{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2023,9,14]],"date-time":"2023-09-14T00:09:34Z","timestamp":1694650174228},"reference-count":12,"publisher":"Elsevier BV","issue":"1-2","license":[{"start":{"date-parts":[[2003,3,1]],"date-time":"2003-03-01T00:00:00Z","timestamp":1046476800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Thin Solid Films"],"published-print":{"date-parts":[[2003,3]]},"DOI":"10.1016\/s0040-6090(02)01172-0","type":"journal-article","created":{"date-parts":[[2003,4,7]],"date-time":"2003-04-07T19:40:02Z","timestamp":1049744402000},"page":"6-10","source":"Crossref","is-referenced-by-count":7,"title":["Polymorphous silicon deposited in large area reactor at 13 and 27 MHz"],"prefix":"10.1016","volume":"427","author":[{"given":"H","family":"\u00c1guas","sequence":"first","affiliation":[]},{"given":"P","family":"Roca i Cabarrocas","sequence":"additional","affiliation":[]},{"given":"S","family":"Lebib","sequence":"additional","affiliation":[]},{"given":"V","family":"Silva","sequence":"additional","affiliation":[]},{"given":"E","family":"Fortunato","sequence":"additional","affiliation":[]},{"given":"R","family":"Martins","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0040-6090(02)01172-0_BIB1","doi-asserted-by":"crossref","first-page":"39","DOI":"10.1016\/S0040-6090(01)01656-X","volume":"403\u2013404","author":"Roca i Cabarrocas","year":"2002","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)01172-0_BIB2","doi-asserted-by":"crossref","first-page":"161","DOI":"10.1016\/S0040-6090(00)01596-0","volume":"385","author":"Fontcuberta i Morral","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0040-6090(02)01172-0_BIB3","doi-asserted-by":"crossref","first-page":"690","DOI":"10.1088\/0022-3727\/34\/5\/305","volume":"34","author":"Hadjadj","year":"2001","journal-title":"J. Phys. D: Appl. Phys."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB4","doi-asserted-by":"crossref","first-page":"1303","DOI":"10.1063\/1.361026","volume":"79","author":"Fridman","year":"1996","journal-title":"J. Appl. Phys."},{"issue":"4","key":"10.1016\/S0040-6090(02)01172-0_BIB5","doi-asserted-by":"crossref","first-page":"1546","DOI":"10.1063\/1.365955","volume":"82","author":"Jelenkovic","year":"1997","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB6","unstructured":"S. Lebib, P. Roca i Cabarrocas, Phys. Rev. B, submitted for publication"},{"key":"10.1016\/S0040-6090(02)01172-0_BIB7","doi-asserted-by":"crossref","first-page":"475","DOI":"10.1080\/13642810008209755","volume":"80","author":"\u00c1guas","year":"2000","journal-title":"Phil. Mag. B"},{"key":"10.1016\/S0040-6090(02)01172-0_BIB8","doi-asserted-by":"crossref","first-page":"4301","DOI":"10.1063\/1.1425431","volume":"79","author":"Boufendi","year":"2001","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB9","doi-asserted-by":"crossref","first-page":"371","DOI":"10.1063\/1.118064","volume":"69","author":"Jellison","year":"1996","journal-title":"Appl. Phys. Rev. Lett."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB10","doi-asserted-by":"crossref","first-page":"181","DOI":"10.4028\/www.scientific.net\/SSP.44-46.181","volume":"44\u201346","author":"Heintze","year":"1995","journal-title":"Solid State Phenom."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB11","doi-asserted-by":"crossref","first-page":"97","DOI":"10.4028\/www.scientific.net\/SSP.44-46.97","volume":"44\u201346","author":"Keppner","year":"1995","journal-title":"Solid State Phenom."},{"key":"10.1016\/S0040-6090(02)01172-0_BIB12","series-title":"Hydrogenated Amorphous Silicon","first-page":"234","author":"Street","year":"1991"}],"container-title":["Thin Solid Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002011720?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609002011720?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,23]],"date-time":"2019-03-23T20:59:07Z","timestamp":1553374747000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0040609002011720"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,3]]},"references-count":12,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[2003,3]]}},"alternative-id":["S0040609002011720"],"URL":"https:\/\/doi.org\/10.1016\/s0040-6090(02)01172-0","relation":{},"ISSN":["0040-6090"],"issn-type":[{"value":"0040-6090","type":"print"}],"subject":[],"published":{"date-parts":[[2003,3]]}}}