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Once measured, PSFs can be used with two or more low-resolution images of a selected area to create a high-resolution reconstructed image of that area. As an example, a 4\u00d7 improvement in resolution for images is demonstrated for a fine gold particle sample. Since thermionic source instruments have high beam currents associated with large probe sizes, use of this approach implies that high-resolution images can be produced rapidly if the probe diameter is less of a limiting factor. Additionally, very accurate determination of the PSFs can lead to a better understanding of instrument performance as exemplified by very accurate measurement of the beam shape and therefore the degree of astigmatism.<\/jats:p>","DOI":"10.1017\/s1431927613013688","type":"journal-article","created":{"date-parts":[[2013,10,14]],"date-time":"2013-10-14T13:45:27Z","timestamp":1381758327000},"page":"78-89","source":"Crossref","is-referenced-by-count":12,"title":["Improving Scanning Electron Microscope Resolution for Near Planar Samples Through the Use of Image Restoration"],"prefix":"10.1093","volume":"20","author":[{"given":"Eric","family":"Lifshin","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yudhishthir P.","family":"Kandel","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Richard L.","family":"Moore","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"286","published-online":{"date-parts":[[2013,10,14]]},"reference":[{"key":"S1431927613013688_ref010","doi-asserted-by":"publisher","DOI":"10.1117\/12.386444"},{"key":"S1431927613013688_ref005","first-page":"132","article-title":"Measuring the size and intensity distribution of sem beam spot","volume":"3332","author":"Goldenshtein","year":"1998","journal-title":"SPIE"},{"key":"S1431927613013688_ref024","doi-asserted-by":"publisher","DOI":"10.1364\/JOSAA.24.000608"},{"key":"S1431927613013688_ref019","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-38967-5"},{"key":"S1431927613013688_ref026","doi-asserted-by":"crossref","unstructured":"Vanderlinde W.E. & Caron J.N. 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