{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,19]],"date-time":"2026-01-19T13:14:09Z","timestamp":1768828449442,"version":"3.49.0"},"reference-count":18,"publisher":"Elsevier BV","license":[{"start":{"date-parts":[[2003,9,1]],"date-time":"2003-09-01T00:00:00Z","timestamp":1062374400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Surface and Coatings Technology"],"published-print":{"date-parts":[[2003,9]]},"DOI":"10.1016\/s0257-8972(03)00416-x","type":"journal-article","created":{"date-parts":[[2003,4,25]],"date-time":"2003-04-25T09:45:10Z","timestamp":1051263910000},"page":"197-203","source":"Crossref","is-referenced-by-count":73,"special_numbering":"C","title":["Preparation of magnetron sputtered TiNxOy thin films"],"prefix":"10.1016","volume":"174-175","author":[{"given":"F.","family":"Vaz","sequence":"first","affiliation":[]},{"given":"P.","family":"Cerqueira","sequence":"additional","affiliation":[]},{"given":"L.","family":"Rebouta","sequence":"additional","affiliation":[]},{"given":"S.M.C.","family":"Nascimento","sequence":"additional","affiliation":[]},{"given":"E.","family":"Alves","sequence":"additional","affiliation":[]},{"given":"Ph.","family":"Goudeau","sequence":"additional","affiliation":[]},{"given":"J.P.","family":"Rivi\u00e8re","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S0257-8972(03)00416-X_BIB1","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1016\/S0167-5729(99)00013-8","volume":"38","author":"Fraunchy","year":"2000","journal-title":"Surf. Sci. Rep."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB2","series-title":"The Materials Science of Thin Films","author":"Ohring","year":"1992"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB3","doi-asserted-by":"crossref","first-page":"108","DOI":"10.1016\/S0257-8972(98)00791-9","volume":"112","author":"Budke","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB4","doi-asserted-by":"crossref","first-page":"507","DOI":"10.1016\/S0257-8972(89)80012-X","volume":"39\/40","author":"Zega","year":"1989","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB5","doi-asserted-by":"crossref","first-page":"1281","DOI":"10.1016\/0042-207X(95)00015-1","volume":"46","author":"Mitterer","year":"1995","journal-title":"Vacuum"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB6","doi-asserted-by":"crossref","first-page":"728","DOI":"10.1016\/S0257-8972(99)00366-7","volume":"120\u2013121","author":"Constantin","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB7","doi-asserted-by":"crossref","first-page":"1225","DOI":"10.1063\/1.113244","volume":"66","author":"Bhat","year":"1995","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB8","doi-asserted-by":"crossref","first-page":"3495","DOI":"10.1063\/1.113775","volume":"66","author":"Hattangady","year":"1995","journal-title":"Appl. Phys. Lett."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB9","doi-asserted-by":"crossref","first-page":"15","DOI":"10.1109\/16.477588","volume":"43","author":"Hill","year":"1996","journal-title":"IEEE Trans. Electron Devices"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB10","doi-asserted-by":"crossref","first-page":"344","DOI":"10.1016\/0168-583X(85)90762-1","volume":"B9","author":"Doolittle","year":"1985","journal-title":"Nucl. Inst. Meth."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB11","unstructured":"Colorimetry, CIE Publication, 15, 1971 (Comission Internationale de L\u2019\u00c9clairage)"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB12","unstructured":"Recommendations on Uniform Color Spaces, Difference\u2013difference equations, psychometric color terms, CIE Publication, 15 (1978) Suppl. No. 2\u201370 (Comission Internationale de L\u2019\u00c9clairage)"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB13","doi-asserted-by":"crossref","first-page":"305","DOI":"10.1016\/S0040-6090(96)09507-7","volume":"300","author":"Imai","year":"1997","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB14","unstructured":"F. Vaz, Ph.D. Thesis, Minho University, Portugal, 2000"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB15","doi-asserted-by":"crossref","first-page":"391","DOI":"10.1016\/S0040-6090(01)01348-7","volume":"398\u2013399","author":"Carvalho","year":"2001","journal-title":"Thin Solid Films"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB16","unstructured":"Powder Diffraction File of the International Center for Diffraction Data, PDF-ICDD cards"},{"key":"10.1016\/S0257-8972(03)00416-X_BIB17","doi-asserted-by":"crossref","first-page":"274","DOI":"10.1016\/S0257-8972(01)01395-0","volume":"146\u2013147","author":"Vaz","year":"2001","journal-title":"Surf. Coat. Technol."},{"key":"10.1016\/S0257-8972(03)00416-X_BIB18","doi-asserted-by":"crossref","first-page":"115","DOI":"10.1016\/S0254-0584(99)00142-X","volume":"62","author":"Nah","year":"2000","journal-title":"Mater. Chem. Phys."}],"container-title":["Surface and Coatings Technology"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S025789720300416X?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S025789720300416X?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,21]],"date-time":"2019-03-21T20:55:01Z","timestamp":1553201701000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S025789720300416X"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,9]]},"references-count":18,"alternative-id":["S025789720300416X"],"URL":"https:\/\/doi.org\/10.1016\/s0257-8972(03)00416-x","relation":{},"ISSN":["0257-8972"],"issn-type":[{"value":"0257-8972","type":"print"}],"subject":[],"published":{"date-parts":[[2003,9]]}}}