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Their widescale usage is dependent on a reliable encapsulation to protect them from corrosion of body fluids, yet not increasing their sizes or impairing their sensing functions during their lifespans. To realize the above requirements, an ultrathin, flexible, waterproof while robust micro\u2013nano composite coating for encapsulation of an implantable pressure sensor is designed. The composite coating is composed of a nanolayer of silane-coupled molecules and a microlayer of parylene polymers. The mechanism and principle of the composite encapsulation coating with high adhesion are elucidated. Experimental results show that the error of the sensors after encapsulation is less than 2 mmHg, after working continuously for equivalently over 434 days in a simulated body fluid environment. The effects of the coating thickness on the waterproof time and the error of the sensor are also studied. The encapsulated sensor is implanted in an isolated porcine eye and a living rabbit eye, exhibiting excellent performances. Therefore, the micro\u2013nano composite encapsulation coating would have an appealing application in micro\u2013nano-device protections, especially for implantable biomedical devices.<\/jats:p>","DOI":"10.1021\/acsomega.0c02897","type":"journal-article","created":{"date-parts":[[2020,9,2]],"date-time":"2020-09-02T09:27:30Z","timestamp":1599038850000},"page":"23129-23139","source":"Crossref","is-referenced-by-count":20,"title":["Ultrathin and Robust Micro\u2013Nano Composite Coating\nfor Implantable Pressure Sensor Encapsulation"],"prefix":"10.1021","volume":"5","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6797-0747","authenticated-orcid":true,"given":"Jialin","family":"Yao","sequence":"first","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenjiang","family":"Qiang","sequence":"additional","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hao","family":"Wei","sequence":"additional","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yan","family":"Xu","sequence":"additional","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bo","family":"Wang","sequence":"additional","affiliation":[{"name":"Yantai University , , ,","place":["Yantai, People\u2019s Republic of China, 264005"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yushuang","family":"Zheng","sequence":"additional","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xizi","family":"Wang","sequence":"additional","affiliation":[{"name":"University of Science and Technology Beijing , , ,","place":["Beijing, People\u2019s Republic of China, 100083"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zequn","family":"Miao","sequence":"additional","affiliation":[{"name":"Peking University People\u2019s Hospital , , ,","place":["Beijing, People\u2019s Republic of China, 100044"]},{"name":"Beijing Key Laboratory of Diagnosis and Therapy of Retinal and Choroid Diseases , ,","place":["Beijing, People\u2019s Republic of China, 100044"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lejin","family":"Wang","sequence":"additional","affiliation":[{"name":"Peking University People\u2019s Hospital , , ,","place":["Beijing, People\u2019s Republic of China, 100044"]},{"name":"Beijing Key Laboratory of Diagnosis and Therapy of Retinal and Choroid Diseases , ,","place":["Beijing, People\u2019s Republic of China, 100044"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Song","family":"Wang","sequence":"additional","affiliation":[{"name":"Tsinghua University , , ,","place":["Beijing, People\u2019s Republic of China, 100084"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1249-3602","authenticated-orcid":true,"given":"Xing","family":"Yang","sequence":"additional","affiliation":[{"name":"Tsinghua University , , ,","place":["Beijing, People\u2019s Republic of China, 100084"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2020,9,2]]},"reference":[{"key":"2026090209454782900_cit1","doi-asserted-by":"publisher","first-page":"1074","DOI":"10.1038\/nm.3621","article-title":"An implantable microfluidic device\nfor self-monitoring of intraocular pressure","volume":"20","author":"Araci","year":"2014","journal-title":"Nat. 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