{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T20:42:50Z","timestamp":1759178570102},"reference-count":6,"publisher":"Elsevier BV","issue":"11-12","license":[{"start":{"date-parts":[[2007,8,1]],"date-time":"2007-08-01T00:00:00Z","timestamp":1185926400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Vacuum"],"published-print":{"date-parts":[[2007,8]]},"DOI":"10.1016\/j.vacuum.2007.04.027","type":"journal-article","created":{"date-parts":[[2007,4,20]],"date-time":"2007-04-20T16:07:33Z","timestamp":1177085253000},"page":"1503-1506","source":"Crossref","is-referenced-by-count":4,"title":["Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition"],"prefix":"10.1016","volume":"81","author":[{"given":"Y.","family":"Nunes","sequence":"first","affiliation":[]},{"given":"A.","family":"Wemans","sequence":"additional","affiliation":[]},{"given":"H.P.","family":"Marques","sequence":"additional","affiliation":[]},{"given":"C.","family":"Marques","sequence":"additional","affiliation":[]},{"given":"Q.","family":"Ferreira","sequence":"additional","affiliation":[]},{"given":"O.M.N.D.","family":"Teodoro","sequence":"additional","affiliation":[]},{"given":"E.","family":"Alves","sequence":"additional","affiliation":[]},{"given":"M.J.P.","family":"Maneira","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"issue":"3\u20134","key":"10.1016\/j.vacuum.2007.04.027_bib1","first-page":"315","article-title":"Cylindrical hollow magnetron cathode","volume":"64","author":"Gordo","year":"2002","journal-title":"Al\u2013N selective coatings for solar collector absorbers. Vacuum"},{"issue":"1","key":"10.1016\/j.vacuum.2007.04.027_bib2","doi-asserted-by":"crossref","first-page":"104","DOI":"10.1016\/S0040-6090(00)00653-2","article-title":"Superhard nanocomposite Ti1\u2212xAlxN films prepared by magnetron sputtering","volume":"365","author":"Musil","year":"2000","journal-title":"Thin Solid Films"},{"issue":"1\u20132","key":"10.1016\/j.vacuum.2007.04.027_bib3","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/0257-8972(95)02686-X","article-title":"Structure of TiN coatings","volume":"80","author":"Valvoda","year":"1996","journal-title":"Surf Coat Technol"},{"key":"10.1016\/j.vacuum.2007.04.027_bib4","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1063\/1.119524","volume":"71","author":"Barradas","year":"1997","journal-title":"Appl Phys Lett"},{"issue":"8\u201310","key":"10.1016\/j.vacuum.2007.04.027_bib5","doi-asserted-by":"crossref","first-page":"1205","DOI":"10.1016\/0042-207X(95)00142-5","article-title":"Multitechnique surface-analysis system\u2014apparatus description","volume":"46","author":"Teodoro","year":"1995","journal-title":"Vacuum"},{"key":"10.1016\/j.vacuum.2007.04.027_bib6","unstructured":"Fairley N. CasaXPS version 2.3.12. Casa Software Ltd., 2006, \u3008www.casaxps.com\u3009."}],"container-title":["Vacuum"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0042207X07001479?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0042207X07001479?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,1,8]],"date-time":"2019-01-08T02:58:10Z","timestamp":1546916290000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0042207X07001479"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007,8]]},"references-count":6,"journal-issue":{"issue":"11-12","published-print":{"date-parts":[[2007,8]]}},"alternative-id":["S0042207X07001479"],"URL":"https:\/\/doi.org\/10.1016\/j.vacuum.2007.04.027","relation":{},"ISSN":["0042-207X"],"issn-type":[{"value":"0042-207X","type":"print"}],"subject":[],"published":{"date-parts":[[2007,8]]}}}