{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,30]],"date-time":"2025-09-30T00:14:04Z","timestamp":1759191244440,"version":"3.44.0"},"reference-count":19,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[1998,3,1]],"date-time":"1998-03-01T00:00:00Z","timestamp":888710400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[1998,3,1]],"date-time":"1998-03-01T00:00:00Z","timestamp":888710400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"published-print":{"date-parts":[[1998,3]]},"DOI":"10.1016\/s0168-583x(97)00687-3","type":"journal-article","created":{"date-parts":[[2002,7,25]],"date-time":"2002-07-25T20:01:23Z","timestamp":1027627283000},"page":"247-252","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":1,"special_numbering":"C","title":["High precision Rutherford backscattering characterisation of 3-D objects implanted by plasma immersion ion implantation"],"prefix":"10.1016","volume":"136-138","author":[{"given":"N.P.","family":"Barradas","sequence":"first","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0168-583X(97)00687-3_BIB1","doi-asserted-by":"crossref","first-page":"4591","DOI":"10.1063\/1.339055","volume":"62","author":"Conrad","year":"1987","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB2","doi-asserted-by":"crossref","first-page":"2143","DOI":"10.1063\/1.100299","volume":"53","author":"Tendys","year":"1988","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB3","series-title":"Protective Coatings and Thin Films","first-page":"635","author":"G\u00fcnzel","year":"1997"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB4","doi-asserted-by":"crossref","first-page":"270","DOI":"10.1016\/S0168-583X(96)00526-5","volume":"120","author":"Ensinger","year":"1996","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB5","doi-asserted-by":"crossref","first-page":"1918","DOI":"10.1063\/1.115625","volume":"68","author":"Sheridan","year":"1996","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB6","doi-asserted-by":"crossref","first-page":"7616","DOI":"10.1063\/1.357928","volume":"76","author":"Kissick","year":"1994","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB7","doi-asserted-by":"crossref","first-page":"1707","DOI":"10.1063\/1.342942","volume":"65","author":"Conrad","year":"1989","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB8","doi-asserted-by":"crossref","first-page":"255","DOI":"10.1016\/0168-583X(95)01248-6","volume":"112","author":"Hartmann","year":"1996","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB9","doi-asserted-by":"crossref","first-page":"996","DOI":"10.1016\/S0168-583X(97)00046-3","volume":"127\/128","author":"M\u00e4ndl","year":"1997","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB10","doi-asserted-by":"crossref","first-page":"927","DOI":"10.1116\/1.587329","volume":"12","author":"G\u00fcnzel","year":"1994","journal-title":"J. Vac. Sci. Technol. B"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB11","doi-asserted-by":"crossref","first-page":"254","DOI":"10.1002\/(SICI)1096-9918(199704)25:4<254::AID-SIA232>3.0.CO;2-F","volume":"25","author":"Jeynes","year":"1997","journal-title":"Surf. Interface Anal."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB12","doi-asserted-by":"crossref","first-page":"695","DOI":"10.1016\/0042-207X(94)00146-4","volume":"4","author":"Fancey","year":"1995","journal-title":"Vacuum"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB13","doi-asserted-by":"crossref","first-page":"3124","DOI":"10.1557\/JMR.1995.3124","volume":"10","author":"Zheng","year":"1995","journal-title":"J. Mater. Res."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB14","doi-asserted-by":"crossref","first-page":"1094","DOI":"10.1088\/0022-3727\/28\/6\/011","volume":"28","author":"Sheridan","year":"1995","journal-title":"J. Phys. D.: Appl. Phys."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB15","doi-asserted-by":"crossref","first-page":"193","DOI":"10.1016\/0168-583X(92)96010-V","volume":"69","author":"Chakarov","year":"1992","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB16","doi-asserted-by":"crossref","first-page":"1101","DOI":"10.1016\/0042-207X(89)91099-3","volume":"39","author":"Todorov","year":"1989","journal-title":"Vacuum"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB17","doi-asserted-by":"crossref","first-page":"257","DOI":"10.1016\/0029-554X(80)90440-1","volume":"174","author":"Biersack","year":"1980","journal-title":"Nucl. Instr. and Meth."},{"key":"10.1016\/S0168-583X(97)00687-3_BIB18","first-page":"657","volume":"vol. 2","author":"Webb","year":"1992"},{"key":"10.1016\/S0168-583X(97)00687-3_BIB19","first-page":"201","volume":"vol. I","author":"Andersen","year":"1981"}],"container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X97006873?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X97006873?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T17:07:42Z","timestamp":1759165662000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0168583X97006873"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1998,3]]},"references-count":19,"alternative-id":["S0168583X97006873"],"URL":"https:\/\/doi.org\/10.1016\/s0168-583x(97)00687-3","relation":{},"ISSN":["0168-583X"],"issn-type":[{"type":"print","value":"0168-583X"}],"subject":[],"published":{"date-parts":[[1998,3]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"High precision Rutherford backscattering characterisation of 3-D objects implanted by plasma immersion ion implantation","name":"articletitle","label":"Article Title"},{"value":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/S0168-583X(97)00687-3","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"converted-article","name":"content_type","label":"Content Type"},{"value":"Copyright \u00a9 1998 Published by Elsevier B.V.","name":"copyright","label":"Copyright"}]}}