{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,4]],"date-time":"2022-04-04T04:01:22Z","timestamp":1649044882087},"reference-count":10,"publisher":"Elsevier BV","issue":"1-2","license":[{"start":{"date-parts":[[1999,1,1]],"date-time":"1999-01-01T00:00:00Z","timestamp":915148800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Thin Solid Films"],"published-print":{"date-parts":[[1999,1]]},"DOI":"10.1016\/s0040-6090(98)01177-8","type":"journal-article","created":{"date-parts":[[2002,7,26]],"date-time":"2002-07-26T00:50:19Z","timestamp":1027644619000},"page":"203-207","source":"Crossref","is-referenced-by-count":1,"title":["Ion implantation of microcrystalline silicon for low process temperature top gate thin film transistors"],"prefix":"10.1016","volume":"337","author":[{"given":"V.","family":"Chu","sequence":"first","affiliation":[]},{"given":"H.","family":"Silva","sequence":"additional","affiliation":[]},{"given":"L.M.","family":"Redondo","sequence":"additional","affiliation":[]},{"given":"C.","family":"Jesus","sequence":"additional","affiliation":[]},{"given":"M.F.","family":"Silva","sequence":"additional","affiliation":[]},{"given":"J.C.","family":"Soares","sequence":"additional","affiliation":[]},{"given":"J.P.","family":"Conde","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0040-6090(98)01177-8_BIB1","doi-asserted-by":"crossref","first-page":"7374","DOI":"10.1063\/1.349732","volume":"70","author":"Kakinuma","year":"1991","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB2","doi-asserted-by":"crossref","first-page":"4565","DOI":"10.1143\/JJAP.31.4555","volume":"31","author":"Nagahara","year":"1992","journal-title":"Jpn. J. Appl. Phys."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB3","doi-asserted-by":"crossref","first-page":"639","DOI":"10.1143\/JJAP.33.639","volume":"33","author":"Hsu","year":"1994","journal-title":"Jpn. J. Appl. Phys."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB4","doi-asserted-by":"crossref","first-page":"893","DOI":"10.1557\/PROC-467-893","volume":"467","author":"Froggatt","year":"1997","journal-title":"Mater. Res. Soc. Symp. Proc."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB5","doi-asserted-by":"crossref","first-page":"253","DOI":"10.1063\/1.98464","volume":"51","author":"Yoshida","year":"1987","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB6","doi-asserted-by":"crossref","first-page":"1033","DOI":"10.1063\/1.357847","volume":"76","author":"Wei","year":"1994","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB7","doi-asserted-by":"crossref","first-page":"5247","DOI":"10.1063\/1.321593","volume":"46","author":"Seto","year":"1975","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB8","doi-asserted-by":"crossref","first-page":"419","DOI":"10.1080\/01418638108222107","volume":"43","author":"Muller","year":"1981","journal-title":"Phil. Mag."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB9","doi-asserted-by":"crossref","first-page":"935","DOI":"10.1080\/14786437608221926","volume":"33","author":"Spear","year":"1976","journal-title":"Phil. Mag."},{"key":"10.1016\/S0040-6090(98)01177-8_BIB10","doi-asserted-by":"crossref","first-page":"439","DOI":"10.1080\/13642818008245398","volume":"41","author":"Kalbitzer","year":"1980","journal-title":"Phil. Mag."}],"container-title":["Thin Solid Films"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609098011778?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0040609098011778?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,4,16]],"date-time":"2019-04-16T11:53:40Z","timestamp":1555415620000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0040609098011778"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1999,1]]},"references-count":10,"journal-issue":{"issue":"1-2","published-print":{"date-parts":[[1999,1]]}},"alternative-id":["S0040609098011778"],"URL":"https:\/\/doi.org\/10.1016\/s0040-6090(98)01177-8","relation":{},"ISSN":["0040-6090"],"issn-type":[{"value":"0040-6090","type":"print"}],"subject":[],"published":{"date-parts":[[1999,1]]}}}