas layers","author":"Sugata","year":"1956"},{"issue":"5","key":"10.1016\/S0065-2458(08)60142-4_bib28","doi-asserted-by":"crossref","first-page":"782","DOI":"10.1063\/1.1735699","article-title":"Stable, high density field emission cathode.","volume":"31","author":"Martin","year":"1960","journal-title":"J. Appl. Phys."},{"issue":"5","key":"10.1016\/S0065-2458(08)60142-4_bib29","doi-asserted-by":"crossref","first-page":"921","DOI":"10.1063\/1.1735719","article-title":"Evolution of gases and ions from different anodes under electron bombardment.","volume":"31","author":"Young","year":"1960","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib30","first-page":"370","author":"De Boer","year":"1935"},{"issue":"2","key":"10.1016\/S0065-2458(08)60142-4_bib31","first-page":"192","article-title":"The tunnel effect in sulphide rectifiers.","volume":"2","author":"Volokobinskii","year":"1958","journal-title":"Soviet Phys.\u2014Doklady"},{"issue":"2","key":"10.1016\/S0065-2458(08)60142-4_bib32","first-page":"173","article-title":"The influence of electric fields on the properties of thin dielectric and semiconducting films.","volume":"2","author":"Volokobinskii","year":"1958","journal-title":"Soviet Phys.\u2014Doklady"},{"key":"10.1016\/S0065-2458(08)60142-4_bib33","series-title":"Term paper for Molecular Engineering Course.","article-title":"Solid state field emission switching components","author":"Highleyman","year":"1957"},{"issue":"No 3","key":"10.1016\/S0065-2458(08)60142-4_bib34","first-page":"359","article-title":"The tunnel emission amplifier.","volume":"48","author":"Mead","year":"1960","journal-title":"Proc. IRE"},{"issue":"4","key":"10.1016\/S0065-2458(08)60142-4_bib35","doi-asserted-by":"crossref","DOI":"10.1109\/TNS2.1956.4315542","article-title":"Transmission secondary electron multiplication for high speed pulse counting.","volume":"NS-3","author":"Sternglass","year":"1956","journal-title":"IRE Trans. on Nuclear Sci."},{"key":"10.1016\/S0065-2458(08)60142-4_bib36","first-page":"623","article-title":"On secondary electron multipliers.","volume":"17","author":"Weiss","year":"1936","journal-title":"Z. Tech. Physik"},{"key":"10.1016\/S0065-2458(08)60142-4_bib37","doi-asserted-by":"crossref","first-page":"519","DOI":"10.1063\/1.1714904","article-title":"The use of secondary electron emission to obtain trigger or relay action.","volume":"13","author":"Skellett","year":"1942","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib38","first-page":"63","author":"Bruining","year":"1954"},{"issue":"11","key":"10.1016\/S0065-2458(08)60142-4_bib39","doi-asserted-by":"crossref","first-page":"1311","DOI":"10.1063\/1.1722256","article-title":"Preparation and properties of thin film MgO secondary emitters.","volume":"27","author":"Wargo","year":"1956","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib40","first-page":"4588","author":"Bruining","year":"1954"},{"key":"10.1016\/S0065-2458(08)60142-4_bib41","doi-asserted-by":"crossref","first-page":"1037","DOI":"10.1103\/PhysRev.88.1037","article-title":"Field emission from photoconductors.","volume":"88","author":"Apker","year":"1952","journal-title":"Phys. Rev."},{"key":"10.1016\/S0065-2458(08)60142-4_bib42","series-title":"Paper presented at Field Emission Symposium","article-title":"Field emission from cadmium sulfide.","author":"Sokolskaya","year":"1958"},{"issue":"6","key":"10.1016\/S0065-2458(08)60142-4_bib43","first-page":"465","article-title":"Luminescence of the oxide layer on aluminum during and after its formation by electrolytic oxidation.","volume":"12","author":"Van Geel","year":"1957","journal-title":"Philips Research Res."},{"issue":"10","key":"10.1016\/S0065-2458(08)60142-4_bib44","first-page":"274","article-title":"Field emission from dielectrics containing impurities.","volume":"4","author":"Elinson","year":"1959","journal-title":"Radio Engineering and Electronics"},{"issue":"5","key":"10.1016\/S0065-2458(08)60142-4_bib44a","doi-asserted-by":"crossref","first-page":"206","DOI":"10.1088\/0950-7671\/34\/5\/410","article-title":"A precision electron beam oscillograph with a spot diameter of a few microns.","volume":"34","author":"von Ardenne","year":"1957","journal-title":"J. Sci. Instr."},{"key":"10.1016\/S0065-2458(08)60142-4_bib45","first-page":"124","author":"Bruining","year":"1954"},{"key":"10.1016\/S0065-2458(08)60142-4_bib46","doi-asserted-by":"crossref","first-page":"1517","DOI":"10.1109\/JRPROC.1957.278345","article-title":"Slalom focusing.","volume":"45","author":"Cook","year":"1957","journal-title":"Proc. IRE"},{"key":"10.1016\/S0065-2458(08)60142-4_bib47","doi-asserted-by":"crossref","first-page":"583","DOI":"10.1063\/1.1723227","article-title":"Stability of an electron on a slalom orbit.","volume":"29","author":"Cook","year":"1958","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib48","first-page":"73","article-title":"Electron beam parametric amplifiers","author":"Crumly","year":"1959","journal-title":"Electronic Ind."},{"issue":"8","key":"10.1016\/S0065-2458(08)60142-4_bib48a","first-page":"1485","article-title":"An electrostatically focused electron beam parametric amplifier.","volume":"48","author":"Udelson","year":"1960","journal-title":"Proc. IRE"},{"issue":"3","key":"10.1016\/S0065-2458(08)60142-4_bib49","doi-asserted-by":"crossref","first-page":"342","DOI":"10.1063\/1.1735165","article-title":"Electrodynamic containment of charged particles.","volume":"30","author":"Wuerker","year":"1959","journal-title":"J. Appl. Phys."},{"issue":"9","key":"10.1016\/S0065-2458(08)60142-4_bib50","doi-asserted-by":"crossref","first-page":"746","DOI":"10.1364\/JOSA.39.000746","article-title":"X-ray optics: imperfections of optical flats and their effect on the reflection of X-rays.","volume":"39","author":"Ehrenberg","year":"1949","journal-title":"J. Opt. Soc. Am."},{"issue":"12","key":"10.1016\/S0065-2458(08)60142-4_bib51","doi-asserted-by":"crossref","first-page":"1015","DOI":"10.1364\/JOSA.45.001015","article-title":"Multiple-beam fringes of equal chromatic order, part VII, mechanism of polishing Glass","volume":"45","author":"Koehler","year":"1955","journal-title":"J. Opt. Soc. Am."},{"issue":"4","key":"10.1016\/S0065-2458(08)60142-4_bib52","doi-asserted-by":"crossref","first-page":"715","DOI":"10.1063\/1.1735674","article-title":"Production and demonstration of atomically clean surfaces","volume":"31","author":"Hagstrum","year":"1960","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib53","first-page":"133","author":"Powell","year":"1955"},{"key":"10.1016\/S0065-2458(08)60142-4_bib54","first-page":"348","author":"Hall","year":"1953"},{"key":"10.1016\/S0065-2458(08)60142-4_bib55","series-title":"Vapor-Plating.","author":"Powell","year":"1955"},{"key":"10.1016\/S0065-2458(08)60142-4_bib56","series-title":"Armour Research Foundation of Illinois Inst. of Technol.","article-title":"Research on the Pyrolytic Deposition of Thin Films, WADC Tech.","author":"Schossberger","year":"1959"},{"key":"10.1016\/S0065-2458(08)60142-4_bib57","first-page":"619","article-title":"Microanalysis with a scanning X-ray microscope","author":"Duncumb","year":"1957"},{"issue":"2","key":"10.1016\/S0065-2458(08)60142-4_bib58","doi-asserted-by":"crossref","first-page":"143","DOI":"10.1007\/BF01327353","article-title":"Das elektrische Massenfilter als Massenspektrometer und isotopentrenner.","volume":"152","author":"Paul","year":"1958","journal-title":"Z. Physik"},{"key":"10.1016\/S0065-2458(08)60142-4_bib59","author":"Brubaker","year":"1960"},{"key":"10.1016\/S0065-2458(08)60142-4_bib60","first-page":"214","article-title":"Field emission","volume":"21","author":"Good","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib61","series-title":"Private communication and internal publication on Mechanism for the chemical reaction of atoms with solids.","author":"Wise","year":"1960"},{"key":"10.1016\/S0065-2458(08)60142-4_bib62","doi-asserted-by":"crossref","first-page":"1335","DOI":"10.1002\/cber.19290620537","volume":"62B","author":"Paneth","year":"1929","journal-title":"Ber. deut. chem. Ges."},{"key":"10.1016\/S0065-2458(08)60142-4_bib63","first-page":"679","author":"Langmuir","year":"1949"},{"key":"10.1016\/S0065-2458(08)60142-4_bib64","first-page":"401","author":"Holland","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib65","doi-asserted-by":"crossref","first-page":"1150","DOI":"10.1063\/1.1723393","article-title":"Application of the ion bombardment cleaning method to titanium, germanium, silicon, and nickel as determined by low-energy electron diffraction.","volume":"29","author":"Farnsworth","year":"1958","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib66","first-page":"276","article-title":"Sputtering by ion bombardment.","volume":"7","author":"Wehner","year":"1955","journal-title":"Advances in Electronics and Electron Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib67","first-page":"466","article-title":"Formation of thin layers in a self-maintained high vacuum discharge and its application in electron microscopial specimen technique","author":"Haefer","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib68","doi-asserted-by":"crossref","DOI":"10.1145\/1458043.1458057","article-title":"An approach to microminiature printed systems","author":"Buck","year":"1958"},{"key":"10.1016\/S0065-2458(08)60142-4_bib69","doi-asserted-by":"crossref","first-page":"894","DOI":"10.1063\/1.1721764","article-title":"Decompositions of inorganic specimens during observation in the electron microscope.","volume":"25","author":"Fischer","year":"1954","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0065-2458(08)60142-4_bib70","first-page":"134","article-title":"The decomposition of silver azide by electrons","volume":"1","author":"Camp","year":"1960"},{"issue":"3","key":"10.1016\/S0065-2458(08)60142-4_bib71","doi-asserted-by":"crossref","first-page":"472","DOI":"10.1103\/PhysRev.75.472","article-title":"Conductivity induced by electron bombardment in thin insulating films.","volume":"75","author":"Pensak","year":"1949","journal-title":"Phys. Rev."},{"key":"10.1016\/S0065-2458(08)60142-4_bib72","doi-asserted-by":"crossref","first-page":"362","DOI":"10.1088\/0370-1298\/64\/4\/303","article-title":"Electron-bombardment conductivity of dielectric films.","volume":"A64","author":"Ansbacher","year":"1951","journal-title":"Proc. Phys. Soc.London)"},{"key":"10.1016\/S0065-2458(08)60142-4_bib73","doi-asserted-by":"crossref","first-page":"8","DOI":"10.1063\/1.1714924","article-title":"Electrostatic electron microscopy.","volume":"14","author":"Bachman","year":"1943","journal-title":"J. Appl. Phys"},{"key":"10.1016\/S0065-2458(08)60142-4_bib74","first-page":"15","article-title":"Measured properties of strong unipotential lenses","volume":"A62","author":"Liebmann","year":"1949","journal-title":"Proc. Phys. Soc.London)"},{"key":"10.1016\/S0065-2458(08)60142-4_bib75","first-page":"116","article-title":"A shorter focal length electrostatic objective lens for the point projection X-ray microscope","author":"Newberry","year":"1957"},{"key":"10.1016\/S0065-2458(08)60142-4_bib76","first-page":"12","article-title":"A scanning microscope with either electron or X-ray recording","author":"Cosslett","year":"1957"},{"key":"10.1016\/S0065-2458(08)60142-4_bib77","first-page":"269","article-title":"Recent developments in scanning electron microscopy","volume":"1","author":"Everhart","year":"1960"},{"key":"10.1016\/S0065-2458(08)60142-4_bib78","unstructured":"Mendenhall, H.E., U.S. Patent No. 2,700, 6261955"},{"key":"10.1016\/S0065-2458(08)60142-4_bib79","first-page":"267","article-title":"Microanalysis with an X-ray scanning microscope","volume":"1","author":"Duncumb","year":"1960"},{"key":"10.1016\/S0065-2458(08)60142-4_bib80","doi-asserted-by":"crossref","first-page":"127","DOI":"10.1063\/1.1769841","article-title":"Electron multiplier as an electron counting device.","volume":"12","author":"Bay","year":"1941","journal-title":"Rev. Sci. Instr."},{"key":"10.1016\/S0065-2458(08)60142-4_bib81","doi-asserted-by":"crossref","first-page":"484","DOI":"10.1063\/1.1769786","article-title":"The X-ray photon efficiency of a multiplier phototube.","volume":"12","author":"Allen","year":"1941","journal-title":"Rev. Sci. Instr."},{"key":"10.1016\/S0065-2458(08)60142-4_bib82","first-page":"395","article-title":"Ein Auflichtelektronenmikroskop","author":"Von Bartz","year":"1956"},{"key":"10.1016\/S0065-2458(08)60142-4_bib83","doi-asserted-by":"crossref","first-page":"1228","DOI":"10.1063\/1.1721879","volume":"26","author":"Mayer","year":"1955","journal-title":"J. Appl. Phys."}],"container-title":["Advances in Computers","Advances in Computers Volume 2"],"original-title":[],"language":"en","deposited":{"date-parts":[[2019,6,7]],"date-time":"2019-06-07T23:42:18Z","timestamp":1559950938000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0065245808601424"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1961]]},"ISBN":["9780120121021"],"references-count":88,"URL":"https:\/\/doi.org\/10.1016\/s0065-2458(08)60142-4","relation":{},"ISSN":["0065-2458"],"issn-type":[{"value":"0065-2458","type":"print"}],"subject":[],"published":{"date-parts":[[1961]]}}}