{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,10]],"date-time":"2026-10-10T19:49:26Z","timestamp":1791661766143,"version":"4.3.4"},"reference-count":17,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-017"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-012"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T00:00:00Z","timestamp":1793491200000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-004"}],"funder":[{"DOI":"10.13039\/501100017596","name":"Natural Science Basic Research Program of Shaanxi Province","doi-asserted-by":"publisher","award":["2024JC-JCQN-69"],"award-info":[{"award-number":["2024JC-JCQN-69"]}],"id":[{"id":"10.13039\/501100017596","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2024YFB4608501"],"award-info":[{"award-number":["2024YFB4608501"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Ultramicroscopy"],"published-print":{"date-parts":[[2026,11]]},"DOI":"10.1016\/j.ultramic.2026.114448","type":"journal-article","created":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T15:52:24Z","timestamp":1790610744000},"page":"114448","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":0,"special_numbering":"C","title":["An Approach for the aberration calculation of multi-electron-beam systems"],"prefix":"10.1016","volume":"287","author":[{"given":"Jintao","family":"Hu","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Han","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hangfeng","family":"Hu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fu","family":"Liu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7433-2970","authenticated-orcid":false,"given":"Yongfeng","family":"Kang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"78","reference":[{"key":"10.1016\/j.ultramic.2026.114448_bib0001","article-title":"Electron Optics of Low-Voltage Electron Beam Testing and Inspection. Part I: Simulation Tools","volume":"205","author":"Plies","year":"2018"},{"key":"10.1016\/j.ultramic.2026.114448_bib0002","doi-asserted-by":"crossref","first-page":"23","DOI":"10.1016\/j.mee.2014.11.015","article-title":"High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution","volume":"133","author":"Okazaki","year":"2015","journal-title":"Microelectron. Eng."},{"key":"10.1016\/j.ultramic.2026.114448_bib0003","series-title":"Doctoral Thesis","article-title":"A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications","author":"Zhang","year":"2008"},{"key":"10.1016\/j.ultramic.2026.114448_bib0004","doi-asserted-by":"crossref","first-page":"109","DOI":"10.1016\/j.mee.2013.07.008","article-title":"A large current scanning electron microscope with MEMS-based multi-beam optics","volume":"113","author":"Ichimura","year":"2014","journal-title":"Microelectron. Eng."},{"key":"10.1016\/j.ultramic.2026.114448_bib0005","series-title":"Metrology, Inspection, and Process Control for Microlithography XXIX","article-title":"Further advancing the throughput of a multi-beam SEM","author":"Kemen","year":"2015"},{"key":"10.1016\/j.ultramic.2026.114448_bib0006","doi-asserted-by":"crossref","first-page":"655","DOI":"10.1116\/1.2897321","article-title":"Electron optics of microlenses with inclined beams","volume":"26","author":"Zhang","year":"2008","journal-title":"J. Vac. Sci. Technol. B"},{"key":"10.1016\/j.ultramic.2026.114448_bib0007","doi-asserted-by":"crossref","first-page":"139","DOI":"10.1116\/1.3071850","article-title":"Electron optics of skewed micro-Einzel lenses","volume":"27","author":"van Bruggen","year":"2009","journal-title":"J. Vac. Sci. Technol. B"},{"key":"10.1016\/j.ultramic.2026.114448_bib0008","doi-asserted-by":"crossref","first-page":"60","DOI":"10.1016\/j.nima.2010.12.090","article-title":"Electron optics of multi-beam scanning electron microscope","volume":"645","author":"Mohammadi-Gheidari","year":"2011","journal-title":"Nucl. Instrum. Methods Phys. Res. A"},{"key":"10.1016\/j.ultramic.2026.114448_bib0009","doi-asserted-by":"crossref","DOI":"10.1016\/j.ultramic.2023.113735","article-title":"In multi electron beam systems, \u201cNeighbours Matter\u201d","volume":"249","author":"Mohammadi-Gheidari","year":"2023","journal-title":"Ultramicroscopy"},{"key":"10.1016\/j.ultramic.2026.114448_bib0010","doi-asserted-by":"crossref","DOI":"10.1016\/j.ultramic.2024.114085","article-title":"Aberration calculation of microlens array using differential algebraic method","volume":"269","author":"Hu","year":"2025","journal-title":"Ultramicroscopy"},{"key":"10.1016\/j.ultramic.2026.114448_bib0011","doi-asserted-by":"crossref","first-page":"1365","DOI":"10.1016\/j.ultramic.2009.07.001","article-title":"Calculation of aberration coefficients by ray tracing","volume":"109","author":"Oral","year":"2009","journal-title":"Ultramicroscopy"},{"key":"10.1016\/j.ultramic.2026.114448_bib0012","series-title":"AIP Conference Proceedings","first-page":"275","article-title":"Differential algebraic treatment of beam dynamics to very high orders including applications to space charge","author":"Berz","year":"1988"},{"key":"10.1016\/j.ultramic.2026.114448_bib0013","doi-asserted-by":"crossref","first-page":"250","DOI":"10.1078\/0030-4026-00045","article-title":"Study on differential algebraic aberration method for electrostatic electron lenses","volume":"112","author":"Cheng","year":"2001","journal-title":"Optik"},{"key":"10.1016\/j.ultramic.2026.114448_bib0014","doi-asserted-by":"crossref","first-page":"2038","DOI":"10.1116\/1.1603291","article-title":"Differential algebraic theory and calculation for arbitrary high order aberrations of a bipotential electrostatic lens","volume":"21","author":"Cheng","year":"2003","journal-title":"J. Vac. Sci. Technol. B"},{"key":"10.1016\/j.ultramic.2026.114448_bib0015","doi-asserted-by":"crossref","first-page":"300","DOI":"10.1016\/j.nima.2011.01.043","article-title":"Design and optimization of multipole lens and Wien filter systems","volume":"645","author":"Liu","year":"2011","journal-title":"Nucl. Instrum. Methods Phys. Res. A"},{"key":"10.1016\/j.ultramic.2026.114448_bib0016","doi-asserted-by":"crossref","first-page":"1198","DOI":"10.1016\/j.ultramic.2010.04.018","article-title":"Determination of analytical expansion from numerical field data","volume":"110","author":"Radlicka","year":"2010","journal-title":"Ultramicroscopy"},{"key":"10.1016\/j.ultramic.2026.114448_bib0017","doi-asserted-by":"crossref","DOI":"10.1016\/j.ultramic.2026.114356","article-title":"A calculation approach for the virtual source spatial distribution of sub-beams in single-emitter multi-electron-beam systems","volume":"283","author":"Hu","year":"2026","journal-title":"Ultramicroscopy"}],"container-title":["Ultramicroscopy"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0304399126001403?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0304399126001403?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2026,10,10]],"date-time":"2026-10-10T19:18:50Z","timestamp":1791659930000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0304399126001403"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,11]]},"references-count":17,"alternative-id":["S0304399126001403"],"URL":"https:\/\/doi.org\/10.1016\/j.ultramic.2026.114448","relation":{},"ISSN":["0304-3991"],"issn-type":[{"value":"0304-3991","type":"print"}],"subject":[],"published":{"date-parts":[[2026,11]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"An Approach for the aberration calculation of multi-electron-beam systems","name":"articletitle","label":"Article Title"},{"value":"Ultramicroscopy","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/j.ultramic.2026.114448","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"article","name":"content_type","label":"Content Type"},{"value":"\u00a9 2026 Elsevier B.V. All rights are reserved, including those for text and data mining, AI training, and similar technologies.","name":"copyright","label":"Copyright"}],"article-number":"114448"}}