{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,1,25]],"date-time":"2024-01-25T21:44:33Z","timestamp":1706219073922},"reference-count":6,"publisher":"Elsevier BV","issue":"1-3","license":[{"start":{"date-parts":[[2001,2,1]],"date-time":"2001-02-01T00:00:00Z","timestamp":980985600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.elsevier.com\/tdm\/userlicense\/1.0\/"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Materials Science in Semiconductor Processing"],"published-print":{"date-parts":[[2001,2]]},"DOI":"10.1016\/s1369-8001(00)00106-2","type":"journal-article","created":{"date-parts":[[2002,10,14]],"date-time":"2002-10-14T16:48:57Z","timestamp":1034614137000},"page":"319-321","source":"Crossref","is-referenced-by-count":3,"title":["Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO2 thin films"],"prefix":"10.1016","volume":"4","author":[{"given":"Hugo","family":"\u00c1guas","sequence":"first","affiliation":[]},{"given":"Ant\u00f3nio","family":"Marques","sequence":"additional","affiliation":[]},{"given":"Rodrigo","family":"Martins","sequence":"additional","affiliation":[]},{"given":"Elvira","family":"Fortunato","sequence":"additional","affiliation":[]}],"member":"78","reference":[{"key":"10.1016\/S1369-8001(00)00106-2_BIB1","doi-asserted-by":"crossref","first-page":"475","DOI":"10.1080\/13642810008209755","volume":"80","author":"\u00c1guas","year":"2000","journal-title":"Philos Mag B"},{"key":"10.1016\/S1369-8001(00)00106-2_BIB2","doi-asserted-by":"crossref","first-page":"171","DOI":"10.1016\/S0040-6090(98)01393-5","volume":"337","author":"Ba\u0131\u0301a","year":"1999","journal-title":"Thin Solid Films"},{"key":"10.1016\/S1369-8001(00)00106-2_BIB3","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/S0040-6090(98)00807-4","volume":"333","author":"Nunes","year":"1998","journal-title":"Thin Solid Films"},{"key":"10.1016\/S1369-8001(00)00106-2_BIB4","doi-asserted-by":"crossref","first-page":"L71","DOI":"10.1016\/0040-6090(85)90065-3","volume":"129","author":"Apparao","year":"1985","journal-title":"Thin Solid Films"},{"key":"10.1016\/S1369-8001(00)00106-2_BIB5","unstructured":"Bass M. HandBook of optics. Optical Society of America, 1995."},{"key":"10.1016\/S1369-8001(00)00106-2_BIB6","doi-asserted-by":"crossref","first-page":"169","DOI":"10.1016\/0040-6090(80)90345-4","volume":"73","author":"Pawlewicz","year":"1980","journal-title":"Thin Solid Films"}],"container-title":["Materials Science in Semiconductor Processing"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S1369800100001062?httpAccept=text\/xml","content-type":"text\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/api.elsevier.com\/content\/article\/PII:S1369800100001062?httpAccept=text\/plain","content-type":"text\/plain","content-version":"vor","intended-application":"text-mining"}],"deposited":{"date-parts":[[2019,3,14]],"date-time":"2019-03-14T18:37:09Z","timestamp":1552588629000},"score":1,"resource":{"primary":{"URL":"https:\/\/linkinghub.elsevier.com\/retrieve\/pii\/S1369800100001062"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2001,2]]},"references-count":6,"journal-issue":{"issue":"1-3","published-print":{"date-parts":[[2001,2]]}},"alternative-id":["S1369800100001062"],"URL":"https:\/\/doi.org\/10.1016\/s1369-8001(00)00106-2","relation":{},"ISSN":["1369-8001"],"issn-type":[{"value":"1369-8001","type":"print"}],"subject":[],"published":{"date-parts":[[2001,2]]}}}