{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,9]],"date-time":"2026-03-09T06:55:31Z","timestamp":1773039331685,"version":"3.50.1"},"reference-count":36,"publisher":"American Chemical Society (ACS)","issue":"12","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Nano Lett."],"published-print":{"date-parts":[[2008,12,10]]},"DOI":"10.1021\/nl801785b","type":"journal-article","created":{"date-parts":[[2008,10,30]],"date-time":"2008-10-30T11:03:22Z","timestamp":1225364602000},"page":"4201-4204","source":"Crossref","is-referenced-by-count":100,"title":["Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer Deposition Process"],"prefix":"10.1021","volume":"8","author":[{"given":"Marc-Georg","family":"Willinger","sequence":"first","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]},{"given":"Giovanni","family":"Neri","sequence":"additional","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]},{"given":"Erwan","family":"Rauwel","sequence":"additional","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]},{"given":"Anna","family":"Bonavita","sequence":"additional","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]},{"given":"Giuseppe","family":"Micali","sequence":"additional","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]},{"given":"Nicola","family":"Pinna","sequence":"additional","affiliation":[{"name":"Department of Chemistry, CICECO, University of Aveiro, 3810-193 Aveiro, Portugal, Fritz Haber Institute of the Max Planck Society, Department of Inorganic Chemistry, Faradayweg 4-6, 14195 Berlin, Germany, and Department of Industrial Chemistry and Materials Engineering, University of Messina, C\/da Di Dio, 98100 Messina, Italy"}]}],"member":"316","published-online":{"date-parts":[[2008,10,30]]},"reference":[{"issue":"1","key":"ref1\/cit1","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1016\/S0920-5861(02)00323-1","volume":"78","author":"Weckhuysen B. M.","year":"2003","journal-title":"Catal. Today"},{"key":"ref2\/cit2","unstructured":"Ritala, M.; Leskela, M.InHandbook of Thin Film Materials;Nalwa, H. S.,Ed.Academic Press:San Diego, CA, 2002; Vol.1, pp103\u2212159"},{"issue":"21","key":"ref3\/cit3","doi-asserted-by":"crossref","first-page":"3403","DOI":"10.1002\/adma.200700079","volume":"19","author":"Knez M.","year":"2007","journal-title":"Adv. Mater."},{"issue":"12","key":"ref4\/cit4","doi-asserted-by":"crossref","first-page":"121301","DOI":"10.1063\/1.1940727","volume":"97","author":"Puurunen R. L.","year":"2005","journal-title":"J. Appl. Phys."},{"issue":"1","key":"ref5\/cit5","doi-asserted-by":"crossref","first-page":"23","DOI":"10.1016\/S0921-5107(96)01617-0","volume":"41","author":"Niinisto L.","year":"1996","journal-title":"Mater. Sci. Eng., B"},{"key":"ref6\/cit6","doi-asserted-by":"crossref","first-page":"622","DOI":"10.1126\/science.287.5453.622","volume":"287","author":"Kong J.","year":"2000","journal-title":"Science"},{"key":"ref7\/cit7","doi-asserted-by":"crossref","first-page":"852","DOI":"10.1016\/S0039-6028(03)00104-3","volume":"532","author":"Ulbricht H.","year":"2003","journal-title":"Surf. Sci."},{"key":"ref8\/cit8","doi-asserted-by":"crossref","first-page":"10904","DOI":"10.1063\/1.1619948","volume":"119","author":"Santucci S.","year":"2003","journal-title":"J. Chem. Phys."},{"key":"ref9\/cit9","doi-asserted-by":"crossref","first-page":"195","DOI":"10.1088\/0957-4484\/13\/2\/312","volume":"13","author":"Zhao J.","year":"2002","journal-title":"Nanotechnology"},{"key":"ref10\/cit10","doi-asserted-by":"crossref","first-page":"929","DOI":"10.1021\/nl034220x","volume":"3","author":"Li J.","year":"2003","journal-title":"Nano Lett."},{"key":"ref11\/cit11","doi-asserted-by":"crossref","first-page":"877","DOI":"10.1021\/nl034061h","volume":"3","author":"Someya T.","year":"2003","journal-title":"Nano Lett."},{"key":"ref12\/cit12","doi-asserted-by":"crossref","first-page":"36","DOI":"10.1016\/j.snb.2005.02.020","volume":"113","author":"Ionescu R.","year":"2006","journal-title":"Sens. Actuators, B"},{"issue":"3","key":"ref13\/cit13","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1021\/nl034010k","volume":"3","author":"Qi P.","year":"2003","journal-title":"Nano Lett."},{"issue":"43","key":"ref14\/cit14","first-page":"435504","author":"Young Wook C.","year":"2007","journal-title":"Nanotechnology"},{"issue":"2","key":"ref15\/cit15","doi-asserted-by":"crossref","first-page":"59","DOI":"10.1016\/j.progsolidstchem.2005.11.032","volume":"33","author":"Niederberger M.","year":"2005","journal-title":"Prog. Solid State Chem."},{"key":"ref16\/cit16","doi-asserted-by":"crossref","first-page":"5292","DOI":"10.1002\/anie.200704541","volume":"47","author":"Pinna N.","year":"2008","journal-title":"Angew. Chem., Int. Ed."},{"issue":"28","key":"ref17\/cit17","doi-asserted-by":"crossref","first-page":"7282","DOI":"10.1002\/chem.200600313","volume":"12","author":"Niederberger M.","year":"2006","journal-title":"Chem. Eur. J."},{"issue":"11","key":"ref18\/cit18","doi-asserted-by":"crossref","first-page":"2292","DOI":"10.1021\/cm970322a","volume":"9","author":"Vioux A.","year":"1997","journal-title":"Chem. Mater."},{"key":"ref19\/cit19","doi-asserted-by":"crossref","first-page":"3592","DOI":"10.1002\/anie.200705550","volume":"47","author":"Rauwel E.","year":"2008","journal-title":"Angew. Chem., Int. Ed."},{"issue":"33","key":"ref20\/cit20","doi-asserted-by":"crossref","first-page":"12754","DOI":"10.1021\/jp8037363","volume":"112","author":"Rauwel E.","year":"2008","journal-title":"J. Phys. Chem. C"},{"key":"ref21\/cit21","unstructured":"Pure nitrogen was used as carrier and purging gas. The substrate temperature was set to 200 \u00b0C. Metal precursor and acetic acid vapors were generated in external reservoirs preheated at 90 and 40 \u00b0C, respectively. They were introduced into the reactor through an ALD valve. All tubes of the circuit were maintained at 120 \u00b0C during the deposition process. The nitrogen gas flow was set to 10 sccm and was maintained throughout the deposition process. In a typical experiment the valves were opened for 0.02 s for carboxylic acid and 1 s for the metal alkoxides. The residence and purging periods were 20 and 15 s, respectively. The growth per cycle under these conditions was around 0.04 nm. CNTs obtained from Applied Science were treated with concentrated HNO3at 100 \u00b0C for 2 h before deposition."},{"key":"ref22\/cit22","unstructured":"Transmission electron microscopy measurements were performed using a CM200 FEG (Philips) microscope operated at 200 kV and equipped with a field emission gun and postcolumn electron energy loss spectrometer (GATAN Tridiem)."},{"key":"ref23\/cit23","unstructured":"The thickness of the films was determined by X-ray reflectometry (XRR) measurements on films deposited on Si wafers using a Philips X\u2019Pert MPD X-ray diffractometer with a copper radiation (\u03bbK\u03b1 = 1.54056 \u00c5) and a graphite monochromator for the selection of pure K\u03b1 radiation. The X-ray tube was operated at 40 kV and 50 mA. A 1 mm slit was used in order to reduce the scattered X-ray intensity. Reflection geometry was used in the measurement. Instrumental configuration: divergence slit at the incident beam, equal1\/8in.; step width, 0.01\u00b0; acquisition time, 0.6 s."},{"issue":"4","key":"ref24\/cit24","doi-asserted-by":"crossref","first-page":"407","DOI":"10.1140\/epjb\/e2002-00244-4","volume":"28","author":"H\u00e9bert C.","year":"2002","journal-title":"Eur. Phys. J. B"},{"key":"ref25\/cit25","unstructured":"The sensor was treated in air at different temperatures (150\u2212300 \u00b0C). Electrical measurements were carried out in the temperature range from 50 to 250 \u00b0C, with steps of 50 \u00b0C, under a dry air total stream of 200 sccm."},{"key":"ref26\/cit26","volume-title":"Science of Fullerenes and Carbon Nanotubes","author":"Dresselhaus M. S.","year":"1996"},{"key":"ref27\/cit27","unstructured":"S, is defined asS= [(R\u2212R0)\/R0\u00d7 100] whereRis the electrical resistance of the sensor at different NO2concentrations in dry air andR0the resistance in dry air."},{"key":"ref28\/cit28","unstructured":"The test has been carried out by exposing the film to 6.5 ppm of NO2in dry air at an operating temperature of 150 \u00b0C."},{"key":"ref29\/cit29","doi-asserted-by":"crossref","first-page":"1327","DOI":"10.1016\/j.diamond.2003.11.070","volume":"13","author":"Wanga S. G.","year":"2004","journal-title":"Diamond Relat. Mater."},{"key":"ref30\/cit30","doi-asserted-by":"crossref","first-page":"3269","DOI":"10.1016\/j.carbon.2004.08.009","volume":"42","author":"Zhao L.","year":"2004","journal-title":"Carbon"},{"key":"ref31\/cit31","doi-asserted-by":"crossref","first-page":"3863","DOI":"10.1063\/1.1424069","volume":"79","author":"Chang H.","year":"2001","journal-title":"Appl. Phys. Lett."},{"issue":"1","key":"ref32\/cit32","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1016\/0925-4005(91)85009-8","volume":"3","author":"Kl\u00f6ber J.","year":"1991","journal-title":"Sens. Actuators, B"},{"issue":"1","key":"ref33\/cit33","doi-asserted-by":"crossref","first-page":"178","DOI":"10.1016\/S0921-5107(96)01648-0","volume":"41","author":"Yamazoe N.","year":"1996","journal-title":"Mater. Sci. Eng., B"},{"key":"ref34\/cit34","doi-asserted-by":"crossref","first-page":"81","DOI":"10.1016\/j.snb.2004.02.028","volume":"101","author":"Wei B.-Y.","year":"2004","journal-title":"Sens. Actuators, B"},{"key":"ref35\/cit35","doi-asserted-by":"crossref","first-page":"137","DOI":"10.1016\/j.snb.2007.07.108","volume":"127","author":"Espinosa E. H.","year":"2007","journal-title":"Sens. Actuators, B"},{"key":"ref36\/cit36","doi-asserted-by":"crossref","first-page":"2709","DOI":"10.1063\/1.363973","volume":"81","author":"Manno D.; A.","year":"1997","journal-title":"J. Appl. Phys."}],"container-title":["Nano Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/pubs.acs.org\/doi\/pdf\/10.1021\/nl801785b","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,3,14]],"date-time":"2023-03-14T21:18:08Z","timestamp":1678828688000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.acs.org\/doi\/10.1021\/nl801785b"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008,10,30]]},"references-count":36,"journal-issue":{"issue":"12","published-print":{"date-parts":[[2008,12,10]]}},"alternative-id":["10.1021\/nl801785b"],"URL":"https:\/\/doi.org\/10.1021\/nl801785b","relation":{},"ISSN":["1530-6984","1530-6992"],"issn-type":[{"value":"1530-6984","type":"print"},{"value":"1530-6992","type":"electronic"}],"subject":[],"published":{"date-parts":[[2008,10,30]]}}}