{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,7]],"date-time":"2026-10-07T13:02:05Z","timestamp":1791378125427,"version":"4.3.2"},"reference-count":46,"publisher":"American Chemical Society (ACS)","issue":"39","license":[{"start":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T00:00:00Z","timestamp":1790294400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-029"},{"start":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T00:00:00Z","timestamp":1790294400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-037"},{"start":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T00:00:00Z","timestamp":1790294400000},"content-version":"stm-asf","delay-in-days":0,"URL":"https:\/\/doi.org\/10.15223\/policy-045"}],"funder":[{"DOI":"10.13039\/501100002367","name":"Chinese Academy of Sciences","doi-asserted-by":"publisher","award":["XDA0380303"],"award-info":[{"award-number":["XDA0380303"]}],"id":[{"id":"10.13039\/501100002367","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2023YFB4603802"],"award-info":[{"award-number":["2023YFB4603802"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,10,7]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>Metasurfaces offer a transformative platform for ultracompact, multifunctional terahertz (THz) devices. However, realizing complex meta-units for advanced wavefront control and developing efficient fabrication methods still remain challenging. Herein, an advanced manufacturing platform based on holographic femtosecond laser lithography driven by an analytical-composite (AC) algorithm is proposed. This platform operates in a unit-by-unit manner, achieving a high-efficiency and high-throughput patterning. The AC algorithm achieves &amp;gt;80% holographic conversion efficiency, substantially surpassing traditional iterative methods (typically &amp;lt;50%). It generates rarely reported complex meta-units, such as multi-slit and concentrically nested multi-slit ring resonators, while simultaneously enabling full-parameter control (e.g., dimension, orientation angles) over these topologically intricate substructures. Each meta-unit, whether simple or complex, takes only 37 ms via unit-by-unit lithography, whereas point-by-point lithography scales with structural complexity. Consequently, 100 \u00d7 100 meta-units are fabricated within 10 min, outperforming point-by-point methods by an order of magnitude. The versatility and device-level performance of this approach are validated through three distinct high-performance THz devices: a triple-mode metalens for bifocal focusing, a quad-focus arrayed metalens, and a polarization-multiplexed holographic metasurface. All exhibit large-area uniformity, structural fidelity, and defect-free surfaces. This mask-free patterning lithography offers an efficient, complexity-independent fabrication of multifunctional metasurfaces across the THz spectrum and beyond.<\/jats:p>","DOI":"10.1021\/acsami.6c10614","type":"journal-article","created":{"date-parts":[[2026,9,25]],"date-time":"2026-09-25T09:02:20Z","timestamp":1790326940000},"page":"54146-54156","source":"Crossref","is-referenced-by-count":0,"title":["Analytic-Composite Algorithm-Driven Holographic Femtosecond Laser Lithography for Rapid Prototyping of Multifunctional Terahertz Metasurfaces"],"prefix":"10.1021","volume":"18","author":[{"given":"Dan","family":"Rao","sequence":"first","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences , , ,","place":["Shanghai, China, 201800"]},{"name":"University of Chinese Academy of Sciences , , ,","place":["Beijing, China, 100049"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3169-9198","authenticated-orcid":true,"given":"Jing","family":"Qian","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences , , ,","place":["Shanghai, China, 201800"]},{"name":"University of Chinese Academy of Sciences , , ,","place":["Beijing, China, 100049"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lequn","family":"Liu","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences , , ,","place":["Shanghai, China, 201800"]},{"name":"University of Chinese Academy of Sciences , , ,","place":["Beijing, China, 100049"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guande","family":"Wang","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences , , ,","place":["Shanghai, China, 201800"]},{"name":"University of Chinese Academy of Sciences , , ,","place":["Beijing, China, 100049"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2716-4318","authenticated-orcid":true,"given":"Yuxin","family":"Leng","sequence":"additional","affiliation":[{"name":"Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences , , ,","place":["Shanghai, China, 201800"]},{"name":"University of Chinese Academy of Sciences , , ,","place":["Beijing, China, 100049"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2026,9,25]]},"reference":[{"issue":"6125","key":"2026100708064874100_cit1","doi-asserted-by":"publisher","first-page":"6","DOI":"10.1126\/science.1232009","article-title":"Planar Photonics with Metasurfaces","volume":"339","author":"Kildishev","year":"2013","journal-title":"Science"},{"issue":"1","key":"2026100708064874100_cit2","doi-asserted-by":"publisher","first-page":"191","DOI":"10.1038\/s41377-023-01228-w","article-title":"Real-time programmable metasurface for terahertz multifunctional wave front engineering","volume":"12","author":"Lan","year":"2023","journal-title":"Light Sci. 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