{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,2]],"date-time":"2025-11-02T19:46:53Z","timestamp":1762112813856},"reference-count":31,"publisher":"Elsevier BV","issue":"1","license":[{"start":{"date-parts":[[2003,3,1]],"date-time":"2003-03-01T00:00:00Z","timestamp":1046476800000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Surface and Coatings Technology"],"published-print":{"date-parts":[[2003,3]]},"DOI":"10.1016\/s0257-8972(02)00767-3","type":"journal-article","created":{"date-parts":[[2002,12,28]],"date-time":"2002-12-28T15:33:19Z","timestamp":1041089599000},"page":"44-50","source":"Crossref","is-referenced-by-count":52,"title":["Annealing effect on ITO thin films prepared by microwave-enhanced dc reactive magnetron sputtering for telecommunication applications"],"prefix":"10.1016","volume":"166","author":[{"given":"Li-Jian","family":"Meng","sequence":"first","affiliation":[]},{"given":"Frank","family":"Placido","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0257-8972(02)00767-3_BIB1","doi-asserted-by":"crossref","first-page":"49","DOI":"10.1016\/S0040-6090(01)01489-4","volume":"397","author":"Park","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB2","doi-asserted-by":"crossref","first-page":"11","DOI":"10.1016\/0022-2313(87)90004-4","volume":"39","author":"Meng","year":"1987","journal-title":"J. Lum."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB3","doi-asserted-by":"crossref","first-page":"114","DOI":"10.1016\/S0921-5107(01)00541-4","volume":"85","author":"Zhu","year":"2001","journal-title":"Mater. Sci. Eng. B"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB4","doi-asserted-by":"crossref","first-page":"665","DOI":"10.1016\/S0038-1101(98)00306-2","volume":"43","author":"Tsai","year":"1999","journal-title":"Solid State Electron."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB5","series-title":"45th Annual Technical Conference Proceedings of Society of Vacuum Coaters","author":"Voronov","year":"2002"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB6","doi-asserted-by":"crossref","first-page":"R123","DOI":"10.1063\/1.337534","volume":"60","author":"Hamberg","year":"1986","journal-title":"J. Appl. Phys."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB7","doi-asserted-by":"crossref","first-page":"163","DOI":"10.1016\/S0257-8972(98)00727-0","volume":"111","author":"Bhagwat","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB8","doi-asserted-by":"crossref","first-page":"110","DOI":"10.1016\/S0921-5107(00)00477-3","volume":"77","author":"Terzini","year":"2000","journal-title":"Mater. Sci. Eng. B"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB9","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1016\/S0040-6090(00)01132-9","volume":"373","author":"Minami","year":"2000","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB10","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1016\/S0040-6090(01)00777-5","volume":"386","author":"Lee","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB11","doi-asserted-by":"crossref","first-page":"91","DOI":"10.1016\/S0040-6090(01)01013-6","volume":"392","author":"Mergel","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB12","doi-asserted-by":"crossref","first-page":"34","DOI":"10.1016\/S0040-6090(01)00820-3","volume":"388","author":"Thilakan","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB13","doi-asserted-by":"crossref","first-page":"673","DOI":"10.1016\/0042-207X(94)00150-2","volume":"46","author":"Meng","year":"1995","journal-title":"Vacuum"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB14","doi-asserted-by":"crossref","first-page":"151","DOI":"10.1016\/S0040-6090(97)00050-3","volume":"303","author":"Meng","year":"1997","journal-title":"Thin Solid Films"},{"issue":"4","key":"10.1016\/S0257-8972(02)00767-3_BIB15","doi-asserted-by":"crossref","first-page":"1668","DOI":"10.1116\/1.582404","volume":"18","author":"Meng","year":"2000","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB16","series-title":"45th Annual Technical Conference Proceedings of Society of Vacuum Coaters","author":"Voronov","year":"2002"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB17","doi-asserted-by":"crossref","first-page":"543","DOI":"10.1016\/S0169-4332(01)00145-3","volume":"175\/176","author":"Postava","year":"2001","journal-title":"Appl. Surf. Sci."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB18","doi-asserted-by":"crossref","first-page":"1968","DOI":"10.1016\/S0925-9635(01)00387-9","volume":"10","author":"Gupta","year":"2001","journal-title":"Diamond Relat. Mater."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB19","doi-asserted-by":"crossref","first-page":"283","DOI":"10.1016\/S0040-6090(00)01881-2","volume":"388","author":"Franke","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB20","series-title":"Luminescence of Inorganic Solids","author":"Curie","year":"1978"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB21","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1016\/0040-6090(70)90052-0","volume":"5","author":"Heitmann","year":"1970","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB22","doi-asserted-by":"crossref","first-page":"1230","DOI":"10.1116\/1.576260","volume":"7","author":"Howson","year":"1989","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB23","doi-asserted-by":"crossref","first-page":"262","DOI":"10.1016\/S0257-8972(97)00152-7","volume":"96","author":"Schneider","year":"1997","journal-title":"Surf. Coatings Technol."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB24","doi-asserted-by":"crossref","first-page":"1433","DOI":"10.1016\/0042-207X(95)00166-2","volume":"46","author":"Brarankova","year":"1995","journal-title":"Vacuum"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB25","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/S0040-6090(99)00081-4","volume":"351","author":"Howson","year":"1999","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB26","first-page":"45","volume":"3","author":"Nadel","year":"2001","journal-title":"Int. Glass Rev."},{"key":"10.1016\/S0257-8972(02)00767-3_BIB27","doi-asserted-by":"crossref","first-page":"469","DOI":"10.1016\/0040-6090(80)90533-7","volume":"72","author":"Smith","year":"1980","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB28","doi-asserted-by":"crossref","first-page":"91","DOI":"10.1016\/0042-207X(95)00199-9","volume":"47","author":"Uthanna","year":"1996","journal-title":"Vacuum"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB29","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1016\/0040-6090(93)90737-A","volume":"223","author":"Karasawa","year":"1993","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB30","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0040-6090(93)90632-Y","volume":"236","author":"Davis","year":"1993","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(02)00767-3_BIB31","doi-asserted-by":"crossref","first-page":"673","DOI":"10.1016\/0042-207X(94)00150-2","volume":"46","author":"Meng","year":"1995","journal-title":"Vacuum"}],"container-title":["Surface and Coatings Technology"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0257897202007673?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S0257897202007673?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,30]],"date-time":"2019-03-30T17:28:10Z","timestamp":1553966890000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S0257897202007673"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,3]]},"references-count":31,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2003,3]]}},"alternative-id":["S0257897202007673"],"URL":"https:\/\/doi.org\/10.1016\/s0257-8972(02)00767-3","relation":{},"ISSN":["0257-8972"],"issn-type":[{"value":"0257-8972","type":"print"}],"subject":[],"published":{"date-parts":[[2003,3]]}}}