{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,14]],"date-time":"2025-10-14T19:49:55Z","timestamp":1760471395373},"reference-count":7,"publisher":"Elsevier BV","issue":"10-11","license":[{"start":{"date-parts":[[1994,10,1]],"date-time":"1994-10-01T00:00:00Z","timestamp":780969600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Vacuum"],"published-print":{"date-parts":[[1994,10]]},"DOI":"10.1016\/0042-207x(94)90020-5","type":"journal-article","created":{"date-parts":[[2002,10,19]],"date-time":"2002-10-19T01:58:28Z","timestamp":1034992708000},"page":"1051-1053","source":"Crossref","is-referenced-by-count":24,"title":["Study of tungsten sputtered films with low nitrogen content"],"prefix":"10.1016","volume":"45","author":[{"given":"J","family":"Castanho","sequence":"first","affiliation":[]},{"given":"A","family":"Cavaleiro","sequence":"additional","affiliation":[]},{"given":"MT","family":"Vieira","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/0042-207X(94)90020-5_BIB1","doi-asserted-by":"crossref","first-page":"2259","DOI":"10.1116\/1.574062","volume":"A4","author":"Sundgren","year":"1986","journal-title":"J Vac Sci Technol"},{"key":"10.1016\/0042-207X(94)90020-5_BIB2","doi-asserted-by":"crossref","first-page":"167","DOI":"10.1557\/PROC-47-167","volume":"47","author":"Kattelus","year":"1985","journal-title":"Mater Res Soc Symp Proc"},{"key":"10.1016\/0042-207X(94)90020-5_BIB3","doi-asserted-by":"crossref","first-page":"161","DOI":"10.1557\/PROC-187-161","volume":"187","author":"Lin","year":"1990","journal-title":"Mater Res Soc Symp Proc"},{"key":"10.1016\/0042-207X(94)90020-5_BIB4","doi-asserted-by":"crossref","first-page":"239","DOI":"10.1146\/annurev.ms.07.080177.001323","volume":"7","author":"Thornton","year":"1977","journal-title":"Ann Rev Mater Sci"},{"key":"10.1016\/0042-207X(94)90020-5_BIB5","doi-asserted-by":"crossref","first-page":"1681","DOI":"10.1116\/1.575307","volume":"A6","author":"Shih","year":"1988","journal-title":"J Vac Sci Technol"},{"key":"10.1016\/0042-207X(94)90020-5_BIB6","first-page":"52","article-title":"Tables of Physical and Chemical Constants","author":"Kaye","year":"1973"},{"key":"10.1016\/0042-207X(94)90020-5_BIB7","doi-asserted-by":"crossref","first-page":"403","DOI":"10.1016\/0040-6090(87)90382-8","volume":"154","author":"Burnett","year":"1987","journal-title":"Thin Solid Films"}],"container-title":["Vacuum"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0042207X94900205?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0042207X94900205?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2020,3,11]],"date-time":"2020-03-11T12:41:58Z","timestamp":1583930518000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/0042207X94900205"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1994,10]]},"references-count":7,"journal-issue":{"issue":"10-11","published-print":{"date-parts":[[1994,10]]}},"alternative-id":["0042207X94900205"],"URL":"https:\/\/doi.org\/10.1016\/0042-207x(94)90020-5","relation":{},"ISSN":["0042-207X"],"issn-type":[{"value":"0042-207X","type":"print"}],"subject":[],"published":{"date-parts":[[1994,10]]}}}