{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,23]],"date-time":"2026-10-23T19:46:08Z","timestamp":1792784768157,"version":"4.5.0"},"reference-count":53,"publisher":"American Chemical Society (ACS)","issue":"40","license":[{"start":{"date-parts":[[2026,10,3]],"date-time":"2026-10-03T00:00:00Z","timestamp":1790985600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/100016019","name":"Freistaat Th\u00fcringen","doi-asserted-by":"publisher","id":[{"id":"10.13039\/100016019","id-type":"DOI","asserted-by":"publisher"}]},{"name":"German Research Council (DFG)","award":["405054418"],"award-info":[{"award-number":["405054418"]}]},{"name":"European Social Fund","award":["2023FGR0053"],"award-info":[{"award-number":["2023FGR0053"]}],"id":[{"id":"https:\/\/ror.org\/048snh465","id-type":"ROR","asserted-by":"crossref"}]},{"name":"Fraunhofer Cluster of Excellence Advanced Photon Sources","id":[{"id":"https:\/\/ror.org\/04qxsr837","id-type":"ROR","asserted-by":"crossref"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,10,14]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>Quantitative, nondestructive characterization of materials at the nanoscale is crucial for the development of advanced energy, electronic, and nanostructured systems. In this context, microscopy based on extreme ultraviolet (EUV) radiation has recently attracted considerable interest, as it combines high spatial resolution, strong elemental contrast, and micrometer-scale penetration depth in compact, table-top setups. Here, we employ EUV ptychography to quantitatively resolve the spatial distribution of silicon, oxygen, and aluminum with sub-50 nm half-pitch resolution. Compared to the established energy-dispersive X-ray spectroscopy (EDX) technique, our approach delivers enhanced image quality and spatial resolution, while conventional methods reach their limits. This is enabled by retrieving element-specific atomic areal densities from quantitative amplitude and phase reconstructions provided by EUV ptychography. With a single-wavelength illumination, we determine the oxygen and silicon content within a 1.4 \u03bcm thick lamella of an all-solid-state battery anode. We additionally characterize the composition of a more complex aluminum\u2013silicon alloy, enabled through differential contrast dual-wavelength EUV ptychography. Overall, these results establish EUV ptychography as a powerful technique for quantitative nanoscale material analysis. It is suitable for radiation-sensitive specimens or elements, which are difficult to distinguish in electron microscopy. Its capability to accurately map light elements, often challenging for conventional methods, makes it a promising tool for applications spanning materials science, energy technologies, and microbiology.<\/jats:p>","DOI":"10.1021\/acsami.6c13118","type":"journal-article","created":{"date-parts":[[2026,10,3]],"date-time":"2026-10-03T12:01:43Z","timestamp":1791028903000},"page":"55324-55333","source":"Crossref","is-referenced-by-count":0,"title":["Quantitative Nanoscale Material Mapping Based on Extreme Ultraviolet Ptychography"],"prefix":"10.1021","volume":"18","author":[{"ORCID":"https:\/\/orcid.org\/0009-0002-3493-0858","authenticated-orcid":true,"given":"Leona","family":"Licht","sequence":"first","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wilhelm","family":"Eschen","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chang","family":"Liu","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Johannes","family":"Reents","sequence":"additional","affiliation":[{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Themistoklis","family":"Sidiropoulos","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Daniel Santiago Penagos","family":"Molina","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"J\u00f6rg","family":"Kaspa","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Material and Beam Technology , Winterbergstra\u00dfe 28 , ,","place":["Dresden, Germany, 01277"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3865-6262","authenticated-orcid":true,"given":"Holger","family":"Althues","sequence":"additional","affiliation":[{"name":"Fraunhofer Institute for Material and Beam Technology , Winterbergstra\u00dfe 28 , ,","place":["Dresden, Germany, 01277"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jonathan","family":"Apell","sequence":"additional","affiliation":[{"name":"Friedrich-Schiller-Universit\u00e4t-Jena , , ,","place":["Jena, Germany, 07743"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6769-4911","authenticated-orcid":true,"given":"Dongmei","family":"Liu","sequence":"additional","affiliation":[{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Stephanie","family":"Lippmann","sequence":"additional","affiliation":[{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Fraunhofer Institute for Applied Optics and Precision Engineering , Albert-Einstein-Stra\u00dfe 7 , ,","place":["Jena, Germany, 07745"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jens","family":"Limpert","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]},{"name":"Fraunhofer Institute for Applied Optics and Precision Engineering , Albert-Einstein-Stra\u00dfe 7 , ,","place":["Jena, Germany, 07745"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jan","family":"Rothhardt","sequence":"additional","affiliation":[{"name":"GSI Helmholtzzentrum f\u00fcr Schwerionenforschung , Planckstra\u00dfe 1 , ,","place":["Darmstadt, Germany, 64291"]},{"name":"Friedrich-Schiller-University Jena , , Albert-Einstein-Stra\u00dfe 15 , ,","place":["Jena, Germany, 07745"]},{"name":"Helmholtz-Institute Jena , Fr\u00f6belstieg 3 , ,","place":["Jena, Germany, 07743"]},{"name":"Fraunhofer Institute for Applied Optics and Precision Engineering , Albert-Einstein-Stra\u00dfe 7 , ,","place":["Jena, Germany, 07745"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2026,10,3]]},"reference":[{"issue":"1","key":"2026101408071322700_cit1","doi-asserted-by":"publisher","first-page":"16","DOI":"10.1111\/j.0022-2720.2005.01414.x","article-title":"Recent Developments and New Strategies in Scanning Electron Microscopy","volume":"217","author":"Cazaux","year":"2005","journal-title":"J. Microsc."},{"issue":"18","key":"2026101408071322700_cit2","doi-asserted-by":"publisher","first-page":"1497","DOI":"10.1002\/ADMA.200300384","article-title":"New Developments in Transmission Electron Microscopy for Nanotechnology","volume":"15","author":"Wang","year":"2003","journal-title":"Adv. Mater."},{"issue":"10","key":"2026101408071322700_cit3","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevB.81.100101","article-title":"Atomic-Resolution Chemical Mapping Using Energy-Dispersive X-Ray Spectroscopy","volume":"81","author":"D\u2019Alfonso","year":"2010","journal-title":"Phys. Rev. B"},{"key":"2026101408071322700_cit4","doi-asserted-by":"crossref","DOI":"10.1007\/978-3-030-00069-1","volume-title":"Springer Handbook of Microscopy","author":"Hawkes","year":"2019"},{"issue":"6","key":"2026101408071322700_cit5","doi-asserted-by":"publisher","first-page":"399","DOI":"10.1016\/j.micron.2004.02.003","article-title":"Radiation Damage in the TEM and SEM","volume":"35","author":"Egerton","year":"2004","journal-title":"Micron"},{"issue":"6451","key":"2026101408071322700_cit6","doi-asserted-by":"publisher","first-page":"143","DOI":"10.1038\/366143A0","article-title":"Atomic-Resolution Chemical Analysis Using a Scanning Transmission Electron Microscope","volume":"366","author":"Browning","year":"1993","journal-title":"Nature"},{"issue":"3","key":"2026101408071322700_cit7","doi-asserted-by":"publisher","first-page":"4133","DOI":"10.1364\/oe.443622","article-title":"Advances in Laboratory-Scale Ptychography Using High Harmonic Sources","volume":"30","author":"Loetgering","year":"2022","journal-title":"Opt. Express"},{"issue":"4","key":"2026101408071322700_cit8","doi-asserted-by":"publisher","first-page":"259","DOI":"10.1038\/nphoton.2017.33","article-title":"Subwavelength Coherent Imaging of Periodic Samples Using a 13.5 nm Tabletop High-Harmonic Light Source","volume":"11","author":"Gardner","year":"2017","journal-title":"Nat. Photonics"},{"issue":"1","key":"2026101408071322700_cit9","doi-asserted-by":"publisher","first-page":"117","DOI":"10.1038\/s41377-022-00797-6","article-title":"Material-Specific High-Resolution Table-Top Extreme Ultraviolet Microscopy","volume":"11","author":"Eschen","year":"2022","journal-title":"Light Sci. Appl."},{"issue":"9","key":"2026101408071322700_cit10","doi-asserted-by":"publisher","first-page":"14212","DOI":"10.1364\/oe.485779","article-title":"High-Speed and Wide-Field Nanoscale Table-Top Ptychographic EUV Imaging and Beam Characterization with a sCMOS Detector","volume":"31","author":"Eschen","year":"2023","journal-title":"Opt. Express"},{"issue":"1","key":"2026101408071322700_cit11","doi-asserted-by":"publisher","first-page":"79","DOI":"10.1038\/s41377-025-02057-9","article-title":"Soft X-Ray Imaging with Coherence Tomography in the Water Window Spectral Range Using High-Harmonic Generation","volume":"15","author":"Reinhard","year":"2026","journal-title":"Light Sci. Appl."},{"key":"2026101408071322700_cit12","doi-asserted-by":"publisher","first-page":"98","DOI":"10.1016\/J.ULTRAMIC.2015.07.006","article-title":"High Contrast 3D Imaging of Surfaces near the Wavelength Limit Using Tabletop EUV Ptychography","volume":"158","author":"Zhang","year":"2015","journal-title":"Ultramicroscopy"},{"issue":"8045","key":"2026101408071322700_cit13","doi-asserted-by":"publisher","first-page":"281","DOI":"10.1038\/S41586-024-08278-Z","article-title":"Computational Microscopy with Coherent Diffractive Imaging and Ptychography","volume":"637","author":"Miao","year":"2025","journal-title":"Nature"},{"issue":"5","key":"2026101408071322700_cit14","doi-asserted-by":"publisher","DOI":"10.1063\/5.0254017","article-title":"Coherent Nanoscale Imaging and Chemical Mapping with Compact Extreme Ultraviolet and Soft X-Ray Sources: Review and Perspective","volume":"10","author":"Eschen","year":"2025","journal-title":"APL Photonics"},{"key":"2026101408071322700_cit15","doi-asserted-by":"publisher","first-page":"819","DOI":"10.1007\/978-3-030-00069-1_17","volume-title":"Springer Handbook of Microscopy","author":"Rodenburg","year":"2019"},{"issue":"10","key":"2026101408071322700_cit16","doi-asserted-by":"publisher","first-page":"1256","DOI":"10.1016\/j.ultramic.2009.05.012","article-title":"An Improved Ptychographical Phase Retrieval Algorithm for Diffractive Imaging","volume":"109","author":"Maiden","year":"2009","journal-title":"Ultramicroscopy"},{"issue":"1","key":"2026101408071322700_cit17","doi-asserted-by":"publisher","first-page":"9","DOI":"10.1038\/s41566-017-0072-5","article-title":"X-Ray Ptychography","volume":"12","author":"Pfeiffer","year":"2018","journal-title":"Nat. Photonics"},{"issue":"8023","key":"2026101408071322700_cit18","doi-asserted-by":"publisher","first-page":"81","DOI":"10.1038\/s41586-024-07615-6","article-title":"High-Performance 4-nm-Resolution X-Ray Tomography Using Burst Ptychography","volume":"632","author":"Aidukas","year":"2024","journal-title":"Nature"},{"issue":"5887","key":"2026101408071322700_cit19","doi-asserted-by":"publisher","first-page":"379","DOI":"10.1126\/science.1158573","article-title":"High-Resolution Scanning X-Ray Diffraction Microscopy","volume":"321","author":"Thibault","year":"2008","journal-title":"Science"},{"issue":"20","key":"2026101408071322700_cit20","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevLett.107.208101","article-title":"Chemical Contrast in Soft X-Ray Ptychography","volume":"107","author":"Beckers","year":"2011","journal-title":"Phys. Rev. Lett."},{"issue":"10","key":"2026101408071322700_cit21","doi-asserted-by":"publisher","first-page":"765","DOI":"10.1038\/nphoton.2014.207","article-title":"Chemical Composition Mapping with Nanometre Resolution by Soft X-Ray Microscopy","volume":"8","author":"Shapiro","year":"2014","journal-title":"Nat. Photonics"},{"key":"2026101408071322700_cit22","doi-asserted-by":"publisher","first-page":"6796","DOI":"10.1038\/srep06796","article-title":"Mapping Biological Composition through Quantitative Phase and Absorption X-Ray Ptychography","volume":"4","author":"Jones","year":"2014","journal-title":"Sci. Rep."},{"issue":"5","key":"2026101408071322700_cit23","doi-asserted-by":"publisher","DOI":"10.1126\/sciadv.abd9667","article-title":"Nondestructive, High-Resolution, Chemically Specific 3D Nanostructure Characterization Using Phase-Sensitive EUV Imaging Reflectometry","volume":"7","author":"Tanksalvala","year":"2021","journal-title":"Sci. Adv."},{"issue":"9","key":"2026101408071322700_cit24","doi-asserted-by":"publisher","first-page":"5444","DOI":"10.1021\/acs.nanolett.6b01864","article-title":"Quantitative Chemically Specific Coherent Diffractive Imaging of Reactions at Buried Interfaces with Few Nanometer Precision","volume":"16","author":"Shanblatt","year":"2016","journal-title":"Nano Lett."},{"issue":"1","key":"2026101408071322700_cit25","doi-asserted-by":"publisher","first-page":"6","DOI":"10.1186\/s43074-023-00084-6","article-title":"Visualizing the Ultra-Structure of Microorganisms Using Table-Top Extreme Ultraviolet Imaging","volume":"4","author":"Liu","year":"2023","journal-title":"PhotoniX"},{"issue":"1","key":"2026101408071322700_cit26","doi-asserted-by":"publisher","first-page":"47","DOI":"10.1186\/S43074-026-00266-Y","article-title":"Quantitative EUV Ptychography Reveals Nanoscale Morphological Responses of Bacteria under Physiological and Antibiotic Stress","volume":"7","author":"Liu","year":"2026","journal-title":"PhotoniX"},{"key":"2026101408071322700_cit27","doi-asserted-by":"publisher","first-page":"6680","DOI":"10.1021\/acsphotonics.5c01717","article-title":"Material-Sensitive and Thickness-Resolved Transmission Imaging Using Coherent Extreme Ultraviolet Radiation","volume":"12","author":"Zhang","year":"2025","journal-title":"ACS Photonics"},{"issue":"3","key":"2026101408071322700_cit28","doi-asserted-by":"publisher","first-page":"3480","DOI":"10.1364\/oe.507715","article-title":"Structured Illumination Ptychography and At-Wavelength Characterization with an EUV Diffuser at 13.5 nm Wavelength","volume":"32","author":"Eschen","year":"2024","journal-title":"Opt. Express"},{"issue":"5","key":"2026101408071322700_cit29","doi-asserted-by":"publisher","first-page":"1581","DOI":"10.1364\/OL.543865","article-title":"Purity-Based Self-Calibration in Ptychography","volume":"50","author":"Liu","year":"2025","journal-title":"Opt. Lett."},{"issue":"34","key":"2026101408071322700_cit30","doi-asserted-by":"publisher","DOI":"10.1002\/aenm.202001320","article-title":"Enabling High-Energy Solid-State Batteries with Stable Anode Interphase by the Use of Columnar Silicon Anodes","volume":"10","author":"Cangaz","year":"2020","journal-title":"Adv. Energy Mater."},{"key":"2026101408071322700_cit31","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1007\/978-3-319-98482-7","author":"Ul-Hamid","year":"2018","journal-title":"A Beginners\u2019 Guide to Scanning Electron Microscopy"},{"issue":"5","key":"2026101408071322700_cit32","doi-asserted-by":"publisher","first-page":"6188","DOI":"10.1364\/OE.28.006188","article-title":"Generation of Coherent Broadband High Photon Flux Continua in the XUV with a Sub-Two-Cycle Fiber Laser","volume":"28","author":"Klas","year":"2020","journal-title":"Opt. Express"},{"key":"2026101408071322700_cit33","doi-asserted-by":"publisher","first-page":"181","DOI":"10.1006\/adnd.1993.1013","article-title":"X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50\u201330,000 eV, Z = 1\u201392","volume":"54","author":"Henke","year":"1993","journal-title":"At. Data Nucl. Data Tables"},{"issue":"3","key":"2026101408071322700_cit34","doi-asserted-by":"publisher","first-page":"363","DOI":"10.1016\/J.JSB.2013.05.004","article-title":"Fourier Ring Correlation as a Resolution Criterion for Super-Resolution Microscopy","volume":"183","author":"Banterle","year":"2013","journal-title":"J. Struct. Biol."},{"issue":"10","key":"2026101408071322700_cit35","doi-asserted-by":"publisher","first-page":"1226","DOI":"10.3139\/146.110576","article-title":"Observation of Early Melting Stages of an Al-Cu Alloy in a Temperature Gradient","volume":"102","author":"Fischer","year":"2011","journal-title":"Int. J. Mater. Res."},{"key":"2026101408071322700_cit36","doi-asserted-by":"publisher","first-page":"32","DOI":"10.1016\/J.ACTAMAT.2014.02.032","article-title":"Experimental Determination of the Nucleation Rate of Melt in a Solid Solution","volume":"72","author":"Lippmann","year":"2014","journal-title":"Acta Mater."},{"key":"2026101408071322700_cit37","doi-asserted-by":"publisher","DOI":"10.1088\/1757-899X\/27\/1\/012019","article-title":"Observation of the Formation of Liquid Droplets in Steep Temperature Gradients","volume":"27","author":"Fischer","year":"2012","journal-title":"IOP Conf. Ser. Mater. Sci. Eng."},{"key":"2026101408071322700_cit38","doi-asserted-by":"publisher","first-page":"231","DOI":"10.1088\/0034-4885\/37\/2\/002","article-title":"The Oxidation of Metals","volume":"37","author":"Lawless","year":"1974","journal-title":"Rep. Prog. Phys."},{"issue":"1","key":"2026101408071322700_cit39","doi-asserted-by":"publisher","first-page":"163","DOI":"10.1088\/0034-4885\/12\/1\/308","article-title":"Theory of the Oxidation of Metals","volume":"12","author":"Cabrera","year":"1949","journal-title":"Rep. Prog. Phys."},{"issue":"1","key":"2026101408071322700_cit40","doi-asserted-by":"publisher","first-page":"1550","DOI":"10.1038\/s41467-020-15355-0","article-title":"A Reflection on Lithium-Ion Battery Cathode Chemistry","volume":"11","author":"Manthiram","year":"2020","journal-title":"Nat. Commun."},{"issue":"6086","key":"2026101408071322700_cit41","doi-asserted-by":"publisher","first-page":"1287","DOI":"10.1126\/SCIENCE.1218497","article-title":"Bright Coherent Ultrahigh Harmonics in the keV X-Ray Regime from Mid-Infrared Femtosecond Lasers","volume":"336","author":"Popmintchev","year":"2012","journal-title":"Science"},{"issue":"10","key":"2026101408071322700_cit42","doi-asserted-by":"publisher","first-page":"618","DOI":"10.1038\/s41566-020-0660-7","article-title":"Broadband Coherent Diffractive Imaging","volume":"14","author":"Huijts","year":"2020","journal-title":"Nat. Photonics"},{"issue":"1","key":"2026101408071322700_cit43","doi-asserted-by":"publisher","first-page":"213","DOI":"10.1038\/s41377-024-01581-4","article-title":"Ultra-Broadband Diffractive Imaging with Unknown Probe Spectrum","volume":"13","author":"Chen","year":"2024","journal-title":"Light Sci. Appl."},{"issue":"1","key":"2026101408071322700_cit44","doi-asserted-by":"publisher","first-page":"5714","DOI":"10.1038\/s41467-025-61339-3","article-title":"Ultra-Broadband Ptychography for Dispersive Samples","volume":"16","author":"Lin","year":"2025","journal-title":"Nat. Commun."},{"issue":"2","key":"2026101408071322700_cit45","doi-asserted-by":"publisher","first-page":"130","DOI":"10.1364\/OPTICA.410007","article-title":"Tailoring Spatial Entropy in Extreme Ultraviolet Focused Beams for Multispectral Ptychography","volume":"8","author":"Loetgering","year":"2021","journal-title":"Optica"},{"issue":"5","key":"2026101408071322700_cit46","doi-asserted-by":"publisher","DOI":"10.1063\/5.0147576","article-title":"Spectrally Tunable Ultrashort Monochromatized Extreme Ultraviolet Pulses at 100 kHz","volume":"8","author":"Csizmadia","year":"2023","journal-title":"APL Photonics"},{"issue":"1","key":"2026101408071322700_cit47","doi-asserted-by":"publisher","first-page":"12","DOI":"10.1038\/s41377-023-01342-9","article-title":"Highly Efficient and Aberration-Free Off-Plane Grating Spectrometer and Monochromator for EUV\u2014Soft X-Ray Applications","volume":"13","author":"Li","year":"2024","journal-title":"Light Sci. Appl."},{"key":"2026101408071322700_cit48","doi-asserted-by":"publisher","first-page":"19","DOI":"10.1557\/PROC-480-19","article-title":"Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation","volume":"480","author":"Giannuzzi","year":"1997","journal-title":"MRS Proc."},{"issue":"7","key":"2026101408071322700_cit49","doi-asserted-by":"publisher","first-page":"736","DOI":"10.1364\/OPTICA.4.000736","article-title":"Further Improvements to the Ptychographical Iterative Engine","volume":"4","author":"Maiden","year":"2017","journal-title":"Optica"},{"issue":"7435","key":"2026101408071322700_cit50","doi-asserted-by":"publisher","first-page":"68","DOI":"10.1038\/NATURE11806","article-title":"Reconstructing State Mixtures from Diffraction Measurements","volume":"494","author":"Thibault","year":"2013","journal-title":"Nature"},{"issue":"8","key":"2026101408071322700_cit51","doi-asserted-by":"publisher","first-page":"8360","DOI":"10.1364\/OE.24.008360","article-title":"Ptychographic Coherent Diffractive Imaging with Orthogonal Probe Relaxation","volume":"24","author":"Odstrcil","year":"2016","journal-title":"Opt. Express"},{"issue":"9","key":"2026101408071322700_cit52","doi-asserted-by":"publisher","first-page":"13763","DOI":"10.1364\/oe.485370","article-title":"PtyLab.m\/Py\/Jl: A Cross-Platform, Open-Source Inverse Modeling Toolbox for Conventional and Fourier Ptychography","volume":"31","author":"Loetgering","year":"2023","journal-title":"Opt. Express"},{"issue":"17","key":"2026101408071322700_cit53","doi-asserted-by":"publisher","DOI":"10.1063\/1.4874304","article-title":"Ptychography with Broad-Bandwidth Radiation","volume":"104","author":"Enders","year":"2014","journal-title":"Appl. Phys. Lett."}],"container-title":["ACS Applied Materials &amp; Interfaces"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acsami.6c13118","content-type":"application\/pdf","content-version":"vor","intended-application":"unspecified"},{"URL":"https:\/\/pubs.acs.org\/aamick\/article-pdf\/18\/40\/55324\/68739111\/am-2026-13118p.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.acs.org\/aamick\/article-pdf\/18\/40\/55324\/68739111\/am-2026-13118p.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,10,14]],"date-time":"2026-10-14T12:29:52Z","timestamp":1791980992000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/aamick\/article\/18\/40\/55324\/5444180\/Quantitative-Nanoscale-Material-Mapping-Based-on"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,10,3]]},"references-count":53,"journal-issue":{"issue":"40","published-online":{"date-parts":[[2026,10,3]]},"published-print":{"date-parts":[[2026,10,14]]}},"URL":"https:\/\/doi.org\/10.1021\/acsami.6c13118","relation":{},"ISSN":["1944-8244","1944-8252"],"issn-type":[{"value":"1944-8244","type":"print"},{"value":"1944-8252","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,10,3]]}}}