{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,30]],"date-time":"2025-09-30T10:52:32Z","timestamp":1759229552285,"version":"3.44.0"},"reference-count":33,"publisher":"Elsevier BV","issue":"1-4","license":[{"start":{"date-parts":[[1996,12,1]],"date-time":"1996-12-01T00:00:00Z","timestamp":849398400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[1996,12,1]],"date-time":"1996-12-01T00:00:00Z","timestamp":849398400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"published-print":{"date-parts":[[1996,12]]},"DOI":"10.1016\/s0168-583x(96)00507-1","type":"journal-article","created":{"date-parts":[[2002,7,25]],"date-time":"2002-07-25T09:05:34Z","timestamp":1027587934000},"page":"190-197","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":7,"title":["Channeled ion beam synthesis: a new technique for forming high-quality rare-earth silicides"],"prefix":"10.1016","volume":"120","author":[{"given":"A.","family":"Vantomme","sequence":"first","affiliation":[]},{"given":"M.F.","family":"Wu","sequence":"additional","affiliation":[]},{"given":"U.","family":"Wahl","sequence":"additional","affiliation":[]},{"given":"J.","family":"De Wachter","sequence":"additional","affiliation":[]},{"given":"S.","family":"Degroote","sequence":"additional","affiliation":[]},{"given":"H.","family":"Pattyn","sequence":"additional","affiliation":[]},{"given":"G.","family":"Langouche","sequence":"additional","affiliation":[]},{"given":"H.","family":"Bender","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0168-583X(96)00507-1_BIB1","doi-asserted-by":"crossref","first-page":"466","DOI":"10.1063\/1.96532","volume":"48","author":"Knapp","year":"1986","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB2","doi-asserted-by":"crossref","first-page":"162","DOI":"10.1016\/0169-4332(89)90532-1","volume":"38","author":"Siegal","year":"1989","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB3","doi-asserted-by":"crossref","first-page":"84","DOI":"10.1063\/1.102392","volume":"55","author":"Duboz","year":"1989","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB4","doi-asserted-by":"crossref","first-page":"890","DOI":"10.1063\/1.339695","volume":"62","author":"Badoz","year":"1987","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB5","doi-asserted-by":"crossref","first-page":"4295","DOI":"10.1063\/1.352191","volume":"72","author":"Sagnes","year":"1992","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB6","doi-asserted-by":"crossref","first-page":"3873","DOI":"10.1063\/1.352899","volume":"73","author":"Unewisse","year":"1993","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB7","first-page":"261","volume":"54","author":"Knapp","year":"1986"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB8","doi-asserted-by":"crossref","first-page":"325","DOI":"10.1016\/0040-6090(90)90428-G","volume":"184","author":"Kaatz","year":"1990","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB9","doi-asserted-by":"crossref","first-page":"594","DOI":"10.1063\/1.91559","volume":"36","author":"Baglin","year":"1980","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB10","doi-asserted-by":"crossref","first-page":"283","DOI":"10.1016\/0040-6090(90)90424-C","volume":"184","author":"Arnaud d'Avitaya","year":"1990","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB11","doi-asserted-by":"crossref","first-page":"95","DOI":"10.1063\/1.97830","volume":"50","author":"White","year":"1987","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB12","doi-asserted-by":"crossref","first-page":"444","DOI":"10.1016\/0168-583X(91)95392-Q","volume":"54","author":"Wu","year":"1991","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB13","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0920-2307(92)90006-M","volume":"8","author":"Mantl","year":"1992","journal-title":"Mater. Sci. Rep."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB14","doi-asserted-by":"crossref","first-page":"444","DOI":"10.1016\/0168-583X(91)95256-D","volume":"59\/60","author":"Golanski","year":"1991","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB15","doi-asserted-by":"crossref","first-page":"3886","DOI":"10.1063\/1.115306","volume":"67","author":"Wu","year":"1995","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB16","doi-asserted-by":"crossref","first-page":"10717","DOI":"10.1103\/PhysRevB.40.10717","volume":"40","author":"Robinson","year":"1989","journal-title":"Phys. Rev. B"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB17","unstructured":"M.T. Robinson, User's guide to MARLOWE V13c."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB18","doi-asserted-by":"crossref","first-page":"383","DOI":"10.1103\/PhysRev.184.383","volume":"184","author":"Sigmund","year":"1969","journal-title":"Phys. Rev."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB19","doi-asserted-by":"crossref","first-page":"6920","DOI":"10.1063\/1.361516","volume":"79","author":"Wu","year":"1996","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB20","doi-asserted-by":"crossref","first-page":"3307","DOI":"10.1063\/1.350950","volume":"71","author":"Lee","year":"1992","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB21","unstructured":"N. Frangis, G. Van Tendello, J. Van Landuyt, P. Muret and T.T.A. Nguyen, J. Alloy and Compounds (submitted)."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB22","doi-asserted-by":"crossref","first-page":"2198","DOI":"10.1063\/1.101517","volume":"54","author":"Arnaud d'Avitaya","year":"1989","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB23","doi-asserted-by":"crossref","first-page":"1748","DOI":"10.1063\/1.109594","volume":"62","author":"Kaatz","year":"1993","journal-title":"Appl. Phys. Lett."},{"volume":"402","year":"1995","author":"Bender","key":"10.1016\/S0168-583X(96)00507-1_BIB24"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB25","unstructured":"M.F. Wu, A. Vantomme, H. Pattyn, G. Langouche, Q. Yang and Q. Wang, J. Appl. Phys., to be published."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB26","first-page":"39","volume":"69","author":"Paine","year":"1986"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB27","doi-asserted-by":"crossref","first-page":"1707","DOI":"10.1063\/1.360268","volume":"78","author":"Wu","year":"1995","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB28","doi-asserted-by":"crossref","first-page":"249","DOI":"10.1063\/1.104704","volume":"58","author":"Moln\u00e1r","year":"1991","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB29","first-page":"537","volume":"146","author":"Vannuffel","year":"1995"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB30","doi-asserted-by":"crossref","first-page":"159","DOI":"10.1016\/0169-4332(96)00039-6","volume":"120","author":"Moln\u00e1r","year":"1996","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB31","first-page":"159","volume":"102","author":"Moln\u00e1r","year":"1996","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(96)00507-1_BIB32","doi-asserted-by":"crossref","first-page":"2474","DOI":"10.1116\/1.575575","volume":"6","author":"Youn","year":"1988","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0168-583X(96)00507-1_BIB33","doi-asserted-by":"crossref","first-page":"3260","DOI":"10.1063\/1.116567","volume":"68","author":"Wu","year":"1996","journal-title":"Appl. Phys. Lett."}],"container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X96005071?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X96005071?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T16:51:44Z","timestamp":1759164704000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0168583X96005071"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1996,12]]},"references-count":33,"journal-issue":{"issue":"1-4","published-print":{"date-parts":[[1996,12]]}},"alternative-id":["S0168583X96005071"],"URL":"https:\/\/doi.org\/10.1016\/s0168-583x(96)00507-1","relation":{},"ISSN":["0168-583X"],"issn-type":[{"type":"print","value":"0168-583X"}],"subject":[],"published":{"date-parts":[[1996,12]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"Channeled ion beam synthesis: a new technique for forming high-quality rare-earth silicides","name":"articletitle","label":"Article Title"},{"value":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/S0168-583X(96)00507-1","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"converted-article","name":"content_type","label":"Content Type"},{"value":"Copyright \u00a9 1996 Published by Elsevier B.V.","name":"copyright","label":"Copyright"}]}}