{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2023,2,15]],"date-time":"2023-02-15T05:23:19Z","timestamp":1676438599318},"reference-count":0,"publisher":"Oxford University Press (OUP)","issue":"S3","license":[{"start":{"date-parts":[[2008,10,3]],"date-time":"2008-10-03T00:00:00Z","timestamp":1222992000000},"content-version":"unspecified","delay-in-days":32,"URL":"https:\/\/www.cambridge.org\/core\/terms"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Microsc Microanal"],"published-print":{"date-parts":[[2008,9]]},"abstract":"<jats:p>This paper focus on the analysis of the interfaces of nanocomposite TiAlN\/Mo multilayers by high-resolution transmission electron microscopy (HRTEM). These thin films were deposited by reactive magnetron sputtering, with modulation periods below 7 nm. The structural disorder at the interfaces was probed by the analysis of the X-ray diffraction data, and afterwards correlated with the TEM observations on the cross-sections of the TiAlN\/Mo multilayers. For specific deposition conditions, these structures can be prepared with relatively planar interfaces, revealing layer-by-layer growth. For modulation periods below 3 nm the intermixing acts a major role in the degradation of the multilayer chemical modulation.<\/jats:p>","DOI":"10.1017\/s1431927608089204","type":"journal-article","created":{"date-parts":[[2008,10,3]],"date-time":"2008-10-03T11:24:08Z","timestamp":1223033048000},"page":"1-4","source":"Crossref","is-referenced-by-count":2,"title":["Transmission electron microscopy analysis of the interfaces of TiAlN\/Mo multilayers"],"prefix":"10.1093","volume":"14","author":[{"given":"C.J.","family":"Tavares","sequence":"first","affiliation":[]},{"given":"L.","family":"Rebouta","sequence":"additional","affiliation":[]},{"given":"J.P.","family":"Rivi\u00e8re","sequence":"additional","affiliation":[]},{"given":"M.F.","family":"Denanot","sequence":"additional","affiliation":[]}],"member":"286","published-online":{"date-parts":[[2008,10,3]]},"container-title":["Microscopy and Microanalysis"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.cambridge.org\/core\/services\/aop-cambridge-core\/content\/view\/S1431927608089204","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,2,14]],"date-time":"2023-02-14T20:58:56Z","timestamp":1676408336000},"score":1,"resource":{"primary":{"URL":"https:\/\/academic.oup.com\/mam\/article\/14\/S3\/1\/6919787"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,9]]},"references-count":0,"journal-issue":{"issue":"S3","published-print":{"date-parts":[[2008,9]]}},"alternative-id":["S1431927608089204"],"URL":"https:\/\/doi.org\/10.1017\/s1431927608089204","relation":{},"ISSN":["1431-9276","1435-8115"],"issn-type":[{"value":"1431-9276","type":"print"},{"value":"1435-8115","type":"electronic"}],"subject":[],"published":{"date-parts":[[2008,9]]}}}