{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,11,10]],"date-time":"2026-11-10T19:05:06Z","timestamp":1794337506721,"version":"4.9.0"},"reference-count":346,"publisher":"American Chemical Society (ACS)","issue":"9","license":[{"start":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T00:00:00Z","timestamp":1776124800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T00:00:00Z","timestamp":1776124800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"},{"start":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T00:00:00Z","timestamp":1776124800000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-045"}],"funder":[{"DOI":"10.13039\/100017535","name":"Energy Frontier Research Centers","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100017535","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100007231","name":"Cornell University","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100007231","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100018058","name":"SK Hynix","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100018058","id-type":"DOI","asserted-by":"publisher"}]},{"name":"Qnity Electronics, Inc."}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Chem. Rev."],"published-print":{"date-parts":[[2026,5,13]]},"DOI":"10.1021\/acs.chemrev.5c01043","type":"journal-article","created":{"date-parts":[[2026,4,14]],"date-time":"2026-04-14T17:52:11Z","timestamp":1776189131000},"page":"5444-5489","source":"Crossref","is-referenced-by-count":7,"title":["Advancing EUV Patterning: Innovations in Resist Platforms, Patterning Strategies, and Computational Approaches"],"prefix":"10.1021","volume":"126","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-8683-6754","authenticated-orcid":true,"given":"Madan Rajendra","family":"Biradar","sequence":"first","affiliation":[{"name":"Department of Materials Science and Engineering","place":["Ithaca, United States"]},{"name":"Cornell University","place":["Ithaca, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Gokhan","family":"Sagdic","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering","place":["Ithaca, United States"]},{"name":"Cornell University","place":["Ithaca, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0713-8737","authenticated-orcid":true,"given":"Chenyun","family":"Yuan","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering","place":["Ithaca, United States"]},{"name":"Cornell University","place":["Ithaca, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0009-2506-1196","authenticated-orcid":true,"given":"Rika","family":"Marui","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering","place":["Ithaca, United States"]},{"name":"Cornell University","place":["Ithaca, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3805-3314","authenticated-orcid":true,"given":"Christopher Kemper","family":"Ober","sequence":"additional","affiliation":[{"name":"Department of Materials Science and Engineering","place":["Ithaca, United States"]},{"name":"Cornell University","place":["Ithaca, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2026,4,14]]},"reference":[{"key":"ref1\/cit1","unstructured":"Bardeen, J.; Summit; Brattain, W. H. Three-Electrode Circuit Element Utilizing Semiconductive Materials. U.S. Patent 2,524,035, 1950."},{"key":"ref2\/cit2","unstructured":"Shockley, W. Semiconductor Amplifier. U.S. Patent 2,502,488, 1950."},{"key":"ref3\/cit3","unstructured":"Kilby, J. S. Miniaturized Electronic Circuits. U.S. Patent 3,138,743, 1964."},{"key":"ref4\/cit4","first-page":"166","volume":"40","author":"Kaplan M.","year":"1979","journal-title":"RCA Rev."},{"key":"ref5\/cit5","doi-asserted-by":"crossref","unstructured":"Dammel, R. R.\n                      Diazonaphthoquinone-based Resists\n                      . SPIE press, TT11, 216, 1993, ISBN: 9780819410191.","DOI":"10.1117\/3.2265072"},{"key":"ref6\/cit6","doi-asserted-by":"crossref","first-page":"327","DOI":"10.1201\/9781315117171-7","volume-title":"Microlithography","author":"Ueno T.","year":"2020","edition":"3"},{"key":"ref7\/cit7","unstructured":"Ito, H.; Willson, C. G.; Fr\u00e9chet, J. M. J. Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone. U.S. Patent 4,491,628, 1985."},{"key":"ref8\/cit8","doi-asserted-by":"publisher","DOI":"10.1147\/rd.411.0095"},{"key":"ref9\/cit9","doi-asserted-by":"publisher","DOI":"10.1021\/cm010789s"},{"key":"ref10\/cit10","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200501802"},{"key":"ref11\/cit11","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.64.241102"},{"key":"ref12\/cit12","doi-asserted-by":"publisher","DOI":"10.1117\/1.jmm.17.4.041002"},{"key":"ref13\/cit13","doi-asserted-by":"publisher","DOI":"10.1117\/1.3631753"},{"key":"ref14\/cit14","doi-asserted-by":"publisher","DOI":"10.1080\/08940886.2019.1634431"},{"key":"ref15\/cit15","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.26.625"},{"key":"ref16\/cit16","author":"Mack C. A.","year":"2025","journal-title":"EE Times"},{"key":"ref17\/cit17","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.49.030001"},{"key":"ref18\/cit18","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.34.99"},{"key":"ref19\/cit19","doi-asserted-by":"publisher","DOI":"10.1039\/D5TC00441A"},{"key":"ref20\/cit20","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.3c05884"},{"key":"ref21\/cit21","doi-asserted-by":"publisher","DOI":"10.1016\/j.cis.2024.103197"},{"key":"ref22\/cit22","doi-asserted-by":"publisher","DOI":"10.1016\/j.mattod.2023.06.005"},{"key":"ref23\/cit23","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.17.2.023505"},{"key":"ref24\/cit24","doi-asserted-by":"publisher","DOI":"10.1063\/1.4981815"},{"key":"ref25\/cit25","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.20.1.014603"},{"key":"ref26\/cit26","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.2c01444"},{"key":"ref27\/cit27","doi-asserted-by":"publisher","DOI":"10.1117\/12.2281449"},{"key":"ref28\/cit28","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.4.043511"},{"key":"ref29\/cit29","doi-asserted-by":"publisher","DOI":"10.35848\/1347-4065\/ac5534"},{"key":"ref30\/cit30","doi-asserted-by":"publisher","DOI":"10.1007\/b97574"},{"key":"ref31\/cit31","doi-asserted-by":"publisher","DOI":"10.1021\/cr980003i"},{"key":"ref32\/cit32","doi-asserted-by":"publisher","DOI":"10.1116\/1.586606"},{"key":"ref33\/cit33","doi-asserted-by":"publisher","DOI":"10.1116\/1.1813463"},{"key":"ref34\/cit34","doi-asserted-by":"publisher","DOI":"10.1021\/cm970505x"},{"key":"ref35\/cit35","doi-asserted-by":"publisher","DOI":"10.1021\/cr900244n"},{"key":"ref36\/cit36","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.20.751"},{"key":"ref37\/cit37","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.24.179"},{"key":"ref38\/cit38","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.18.737"},{"key":"ref39\/cit39","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.24.185"},{"key":"ref40\/cit40","doi-asserted-by":"publisher","DOI":"10.1021\/acsmacrolett.5c00320"},{"key":"ref41\/cit41","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.25.597"},{"key":"ref42\/cit42","doi-asserted-by":"publisher","DOI":"10.1117\/12.2046133"},{"key":"ref43\/cit43","doi-asserted-by":"publisher","DOI":"10.1117\/12.2258217"},{"key":"ref44\/cit44","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011565"},{"key":"ref45\/cit45","doi-asserted-by":"publisher","DOI":"10.1117\/12.2218457"},{"key":"ref46\/cit46","doi-asserted-by":"publisher","DOI":"10.1006\/adnd.1993.1013"},{"key":"ref47\/cit47","doi-asserted-by":"publisher","DOI":"10.1117\/12.2255650"},{"key":"ref48\/cit48","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.32.21"},{"key":"ref49\/cit49","doi-asserted-by":"publisher","DOI":"10.1117\/12.2257899"},{"key":"ref50\/cit50","doi-asserted-by":"publisher","DOI":"10.1039\/C7CS00080D"},{"key":"ref51\/cit51","doi-asserted-by":"publisher","DOI":"10.1143\/APEX.1.047001"},{"key":"ref52\/cit52","doi-asserted-by":"publisher","DOI":"10.1117\/12.917006"},{"key":"ref53\/cit53","doi-asserted-by":"publisher","DOI":"10.1021\/cm101867g"},{"key":"ref54\/cit54","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.22.43"},{"key":"ref55\/cit55","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.26.825"},{"key":"ref56\/cit56","doi-asserted-by":"publisher","DOI":"10.1117\/12.2219433"},{"key":"ref57\/cit57","doi-asserted-by":"publisher","DOI":"10.1117\/12.2218936"},{"key":"ref58\/cit58","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.28.507"},{"key":"ref59\/cit59","doi-asserted-by":"publisher","DOI":"10.1515\/aot-2017-0021"},{"key":"ref60\/cit60","doi-asserted-by":"publisher","DOI":"10.1117\/12.879542"},{"key":"ref61\/cit61","unstructured":"Stowers, J. K.; Telecky, A. J.; Keszler, D. A.; Grenville, A. Patterned inorganic layers, radiation based patterning compositions and corresponding methods. EP2988172A1, 2010."},{"key":"ref62\/cit62","doi-asserted-by":"publisher","DOI":"10.1117\/12.3051549"},{"key":"ref63\/cit63","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011533"},{"key":"ref64\/cit64","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2008.11.034"},{"key":"ref65\/cit65","doi-asserted-by":"publisher","DOI":"10.1117\/12.2086006"},{"key":"ref66\/cit66","doi-asserted-by":"publisher","DOI":"10.1117\/12.2085982"},{"key":"ref67\/cit67","doi-asserted-by":"publisher","DOI":"10.1117\/12.2219527"},{"key":"ref68\/cit68","doi-asserted-by":"publisher","DOI":"10.1117\/12.2584769"},{"key":"ref69\/cit69","doi-asserted-by":"publisher","DOI":"10.1117\/12.3010921"},{"key":"ref70\/cit70","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2014.04.024"},{"key":"ref71\/cit71","doi-asserted-by":"publisher","DOI":"10.1117\/12.2046536"},{"key":"ref72\/cit72","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.16.3.033510"},{"key":"ref73\/cit73","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.31.249"},{"key":"ref74\/cit74","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.1c12411"},{"key":"ref75\/cit75","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.31.243"},{"key":"ref76\/cit76","doi-asserted-by":"publisher","DOI":"10.1117\/12.846672"},{"key":"ref77\/cit77","doi-asserted-by":"publisher","DOI":"10.1016\/j.polymer.2023.126020"},{"key":"ref78\/cit78","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.5b01506"},{"key":"ref79\/cit79","doi-asserted-by":"publisher","DOI":"10.1039\/c0jm00679c"},{"key":"ref80\/cit80","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.27.663"},{"key":"ref81\/cit81","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011490"},{"key":"ref82\/cit82","doi-asserted-by":"publisher","DOI":"10.1117\/12.2011282"},{"key":"ref83\/cit83","doi-asserted-by":"publisher","DOI":"10.1117\/12.916384"},{"key":"ref84\/cit84","doi-asserted-by":"publisher","DOI":"10.1117\/12.879385"},{"key":"ref85\/cit85","doi-asserted-by":"publisher","DOI":"10.1117\/12.2258187"},{"key":"ref86\/cit86","doi-asserted-by":"publisher","DOI":"10.1117\/12.2297266"},{"key":"ref87\/cit87","doi-asserted-by":"publisher","DOI":"10.1117\/12.2046555"},{"key":"ref88\/cit88","doi-asserted-by":"publisher","DOI":"10.1117\/12.2046677"},{"key":"ref89\/cit89","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.16.4.041007"},{"key":"ref90\/cit90","doi-asserted-by":"publisher","DOI":"10.1016\/j.mattod.2023.05.027"},{"key":"ref91\/cit91","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.33.153"},{"key":"ref92\/cit92","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.18.1.013504"},{"key":"ref93\/cit93","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.8b01573"},{"key":"ref94\/cit94","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.14.4.043503"},{"key":"ref95\/cit95","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.27.655"},{"key":"ref96\/cit96","doi-asserted-by":"publisher","DOI":"10.1016\/B978-0-08-100354-1.00011-9"},{"key":"ref97\/cit97","doi-asserted-by":"publisher","DOI":"10.1039\/D4TC02671C"},{"key":"ref98\/cit98","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.34.117"},{"key":"ref99\/cit99","doi-asserted-by":"publisher","DOI":"10.1117\/12.2046537"},{"key":"ref100\/cit100","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.17.4.043507"},{"key":"ref101\/cit101","doi-asserted-by":"publisher","DOI":"10.1117\/12.2086598"},{"key":"ref102\/cit102","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.17.3.031203"},{"key":"ref103\/cit103","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200800763"},{"key":"ref104\/cit104","doi-asserted-by":"publisher","DOI":"10.1246\/cl.2004.706"},{"key":"ref105\/cit105","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2006.01.025"},{"key":"ref106\/cit106","doi-asserted-by":"publisher","DOI":"10.1039\/b719108a"},{"key":"ref107\/cit107","doi-asserted-by":"publisher","DOI":"10.1039\/b709649f"},{"key":"ref108\/cit108","doi-asserted-by":"publisher","DOI":"10.1002\/mame.201700654"},{"key":"ref109\/cit109","doi-asserted-by":"publisher","DOI":"10.1002\/admi.202300194"},{"key":"ref110\/cit110","doi-asserted-by":"publisher","DOI":"10.1016\/j.jphotochem.2024.115684"},{"key":"ref111\/cit111","doi-asserted-by":"publisher","DOI":"10.1116\/1.5057442"},{"key":"ref112\/cit112","doi-asserted-by":"publisher","DOI":"10.1117\/12.2086039"},{"key":"ref113\/cit113","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.2c19940"},{"key":"ref114\/cit114","doi-asserted-by":"publisher","DOI":"10.1021\/acsanm.3c03900"},{"key":"ref115\/cit115","doi-asserted-by":"publisher","DOI":"10.1007\/s40242-022-2163-1"},{"key":"ref116\/cit116","doi-asserted-by":"publisher","DOI":"10.1039\/D2TC01339H"},{"key":"ref117\/cit117","doi-asserted-by":"publisher","DOI":"10.1021\/ja973374+"},{"key":"ref118\/cit118","doi-asserted-by":"publisher","DOI":"10.1039\/JM9930300991"},{"key":"ref119\/cit119","doi-asserted-by":"publisher","DOI":"10.1117\/12.656559"},{"key":"ref120\/cit120","doi-asserted-by":"publisher","DOI":"10.1021\/acsomega.2c03445"},{"key":"ref121\/cit121","doi-asserted-by":"publisher","DOI":"10.1021\/acsapm.8b00235"},{"key":"ref122\/cit122","doi-asserted-by":"publisher","DOI":"10.1039\/b514065j"},{"key":"ref123\/cit123","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.21.443"},{"key":"ref124\/cit124","doi-asserted-by":"publisher","DOI":"10.1002\/cjoc.202500041"},{"key":"ref125\/cit125","doi-asserted-by":"publisher","DOI":"10.1117\/12.722919"},{"key":"ref126\/cit126","doi-asserted-by":"publisher","DOI":"10.1039\/b925403j"},{"key":"ref127\/cit127","doi-asserted-by":"publisher","DOI":"10.1038\/pj.2010.146"},{"key":"ref128\/cit128","doi-asserted-by":"publisher","DOI":"10.1117\/12.600615"},{"key":"ref129\/cit129","unstructured":"Lichtenhan, J.; Gonzalez, R.; Gonzalez, J. Polyhedral oligomeric silsesquioxanes and polyhedral oligomeric silicates barrier materials for packaging. U.S. Patent 0,127,583, 2006."},{"key":"ref130\/cit130","doi-asserted-by":"publisher","DOI":"10.1051\/rphysap:0198800230100171100"},{"key":"ref131\/cit131","doi-asserted-by":"publisher","DOI":"10.1364\/AO.32.007044"},{"key":"ref132\/cit132","doi-asserted-by":"publisher","DOI":"10.1116\/1.586334"},{"key":"ref133\/cit133","doi-asserted-by":"publisher","DOI":"10.1117\/12.535666"},{"key":"ref134\/cit134","doi-asserted-by":"publisher","DOI":"10.1116\/1.2401612"},{"key":"ref135\/cit135","doi-asserted-by":"publisher","DOI":"10.1021\/ma60078a060"},{"key":"ref136\/cit136","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2006.01.149"},{"key":"ref137\/cit137","doi-asserted-by":"publisher","DOI":"10.1002\/pola.1986.080240513"},{"key":"ref138\/cit138","doi-asserted-by":"publisher","DOI":"10.1039\/C9TC02974E"},{"key":"ref139\/cit139","doi-asserted-by":"publisher","DOI":"10.1039\/C9TC06482F"},{"key":"ref140\/cit140","doi-asserted-by":"publisher","DOI":"10.1117\/12.2219165"},{"key":"ref141\/cit141","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.31.4508"},{"key":"ref142\/cit142","doi-asserted-by":"publisher","DOI":"10.1117\/12.2536348"},{"key":"ref143\/cit143","doi-asserted-by":"publisher","DOI":"10.1117\/12.2657506"},{"key":"ref144\/cit144","doi-asserted-by":"publisher","DOI":"10.1117\/12.2572582"},{"key":"ref145\/cit145","doi-asserted-by":"publisher","DOI":"10.1117\/12.2686602"},{"key":"ref146\/cit146","doi-asserted-by":"publisher","DOI":"10.1149\/1.2403352"},{"key":"ref147\/cit147","doi-asserted-by":"publisher","DOI":"10.1002\/pen.760140712"},{"key":"ref148\/cit148","doi-asserted-by":"publisher","DOI":"10.1016\/j.radphyschem.2010.07.038"},{"key":"ref149\/cit149","doi-asserted-by":"publisher","DOI":"10.1039\/c0jm03288c"},{"key":"ref150\/cit150","doi-asserted-by":"publisher","DOI":"10.1295\/polymj.19.31"},{"key":"ref151\/cit151","doi-asserted-by":"publisher","DOI":"10.1039\/C39850001514"},{"key":"ref152\/cit152","doi-asserted-by":"publisher","DOI":"10.1002\/marc.1986.030070304"},{"key":"ref153\/cit153","doi-asserted-by":"publisher","DOI":"10.1117\/12.716213"},{"key":"ref154\/cit154","doi-asserted-by":"publisher","DOI":"10.1002\/marc.201000117"},{"key":"ref155\/cit155","doi-asserted-by":"publisher","DOI":"10.1117\/12.656238"},{"key":"ref156\/cit156","doi-asserted-by":"publisher","DOI":"10.1016\/j.eurpolymj.2019.01.064"},{"key":"ref157\/cit157","doi-asserted-by":"publisher","DOI":"10.3390\/polym15071598"},{"key":"ref158\/cit158","doi-asserted-by":"publisher","DOI":"10.1021\/acsapm.4c03843"},{"key":"ref159\/cit159","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.8b01038"},{"key":"ref160\/cit160","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.26.665"},{"key":"ref161\/cit161","doi-asserted-by":"publisher","DOI":"10.1117\/12.2299853"},{"key":"ref162\/cit162","doi-asserted-by":"publisher","DOI":"10.1117\/12.2584085"},{"key":"ref163\/cit163","doi-asserted-by":"publisher","DOI":"10.1117\/12.813990"},{"key":"ref164\/cit164","doi-asserted-by":"publisher","DOI":"10.1117\/12.879349"},{"key":"ref165\/cit165","doi-asserted-by":"publisher","DOI":"10.1117\/12.772943"},{"key":"ref166\/cit166","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.2c08202"},{"key":"ref167\/cit167","doi-asserted-by":"publisher","DOI":"10.1002\/anie.202415588"},{"key":"ref168\/cit168","doi-asserted-by":"publisher","DOI":"10.1021\/cr00096a001"},{"key":"ref169\/cit169","doi-asserted-by":"publisher","DOI":"10.1021\/ar00042a001"},{"key":"ref170\/cit170","doi-asserted-by":"publisher","DOI":"10.1002\/smll.200700324"},{"key":"ref171\/cit171","doi-asserted-by":"publisher","DOI":"10.1117\/12.712152"},{"key":"ref172\/cit172","doi-asserted-by":"publisher","DOI":"10.1117\/12.918039"},{"key":"ref173\/cit173","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.50.036504"},{"key":"ref174\/cit174","doi-asserted-by":"publisher","DOI":"10.1039\/D4LP00136B"},{"key":"ref175\/cit175","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.21.4.041403"},{"key":"ref176\/cit176","doi-asserted-by":"publisher","DOI":"10.1117\/12.600432"},{"key":"ref177\/cit177","doi-asserted-by":"publisher","DOI":"10.1117\/12.2045736"},{"key":"ref178\/cit178","doi-asserted-by":"publisher","DOI":"10.1117\/12.2041183"},{"key":"ref179\/cit179","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.6b10384"},{"key":"ref180\/cit180","doi-asserted-by":"publisher","DOI":"10.1016\/j.jphotochem.2018.06.005"},{"key":"ref181\/cit181","doi-asserted-by":"publisher","DOI":"10.1117\/12.2258092"},{"key":"ref182\/cit182","doi-asserted-by":"publisher","DOI":"10.1117\/12.2085672"},{"key":"ref183\/cit183","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.31.227"},{"key":"ref184\/cit184","doi-asserted-by":"publisher","DOI":"10.1117\/12.2552214"},{"key":"ref185\/cit185","doi-asserted-by":"publisher","DOI":"10.1117\/12.2658456"},{"key":"ref186\/cit186","doi-asserted-by":"publisher","DOI":"10.1117\/12.2658685"},{"key":"ref187\/cit187","doi-asserted-by":"publisher","DOI":"10.35848\/1347-4065\/acce43"},{"key":"ref188\/cit188","doi-asserted-by":"publisher","DOI":"10.1039\/D4TC02794A"},{"key":"ref189\/cit189","doi-asserted-by":"publisher","DOI":"10.1021\/am1010805"},{"key":"ref190\/cit190","doi-asserted-by":"publisher","DOI":"10.1116\/1.590398"},{"key":"ref191\/cit191","doi-asserted-by":"publisher","DOI":"10.1021\/la302099y"},{"key":"ref192\/cit192","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.5b05361"},{"key":"ref193\/cit193","doi-asserted-by":"publisher","DOI":"10.1117\/12.771101"},{"key":"ref194\/cit194","doi-asserted-by":"publisher","DOI":"10.35848\/1347-4065\/adb439"},{"key":"ref195\/cit195","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.37.257"},{"key":"ref196\/cit196","unstructured":"Wu, C.; Weidman, T.; Nardi, K. Methods for Making EUV Patternable Hard Masks Int. Publication Number WO 2019\/217749 A1, 2019."},{"key":"ref197\/cit197","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.21.4.041405"},{"key":"ref198\/cit198","doi-asserted-by":"publisher","DOI":"10.1117\/12.2661652"},{"key":"ref199\/cit199","doi-asserted-by":"publisher","DOI":"10.1117\/12.3009753"},{"key":"ref200\/cit200","doi-asserted-by":"publisher","DOI":"10.1117\/12.3034596"},{"key":"ref201\/cit201","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202311149"},{"key":"ref202\/cit202","doi-asserted-by":"publisher","DOI":"10.1117\/12.3010916"},{"key":"ref203\/cit203","doi-asserted-by":"publisher","DOI":"10.1117\/12.3050172"},{"key":"ref204\/cit204","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.5c01476"},{"key":"ref205\/cit205","doi-asserted-by":"publisher","DOI":"10.1117\/12.772507"},{"key":"ref206\/cit206","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.140.A1133"},{"key":"ref207\/cit207","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.19.3.034601"},{"key":"ref208\/cit208","doi-asserted-by":"publisher","DOI":"10.1063\/1.5046521"},{"key":"ref209\/cit209","doi-asserted-by":"publisher","DOI":"10.1016\/j.ccr.2004.02.012"},{"key":"ref210\/cit210","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.25.101"},{"key":"ref211\/cit211","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.24.205"},{"key":"ref212\/cit212","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpca.4c07585"},{"key":"ref213\/cit213","doi-asserted-by":"publisher","DOI":"10.1016\/j.apsusc.2024.162040"},{"key":"ref214\/cit214","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.4c18270"},{"key":"ref215\/cit215","doi-asserted-by":"publisher","DOI":"10.1117\/12.2538985"},{"key":"ref216\/cit216","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.4c02731"},{"key":"ref217\/cit217","doi-asserted-by":"publisher","DOI":"10.1016\/j.jsamd.2018.01.002"},{"key":"ref218\/cit218","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.18.1.013503"},{"key":"ref219\/cit219","doi-asserted-by":"publisher","DOI":"10.1117\/12.2299643"},{"key":"ref220\/cit220","doi-asserted-by":"publisher","DOI":"10.1109\/t-ed.1979.19482"},{"key":"ref221\/cit221","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.19.2.024601"},{"key":"ref222\/cit222","doi-asserted-by":"publisher","DOI":"10.1117\/12.2260265"},{"key":"ref223\/cit223","doi-asserted-by":"publisher","DOI":"10.1063\/5.0239120"},{"key":"ref224\/cit224","doi-asserted-by":"publisher","DOI":"10.1016\/j.polymer.2005.01.049"},{"key":"ref225\/cit225","doi-asserted-by":"publisher","DOI":"10.1117\/12.2087303"},{"key":"ref226\/cit226","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.33.53"},{"key":"ref227\/cit227","doi-asserted-by":"publisher","DOI":"10.1039\/D1TC00891A"},{"key":"ref228\/cit228","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpclett.4c03250"},{"key":"ref229\/cit229","doi-asserted-by":"publisher","DOI":"10.1007\/s44275-024-00002-3"},{"key":"ref230\/cit230","doi-asserted-by":"publisher","DOI":"10.35848\/1347-4065\/abe802"},{"key":"ref231\/cit231","doi-asserted-by":"publisher","DOI":"10.1117\/12.2551826"},{"key":"ref232\/cit232","doi-asserted-by":"publisher","DOI":"10.1109\/asmc61125.2024.10545368"},{"key":"ref233\/cit233","doi-asserted-by":"publisher","DOI":"10.1016\/S1369-7021(06)71619-4"},{"key":"ref234\/cit234","doi-asserted-by":"publisher","DOI":"10.1021\/ma401762n"},{"key":"ref235\/cit235","doi-asserted-by":"publisher","DOI":"10.1146\/annurev.pc.41.100190.002521"},{"key":"ref236\/cit236","doi-asserted-by":"publisher","DOI":"10.1021\/ma951138i"},{"key":"ref237\/cit237","doi-asserted-by":"publisher","DOI":"10.1063\/1.882522"},{"key":"ref238\/cit238","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.82.2602"},{"key":"ref239\/cit239","doi-asserted-by":"publisher","DOI":"10.1038\/nature01775"},{"key":"ref240\/cit240","doi-asserted-by":"publisher","DOI":"10.1116\/1.2801884"},{"key":"ref241\/cit241","doi-asserted-by":"publisher","DOI":"10.1063\/1.1383805"},{"key":"ref242\/cit242","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.26.779"},{"key":"ref243\/cit243","doi-asserted-by":"publisher","DOI":"10.1117\/12.2658245"},{"key":"ref244\/cit244","doi-asserted-by":"publisher","DOI":"10.1002\/1521-4095(200108)13:15<1152::AID-ADMA1152>3.0.CO;2-5"},{"key":"ref245\/cit245","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200601421"},{"key":"ref246\/cit246","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201001669"},{"key":"ref247\/cit247","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.6b16129"},{"key":"ref248\/cit248","doi-asserted-by":"publisher","DOI":"10.1021\/ja204724h"},{"key":"ref249\/cit249","doi-asserted-by":"publisher","DOI":"10.1021\/ja0508929"},{"key":"ref250\/cit250","doi-asserted-by":"publisher","DOI":"10.1002\/polb.1994.090320216"},{"key":"ref251\/cit251","doi-asserted-by":"publisher","DOI":"10.1126\/science.1111041"},{"key":"ref252\/cit252","doi-asserted-by":"publisher","DOI":"10.1021\/ma102856t"},{"key":"ref253\/cit253","doi-asserted-by":"publisher","DOI":"10.1007\/BF00353023"},{"key":"ref254\/cit254","doi-asserted-by":"publisher","DOI":"10.1063\/1.116192"},{"key":"ref255\/cit255","doi-asserted-by":"publisher","DOI":"10.1126\/science.276.5317.1401"},{"key":"ref256\/cit256","doi-asserted-by":"publisher","DOI":"10.1126\/science.1157626"},{"key":"ref257\/cit257","doi-asserted-by":"publisher","DOI":"10.1021\/ma902494v"},{"key":"ref258\/cit258","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.26.595"},{"key":"ref259\/cit259","doi-asserted-by":"publisher","DOI":"10.1117\/12.3010817"},{"key":"ref260\/cit260","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.8b05247"},{"key":"ref261\/cit261","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.3c00417"},{"key":"ref262\/cit262","doi-asserted-by":"publisher","DOI":"10.1117\/12.2515176"},{"key":"ref263\/cit263","doi-asserted-by":"publisher","DOI":"10.1117\/12.2657939"},{"key":"ref264\/cit264","doi-asserted-by":"publisher","DOI":"10.1098\/rsta.2012.0306"},{"key":"ref265\/cit265","doi-asserted-by":"publisher","DOI":"10.1002\/(SICI)1521-4095(200006)12:11<787::AID-ADMA787>3.0.CO;2-1"},{"key":"ref266\/cit266","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.41.6112"},{"key":"ref267\/cit267","doi-asserted-by":"publisher","DOI":"10.1116\/1.2966433"},{"key":"ref268\/cit268","doi-asserted-by":"publisher","DOI":"10.1021\/ma101827u"},{"key":"ref269\/cit269","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2020.111369"},{"key":"ref270\/cit270","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.79.237"},{"key":"ref271\/cit271","doi-asserted-by":"publisher","DOI":"10.1126\/science.275.5305.1458"},{"key":"ref272\/cit272","doi-asserted-by":"publisher","DOI":"10.1021\/la060748g"},{"key":"ref273\/cit273","doi-asserted-by":"publisher","DOI":"10.1021\/ma8007338"},{"key":"ref274\/cit274","doi-asserted-by":"publisher","DOI":"10.1021\/ma8018393"},{"key":"ref275\/cit275","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.6b00360"},{"key":"ref276\/cit276","doi-asserted-by":"publisher","DOI":"10.1126\/science.1106604"},{"key":"ref277\/cit277","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200701866"},{"key":"ref278\/cit278","doi-asserted-by":"publisher","DOI":"10.1021\/la1042958"},{"key":"ref279\/cit279","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201201352"},{"key":"ref280\/cit280","doi-asserted-by":"publisher","DOI":"10.1021\/ma00205a033"},{"key":"ref281\/cit281","doi-asserted-by":"publisher","DOI":"10.1021\/ma8013004"},{"key":"ref282\/cit282","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.35.17"},{"key":"ref283\/cit283","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.5b02613"},{"key":"ref284\/cit284","doi-asserted-by":"publisher","DOI":"10.1021\/ma9917085"},{"key":"ref285\/cit285","doi-asserted-by":"publisher","DOI":"10.1002\/pola.28610"},{"key":"ref286\/cit286","doi-asserted-by":"publisher","DOI":"10.1002\/admi.201801401"},{"key":"ref287\/cit287","doi-asserted-by":"publisher","DOI":"10.1039\/C9SM00128J"},{"key":"ref288\/cit288","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-024-49839-0"},{"key":"ref289\/cit289","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202421066"},{"key":"ref290\/cit290","doi-asserted-by":"publisher","DOI":"10.1021\/ma301047y"},{"key":"ref291\/cit291","doi-asserted-by":"publisher","DOI":"10.1021\/ma4020164"},{"key":"ref292\/cit292","doi-asserted-by":"publisher","DOI":"10.1021\/mz2000169"},{"key":"ref293\/cit293","doi-asserted-by":"publisher","DOI":"10.1021\/nl403628d"},{"key":"ref294\/cit294","doi-asserted-by":"publisher","DOI":"10.1021\/ma9018944"},{"key":"ref295\/cit295","doi-asserted-by":"publisher","DOI":"10.1002\/adma.200900518"},{"key":"ref296\/cit296","doi-asserted-by":"publisher","DOI":"10.1021\/ma501597g"},{"key":"ref297\/cit297","doi-asserted-by":"publisher","DOI":"10.1021\/acsmacrolett.6b00376"},{"key":"ref298\/cit298","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.8b01409"},{"key":"ref299\/cit299","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.6b05059"},{"key":"ref300\/cit300","doi-asserted-by":"publisher","DOI":"10.1038\/s41563-022-01392-1"},{"key":"ref301\/cit301","doi-asserted-by":"publisher","DOI":"10.1039\/D4NR00223G"},{"key":"ref302\/cit302","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.7b00945"},{"key":"ref303\/cit303","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.8b01325"},{"key":"ref304\/cit304","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemmater.0c03251"},{"key":"ref305\/cit305","doi-asserted-by":"publisher","DOI":"10.1039\/C8TC06480F"},{"key":"ref306\/cit306","doi-asserted-by":"publisher","DOI":"10.1021\/acs.macromol.9b01323"},{"key":"ref307\/cit307","doi-asserted-by":"publisher","DOI":"10.1557\/s43579-025-00841-7"},{"key":"ref308\/cit308","doi-asserted-by":"publisher","DOI":"10.1016\/S0167-9317(99)00030-1"},{"key":"ref309\/cit309","doi-asserted-by":"publisher","DOI":"10.1116\/1.588604"},{"key":"ref310\/cit310","doi-asserted-by":"publisher","DOI":"10.1117\/12.351155"},{"key":"ref311\/cit311","doi-asserted-by":"publisher","DOI":"10.1116\/1.1324618"},{"key":"ref312\/cit312","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.39.7075"},{"key":"ref313\/cit313","doi-asserted-by":"publisher","DOI":"10.1063\/1.114851"},{"key":"ref314\/cit314","doi-asserted-by":"publisher","DOI":"10.1116\/1.588605"},{"key":"ref315\/cit315","doi-asserted-by":"publisher","DOI":"10.1116\/1.589752"},{"key":"ref316\/cit316","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2007.01.007"},{"key":"ref317\/cit317","doi-asserted-by":"publisher","DOI":"10.2494\/photopolymer.16.615"},{"key":"ref318\/cit318","doi-asserted-by":"publisher","DOI":"10.1116\/1.1415510"},{"key":"ref319\/cit319","doi-asserted-by":"publisher","DOI":"10.1116\/1.1526355"},{"key":"ref320\/cit320","doi-asserted-by":"publisher","DOI":"10.1116\/1.1417547"},{"key":"ref321\/cit321","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.41.4198"},{"key":"ref322\/cit322","doi-asserted-by":"publisher","DOI":"10.1116\/1.1545754"},{"key":"ref323\/cit323","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.43.4050"},{"key":"ref324\/cit324","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/7\/4\/027"},{"key":"ref325\/cit325","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.43.4012"},{"key":"ref326\/cit326","doi-asserted-by":"publisher","DOI":"10.1063\/1.1766071"},{"key":"ref327\/cit327","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.41.4173"},{"key":"ref328\/cit328","doi-asserted-by":"publisher","DOI":"10.1116\/1.590024"},{"key":"ref329\/cit329","doi-asserted-by":"publisher","DOI":"10.1063\/1.120128"},{"key":"ref330\/cit330","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.39.L256"},{"key":"ref331\/cit331","doi-asserted-by":"publisher","DOI":"10.1063\/1.109924"},{"key":"ref332\/cit332","doi-asserted-by":"publisher","DOI":"10.1063\/1.108268"},{"key":"ref333\/cit333","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.40.4325"},{"key":"ref334\/cit334","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.42.L92"},{"key":"ref335\/cit335","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.44.1119"},{"key":"ref336\/cit336","doi-asserted-by":"publisher","DOI":"10.1002\/(SICI)1521-4095(199812)10:17<1466::AID-ADMA1466>3.0.CO;2-5"},{"key":"ref337\/cit337","doi-asserted-by":"publisher","DOI":"10.1146\/annurev.matsci.28.1.153"},{"key":"ref338\/cit338","doi-asserted-by":"publisher","DOI":"10.1002\/adma.19970091107"},{"key":"ref339\/cit339","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2004.12.080"},{"key":"ref340\/cit340","doi-asserted-by":"publisher","DOI":"10.1116\/1.590438"},{"key":"ref341\/cit341","doi-asserted-by":"publisher","DOI":"10.1117\/12.3010463"},{"key":"ref342\/cit342","author":"Christine M.","journal-title":"ASML News"},{"key":"ref343\/cit343","doi-asserted-by":"publisher","DOI":"10.1117\/12.2688127"},{"key":"ref344\/cit344","doi-asserted-by":"publisher","DOI":"10.1117\/12.2614262"},{"key":"ref345\/cit345","doi-asserted-by":"publisher","DOI":"10.1117\/12.3050453"},{"key":"ref346\/cit346","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.21.1.010901"}],"container-title":["Chemical Reviews"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acs.chemrev.5c01043","content-type":"application\/pdf","content-version":"vor","intended-application":"unspecified"},{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acs.chemrev.5c01043","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,5,13]],"date-time":"2026-05-13T08:10:35Z","timestamp":1778659835000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/doi\/10.1021\/acs.chemrev.5c01043"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,4,14]]},"references-count":346,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2026,5,13]]}},"alternative-id":["10.1021\/acs.chemrev.5c01043"],"URL":"https:\/\/doi.org\/10.1021\/acs.chemrev.5c01043","relation":{},"ISSN":["0009-2665","1520-6890"],"issn-type":[{"value":"0009-2665","type":"print"},{"value":"1520-6890","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,4,14]]}}}