{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,5]],"date-time":"2026-02-05T10:35:55Z","timestamp":1770287755164,"version":"3.49.0"},"reference-count":16,"publisher":"Elsevier BV","issue":"1-2","license":[{"start":{"date-parts":[[2002,12,1]],"date-time":"2002-12-01T00:00:00Z","timestamp":1038700800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Thin Solid Films"],"published-print":{"date-parts":[[2002,12]]},"DOI":"10.1016\/s0040-6090(02)00894-5","type":"journal-article","created":{"date-parts":[[2002,12,27]],"date-time":"2002-12-27T21:29:23Z","timestamp":1041024563000},"page":"80-86","source":"Crossref","is-referenced-by-count":16,"title":["Indium\u2013tin-oxide thin film prepared by microwave-enhanced d.c. reactive magnetron sputtering for telecommunication wavelengths"],"prefix":"10.1016","volume":"422","author":[{"given":"Li-Jian","family":"Meng","sequence":"first","affiliation":[]},{"given":"Eddie","family":"Crossan","sequence":"additional","affiliation":[]},{"given":"Andrei","family":"Voronov","sequence":"additional","affiliation":[]},{"given":"Frank","family":"Placido","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0040-6090(02)00894-5_BIB1","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1016\/S0921-5107(01)00583-9","volume":"85","author":"Liu","year":"2001","journal-title":"Mater. Sci. Eng. B"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB2","doi-asserted-by":"crossref","first-page":"11","DOI":"10.1016\/0022-2313(87)90004-4","volume":"39","author":"Meng","year":"1987","journal-title":"J. Lum."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB3","doi-asserted-by":"crossref","first-page":"244","DOI":"10.1016\/S0040-6090(00)01589-3","volume":"383","author":"Ba\u0131\u0301a","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB4","doi-asserted-by":"crossref","first-page":"1270","DOI":"10.1063\/1.343022","volume":"65","author":"Kumar","year":"1989","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB5","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1016\/S0921-5107(98)00209-8","volume":"55","author":"Thilakan","year":"1998","journal-title":"Mater. Sci. Eng. B"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB6","doi-asserted-by":"crossref","first-page":"248","DOI":"10.1016\/S0169-4332(98)00659-X","volume":"142","author":"Thestrup","year":"1999","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB7","doi-asserted-by":"crossref","first-page":"255","DOI":"10.1016\/S0925-3467(98)00089-5","volume":"13","author":"Akinwunmi","year":"1999","journal-title":"Opt. Mater."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB8","doi-asserted-by":"crossref","first-page":"1668","DOI":"10.1116\/1.582404","volume":"18","author":"Meng","year":"2000","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB9","doi-asserted-by":"crossref","first-page":"56","DOI":"10.1016\/S0040-6090(97)00939-5","volume":"322","author":"Meng","year":"1998","journal-title":"Thin solid Films"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB10","doi-asserted-by":"crossref","first-page":"65","DOI":"10.1016\/S0040-6090(96)08892-X","volume":"289","author":"Meng","year":"1996","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB11","doi-asserted-by":"crossref","first-page":"243","DOI":"10.1016\/S0169-4332(97)00224-9","volume":"120","author":"Meng","year":"1997","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB12_1","series-title":"Powder Diffraction File","year":"1967"},{"key":"10.1016\/S0040-6090(02)00894-5_BIB13","doi-asserted-by":"crossref","first-page":"3805","DOI":"10.1063\/1.352887","volume":"73","author":"Shigesato","year":"1993","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB14","doi-asserted-by":"crossref","first-page":"130","DOI":"10.1063\/1.337534","volume":"60","author":"Hamberg","year":"1986","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB15","doi-asserted-by":"crossref","first-page":"45","DOI":"10.1016\/S0257-8972(00)00726-X","volume":"132","author":"George","year":"2000","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0040-6090(02)00894-5_BIB16","doi-asserted-by":"crossref","first-page":"1191","DOI":"10.1016\/0042-207X(94)90080-9","volume":"45","author":"Meng","year":"1994","journal-title":"Vaccum"}],"container-title":["Thin Solid Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002008945?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002008945?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,4,2]],"date-time":"2019-04-02T16:56:38Z","timestamp":1554224198000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0040609002008945"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2002,12]]},"references-count":16,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[2002,12]]}},"alternative-id":["S0040609002008945"],"URL":"https:\/\/doi.org\/10.1016\/s0040-6090(02)00894-5","relation":{},"ISSN":["0040-6090"],"issn-type":[{"value":"0040-6090","type":"print"}],"subject":[],"published":{"date-parts":[[2002,12]]}}}