{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,23]],"date-time":"2026-08-23T15:57:45Z","timestamp":1787500665261,"version":"build-2736575974"},"reference-count":60,"publisher":"American Chemical Society (ACS)","issue":"5","license":[{"start":{"date-parts":[[2025,1,27]],"date-time":"2025-01-27T00:00:00Z","timestamp":1737936000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004359","name":"Vetenskapsr?det","doi-asserted-by":"publisher","award":["2018-06169"],"award-info":[{"award-number":["2018-06169"]}],"id":[{"id":"10.13039\/501100004359","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100011751","name":"Stiftelsen f?r Strategisk Forskning","doi-asserted-by":"publisher","award":["STP19-0065"],"award-info":[{"award-number":["STP19-0065"]}],"id":[{"id":"10.13039\/501100011751","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["ACS Appl. Mater. Interfaces"],"published-print":{"date-parts":[[2025,2,5]]},"DOI":"10.1021\/acsami.5c00255","type":"journal-article","created":{"date-parts":[[2025,1,27]],"date-time":"2025-01-27T21:59:55Z","timestamp":1738015195000},"page":"8737-8748","source":"Crossref","is-referenced-by-count":12,"title":["Localized Nanopore Fabrication in Silicon Nitride Membranes by Femtosecond Laser Exposure and Subsequent Controlled Breakdown"],"prefix":"10.1021","volume":"17","author":[{"given":"Chrysovalantou V.","family":"Leva","sequence":"first","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2810-2151","authenticated-orcid":true,"given":"Saumey","family":"Jain","sequence":"additional","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]},{"name":"Division of Nanobiotechnology, SciLifeLab, Department of Protein Science, School of Engineering Sciences in Chemistry, Biotechnology and Health (CBH)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kevin","family":"Kistermann","sequence":"additional","affiliation":[{"name":"Central Facility for Electron Microscopy (GFE)","place":["Aachen, Germany"]},{"name":"RWTH Aachen University","place":["Aachen, Germany"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kasumi","family":"Sakurai","sequence":"additional","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9552-4234","authenticated-orcid":true,"given":"G\u00f6ran","family":"Stemme","sequence":"additional","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5002-2537","authenticated-orcid":true,"given":"Anna","family":"Herland","sequence":"additional","affiliation":[{"name":"Division of Nanobiotechnology, SciLifeLab, Department of Protein Science, School of Engineering Sciences in Chemistry, Biotechnology and Health (CBH)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]},{"name":"AIMES, Center for Integrated Medical and Engineering Science, Department of Neuroscience","place":["Solna, Sweden"]},{"name":"Karolinska Institute","place":["Solna, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3292-5342","authenticated-orcid":true,"given":"Joachim","family":"Mayer","sequence":"additional","affiliation":[{"name":"Central Facility for Electron Microscopy (GFE)","place":["Aachen, Germany"]},{"name":"RWTH Aachen University","place":["Aachen, Germany"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0525-8647","authenticated-orcid":true,"given":"Frank","family":"Niklaus","sequence":"additional","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2278-1368","authenticated-orcid":true,"given":"Shyamprasad N.","family":"Raja","sequence":"additional","affiliation":[{"name":"Division of Micro and Nanosystems (MST), School of Electrical Engineering and Computer Science (EECS)","place":["Stockholm, Sweden"]},{"name":"KTH Royal Institute of Technology","place":["Stockholm, Sweden"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2025,1,27]]},"reference":[{"key":"ref1\/cit1","doi-asserted-by":"publisher","DOI":"10.1038\/s41578-020-0229-6"},{"key":"ref2\/cit2","doi-asserted-by":"publisher","DOI":"10.1021\/nl901691v"},{"key":"ref3\/cit3","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2011.12"},{"key":"ref4\/cit4","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.8b00734"},{"key":"ref5\/cit5","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.8b02968"},{"key":"ref6\/cit6","doi-asserted-by":"publisher","DOI":"10.1038\/s41551-023-01078-2"},{"key":"ref7\/cit7","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202207434"},{"key":"ref8\/cit8","doi-asserted-by":"publisher","DOI":"10.1038\/s41567-021-01268-2"},{"key":"ref9\/cit9","doi-asserted-by":"publisher","DOI":"10.1038\/s41565-021-00958-5"},{"key":"ref10\/cit10","doi-asserted-by":"publisher","DOI":"10.1039\/C4RA00933A"},{"key":"ref11\/cit11","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.5b03239"},{"key":"ref12\/cit12","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201605442"},{"key":"ref13\/cit13","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2017.176"},{"key":"ref14\/cit14","doi-asserted-by":"publisher","DOI":"10.1038\/nmat941"},{"key":"ref15\/cit15","doi-asserted-by":"publisher","DOI":"10.1038\/35084037"},{"key":"ref16\/cit16","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.9b09964"},{"key":"ref17\/cit17","doi-asserted-by":"publisher","DOI":"10.1073\/pnas.0911450106"},{"key":"ref18\/cit18","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6528\/aaabce"},{"key":"ref19\/cit19","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.8b06805"},{"key":"ref20\/cit20","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.1c03773"},{"key":"ref21\/cit21","doi-asserted-by":"publisher","DOI":"10.1371\/journal.pone.0092880"},{"key":"ref22\/cit22","doi-asserted-by":"publisher","DOI":"10.1038\/s41596-019-0255-2"},{"key":"ref23\/cit23","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2016.120"},{"key":"ref24\/cit24","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201900642"},{"key":"ref25\/cit25","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-019-49622-y"},{"key":"ref26\/cit26","doi-asserted-by":"publisher","DOI":"10.1021\/nl503034j"},{"key":"ref27\/cit27","doi-asserted-by":"publisher","DOI":"10.1021\/nn404743f"},{"key":"ref28\/cit28","doi-asserted-by":"publisher","DOI":"10.1021\/nn406586m"},{"key":"ref29\/cit29","doi-asserted-by":"publisher","DOI":"10.1039\/C7NR02629C"},{"key":"ref30\/cit30","doi-asserted-by":"publisher","DOI":"10.3390\/nano11092450"},{"key":"ref31\/cit31","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6528\/aa564d"},{"key":"ref32\/cit32","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.8b06489"},{"key":"ref33\/cit33","doi-asserted-by":"publisher","DOI":"10.1002\/smtd.201900147"},{"key":"ref34\/cit34","doi-asserted-by":"publisher","DOI":"10.1007\/s12274-022-4535-8"},{"key":"ref35\/cit35","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201303602"},{"key":"ref36\/cit36","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.0c23106"},{"key":"ref37\/cit37","doi-asserted-by":"publisher","DOI":"10.1021\/acs.analchem.3c04860"},{"key":"ref38\/cit38","doi-asserted-by":"publisher","DOI":"10.1016\/j.apmt.2020.100635"},{"key":"ref39\/cit39","doi-asserted-by":"publisher","DOI":"10.3390\/s19081886"},{"key":"ref40\/cit40","doi-asserted-by":"publisher","DOI":"10.1186\/s43074-023-00101-8"},{"key":"ref41\/cit41","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202110152"},{"key":"ref42\/cit42","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.2c09501"},{"key":"ref43\/cit43","doi-asserted-by":"publisher","DOI":"10.29026\/oea.2023.230029"},{"key":"ref44\/cit44","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-018-32957-3"},{"key":"ref45\/cit45","doi-asserted-by":"publisher","DOI":"10.1039\/D0NA00832J"},{"key":"ref46\/cit46","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.7b03530"},{"key":"ref47\/cit47","volume-title":"Laser-based Micro- and Nanoprocessing XV","author":"Uesugi Y.","year":"2021"},{"key":"ref48\/cit48","doi-asserted-by":"publisher","DOI":"10.1364\/OE.400941"},{"key":"ref49\/cit49","doi-asserted-by":"publisher","DOI":"10.1063\/1.5004081"},{"key":"ref50\/cit50","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmatprotec.2023.118001"},{"key":"ref51\/cit51","doi-asserted-by":"publisher","DOI":"10.1007\/s00339-022-06361-8"},{"key":"ref52\/cit52","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/26\/8\/084004"},{"key":"ref53\/cit53","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-018-19450-7"},{"key":"ref54\/cit54","doi-asserted-by":"publisher","DOI":"10.1088\/0957-4484\/22\/31\/315101"},{"key":"ref55\/cit55","doi-asserted-by":"publisher","DOI":"10.1038\/srep05000"},{"key":"ref56\/cit56","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2010.202"},{"key":"ref57\/cit57","doi-asserted-by":"publisher","DOI":"10.1021\/nn4014388"},{"key":"ref58\/cit58","doi-asserted-by":"publisher","DOI":"10.1116\/1.3585536"},{"key":"ref59\/cit59","doi-asserted-by":"publisher","DOI":"10.1021\/nl504345y"},{"key":"ref60\/cit60","doi-asserted-by":"publisher","DOI":"10.1021\/acs.analchem.1c01646"}],"container-title":["ACS Applied Materials & Interfaces"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acsami.5c00255","content-type":"application\/pdf","content-version":"vor","intended-application":"unspecified"},{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acsami.5c00255","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,2,5]],"date-time":"2025-02-05T04:50:03Z","timestamp":1738731003000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/doi\/10.1021\/acsami.5c00255"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,1,27]]},"references-count":60,"journal-issue":{"issue":"5","published-print":{"date-parts":[[2025,2,5]]}},"alternative-id":["10.1021\/acsami.5c00255"],"URL":"https:\/\/doi.org\/10.1021\/acsami.5c00255","relation":{"has-preprint":[{"id-type":"doi","id":"10.26434\/chemrxiv-2024-kcqq1","asserted-by":"object"}]},"ISSN":["1944-8244","1944-8252"],"issn-type":[{"value":"1944-8244","type":"print"},{"value":"1944-8252","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,1,27]]}}}