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In orderto show the feasibility, the fabrication and operation ofarrayed microactuators for conveyors are described. One uses thermally driven cantilevers and the other uses controlled air flow from micronozzles to carry flat objects.<\/jats:p>","DOI":"10.1017\/s0263574700019962","type":"journal-article","created":{"date-parts":[[2009,3,10]],"date-time":"2009-03-10T13:09:54Z","timestamp":1236690594000},"page":"487-492","source":"Crossref","is-referenced-by-count":18,"title":["Group work of distributed microactuators"],"prefix":"10.1017","volume":"14","author":[{"given":"Hiroyuki","family":"Fujita","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Manabu","family":"Ataka","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Satoshi","family":"Konishi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"56","published-online":{"date-parts":[[2009,3,9]]},"reference":[{"key":"S0263574700019962_ref015","doi-asserted-by":"publisher","DOI":"10.1109\/16.2528"},{"key":"S0263574700019962_ref012","doi-asserted-by":"publisher","DOI":"10.1109\/84.273089"},{"key":"S0263574700019962_ref005","doi-asserted-by":"publisher","DOI":"10.1016\/0250-6874(89)87100-8"},{"key":"S0263574700019962_ref009","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.1993.296931"},{"key":"S0263574700019962_ref004","doi-asserted-by":"publisher","DOI":"10.1109\/16.2522"},{"key":"S0263574700019962_ref014","first-page":"219","volume-title":"Proc. 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