{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,7]],"date-time":"2026-04-07T03:29:51Z","timestamp":1775532591682,"version":"3.50.1"},"reference-count":12,"publisher":"Elsevier BV","issue":"1-4","license":[{"start":{"date-parts":[[1995,12,1]],"date-time":"1995-12-01T00:00:00Z","timestamp":817776000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Microelectronic Engineering"],"published-print":{"date-parts":[[1995,12]]},"DOI":"10.1016\/0167-9317(95)00116-6","type":"journal-article","created":{"date-parts":[[2002,7,25]],"date-time":"2002-07-25T22:48:53Z","timestamp":1027637333000},"page":"67-70","source":"Crossref","is-referenced-by-count":36,"title":["Characterization of PZT thin films for micromotors"],"prefix":"10.1016","volume":"29","author":[{"given":"P.","family":"Muralt","sequence":"first","affiliation":[]},{"given":"A.","family":"Kholkin","sequence":"additional","affiliation":[]},{"given":"M.","family":"Kohli","sequence":"additional","affiliation":[]},{"given":"T.","family":"Maeder","sequence":"additional","affiliation":[]},{"given":"N.","family":"Setter","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/0167-9317(95)00116-6_BIB1","doi-asserted-by":"crossref","first-page":"44","DOI":"10.1109\/84.128055","volume":"1","author":"Flynn","year":"1992","journal-title":"J. Microelectromechanical Systems"},{"key":"10.1016\/0167-9317(95)00116-6_BIB2","unstructured":"P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, R. Luthier, and N. Setter, Actuators and Sensors, in press."},{"key":"10.1016\/0167-9317(95)00116-6_BIB3","doi-asserted-by":"crossref","first-page":"2289","DOI":"10.1143\/JJAP.30.2289","volume":"30","author":"Uchiki","year":"1991","journal-title":"Jap. J. Appl. Phys."},{"key":"10.1016\/0167-9317(95)00116-6_BIB4","series-title":"IEEE Ultrasonics Symposium 92","first-page":"893","author":"Kurosawa","year":"1992"},{"key":"10.1016\/0167-9317(95)00116-6_BIB5","series-title":"Proc. IEEE-MEMS 93","first-page":"128","author":"Racine","year":"1993"},{"key":"10.1016\/0167-9317(95)00116-6_BIB6","unstructured":"P. Muralt, A. Kholkin, M. Kohli, T. Maeder, K. Brooks, and R. Luthier, ISIF'95, Colorado Springs, USA, J.Int.Ferroelectrics, in press."},{"key":"10.1016\/0167-9317(95)00116-6_BIB7","unstructured":"T. Maeder et al., this issue."},{"key":"10.1016\/0167-9317(95)00116-6_BIB8","unstructured":"A. Kholkin et al., this issue."},{"key":"10.1016\/0167-9317(95)00116-6_BIB9","series-title":"H\u00f6here Technische Mechanik","author":"Szabo","year":"1956"},{"key":"10.1016\/0167-9317(95)00116-6_BIB10","series-title":"Theory of Plates and Shells","author":"Timoshenko","year":"1959"},{"key":"10.1016\/0167-9317(95)00116-6_BIB11","doi-asserted-by":"crossref","first-page":"24","DOI":"10.1088\/0960-1317\/3\/1\/006","volume":"3","author":"S\u00f6derkvist","year":"1993","journal-title":"J. Micromech. Microeng."},{"key":"10.1016\/0167-9317(95)00116-6_BIB12","doi-asserted-by":"crossref","first-page":"1764","DOI":"10.1063\/1.357693","volume":"76","author":"Lefki","year":"1994","journal-title":"J. Appl. Phys."}],"container-title":["Microelectronic Engineering"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0167931795001166?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:0167931795001166?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,4,18]],"date-time":"2019-04-18T20:23:16Z","timestamp":1555618996000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/0167931795001166"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1995,12]]},"references-count":12,"journal-issue":{"issue":"1-4","published-print":{"date-parts":[[1995,12]]}},"alternative-id":["0167931795001166"],"URL":"https:\/\/doi.org\/10.1016\/0167-9317(95)00116-6","relation":{},"ISSN":["0167-9317"],"issn-type":[{"value":"0167-9317","type":"print"}],"subject":[],"published":{"date-parts":[[1995,12]]}}}