{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,25]],"date-time":"2026-03-25T12:50:06Z","timestamp":1774443006103,"version":"3.50.1"},"reference-count":27,"publisher":"Elsevier BV","issue":"1-2","license":[{"start":{"date-parts":[[2002,8,1]],"date-time":"2002-08-01T00:00:00Z","timestamp":1028160000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Thin Solid Films"],"published-print":{"date-parts":[[2002,8]]},"DOI":"10.1016\/s0040-6090(02)00536-9","type":"journal-article","created":{"date-parts":[[2002,10,9]],"date-time":"2002-10-09T15:39:34Z","timestamp":1034177974000},"page":"123-132","source":"Crossref","is-referenced-by-count":32,"title":["The microstructure and X-ray reflectivity of Mo\/Si multilayers"],"prefix":"10.1016","volume":"415","author":[{"given":"S.S","family":"Andreev","sequence":"first","affiliation":[]},{"given":"S.V","family":"Gaponov","sequence":"additional","affiliation":[]},{"given":"S.A","family":"Gusev","sequence":"additional","affiliation":[]},{"given":"M.N","family":"Haidl","sequence":"additional","affiliation":[]},{"given":"E.B","family":"Kluenkov","sequence":"additional","affiliation":[]},{"given":"K.A","family":"Prokhorov","sequence":"additional","affiliation":[]},{"given":"N.I","family":"Polushkin","sequence":"additional","affiliation":[]},{"given":"E.N","family":"Sadova","sequence":"additional","affiliation":[]},{"given":"N.N","family":"Salashchenko","sequence":"additional","affiliation":[]},{"given":"L.A","family":"Suslov","sequence":"additional","affiliation":[]},{"given":"S.Yu","family":"Zuev","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0040-6090(02)00536-9_BIB1","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1117\/12.309559","volume":"3331","author":"Sweeney","year":"1998","journal-title":"SPIE Proc."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB2","series-title":"Physics of X-Ray Multilayer Structures","author":"Boercker","year":"1992"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB3","series-title":"Silicides for VLSI Applications","author":"Murarka","year":"1983"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB4","series-title":"VLSI Electronics: Microstructure Science, vol. 15","first-page":"77","author":"Singh","year":"1987"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB5","doi-asserted-by":"crossref","first-page":"1422","DOI":"10.1063\/1.338122","volume":"61","author":"Petford-Long","year":"1987","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB6","doi-asserted-by":"crossref","first-page":"73","DOI":"10.1117\/12.23177","volume":"1343","author":"Slaughter","year":"1991","journal-title":"SPIE Proc."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB7","doi-asserted-by":"crossref","first-page":"474","DOI":"10.1063\/1.343425","volume":"65","author":"Holloway","year":"1989","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB8","doi-asserted-by":"crossref","first-page":"383","DOI":"10.1007\/BF00322074","volume":"353","author":"Dietsch","year":"1995","journal-title":"Fresenius J. Anal. Chem."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB9","doi-asserted-by":"crossref","first-page":"2662","DOI":"10.1116\/1.577221","volume":"9","author":"Stearns","year":"1991","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB10","doi-asserted-by":"crossref","first-page":"52","DOI":"10.1016\/0040-6090(95)00603-6","volume":"266","author":"Adams","year":"1995","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB11","doi-asserted-by":"crossref","first-page":"127","DOI":"10.1016\/S0040-6090(98)01451-5","volume":"342","author":"Lohmann","year":"1994","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB12","doi-asserted-by":"crossref","first-page":"2144","DOI":"10.1063\/1.357626","volume":"76","author":"Slaughter","year":"1994","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB13","doi-asserted-by":"crossref","first-page":"187","DOI":"10.1063\/1.350735","volume":"71","author":"Stearns","year":"1992","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB14","doi-asserted-by":"crossref","first-page":"531","DOI":"10.1016\/S0169-4332(97)00699-5","volume":"127\u2013129","author":"Kim","year":"1998","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB15","doi-asserted-by":"crossref","first-page":"5165","DOI":"10.1063\/1.351996","volume":"72","author":"Cheng","year":"1992","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB16","doi-asserted-by":"crossref","first-page":"4072","DOI":"10.1063\/1.361835","volume":"79","author":"Liang","year":"1996","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB17","doi-asserted-by":"crossref","first-page":"L901","DOI":"10.1016\/0039-6028(86)90248-7","volume":"177","author":"Abbati","year":"1986","journal-title":"Surf. Sci."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB18","doi-asserted-by":"crossref","first-page":"5871","DOI":"10.1103\/PhysRevB.41.5871","volume":"41","author":"Meyerheim","year":"1990","journal-title":"Phys. Rev. B"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB19","doi-asserted-by":"crossref","first-page":"3854","DOI":"10.1103\/PhysRevB.44.3854","volume":"44","author":"Slaughter","year":"1991","journal-title":"Phys. Rev. B"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB20","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1016\/0040-6090(91)90139-O","volume":"203","author":"Akhsakhalyan","year":"1991","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB21","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1117\/12.310983","volume":"3406","author":"Andreev","year":"1998","journal-title":"SPIE Proc."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB22","doi-asserted-by":"crossref","first-page":"149","DOI":"10.1016\/0304-3991(91)90116-N","volume":"38","author":"McCaffrey","year":"1991","journal-title":"Ultramicrotomy"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB23_1","first-page":"132","volume":"1","author":"Gusev","year":"2000","journal-title":"Surface"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB24","doi-asserted-by":"crossref","first-page":"4700","DOI":"10.1063\/1.367258","volume":"83","author":"Voorma","year":"1998","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00536-9_BIB25","doi-asserted-by":"crossref","first-page":"2415","DOI":"10.1063\/1.345544","volume":"67","author":"Stearns","year":"1990","journal-title":"J. Appl. Phys."},{"issue":"4","key":"10.1016\/S0040-6090(02)00536-9_BIB26","doi-asserted-by":"crossref","first-page":"2291","DOI":"10.1116\/1.580737","volume":"15","author":"Kim","year":"1997","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0040-6090(02)00536-9_BIB27","doi-asserted-by":"crossref","first-page":"1017","DOI":"10.1063\/1.1381559","volume":"90","author":"Bajt","year":"2001","journal-title":"J. Appl. Phys."}],"container-title":["Thin Solid Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002005369?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002005369?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,4,9]],"date-time":"2019-04-09T14:28:47Z","timestamp":1554820127000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0040609002005369"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2002,8]]},"references-count":27,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[2002,8]]}},"alternative-id":["S0040609002005369"],"URL":"https:\/\/doi.org\/10.1016\/s0040-6090(02)00536-9","relation":{},"ISSN":["0040-6090"],"issn-type":[{"value":"0040-6090","type":"print"}],"subject":[],"published":{"date-parts":[[2002,8]]}}}