{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,14]],"date-time":"2025-10-14T01:09:40Z","timestamp":1760404180610},"reference-count":9,"publisher":"Elsevier BV","issue":"1-2","license":[{"start":{"date-parts":[[2001,2,1]],"date-time":"2001-02-01T00:00:00Z","timestamp":980985600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Thin Solid Films"],"published-print":{"date-parts":[[2001,2]]},"DOI":"10.1016\/s0040-6090(00)01589-3","type":"journal-article","created":{"date-parts":[[2002,7,25]],"date-time":"2002-07-25T15:54:14Z","timestamp":1027612454000},"page":"244-247","source":"Crossref","is-referenced-by-count":26,"title":["Influence of the process parameters on structural and electrical properties of r.f. magnetron sputtering ITO films"],"prefix":"10.1016","volume":"383","author":[{"given":"I.","family":"Ba\u00eda","sequence":"first","affiliation":[]},{"given":"B.","family":"Fernandes","sequence":"additional","affiliation":[]},{"given":"P.","family":"Nunes","sequence":"additional","affiliation":[]},{"given":"M.","family":"Quintela","sequence":"additional","affiliation":[]},{"given":"R.","family":"Martins","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0040-6090(00)01589-3_BIB1","series-title":"Solid State Phenomena, vol. 44\u201346","first-page":"863","author":"Maruyama","year":"1995"},{"key":"10.1016\/S0040-6090(00)01589-3_BIB2","series-title":"Technology and Applications of Amorphous Silicon, Material Science, vol. 37","first-page":"253","author":"Guha","year":"2000"},{"key":"10.1016\/S0040-6090(00)01589-3_BIB3","doi-asserted-by":"crossref","first-page":"863","DOI":"10.1557\/PROC-467-863","article-title":"J. Curran","volume":"467","author":"Powell","year":"1997","journal-title":"MRS Symp."},{"key":"10.1016\/S0040-6090(00)01589-3_BIB4","doi-asserted-by":"crossref","first-page":"757","DOI":"10.1557\/PROC-377-757","volume":"377","author":"Street","year":"1995","journal-title":"MRS Symp."},{"key":"10.1016\/S0040-6090(00)01589-3_BIB5","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1557\/PROC-424-347","volume":"424","author":"Lan","year":"1997","journal-title":"MRS Symp."},{"key":"10.1016\/S0040-6090(00)01589-3_BIB6","unstructured":"N. Harada, JARECT 16, Amorphous Semiconductor Technologies & Devices, 1984, p. 283."},{"key":"10.1016\/S0040-6090(00)01589-3_BIB7","unstructured":"I. Ba\u00eda, M. Quintela, R. Martins, Proceedings 14th European Photovoltaic Solar Energy Conference, 1997, p. 2093."},{"key":"10.1016\/S0040-6090(00)01589-3_BIB8","doi-asserted-by":"crossref","first-page":"171","DOI":"10.1016\/S0040-6090(98)01393-5","volume":"337","author":"Ba\u00eda","year":"1999","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(00)01589-3_BIB9","unstructured":"B.D. Cullity, in: Addison, Wesley (Eds.), Elements of X-Ray diffraction, 1978, p. 102."}],"container-title":["Thin Solid Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609000015893?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609000015893?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,4,22]],"date-time":"2019-04-22T00:01:38Z","timestamp":1555891298000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0040609000015893"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2001,2]]},"references-count":9,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[2001,2]]}},"alternative-id":["S0040609000015893"],"URL":"https:\/\/doi.org\/10.1016\/s0040-6090(00)01589-3","relation":{},"ISSN":["0040-6090"],"issn-type":[{"type":"print","value":"0040-6090"}],"subject":[],"published":{"date-parts":[[2001,2]]}}}