{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,11]],"date-time":"2026-09-11T20:55:26Z","timestamp":1789160126876,"version":"build-2803163510"},"reference-count":73,"publisher":"American Chemical Society (ACS)","issue":"1","license":[{"start":{"date-parts":[[2025,12,24]],"date-time":"2025-12-24T00:00:00Z","timestamp":1766534400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100000028","name":"Semiconductor Research Corporation","doi-asserted-by":"publisher","award":["2021-ES-3038"],"award-info":[{"award-number":["2021-ES-3038"]}],"id":[{"id":"10.13039\/100000028","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Environ. Sci. Technol."],"published-print":{"date-parts":[[2026,1,13]]},"DOI":"10.1021\/acs.est.5c09577","type":"journal-article","created":{"date-parts":[[2025,12,25]],"date-time":"2025-12-25T01:50:21Z","timestamp":1766627421000},"page":"167-180","source":"Crossref","is-referenced-by-count":4,"title":["Developmental Toxicity of Photolithography-Relevant Per- and Polyfluoroalkyl Substances (PFAS) Reveals Concerns for Less-Studied Functional Groups"],"prefix":"10.1021","volume":"60","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-2044-5544","authenticated-orcid":true,"given":"Yuexin","family":"Cao","sequence":"first","affiliation":[{"name":"Department of Civil & Environmental Engineering","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hajar","family":"Smaili","sequence":"additional","affiliation":[{"name":"Department of Civil & Environmental Engineering","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hazel Q.","family":"Shanks","sequence":"additional","affiliation":[{"name":"Center for Integrative Organ Systems, Department of Cell Biology","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Brooke E.","family":"Tvermoes","sequence":"additional","affiliation":[{"name":"Chief Sustainability Office","place":["Durham, United States"]},{"name":"IBM","place":["Durham, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9709-6197","authenticated-orcid":true,"given":"Shan","family":"Niu","sequence":"additional","affiliation":[{"name":"Advanced Interdisciplinary Institute of Environment and Ecology","place":["Zhuhai, China"]},{"name":"Beijing Normal University","place":["Zhuhai, China"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8714-0043","authenticated-orcid":true,"given":"Ruiwen","family":"Chen","sequence":"additional","affiliation":[{"name":"Department of Civil & Environmental Engineering","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9655-9030","authenticated-orcid":true,"given":"Neil A.","family":"Hukriede","sequence":"additional","affiliation":[{"name":"Center for Integrative Organ Systems, Department of Cell Biology","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5521-7862","authenticated-orcid":true,"given":"Carla A.","family":"Ng","sequence":"additional","affiliation":[{"name":"Department of Civil & Environmental Engineering","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]},{"name":"Department of Environmental and Occupational Health","place":["Pittsburgh, United States"]},{"name":"University of Pittsburgh","place":["Pittsburgh, United States"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2025,12,24]]},"reference":[{"key":"ref1\/cit1","unstructured":"MAPT Microelectronics and Advanced Packaging Technologies Roadmap\n                      ; Semiconductor Research Corporation: 2023. https:\/\/srcmapt.org\/wp-content\/uploads\/2024\/03\/SRC-MAPT-Roadmap-2023-v4.pdf (accessed June 2, 2025)."},{"key":"ref2\/cit2","unstructured":"McKinsey on Semiconductors\n2024\n                      ; McKinsey\n& Company: 2024. https:\/\/www.mckinsey.com\/~\/media\/mckinsey\/industries\/semiconductors\/our%20insights\/mckinsey%20on%20semiconductors%202024\/mck_semiconductors_2024_webpdf.pdf (accessed June 2, 2025)."},{"key":"ref3\/cit3","doi-asserted-by":"publisher","DOI":"10.1039\/D0EM00291G"},{"key":"ref4\/cit4","doi-asserted-by":"publisher","DOI":"10.1039\/c9ra08977b"},{"key":"ref5\/cit5","doi-asserted-by":"publisher","DOI":"10.1117\/1.JMM.21.1.010901"},{"key":"ref6\/cit6","doi-asserted-by":"publisher","DOI":"10.1002\/ajim.23362"},{"key":"ref7\/cit7","unstructured":"PFAS Release Mapping from Semiconductor Manufacturing\nPhotolithography\nProcesses.Semiconductor PFAS Consortium Photolithography Working Group, 2023 https:\/\/www.semiconductors.org\/wp-content\/uploads\/2023\/09\/PFAS-Release-Mapping-from-Semiconductor-Photolithography-Processes-Rev.0.pdf (accessed June 2, 2025)."},{"key":"ref8\/cit8","doi-asserted-by":"publisher","DOI":"10.1021\/acs.est.0c06690"},{"key":"ref9\/cit9","doi-asserted-by":"publisher","DOI":"10.1186\/s42834-024-00221-1"},{"key":"ref10\/cit10","doi-asserted-by":"publisher","DOI":"10.1016\/j.envpol.2008.11.033"},{"key":"ref11\/cit11","doi-asserted-by":"publisher","DOI":"10.1016\/j.scitotenv.2023.164161"},{"key":"ref12\/cit12","doi-asserted-by":"publisher","DOI":"10.1002\/etc.4890"},{"key":"ref13\/cit13","doi-asserted-by":"publisher","DOI":"10.1038\/s41545-023-00274-6"},{"key":"ref14\/cit14","doi-asserted-by":"publisher","DOI":"10.1038\/nature12111"},{"key":"ref15\/cit15","doi-asserted-by":"publisher","DOI":"10.3390\/plants9101345"},{"key":"ref16\/cit16","doi-asserted-by":"publisher","DOI":"10.3390\/ijms222413417"},{"key":"ref17\/cit17","doi-asserted-by":"publisher","DOI":"10.1289\/EHP5843"},{"key":"ref18\/cit18","doi-asserted-by":"publisher","DOI":"10.1007\/s11356-012-0977-y"},{"key":"ref19\/cit19","doi-asserted-by":"publisher","DOI":"10.1016\/j.chemosphere.2019.125573"},{"key":"ref20\/cit20","doi-asserted-by":"publisher","DOI":"10.1021\/acs.chemrestox.1c00101"},{"key":"ref21\/cit21","doi-asserted-by":"publisher","DOI":"10.1016\/j.jhazmat.2025.137235"},{"key":"ref22\/cit22","volume-title":"Test No. 236: Fish Embryo Acute Toxicity (FET) Test.","year":"2025"},{"key":"ref23\/cit23","doi-asserted-by":"publisher","DOI":"10.1038\/460208a"},{"key":"ref24\/cit24","doi-asserted-by":"publisher","DOI":"10.1002\/aja.1002030302"},{"key":"ref25\/cit25","doi-asserted-by":"publisher","DOI":"10.1016\/j.jclinepi.2019.02.016"},{"key":"ref26\/cit26","doi-asserted-by":"publisher","DOI":"10.1002\/etc.4899"},{"key":"ref27\/cit27","doi-asserted-by":"publisher","DOI":"10.3389\/fcell.2021.656883"},{"key":"ref28\/cit28","doi-asserted-by":"publisher","DOI":"10.1530\/JME-18-0076"},{"key":"ref29\/cit29","doi-asserted-by":"publisher","DOI":"10.1002\/etc.5930"},{"key":"ref30\/cit30","doi-asserted-by":"publisher","DOI":"10.1016\/j.envint.2024.108795"},{"key":"ref31\/cit31","doi-asserted-by":"publisher","DOI":"10.1016\/j.etap.2013.05.004"},{"key":"ref32\/cit32","doi-asserted-by":"publisher","DOI":"10.3390\/ijms22030995"},{"key":"ref33\/cit33","doi-asserted-by":"publisher","DOI":"10.1016\/j.aquatox.2010.02.003"},{"key":"ref34\/cit34","doi-asserted-by":"publisher","DOI":"10.1007\/s11356-014-3527-y"},{"key":"ref35\/cit35","doi-asserted-by":"publisher","DOI":"10.1289\/EHP6470"},{"key":"ref36\/cit36","doi-asserted-by":"publisher","DOI":"10.1007\/s11356-017-0399-y"},{"key":"ref37\/cit37","doi-asserted-by":"publisher","DOI":"10.1016\/j.fct.2017.02.041"},{"key":"ref38\/cit38","doi-asserted-by":"publisher","DOI":"10.3390\/toxics5040031"},{"key":"ref39\/cit39","doi-asserted-by":"publisher","DOI":"10.1016\/j.chemosphere.2010.10.076"},{"key":"ref40\/cit40","doi-asserted-by":"publisher","DOI":"10.1016\/j.reprotox.2014.10.022"},{"key":"ref41\/cit41","doi-asserted-by":"publisher","DOI":"10.1016\/j.cbpc.2016.11.001"},{"key":"ref42\/cit42","doi-asserted-by":"publisher","DOI":"10.1186\/s13104-020-05255-3"},{"key":"ref43\/cit43","doi-asserted-by":"publisher","DOI":"10.1016\/j.envpol.2020.114928"},{"key":"ref44\/cit44","doi-asserted-by":"publisher","DOI":"10.1080\/15287394.2020.1842272"},{"key":"ref45\/cit45","doi-asserted-by":"publisher","DOI":"10.1016\/j.aquatox.2018.04.009"},{"key":"ref46\/cit46","doi-asserted-by":"publisher","DOI":"10.3390\/toxics8040126"},{"key":"ref47\/cit47","doi-asserted-by":"publisher","DOI":"10.1016\/j.envint.2019.105317"},{"key":"ref48\/cit48","doi-asserted-by":"publisher","DOI":"10.1016\/j.aquatox.2017.10.024"},{"key":"ref49\/cit49","doi-asserted-by":"publisher","DOI":"10.1021\/acs.est.9b07204"},{"key":"ref50\/cit50","doi-asserted-by":"publisher","DOI":"10.1016\/j.envres.2022.113431"},{"key":"ref51\/cit51","doi-asserted-by":"publisher","DOI":"10.1021\/cr200085w"},{"key":"ref52\/cit52","doi-asserted-by":"publisher","DOI":"10.1002\/(SICI)1521-1878(200002)22:2<113::AID-BIES3>3.0.CO;2-L"},{"key":"ref53\/cit53","doi-asserted-by":"publisher","DOI":"10.1016\/j.ydbio.2011.08.024"},{"key":"ref54\/cit54","doi-asserted-by":"publisher","DOI":"10.1016\/j.ydbio.2009.04.035"},{"key":"ref55\/cit55","doi-asserted-by":"publisher","DOI":"10.1248\/bpb.30.1819"},{"key":"ref56\/cit56","doi-asserted-by":"publisher","DOI":"10.1101\/gad.12.20.3156"},{"key":"ref57\/cit57","doi-asserted-by":"publisher","DOI":"10.1016\/S1348-8643(15)00040-3"},{"key":"ref58\/cit58","doi-asserted-by":"publisher","DOI":"10.1016\/j.envint.2019.01.010"},{"key":"ref59\/cit59","doi-asserted-by":"publisher","DOI":"10.7759\/cureus.73568"},{"key":"ref60\/cit60","doi-asserted-by":"publisher","DOI":"10.3389\/ftox.2024.1423449"},{"key":"ref61\/cit61","doi-asserted-by":"publisher","DOI":"10.1016\/j.envpol.2020.114153"},{"key":"ref62\/cit62","doi-asserted-by":"publisher","DOI":"10.3389\/fendo.2023.1142644"},{"key":"ref63\/cit63","doi-asserted-by":"publisher","DOI":"10.3389\/fcell.2021.662583"},{"key":"ref64\/cit64","doi-asserted-by":"publisher","DOI":"10.1093\/toxsci\/kfu111"},{"key":"ref65\/cit65","doi-asserted-by":"publisher","DOI":"10.1016\/j.plipres.2015.08.001"},{"key":"ref66\/cit66","doi-asserted-by":"publisher","DOI":"10.1210\/er.2011-1050"},{"key":"ref67\/cit67","doi-asserted-by":"publisher","DOI":"10.1186\/s12940-015-0029-4"},{"key":"ref68\/cit68","doi-asserted-by":"publisher","DOI":"10.1016\/j.envres.2023.117553"},{"key":"ref69\/cit69","doi-asserted-by":"publisher","DOI":"10.1016\/j.neuro.2023.05.005"},{"key":"ref70\/cit70","doi-asserted-by":"publisher","DOI":"10.1177\/1559325818798282"},{"key":"ref71\/cit71","doi-asserted-by":"publisher","DOI":"10.1146\/annurev.biochem.77.061307.091829"},{"key":"ref72\/cit72","doi-asserted-by":"publisher","DOI":"10.3390\/toxics10050265"},{"key":"ref73\/cit73","unstructured":"PFOS and PFOA Conversion to Short-Chain PFAS-Containing Materials\nUsed in Semiconductor Manufacturing. Semiconductor PFAS Consortium\nPhotolithography Working Group, 2023. https:\/\/www.semiconductors.org\/wp-content\/uploads\/2023\/06\/FINAL-PFOS-PFOA-Case-Study-Paper.pdf (accessed June 2, 2025)."}],"container-title":["Environmental Science &amp; Technology"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acs.est.5c09577","content-type":"application\/pdf","content-version":"vor","intended-application":"unspecified"},{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acs.est.5c09577","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,1,16]],"date-time":"2026-01-16T12:46:07Z","timestamp":1768567567000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/doi\/10.1021\/acs.est.5c09577"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,12,24]]},"references-count":73,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2026,1,13]]}},"alternative-id":["10.1021\/acs.est.5c09577"],"URL":"https:\/\/doi.org\/10.1021\/acs.est.5c09577","relation":{},"ISSN":["0013-936X","1520-5851"],"issn-type":[{"value":"0013-936X","type":"print"},{"value":"1520-5851","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,12,24]]}}}