{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,30]],"date-time":"2025-09-30T00:13:55Z","timestamp":1759191235577,"version":"3.44.0"},"reference-count":20,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[1998,3,1]],"date-time":"1998-03-01T00:00:00Z","timestamp":888710400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"},{"start":{"date-parts":[[1998,3,1]],"date-time":"1998-03-01T00:00:00Z","timestamp":888710400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/legal\/tdmrep-license"}],"content-domain":{"domain":["elsevier.com","sciencedirect.com"],"crossmark-restriction":true},"short-container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"published-print":{"date-parts":[[1998,3]]},"DOI":"10.1016\/s0168-583x(97)00719-2","type":"journal-article","created":{"date-parts":[[2002,7,25]],"date-time":"2002-07-25T19:04:59Z","timestamp":1027623899000},"page":"471-477","update-policy":"https:\/\/doi.org\/10.1016\/elsevier_cm_policy","source":"Crossref","is-referenced-by-count":1,"special_numbering":"C","title":["Backscattering\/channeling study of high-dose rare-earth implants into Si"],"prefix":"10.1016","volume":"136-138","author":[{"given":"A.","family":"Vantomme","sequence":"first","affiliation":[]},{"given":"U.","family":"Wahl","sequence":"additional","affiliation":[]},{"given":"M.F.","family":"Wu","sequence":"additional","affiliation":[]},{"given":"S.","family":"Hogg","sequence":"additional","affiliation":[]},{"given":"H.","family":"Pattyn","sequence":"additional","affiliation":[]},{"given":"G.","family":"Langouche","sequence":"additional","affiliation":[]},{"given":"H.","family":"Bender","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0168-583X(97)00719-2_BIB1","doi-asserted-by":"crossref","first-page":"466","DOI":"10.1063\/1.96532","volume":"48","author":"Knapp","year":"1986","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB2","doi-asserted-by":"crossref","first-page":"162","DOI":"10.1016\/0169-4332(89)90532-1","volume":"38","author":"Siegal","year":"1989","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB3","doi-asserted-by":"crossref","first-page":"84","DOI":"10.1063\/1.102392","volume":"55","author":"Duboz","year":"1989","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB4","first-page":"261","volume":"54","author":"Knapp","year":"1986"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB5","doi-asserted-by":"crossref","first-page":"325","DOI":"10.1016\/0040-6090(90)90428-G","volume":"184","author":"Kaatz","year":"1990","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB6","doi-asserted-by":"crossref","first-page":"594","DOI":"10.1063\/1.91559","volume":"36","author":"Baglin","year":"1980","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB7","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0920-2307(92)90006-M","volume":"8","author":"Mantl","year":"1992","journal-title":"Mater. Sci. Rep."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB8","doi-asserted-by":"crossref","first-page":"444","DOI":"10.1016\/0168-583X(91)95256-D","volume":"59\/60","author":"Golanski","year":"1991","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB9","doi-asserted-by":"crossref","first-page":"3886","DOI":"10.1063\/1.115306","volume":"67","author":"Wu","year":"1995","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB10","doi-asserted-by":"crossref","first-page":"10717","DOI":"10.1103\/PhysRevB.40.10717","volume":"40","author":"Robinson","year":"1989","journal-title":"Phys. Rev. B"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB11","unstructured":"M.T. Robinson, User's guide to MARLOWE V13c."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB12","doi-asserted-by":"crossref","first-page":"311","DOI":"10.1016\/S0168-583X(96)00946-9","volume":"127\/128","author":"Wahl","year":"1997","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB13","first-page":"499","volume":"402","author":"Bender","year":"1995"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB14","doi-asserted-by":"crossref","first-page":"8603","DOI":"10.1103\/PhysRevB.41.8603","volume":"41","author":"Bai","year":"1990","journal-title":"Phys. Rev. B"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB15","first-page":"14","volume":"34","author":"Lindhard","year":"1965","journal-title":"K. Dan. Vidensk. Selsk. Mat. Fys. Medd."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB16","doi-asserted-by":"crossref","first-page":"1527","DOI":"10.1103\/PhysRevB.3.1527","volume":"3","author":"Barrett","year":"1971","journal-title":"Phys. Rev."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB17","doi-asserted-by":"crossref","first-page":"3393","DOI":"10.1063\/1.345351","volume":"67","author":"Guizetti","year":"1990","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0168-583X(97)00719-2_BIB18","doi-asserted-by":"crossref","first-page":"471","DOI":"10.1016\/0168-583X(87)90058-9","volume":"29","author":"Smulders","year":"1987","journal-title":"Nucl. Instr. and Meth. B"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB19","first-page":"281","volume":"355","author":"Lohmeier","year":"1995"},{"key":"10.1016\/S0168-583X(97)00719-2_BIB20","doi-asserted-by":"crossref","first-page":"5713","DOI":"10.1063\/1.363623","volume":"80","author":"Wu","year":"1996","journal-title":"J. Appl. Phys."}],"container-title":["Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X97007192?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0168583X97007192?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2025,9,29]],"date-time":"2025-09-29T17:08:18Z","timestamp":1759165698000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0168583X97007192"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1998,3]]},"references-count":20,"alternative-id":["S0168583X97007192"],"URL":"https:\/\/doi.org\/10.1016\/s0168-583x(97)00719-2","relation":{},"ISSN":["0168-583X"],"issn-type":[{"type":"print","value":"0168-583X"}],"subject":[],"published":{"date-parts":[[1998,3]]},"assertion":[{"value":"Elsevier","name":"publisher","label":"This article is maintained by"},{"value":"Backscattering\/channeling study of high-dose rare-earth implants into Si","name":"articletitle","label":"Article Title"},{"value":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","name":"journaltitle","label":"Journal Title"},{"value":"https:\/\/doi.org\/10.1016\/S0168-583X(97)00719-2","name":"articlelink","label":"CrossRef DOI link to publisher maintained version"},{"value":"converted-article","name":"content_type","label":"Content Type"},{"value":"Copyright \u00a9 1998 Published by Elsevier B.V.","name":"copyright","label":"Copyright"}]}}