{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,3]],"date-time":"2026-09-03T12:13:20Z","timestamp":1788437600535,"version":"build-2803163510"},"reference-count":90,"publisher":"American Chemical Society (ACS)","issue":"34","license":[{"start":{"date-parts":[[2026,8,21]],"date-time":"2026-08-21T00:00:00Z","timestamp":1787270400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004410","name":"T?rkiye Bilimsel ve Teknolojik Arastirma Kurumu","doi-asserted-by":"publisher","award":["1649B022312283"],"award-info":[{"award-number":["1649B022312283"]}],"id":[{"id":"10.13039\/501100004410","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2026,9,1]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>Transparent conducting oxides (TCOs) are critical components of perovskite solar cells (PSCs), motivating the search for low-cost and scalable alternatives to conventional fluorine-doped tin oxide (FTO). Among the proposed alternatives, Al-doped ZnO (AZO) has been widely investigated as a low-cost, indium-free transparent conductive oxide. However, systematic studies correlating sputtering parameters with AZO thin film properties and PSC performance through direct benchmarking against commercial FTO under identical device fabrication conditions remain limited. In this study, AZO thin films were systematically optimized by magnetron sputtering through controlled variation of sputtering power, annealing conditions, substrate temperature, and deposition duration. The optimized high-temperature-grown AZO film (AZO-13) exhibited high visible transparency (\u223c86%), low sheet resistance (1.26 \u00d7 101 \u03a9\u00b7sq\u20131), strong preferential (002) orientation, and high calculated electrical conductivity (\u223c9.85 \u00d7 102 S\u00b7cm\u20131), achieving a Haacke figure of merit (0.668) that slightly surpassed that of commercial FTO (0.664). To evaluate its applicability as a transparent electrode, the optimized AZO film was directly integrated into PSC devices and compared with commercial FTO under identical fabrication conditions. The AZO-based PSC achieved a stabilized efficiency of 16.49%, while comparative PL\/TRPL, EQE, and EIS analyses revealed that the lower device performance mainly originated from increased interfacial resistance and less efficient charge extraction. In addition, AZO exhibited improved long-wavelength transparency compared with FTO, suggesting potential relevance for tandem-oriented photovoltaic applications. These results establish a clear process\u2013structure\u2013property\u2013device relationship for sputtered AZO thin films and demonstrate their potential as alternative TCO electrodes for PSC technologies.<\/jats:p>","DOI":"10.1021\/acsomega.6c06694","type":"journal-article","created":{"date-parts":[[2026,8,22]],"date-time":"2026-08-22T16:22:13Z","timestamp":1787415733000},"page":"51931-51950","source":"Crossref","is-referenced-by-count":0,"title":["Systematic Optimization\nof Sputtered AZO Thin Films\nand Their Integration as Alternative Transparent Electrodes for Perovskite\nSolar Cells"],"prefix":"10.1021","volume":"11","author":[{"given":"Zeynep","family":"Mavili","sequence":"first","affiliation":[{"name":"Necmettin Erbakan University , , ,","place":["Konya, Tu\u0308rkiye, 42090"]},{"name":"Necmettin Erbakan University , , ,","place":["Konya, Tu\u0308rkiye, 42090"]}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3387-5095","authenticated-orcid":true,"given":"Mucahit","family":"Yilmaz","sequence":"additional","affiliation":[{"name":"Necmettin Erbakan University , , ,","place":["Konya, Tu\u0308rkiye, 42090"]},{"name":"Necmettin Erbakan University , , ,","place":["Konya, Tu\u0308rkiye, 42090"]}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"316","published-online":{"date-parts":[[2026,8,21]]},"reference":[{"key":"2026090307190025500_cit1","doi-asserted-by":"publisher","first-page":"1226","DOI":"10.3390\/nano13071226","article-title":"A Brief Review of\nTransparent Conducting Oxides (TCO): The Influence of Different Deposition\nTechniques on the Efficiency of Solar Cells","volume":"13","author":"Chavan","year":"2023","journal-title":"Nanomaterials"},{"key":"2026090307190025500_cit2","doi-asserted-by":"publisher","DOI":"10.1002\/solr.202500942","article-title":"Indium-Free\nRecombination Junctions on\nTunnel Oxide Passivating Contacts for Fully Textured Perovskite\/Silicon\nTandem Solar Cells","volume":"10","author":"Hanser","year":"2026","journal-title":"Sol. RRL"},{"key":"2026090307190025500_cit3","doi-asserted-by":"publisher","first-page":"391","DOI":"10.1109\/JPHOTOV.2026.3665341","article-title":"Selective\nAnnealing of Transparent Conductive Oxides on Silicon Heterojunction\nSolar Cells Enabled by UV Laser Processing","volume":"16","author":"Mu\u0308nzer","year":"2026","journal-title":"IEEE J. Photovoltaics"},{"key":"2026090307190025500_cit4","doi-asserted-by":"publisher","DOI":"10.1002\/cssc.202502745","article-title":"Transparent\nConductive Oxide Electrodes in Perovskite Solar Cells: Challenges,\nStrategies, and Outlook","volume":"19","author":"Sang","year":"2026","journal-title":"ChemSusChem"},{"key":"2026090307190025500_cit5","doi-asserted-by":"publisher","first-page":"100330","DOI":"10.1016\/j.omx.2024.100330","article-title":"Effect of transparent conductive layers on\nthe functionality of liquid\ncrystal devices: Comparison of AZO, FTO and ITO","volume":"22","author":"Marinova","year":"2024","journal-title":"Opt. Mater.: X"},{"key":"2026090307190025500_cit6","doi-asserted-by":"publisher","first-page":"2013","DOI":"10.3390\/nano14242013","article-title":"A Review of Transparent\nConducting Films (TCFs): Prospective ITO and AZO Deposition Methods\nand Applications","volume":"14","author":"Patel","year":"2024","journal-title":"Nanomaterials"},{"key":"2026090307190025500_cit7","doi-asserted-by":"publisher","DOI":"10.1002\/pssa.70383","article-title":"Flexible Aluminum-Doped Zinc Oxide\/Cu\nMesh\/Aluminum-Doped Zinc Oxide Tri-Layer Films for Transparent Electrodes","volume":"223","author":"Li","year":"2026","journal-title":"Phys. Status Solidi A"},{"key":"2026090307190025500_cit8","doi-asserted-by":"publisher","first-page":"36","DOI":"10.1109\/OJNANO.2022.3224757","article-title":"Recent Advances in Touch Sensors\nfor Flexible Displays","volume":"4","author":"Ouyang","year":"2023","journal-title":"IEEE Open J. Nanotechnol."},{"key":"2026090307190025500_cit9","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202520981","article-title":"A Flexible,\nBroadband Optoelectronic Memristor for Neuromorphic Visual Perception\nand Intelligent Image Processing","volume":"36","author":"Gao","year":"2026","journal-title":"Adv. Funct.\nMater."},{"key":"2026090307190025500_cit10","doi-asserted-by":"publisher","first-page":"115291","DOI":"10.1016\/j.optlastec.2026.115291","article-title":"Transparent\nand flexible aluminum-doped ZnO electrodes for next-generation optoelectronic\ndevices","volume":"201","author":"Haddad","year":"2026","journal-title":"Opt. Laser Technol."},{"key":"2026090307190025500_cit11","doi-asserted-by":"publisher","first-page":"13018","DOI":"10.1016\/j.ceramint.2025.01.148","article-title":"Atomic Layer-deposited\nflexible ZnO transparent electrodes with Zn-Al-O\ninterface for electrochromic devices","volume":"51","author":"Chen","year":"2025","journal-title":"Ceram.\nInt."},{"key":"2026090307190025500_cit12","doi-asserted-by":"publisher","first-page":"100007","DOI":"10.1016\/j.gerr.2023.100007","article-title":"Recent\nprogress in improving strategies of metal oxide-based electrochromic\nsmart window","volume":"1","author":"Guo","year":"2023","journal-title":"Green Energy Resour."},{"key":"2026090307190025500_cit13","doi-asserted-by":"publisher","first-page":"113942","DOI":"10.1016\/j.vacuum.2024.113942","article-title":"ALD grown undoped ZnO\nand Al-doped-ZnO thin-film heaters","volume":"233","author":"Tugrul","year":"2025","journal-title":"Vacuum"},{"key":"2026090307190025500_cit14","doi-asserted-by":"publisher","first-page":"357","DOI":"10.1016\/j.snb.2011.07.061","article-title":"Transparent conducting\noxide electrodes for novel metal oxide gas\nsensors","volume":"160","author":"Shim","year":"2011","journal-title":"Sens. Actuators, B"},{"key":"2026090307190025500_cit15","doi-asserted-by":"publisher","first-page":"809","DOI":"10.1038\/nphoton.2012.282","article-title":"Past achievements\nand future challenges in the development of optically transparent\nelectrodes","volume":"6","author":"Ellmer","year":"2012","journal-title":"Nat. Photonics"},{"key":"2026090307190025500_cit16","doi-asserted-by":"publisher","first-page":"S35","DOI":"10.1088\/0268-1242\/20\/4\/004","article-title":"Transparent\nconducting oxide semiconductors for transparent electrodes","volume":"20","author":"Minami","year":"2005","journal-title":"Semicond. Sci. Technol."},{"key":"2026090307190025500_cit17","doi-asserted-by":"publisher","first-page":"127","DOI":"10.1016\/j.vacuum.2012.02.040","article-title":"Influence of thickness and annealing temperature on the electrical,\noptical and structural properties of AZO thin films","volume":"89","author":"Wang","year":"2013","journal-title":"Vacuum"},{"key":"2026090307190025500_cit18","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1108\/MI-06-2015-0058","article-title":"Electrical\nand optical\nproperties of aluminium doped zinc oxide transparent conducting oxide\nfilms prepared by dip coating technique","volume":"34","author":"Manjakkal","year":"2017","journal-title":"Microelectron.\nInt."},{"key":"2026090307190025500_cit19","doi-asserted-by":"publisher","first-page":"14203","DOI":"10.1021\/acsomega.2c00830","article-title":"Room Temperature\nSputtered Aluminum-Doped ZnO Thin Film Transparent Electrode for Application\nin Solar Cells and for Low-Band-Gap Optoelectronic Devices","volume":"7","author":"Badgujar","year":"2022","journal-title":"ACS Omega"},{"key":"2026090307190025500_cit20","doi-asserted-by":"publisher","first-page":"670","DOI":"10.3390\/cryst15080670","article-title":"Towards\nAZO Thin Films for Electronic\nand Optoelectronic Large-Scale Applications","volume":"15","author":"Bancu","year":"2025","journal-title":"Crystals"},{"key":"2026090307190025500_cit21","doi-asserted-by":"publisher","first-page":"100879","DOI":"10.1016\/j.apsadv.2025.100879","article-title":"Defect engineering and dopant activation of\nroom temperature grown\naluminium-doped zinc oxide thin films","volume":"30","author":"Elhamali","year":"2025","journal-title":"Appl.\nSurf. Sci. Adv."},{"key":"2026090307190025500_cit22","doi-asserted-by":"publisher","first-page":"384","DOI":"10.1007\/s10854-025-14450-6","article-title":"Enhancing AZO thin films for optoelectronics: the impact\nof substrate temperature and vacuum annealing","volume":"36","author":"Park","year":"2025","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit23","doi-asserted-by":"publisher","first-page":"194","DOI":"10.1039\/D4EE03956D","article-title":"Perspectives for sustainability\nanalysis of scalable perovskite photovoltaics","volume":"18","author":"Tian","year":"2025","journal-title":"Energy Environ. Sci."},{"key":"2026090307190025500_cit24","doi-asserted-by":"publisher","first-page":"6221","DOI":"10.1039\/D5NR03337C","article-title":"Research progress and perspective of transparent electrode materials\nin flexible perovskite solar cells","volume":"18","author":"Liu","year":"2026","journal-title":"Nanoscale"},{"key":"2026090307190025500_cit25","doi-asserted-by":"publisher","first-page":"209","DOI":"10.1007\/s40820-025-02022-6","article-title":"Key Advancements\nand Emerging Trends of Perovskite Solar Cells in\n2024\u20132025","volume":"18","author":"Shen","year":"2026","journal-title":"Nano Micro Lett."},{"key":"2026090307190025500_cit26","doi-asserted-by":"publisher","first-page":"399","DOI":"10.1038\/s41578-024-00678-x","article-title":"Rapid advances enabling high-performance\ninverted perovskite solar\ncells","volume":"9","author":"Jiang","year":"2024","journal-title":"Nat. Rev. Mater."},{"key":"2026090307190025500_cit27","doi-asserted-by":"publisher","first-page":"2418069","DOI":"10.1002\/adfm.202418069","article-title":"Room Temperature\nPulsed Laser Deposition\nof Aluminum Zinc Oxide (AZO): Enabling Scalable Indium-Free Transparent\nConductive Oxides","volume":"35","author":"Reinders","year":"2025","journal-title":"Adv. Funct. Mater."},{"key":"2026090307190025500_cit28","doi-asserted-by":"publisher","first-page":"2401834","DOI":"10.1002\/admt.202401834","article-title":"Progress in Flexible Perovskite Solar Cells: Paving\nthe Way for Scalable Manufacturing","volume":"10","author":"Kutsarov","year":"2025","journal-title":"Adv. Mater.\nTechnol."},{"key":"2026090307190025500_cit29","doi-asserted-by":"publisher","DOI":"10.1002\/smll.202514903","article-title":"Scalable Aluminum-Doped Zinc Oxide\nTransparent Electrodes via Spatial\nALD for High-Efficiency Perovskite Modules","volume":"22","author":"Jiang","year":"2026","journal-title":"Small"},{"key":"2026090307190025500_cit30","doi-asserted-by":"publisher","first-page":"113964","DOI":"10.1016\/j.solener.2025.113964","article-title":"Transparent conductive oxides in flexible perovskite\nsolar cells\n\u2013 material properties and device performance review","volume":"302","author":"Goje","year":"2025","journal-title":"Sol. Energy"},{"key":"2026090307190025500_cit31","doi-asserted-by":"publisher","first-page":"4032","DOI":"10.1021\/acsaem.4c03332","article-title":"Transparent\nConductive Oxide Films and Their Applications in Silicon\nHeterojunction and Perovskite\/Silicon Tandem Photovoltaics","volume":"8","author":"Liu","year":"2025","journal-title":"ACS Appl. Energy Mater."},{"key":"2026090307190025500_cit32","doi-asserted-by":"publisher","first-page":"113105","DOI":"10.1016\/j.mtcomm.2025.113105","article-title":"From target to film: The crucial role of AZO target grain size in\nsputtered thin film properties","volume":"47","author":"Liang","year":"2025","journal-title":"Mater. Today\nCommun."},{"key":"2026090307190025500_cit33","doi-asserted-by":"publisher","first-page":"4094","DOI":"10.1021\/acs.cgd.6c00183","article-title":"Mist Chemical Vapor\nDeposition: A Novel Solution-Based Film Deposition\nTechnique","volume":"26","author":"Yi","year":"2026","journal-title":"Cryst. Growth Des."},{"key":"2026090307190025500_cit34","doi-asserted-by":"publisher","first-page":"185","DOI":"10.1016\/j.solmat.2015.09.065","article-title":"Comparison of LPCVD and sputter-etched ZnO layers applied\nas front\nelectrodes in tandem thin-film silicon solar cells","volume":"145","author":"Moulin","year":"2016","journal-title":"Sol. Energy Mater. Sol. Cells"},{"key":"2026090307190025500_cit35","doi-asserted-by":"publisher","first-page":"297","DOI":"10.1007\/s00339-016-9812-5","article-title":"Photoresponse\nand photocapacitor properties of Au\/AZO\/p-Si\/Al diode with AZO film\nprepared by pulsed laser deposition (PLD) method","volume":"122","author":"Alyamani","year":"2016","journal-title":"Appl. Phys. A"},{"key":"2026090307190025500_cit36","doi-asserted-by":"publisher","first-page":"3329","DOI":"10.3390\/ma16093329","article-title":"Effect of Al Incorporation\non the Structural and Optical Properties of Sol\u2013Gel AZO Thin\nFilms","volume":"16","author":"Stroescu","year":"2023","journal-title":"Materials"},{"key":"2026090307190025500_cit37","doi-asserted-by":"publisher","first-page":"418675","DOI":"10.1016\/j.physb.2026.418675","article-title":"Tuning the\nmorphology and optoelectronic performance of sputtered AZO thin films\nvia nanopowder annealing temperature","volume":"735","author":"Haddad","year":"2026","journal-title":"Phys.\nB"},{"key":"2026090307190025500_cit38","doi-asserted-by":"publisher","first-page":"1435","DOI":"10.1007\/s10854-026-17831-7","article-title":"Influence\nof substrate temperature\nin RF sputtering on the structural and optoelectronic properties of\nAZO thin films","volume":"37","author":"Madkami","year":"2026","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit39","doi-asserted-by":"publisher","first-page":"1481","DOI":"10.1007\/s10854-025-15511-6","article-title":"Tunable physical and electrical characteristics of\nAZO\/p-Si heterostructures\ndeveloped using super-cycle approach of ALD","volume":"36","author":"Meenakshi","year":"2025","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit40","doi-asserted-by":"publisher","first-page":"2026040","DOI":"10.20517\/microstructures.2025.138","article-title":"Progress\nin atomic layer deposition of metal oxides for efficient and stable\nperovskite solar cells","volume":"6","author":"Park","year":"2026","journal-title":"Microstructures"},{"key":"2026090307190025500_cit41","doi-asserted-by":"publisher","first-page":"1719","DOI":"10.1002\/9781394270705.ch40","article-title":"Perovskite\/Silicon\nTandem Solar Cells","volume-title":"Handbook of Solar Cell\nTechnologies","author":"Sikdar","year":"2026"},{"key":"2026090307190025500_cit42","doi-asserted-by":"publisher","first-page":"344","DOI":"10.1038\/s42254-026-00938-5","article-title":"Transparent conducting\nelectrodes for perovskite\u2013silicon tandem\nsolar cells","volume":"8","author":"O\u2019Sullivan","year":"2026","journal-title":"Nat. Rev. Phys."},{"key":"2026090307190025500_cit43","doi-asserted-by":"publisher","first-page":"845","DOI":"10.1021\/acs.energyfuels.5c05604","article-title":"Cationic Surfactant-Driven\nInterfacial Engineering Enables 22% Efficient and Stable Perovskite\nSolar Cells","volume":"40","author":"Sahin","year":"2026","journal-title":"Energy Fuels"},{"key":"2026090307190025500_cit44","doi-asserted-by":"publisher","DOI":"10.1002\/solr.202500784","article-title":"Plasma Chemistry\nMeets Photovoltaics: Methane-Engineered Titanium Dioxide Layers for\nEfficient and Robust Perovskite Solar Cells","volume":"10","author":"Sahin","year":"2026","journal-title":"Sol. RRL"},{"key":"2026090307190025500_cit45","doi-asserted-by":"publisher","first-page":"105217","DOI":"10.1016\/j.mssp.2020.105217","article-title":"Effect of RF sputtering\npower and vacuum annealing on the properties\nof AZO thin films prepared from ceramic target in confocal configuration","volume":"118","author":"Challali","year":"2020","journal-title":"Mater. Sci. Semicond. Process."},{"key":"2026090307190025500_cit46","doi-asserted-by":"publisher","first-page":"10459","DOI":"10.1021\/acs.langmuir.6b01902","article-title":"Electrochemical\nSynthesis of Highly Oriented, Transparent,\nand Pinhole-Free ZnO and Al-Doped ZnO Films and Their Use in Heterojunction\nSolar Cells","volume":"32","author":"Kang","year":"2016","journal-title":"Langmuir"},{"key":"2026090307190025500_cit47","doi-asserted-by":"publisher","first-page":"2","DOI":"10.1016\/j.tsf.2016.07.078","article-title":"Correlation\nbetween carrier transport\nand orientation evolution of polycrystalline transparent conductive\nAl-doped ZnO films","volume":"620","author":"Nomoto","year":"2016","journal-title":"Thin Solid Films"},{"key":"2026090307190025500_cit48","doi-asserted-by":"publisher","first-page":"978","DOI":"10.1103\/PhysRev.56.978","article-title":"The Scherrer\nFormula for X-Ray Particle Size Determination","volume":"56","author":"Patterson","year":"1939","journal-title":"Phys. Rev."},{"key":"2026090307190025500_cit49","doi-asserted-by":"publisher","first-page":"71","DOI":"10.1016\/0022-0248(94)90727-7","article-title":"The measurement\nof threading dislocation densities in semiconductor crystals by X-ray\ndiffraction","volume":"135","author":"Ayers","year":"1994","journal-title":"J. Cryst. Growth"},{"key":"2026090307190025500_cit50","doi-asserted-by":"publisher","first-page":"22","DOI":"10.1016\/0001-6160(53)90006-6","article-title":"X-ray line broadening\nfrom filed aluminium and wolfram","volume":"1","author":"Williamson","year":"1953","journal-title":"Acta Metall."},{"key":"2026090307190025500_cit51","doi-asserted-by":"publisher","first-page":"12","DOI":"10.1016\/j.pnsc.2015.01.012","article-title":"Pulsed\nlaser deposited Al-doped ZnO\nthin films for optical applications","volume":"25","author":"Kaur","year":"2015","journal-title":"Prog. Nat.\nSci.: Mater. Int."},{"key":"2026090307190025500_cit52","doi-asserted-by":"publisher","first-page":"113","DOI":"10.1080\/14786440108520972","article-title":"Quantitative\nmeasurement of preferred orientation in rolled uranium bars","volume":"43","author":"Harris","year":"1952","journal-title":"London, Edinburgh Dublin Philos. Mag. J. Sci."},{"key":"2026090307190025500_cit53","doi-asserted-by":"publisher","first-page":"197","DOI":"10.1007\/s00339-025-08323-2","article-title":"Tuning of surface properties\nof AZO\nthin films through substrate configuration variation","volume":"131","author":"Ku","year":"2025","journal-title":"Appl. Phys. A"},{"key":"2026090307190025500_cit54","doi-asserted-by":"publisher","first-page":"25288","DOI":"10.1007\/s10854-021-06988-y","article-title":"AZO thin films grown\nby confocal RF sputtering: role of deposition\ntime on microstructural, optical, luminescence and electronic properties","volume":"32","author":"Mohamedi","year":"2021","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit55","doi-asserted-by":"publisher","first-page":"H96","DOI":"10.1149\/2.027202jes","article-title":"Structural and Raman\nScattering Properties of ZnO: Al Thin Films\nSputter-Deposited at Room Temperature","volume":"159","author":"Mohanty","year":"2011","journal-title":"J. Electrochem.\nSoc."},{"key":"2026090307190025500_cit56","doi-asserted-by":"publisher","first-page":"537","DOI":"10.1007\/s10854-018-0320-6","article-title":"Investigations\non preferentially oriented Al-doped\nZnO films developed using rf magnetron sputtering","volume":"30","author":"Poddar","year":"2019","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit57","doi-asserted-by":"publisher","first-page":"14269","DOI":"10.1007\/s10854-019-01796-x","article-title":"Effect\nof substrates and post-deposition annealing\non rf-sputtered Al-doped ZnO (AZO) thin films","volume":"30","author":"Poddar","year":"2019","journal-title":"J. Mater. Sci.: Mater. Electron."},{"key":"2026090307190025500_cit58","doi-asserted-by":"publisher","first-page":"053516","DOI":"10.1063\/1.1856222","article-title":"Silent Raman modes\nin zinc oxide and related nitrides","volume":"97","author":"Manjo\u0301n","year":"2005","journal-title":"J. Appl.\nPhys."},{"key":"2026090307190025500_cit59","doi-asserted-by":"publisher","first-page":"10851","DOI":"10.1016\/j.matpr.2017.12.373","article-title":"Optimization\nof Sputtered AZO Thin Films for Device Application","volume":"5","author":"Subramanyam","year":"2018","journal-title":"Mater. Today: Proc."},{"key":"2026090307190025500_cit60","doi-asserted-by":"publisher","first-page":"84","DOI":"10.1016\/j.matlet.2012.05.130","article-title":"Effect of annealing on the structural,\ntopographical and optical properties of sol\u2013gel derived ZnO\nand AZO thin films","volume":"83","author":"Sengupta","year":"2012","journal-title":"Mater. Lett."},{"key":"2026090307190025500_cit61","doi-asserted-by":"publisher","first-page":"1464","DOI":"10.1002\/pssc.201300631","article-title":"Optical and electrical\nstudies of transparent conductive AZO and\nITO sputtered thin films for CIGS photovoltaics","volume":"11","author":"Mereu","year":"2014","journal-title":"Phys. Status Solidi C"},{"key":"2026090307190025500_cit62","doi-asserted-by":"publisher","first-page":"1896","DOI":"10.17485\/IJST\/v18i24.758","article-title":"Influence of Thickness on Structural,\nMorphological, Compositional and Optical Properties of RF-Sputtered\nAl: ZnO Thin Films","volume":"18","author":"Balegar","year":"2025","journal-title":"Indian J. Sci. Technol."},{"key":"2026090307190025500_cit63","doi-asserted-by":"publisher","first-page":"085302","DOI":"10.1063\/1.4977104","article-title":"Effect of sputtering power on crystallinity,\nintrinsic defects, and\noptical and electrical properties of Al-doped ZnO transparent conducting\nthin films for optoelectronic devices","volume":"121","author":"Hu","year":"2017","journal-title":"J. Appl.\nPhys."},{"key":"2026090307190025500_cit64","doi-asserted-by":"publisher","first-page":"1780","DOI":"10.3390\/nano15231780","article-title":"Improved Optoelectronic Properties and Temporal Stability\nof AZO\/Cu\/AZO Films by Inserting an Ultrathin Al Layer","volume":"15","author":"Mei","year":"2025","journal-title":"Nanomaterials"},{"key":"2026090307190025500_cit65","doi-asserted-by":"publisher","first-page":"105","DOI":"10.1016\/j.tsf.2003.09.031","article-title":"Influence of target-to-substrate\ndistance on the properties\nof AZO films grown by RF magnetron sputtering","volume":"447\u2013448","author":"Jeong","year":"2004","journal-title":"Thin Solid Films"},{"key":"2026090307190025500_cit66","doi-asserted-by":"publisher","first-page":"632","DOI":"10.1103\/PhysRev.93.632","article-title":"Anomalous\nOptical Absorption Limit in InSb","volume":"93","author":"Burstein","year":"1954","journal-title":"Phys. Rev."},{"key":"2026090307190025500_cit67","doi-asserted-by":"publisher","first-page":"775","DOI":"10.1088\/0370-1301\/67\/10\/306","article-title":"The Interpretation\nof the Properties of Indium Antimonide","volume":"67","author":"Moss","year":"1954","journal-title":"Proc.\nPhys. Soc. B"},{"key":"2026090307190025500_cit68","doi-asserted-by":"publisher","first-page":"083705","DOI":"10.1063\/1.2721374","article-title":"Carrier\nconcentration\ndependence of band gap shift in n-type ZnO: Al films","volume":"101","author":"Lu","year":"2007","journal-title":"J. Appl. Phys."},{"key":"2026090307190025500_cit69","doi-asserted-by":"publisher","first-page":"4086","DOI":"10.1063\/1.323240","article-title":"New figure\nof merit for transparent conductors","volume":"47","author":"Haacke","year":"1976","journal-title":"J. Appl.\nPhys."},{"key":"2026090307190025500_cit70","doi-asserted-by":"publisher","first-page":"102695","DOI":"10.1016\/j.rinp.2019.102695","article-title":"Resolution\nimprovement in Haacke\u2019s figure of merit for transparent conductive\nfilms","volume":"15","author":"Cisneros-Contreras","year":"2019","journal-title":"Results Phys."},{"key":"2026090307190025500_cit71","doi-asserted-by":"publisher","first-page":"747","DOI":"10.1021\/acsmaterialsau.5c00255","article-title":"Low-Power Sputtered\nCu2O Films with \u223c 70% Transmittance\nas a Possible Route toward Copper-Based p\u2013n Junctions","volume":"6","author":"Aguilar-Del-Valle","year":"2026","journal-title":"ACS Mater. Au"},{"key":"2026090307190025500_cit72","doi-asserted-by":"publisher","first-page":"149957","DOI":"10.1016\/j.apsusc.2021.149957","article-title":"BCl3\/Ar\nplasma etching for the performance enhancement of Al-doped ZnO thin\nfilms","volume":"561","author":"Joo","year":"2021","journal-title":"Appl. Surf. Sci."},{"key":"2026090307190025500_cit73","doi-asserted-by":"publisher","first-page":"634","DOI":"10.1109\/TNANO.2017.2700408","article-title":"Aluminum-Doped Zinc Oxide Transparent Electrode Prepared\nby Atomic\nLayer Deposition for Organic Light Emitting Devices","volume":"16","author":"Liu","year":"2017","journal-title":"IEEE Trans. Nanotechnol."},{"key":"2026090307190025500_cit74","doi-asserted-by":"publisher","first-page":"H599","DOI":"10.1149\/2.108206jes","article-title":"Comparison of AZO,\nGZO, and AGZO Thin Films TCOs Applied for a-Si Solar Cells","volume":"159","author":"Lin","year":"2012","journal-title":"J. Electrochem. Soc."},{"key":"2026090307190025500_cit75","doi-asserted-by":"publisher","first-page":"139947","DOI":"10.1016\/j.tsf.2023.139947","article-title":"Comprehensive characterization of Al-doped ZnO thin films deposited\nin confocal radio frequency magnetron co-sputtering","volume":"780","author":"Challali","year":"2023","journal-title":"Thin Solid Films"},{"key":"2026090307190025500_cit76","doi-asserted-by":"publisher","first-page":"8633","DOI":"10.1038\/s41598-025-93252-6","article-title":"Aluminum doped zinc oxide nanoplatelets based sensor\nwith enhanced hydrogen sulfide detection","volume":"15","author":"Ydir","year":"2025","journal-title":"Sci.\nRep."},{"key":"2026090307190025500_cit77","doi-asserted-by":"publisher","first-page":"5043","DOI":"10.3390\/molecules25215043","article-title":"Air Annealing Effect\non Oxygen Vacancy Defects in Al-doped ZnO Films\nGrown by High-Speed Atmospheric Atomic Layer Deposition","volume":"25","author":"Hsu","year":"2020","journal-title":"Molecules"},{"key":"2026090307190025500_cit78","doi-asserted-by":"publisher","DOI":"10.1002\/cssc.202502608","article-title":"Strategies and Pathways Toward Efficient Perovskite\/Cu(In,Ga)Se2\nTandem Solar Cells","volume":"19","author":"Wang","year":"2026","journal-title":"ChemSusChem"},{"key":"2026090307190025500_cit79","doi-asserted-by":"publisher","first-page":"724","DOI":"10.1039\/D6EL00022C","article-title":"Interface intercalation into perovskite layer\nimproving\nperformance of tin perovskite solar cells","volume":"2","author":"Rehman","year":"2026","journal-title":"EES\nSol."},{"key":"2026090307190025500_cit80","doi-asserted-by":"publisher","first-page":"1903090","DOI":"10.1002\/aenm.201903090","article-title":"New Strategies for\nDefect Passivation\nin High-Efficiency Perovskite Solar Cells","volume":"10","author":"Akin","year":"2020","journal-title":"Adv.\nEnergy Mater."},{"key":"2026090307190025500_cit81","doi-asserted-by":"publisher","DOI":"10.1002\/solr.70284","article-title":"Interface Engineering\nfor High-Performance Perovskite\nSolar Cells","volume":"10","author":"Wang","year":"2026","journal-title":"Sol. RRL"},{"key":"2026090307190025500_cit82","doi-asserted-by":"publisher","first-page":"55013","DOI":"10.1021\/acsami.5c09193","article-title":"Phthalocyanine-Based Multifunctional Additives for Efficient Defect\nPassivation in Perovskite Solar Cells","volume":"17","author":"Demircioglu","year":"2025","journal-title":"ACS Appl.\nMater. Interfaces"},{"key":"2026090307190025500_cit83","doi-asserted-by":"publisher","first-page":"4017","DOI":"10.1039\/D0EE01767A","article-title":"Defect passivation strategies in perovskites for an enhanced photovoltaic\nperformance","volume":"13","author":"Fu","year":"2020","journal-title":"Energy Environ. Sci."},{"key":"2026090307190025500_cit84","doi-asserted-by":"publisher","first-page":"57338","DOI":"10.1021\/acsami.3c12698","article-title":"Eco-Friendly Boost\nfor Perovskite Photovoltaics: Harnessing Cellulose-Modified SnO2 as\na High-Performance Electron Transporting Material","volume":"15","author":"Ozkaya","year":"2023","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"2026090307190025500_cit85","doi-asserted-by":"publisher","first-page":"2401279","DOI":"10.1002\/aenm.202401279","article-title":"Highly Layer-Oriented\nPbI2 Films Enabling All-Air Processed Perovskite Solar Cells","volume":"14","author":"Zeng","year":"2024","journal-title":"Adv. Energy Mater."},{"key":"2026090307190025500_cit86","doi-asserted-by":"publisher","first-page":"2659","DOI":"10.1021\/acsenergylett.4c00386","article-title":"Regulation of Buried\nInterface through the Rapid Removal of PbI2\u00b7DMSO\nComplex for Enhancing Light Stability of Perovskite Solar Cells","volume":"9","author":"Zhao","year":"2024","journal-title":"ACS Energy Lett."},{"key":"2026090307190025500_cit87","doi-asserted-by":"publisher","first-page":"381","DOI":"10.1038\/s41586-021-03406-5","article-title":"Pseudo-halide anion engineering for \u03b1-FAPbI3\nperovskite solar\ncells","volume":"592","author":"Jeong","year":"2021","journal-title":"Nature"},{"key":"2026090307190025500_cit88","doi-asserted-by":"publisher","first-page":"444","DOI":"10.1038\/s41586-021-03964-8","article-title":"Perovskite solar cells\nwith atomically coherent interlayers on SnO2\nelectrodes","volume":"598","author":"Min","year":"2021","journal-title":"Nature"},{"key":"2026090307190025500_cit89","doi-asserted-by":"publisher","first-page":"1509","DOI":"10.1126\/science.aay9698","article-title":"Constructive molecular\nconfigurations for surface-defect passivation\nof perovskite photovoltaics","volume":"366","author":"Wang","year":"2019","journal-title":"Science"},{"key":"2026090307190025500_cit90","doi-asserted-by":"publisher","first-page":"3456","DOI":"10.1021\/jp510837q","article-title":"Characterization of\nPlanar Lead Halide Perovskite Solar Cells by\nImpedance Spectroscopy, Open-Circuit Photovoltage Decay, and Intensity-Modulated\nPhotovoltage\/Photocurrent Spectroscopy","volume":"119","author":"Pockett","year":"2015","journal-title":"J. Phys.\nChem. C"}],"container-title":["ACS Omega"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/acsomega.6c06694","content-type":"application\/pdf","content-version":"vor","intended-application":"unspecified"},{"URL":"https:\/\/pubs.acs.org\/acsodf\/article-pdf\/11\/34\/51931\/66995767\/acsomega.6c06694.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"syndication"},{"URL":"https:\/\/pubs.acs.org\/acsodf\/article-pdf\/11\/34\/51931\/66995767\/acsomega.6c06694.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,3]],"date-time":"2026-09-03T11:19:11Z","timestamp":1788434351000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/acsodf\/article\/11\/34\/51931\/5286573\/Systematic-Optimization-of-Sputtered-AZO-Thin"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,8,21]]},"references-count":90,"journal-issue":{"issue":"34","published-online":{"date-parts":[[2026,8,21]]},"published-print":{"date-parts":[[2026,9,1]]}},"URL":"https:\/\/doi.org\/10.1021\/acsomega.6c06694","relation":{},"ISSN":["2470-1343"],"issn-type":[{"value":"2470-1343","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,8,21]]}}}