{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,7,20]],"date-time":"2025-07-20T22:56:23Z","timestamp":1753052183412},"reference-count":35,"publisher":"American Chemical Society (ACS)","issue":"9","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Nano Lett."],"published-print":{"date-parts":[[2013,9,11]]},"DOI":"10.1021\/nl4020414","type":"journal-article","created":{"date-parts":[[2013,8,1]],"date-time":"2013-08-01T18:17:43Z","timestamp":1375381063000},"page":"4275-4279","source":"Crossref","is-referenced-by-count":21,"title":["Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration"],"prefix":"10.1021","volume":"13","author":[{"given":"Sunwoo","family":"Lee","sequence":"first","affiliation":[{"name":"Department\rof Electrical Engineering, Columbia University, New York, New York 10027, United\rStates"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Vivekananda P.","family":"Adiga","sequence":"additional","affiliation":[{"name":"School of Applied\rand Engineering\rPhysics, Cornell University, Ithaca, New\rYork 14853, United States"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Robert A.","family":"Barton","sequence":"additional","affiliation":[{"name":"School of Applied\rand Engineering\rPhysics, Cornell University, Ithaca, New\rYork 14853, United States"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Arend M.","family":"van der Zande","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Gwan-Hyoung","family":"Lee","sequence":"additional","affiliation":[{"name":"Samsung-SKKU Graphene Center (SSGC), Suwon, Gyeonggi 440-746, Korea"},{"name":"School\rof Mechanical Engineering, Sungkyunkwan University, 2066, Seobu-ro., Jangan-gu,\rSuwon, Gyeonggi 440-746, Korea"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"B. Rob","family":"Ilic","sequence":"additional","affiliation":[{"name":"The Cornell NanoScale Science and Technology Facility (CNF), Ithaca, New York\r14853, United States"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alexander","family":"Gondarenko","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jeevak M.","family":"Parpia","sequence":"additional","affiliation":[{"name":"School of Applied\rand Engineering\rPhysics, Cornell University, Ithaca, New\rYork 14853, United States"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Harold G.","family":"Craighead","sequence":"additional","affiliation":[{"name":"School of Applied\rand Engineering\rPhysics, Cornell University, Ithaca, New\rYork 14853, United States"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"James","family":"Hone","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"316","published-online":{"date-parts":[[2013,8,23]]},"reference":[{"issue":"5496","key":"ref1\/cit1","doi-asserted-by":"crossref","first-page":"1532","DOI":"10.1126\/science.290.5496.1532","volume":"290","author":"Craighead H. G.","year":"2000","journal-title":"Science"},{"issue":"6922","key":"ref2\/cit2","doi-asserted-by":"crossref","first-page":"496","DOI":"10.1038\/421496a","volume":"421","author":"Huang X. M. H.","year":"2003","journal-title":"Nature"},{"key":"ref3\/cit3","first-page":"243","volume":"1","author":"Nguyen C. T.-C.","year":"2005","journal-title":"TRANSDUCERS"},{"issue":"4","key":"ref4\/cit4","doi-asserted-by":"crossref","first-page":"583","DOI":"10.1021\/nl052134m","volume":"6","author":"Yang Y. T.","year":"2006","journal-title":"Nano Lett."},{"issue":"1","key":"ref5\/cit5","doi-asserted-by":"crossref","first-page":"013112","DOI":"10.1063\/1.2822406","volume":"92","author":"Verbridge S. S.","year":"2008","journal-title":"Appl. Phys. Lett."},{"issue":"6","key":"ref6\/cit6","doi-asserted-by":"crossref","first-page":"064323","DOI":"10.1063\/1.4754576","volume":"112","author":"Adiga V. P.","year":"2012","journal-title":"J. Appl. Phys."},{"issue":"12","key":"ref7\/cit7","doi-asserted-by":"crossref","first-page":"124304","DOI":"10.1063\/1.2204829","volume":"99","author":"Verbridge S. S.","year":"2006","journal-title":"J. Appl. Phys."},{"issue":"1","key":"ref8\/cit8","doi-asserted-by":"crossref","first-page":"215","DOI":"10.1016\/S0924-4247(02)00149-8","volume":"101","author":"Sekaric L.","year":"2002","journal-title":"Sensor. Actuat. A-Phys."},{"issue":"8","key":"ref9\/cit9","doi-asserted-by":"crossref","first-page":"083603","DOI":"10.1103\/PhysRevLett.108.083603","volume":"108","author":"Yu P. L.","year":"2012","journal-title":"Phys. Rev. Lett."},{"issue":"9","key":"ref10\/cit10","doi-asserted-by":"crossref","first-page":"093105","DOI":"10.1063\/1.4748977","volume":"101","author":"Biswas T. S.","year":"2012","journal-title":"Appl. Phys. Lett."},{"issue":"11","key":"ref11\/cit11","doi-asserted-by":"crossref","first-page":"114505","DOI":"10.1063\/1.3431349","volume":"107","author":"Waggoner P. S.","year":"2010","journal-title":"J. Appl. Phys."},{"issue":"10","key":"ref12\/cit12","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1063\/1.4751351","volume":"101","author":"Rieger J.","year":"2012","journal-title":"Appl. Phys. Lett."},{"issue":"7241","key":"ref13\/cit13","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1038\/nature07932","volume":"458","author":"Unterreithmeier Q. P.","year":"2009","journal-title":"Nature"},{"key":"ref14\/cit14","doi-asserted-by":"crossref","first-page":"728","DOI":"10.1038\/ncomms1723","volume":"3","author":"Faust T.","year":"2012","journal-title":"Nat Commun"},{"issue":"7356","key":"ref15\/cit15","doi-asserted-by":"crossref","first-page":"359","DOI":"10.1038\/nature10261","volume":"475","author":"Teufel J. D.","year":"2011","journal-title":"Nature"},{"issue":"5932","key":"ref16\/cit16","doi-asserted-by":"crossref","first-page":"1312","DOI":"10.1126\/science.1171245","volume":"324","author":"Li X.","year":"2009","journal-title":"Science"},{"issue":"7230","key":"ref17\/cit17","doi-asserted-by":"crossref","first-page":"706","DOI":"10.1038\/nature07719","volume":"457","author":"Kim K. S.","year":"2009","journal-title":"Nature"},{"issue":"1","key":"ref18\/cit18","doi-asserted-by":"crossref","first-page":"198","DOI":"10.1021\/nl203305q","volume":"12","author":"Song X.","year":"2011","journal-title":"Nano Lett."},{"key":"ref19\/cit19","first-page":"187","volume":"31","author":"Kern W.","year":"1970","journal-title":"RCA Rev."},{"key":"ref20\/cit20","first-page":"7","volume":"1","author":"Mulhern G. T.","year":"1993","journal-title":"TRANSDUCERS"},{"issue":"9","key":"ref21\/cit21","doi-asserted-by":"crossref","first-page":"2816","DOI":"10.1021\/ja109793s","volume":"133","author":"Li X.","year":"2011","journal-title":"J. Am. Chem. Soc."},{"issue":"6136","key":"ref22\/cit22","doi-asserted-by":"crossref","first-page":"1073","DOI":"10.1126\/science.1235126","volume":"340","author":"Lee G.-H.","year":"2013","journal-title":"Science"},{"issue":"6","key":"ref23\/cit23","doi-asserted-by":"crossref","first-page":"2751","DOI":"10.1021\/nl204481s","volume":"12","author":"Petrone N.","year":"2012","journal-title":"Nano Lett."},{"issue":"12","key":"ref24\/cit24","doi-asserted-by":"crossref","first-page":"4869","DOI":"10.1021\/nl102713c","volume":"10","author":"van der Zande A. M.","year":"2010","journal-title":"Nano Lett."},{"issue":"24","key":"ref25\/cit25","doi-asserted-by":"crossref","first-page":"243111","DOI":"10.1063\/1.3528341","volume":"97","author":"Xu Y.","year":"2010","journal-title":"Appl. Phys. Lett."},{"issue":"4","key":"ref26\/cit26","doi-asserted-by":"crossref","first-page":"047205","DOI":"10.1103\/PhysRevLett.106.047205","volume":"106","author":"Wilson-Rae I.","year":"2011","journal-title":"Phys. Rev. Lett."},{"issue":"25","key":"ref27\/cit27","doi-asserted-by":"crossref","first-page":"253103","DOI":"10.1063\/1.3671150","volume":"99","author":"Adiga V. P.","year":"2011","journal-title":"Appl. Phys. Lett."},{"key":"ref28\/cit28","unstructured":"Adiga, V. P.; De Alba, R.; Storch, I. R.; Yu, P. A.; Ilic, B.; Barton, R. A.; Lee, S.; Hone, J.; McEuen, P. L.; Parpia, J. M.; Craighead, H. G.arXiv:1307.2525 2013."},{"issue":"5811","key":"ref29\/cit29","doi-asserted-by":"crossref","first-page":"490","DOI":"10.1126\/science.1136836","volume":"315","author":"Bunch J. S.","year":"2007","journal-title":"Science"},{"issue":"11","key":"ref31\/cit31","doi-asserted-by":"crossref","first-page":"4748","DOI":"10.1021\/nl202562u","volume":"11","author":"Conley H.","year":"2011","journal-title":"Nano Lett."},{"issue":"3","key":"ref32\/cit32","doi-asserted-by":"crossref","first-page":"1232","DOI":"10.1021\/nl1042227","volume":"11","author":"Barton R. A.","year":"2011","journal-title":"Nano Lett."},{"issue":"12","key":"ref33\/cit33","doi-asserted-by":"crossref","first-page":"861","DOI":"10.1038\/nnano.2009.267","volume":"4","author":"Chen C.","year":"2009","journal-title":"Nature Nanotech."},{"issue":"11","key":"ref34\/cit34","doi-asserted-by":"crossref","first-page":"115459","DOI":"10.1103\/PhysRevB.81.115459","volume":"81","author":"Solanki H. S.","year":"2010","journal-title":"Phys. Rev. B"},{"key":"ref35\/cit35","doi-asserted-by":"crossref","first-page":"666","DOI":"10.1126\/science.1102896","volume":"306","author":"Novoselov K. S.","year":"2004","journal-title":"Science"},{"issue":"7277","key":"ref36\/cit36","doi-asserted-by":"crossref","first-page":"72","DOI":"10.1038\/nature08681","volume":"463","author":"Rocheleau T.","year":"2010","journal-title":"Nature"}],"container-title":["Nano Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/nl4020414","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,4,15]],"date-time":"2023-04-15T00:55:01Z","timestamp":1681520101000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/doi\/10.1021\/nl4020414"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2013,8,23]]},"references-count":35,"journal-issue":{"issue":"9","published-print":{"date-parts":[[2013,9,11]]}},"alternative-id":["10.1021\/nl4020414"],"URL":"https:\/\/doi.org\/10.1021\/nl4020414","relation":{},"ISSN":["1530-6984","1530-6992"],"issn-type":[{"value":"1530-6984","type":"print"},{"value":"1530-6992","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,8,23]]}}}