{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T08:09:41Z","timestamp":1788854981067,"version":"build-2803163510"},"reference-count":33,"publisher":"Springer Science and Business Media LLC","issue":"1","license":[{"start":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T00:00:00Z","timestamp":1788825600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0"},{"start":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T00:00:00Z","timestamp":1788825600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Microsyst Nanoeng"],"DOI":"10.1038\/s41378-026-01427-6","type":"journal-article","created":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T07:52:06Z","timestamp":1788853926000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Parallel reservoir computing exploiting a single MEMS device via blue sideband excitation"],"prefix":"10.1038","volume":"12","author":[{"given":"Yueyang","family":"Li","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yu","family":"Qian","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fangzhou","family":"Chen","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0005-7765-4867","authenticated-orcid":false,"given":"Yancheng","family":"Lian","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5347-0124","authenticated-orcid":false,"given":"Xudong","family":"Zou","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kunfeng","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zheng","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Junbo","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6443-4727","authenticated-orcid":false,"given":"Xueyong","family":"Wei","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chengxin","family":"Li","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ka Meng","family":"Lei","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wei-Han","family":"Yu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ruiqi","family":"Guo","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiawei","family":"Xu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"R. P.","family":"Martins","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3814-4520","authenticated-orcid":false,"given":"Yuan","family":"Wang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Pui-In","family":"Mak","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2026,9,8]]},"reference":[{"key":"1427_CR1","doi-asserted-by":"publisher","first-page":"5156","DOI":"10.1109\/JBHI.2024.3417236","volume":"28","author":"H Qiu","year":"2024","unstructured":"Qiu, H. et al. A real-time hand gesture recognition system for low-latency HMI via transient HD-SEMG and in-sensor computing.  IEEE J. Biomed. Health Inform. 28, 5156\u20135167 (2024).","journal-title":"IEEE J. Biomed. Health Inform."},{"key":"1427_CR2","doi-asserted-by":"crossref","unstructured":"Qiu, J. et al. Going deeper with embedded FPGA: quantizing fully convolutional network and its real-time implementations. In 2016 ACM\/SIGDA International Symposium, 26\u201335 (ACM, 2016).","DOI":"10.1145\/2847263.2847265"},{"key":"1427_CR3","first-page":"216","volume":"2","author":"X Zhang","year":"2020","unstructured":"Zhang, X. et al. SkyNet: a hardware-efficient method for object detection and tracking on embedded systems. Proc. Mach. Learn. Syst. 2, 216\u2013229 (2020).","journal-title":"Proc. Mach. Learn. Syst."},{"key":"1427_CR4","doi-asserted-by":"publisher","first-page":"60486","DOI":"10.1109\/ACCESS.2022.3180829","volume":"10","author":"AK Jameil","year":"2022","unstructured":"Jameil, A. K. & Al-Raweshidy, H. Efficient CNN architecture on FPGA using high level module for healthcare devices. IEEE Access 10, 60486\u201360495 (2022).","journal-title":"IEEE Access"},{"key":"1427_CR5","doi-asserted-by":"crossref","unstructured":"Zhao, Y. et al. A 28-nm 3.32-nJ\/frame compute-in-memory CNN processor with layer fusion for always-on applications. In IEEE Transactions on Circuits and Systems I: Regular Papers, 72, 5683\u20135695 (IEEE, 2025).","DOI":"10.1109\/TCSI.2025.3542590"},{"key":"1427_CR6","doi-asserted-by":"publisher","first-page":"108","DOI":"10.1109\/JSSC.2019.2942367","volume":"55","author":"J Park","year":"2020","unstructured":"Park, J., Lee, J. & Jeon, D. A 65-nm neuromorphic image classification processor with energy-efficient training through direct spike-only feedback. IEEE J. Solid State Circuits 55, 108\u2013119 (2020).","journal-title":"IEEE J. Solid State Circuits"},{"key":"1427_CR7","doi-asserted-by":"publisher","first-page":"2722","DOI":"10.1109\/JSSC.2018.2841824","volume":"53","author":"PN Whatmough","year":"2018","unstructured":"Whatmough, P. N., Lee, S. K., Brooks, D. & Wei, G. DNN engine: a 28-nm timing-error tolerant sparse deep neural network processor for IoT applications. IEEE J. Solid State Circuits 53, 2722\u20132731 (2018).","journal-title":"IEEE J. Solid State Circuits"},{"key":"1427_CR8","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-023-40989-1","volume":"14","author":"T Mei","year":"2023","unstructured":"Mei, T. & Chen, C. Q. In-memory mechanical computing. Nat. Commun. 14, 5204 (2023).","journal-title":"Nat. Commun."},{"key":"1427_CR9","doi-asserted-by":"crossref","unstructured":"Alsaleem F. M., Hasan M. H. H. & Tesfay M. K. A MEMS nonlinear dynamic approach for neural computing. J. Microelectromechanical Syst. 27, 780\u2013789, (2018).","DOI":"10.1109\/JMEMS.2018.2864175"},{"key":"1427_CR10","doi-asserted-by":"publisher","first-page":"19","DOI":"10.1038\/s44172-023-00071-6","volume":"2","author":"H Nikfarjam","year":"2023","unstructured":"Nikfarjam, H. et al. Energy efficient integrated MEMS neural network for simultaneous sensing and computing. Commun. Eng. 2, 19 (2023).","journal-title":"Commun. Eng."},{"key":"1427_CR11","doi-asserted-by":"publisher","first-page":"12049","DOI":"10.1109\/JSEN.2023.3265908","volume":"23","author":"H Nikfarjam","year":"2023","unstructured":"Nikfarjam, H., Megdadi, M., Okour, M., Pourkamali, S. & Alsaleem, F. Theoretical and experimental investigation of using multidegree of freedom electrostatically actuated microstructures in performing classification problems. IEEE Sens. J. 23, 12049\u201312057 (2023).","journal-title":"IEEE Sens. J."},{"key":"1427_CR12","doi-asserted-by":"crossref","unstructured":"Markovic A. et al. In-sensor computing with contactless MEMS: binary neurons for harsh environment. In 2025 IEEE SENSORS, 1\u20134 (IEEE, 2025)","DOI":"10.1109\/SENSORS59705.2025.11330918"},{"key":"1427_CR13","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms1476","volume":"2","author":"L Appeltant","year":"2011","unstructured":"Appeltant, L. et al. Information processing using a single dynamical node as complex system. Nat. Commun. 2, 468 (2011).","journal-title":"Nat. Commun."},{"key":"1427_CR14","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-022-29260-1","volume":"13","author":"X Liang","year":"2022","unstructured":"Liang, X. et al. Rotating neurons for all-analog implementation of cyclic reservoir computing. Nat. Commun. 13, 1549 (2022).","journal-title":"Nat. Commun."},{"key":"1427_CR15","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-017-02337-y","volume":"8","author":"C Du","year":"2017","unstructured":"Du, C. et al. Reservoir computing using dynamic memristors for temporal information processing. Nat. Commun. 8, 2204 (2017).","journal-title":"Nat. Commun."},{"key":"1427_CR16","doi-asserted-by":"publisher","first-page":"127","DOI":"10.1016\/j.cosrev.2009.03.005","volume":"3","author":"M Luko\u0161evi\u010dius","year":"2009","unstructured":"Luko\u0161evi\u010dius, M. & Jaeger, H. Reservoir computing approaches to recurrent neural network training. Comput. Sci. Rev. 3, 127\u2013149 (2009).","journal-title":"Comput. Sci. Rev."},{"key":"1427_CR17","doi-asserted-by":"publisher","first-page":"11182","DOI":"10.1364\/OE.16.011182","volume":"16","author":"K Vandoorne","year":"2008","unstructured":"Vandoorne, K. et al. Toward optical signal processing using Photonic Reservoir Computing. Opt. Express 16, 11182\u201311192 (2008).","journal-title":"Opt. Express"},{"key":"1427_CR18","doi-asserted-by":"publisher","first-page":"152132","DOI":"10.1063\/1.5038038","volume":"124","author":"G Dion","year":"2018","unstructured":"Dion, G., Mejaouri, S. & Sylvestre, J. Reservoir computing with a single delay-coupled non-linear mechanical oscillator. J. Appl. Phys. 124, 152132 (2018).","journal-title":"J. Appl. Phys."},{"key":"1427_CR19","doi-asserted-by":"publisher","first-page":"83","DOI":"10.1038\/s41378-021-00313-7","volume":"7","author":"J Sun","year":"2021","unstructured":"Sun, J. et al. Novel nondelay-based reservoir computing with a single micromechanical nonlinear resonator for high-efficiency information processing. Microsyst. Nanoeng. 7, 83 (2021).","journal-title":"Microsyst. Nanoeng."},{"key":"1427_CR20","doi-asserted-by":"publisher","first-page":"317","DOI":"10.3390\/mi13020317","volume":"13","author":"J Sun","year":"2022","unstructured":"Sun, J. et al. Enhancing the recognition task performance of MEMS resonator-based reservoir computing system via nonlinearity tuning. Micromachines 13, 317 (2022).","journal-title":"Micromachines"},{"key":"1427_CR21","doi-asserted-by":"crossref","unstructured":"Barazani, B., Dion, G., Morissette, J.-F., Beaudoin, L. & Sylvestre, J. Microfabricated neuroaccelerometer: integrating sensing and reservoir computing in MEMS. J. Microelectromechanical Syst. 29, 338\u2013347 (2020).","DOI":"10.1109\/JMEMS.2020.2978467"},{"key":"1427_CR22","doi-asserted-by":"publisher","first-page":"38092","DOI":"10.1109\/JSEN.2024.3446672","volume":"24","author":"X Guo","year":"2024","unstructured":"Guo, X. et al. Optimizing temporal data forecasting for stiffness-modulated MEMS reservoir computing.  IEEE Sens. J. 24, 38092\u201338101 (2024).","journal-title":"IEEE Sens. J."},{"key":"1427_CR23","doi-asserted-by":"publisher","first-page":"84","DOI":"10.1038\/s41378-024-00701-9","volume":"10","author":"X Guo","year":"2024","unstructured":"Guo, X. et al. MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge. Microsyst. Nanoeng. 10, 84 (2024).","journal-title":"Microsyst. Nanoeng."},{"key":"1427_CR24","unstructured":"Yoshimura, T., Haga, T., Fujimura, N., Kanda, K. & Kanno, I. Efficient reservoir computing by nonlinearly coupled piezoelectric MEMS resonators. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 457\u2013460 (IEEE, 2023)."},{"key":"1427_CR25","doi-asserted-by":"crossref","unstructured":"Xi, J. et al. Multiple parameter decoupling using a single resonant MEMS sensor via blue sideband excitation. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 917\u2013920 (IEEE, 2023).","DOI":"10.1109\/MEMS49605.2023.10052550"},{"key":"1427_CR26","doi-asserted-by":"publisher","first-page":"234","DOI":"10.1038\/s41378-025-01070-7","volume":"11","author":"J Xu","year":"2025","unstructured":"Xu, J. et al. A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing. Microsyst. Nanoeng. 11, 234 (2025).","journal-title":"Microsyst. Nanoeng."},{"key":"1427_CR27","doi-asserted-by":"publisher","first-page":"715","DOI":"10.1109\/JMEMS.2004.835771","volume":"13","author":"V Kaajakari","year":"2004","unstructured":"Kaajakari, V., Mattila, T., Oja, A. & Seppa, H. Nonlinear limits for single-crystal silicon microresonators. J. Microelectromechanical Syst. 13, 715\u2013724 (2004).","journal-title":"J. Microelectromechanical Syst."},{"key":"1427_CR28","doi-asserted-by":"publisher","first-page":"690","DOI":"10.1109\/JMEMS.2022.3183021","volume":"31","author":"L Xu","year":"2022","unstructured":"Xu, L. et al. A closed-loop system for resonant MEMS sensors subject to blue-sideband excitation. J. Microelectromechanical Syst. 31, 690\u2013699 (2022).","journal-title":"J. Microelectromechanical Syst."},{"key":"1427_CR29","doi-asserted-by":"crossref","unstructured":"Venstra, W. J., Westra, H. J. & van der Zant, H. S. Q-factor control of a microcantilever by mechanical sideband excitation. Appl. Phys. Lett. 99, 151904 (2011).","DOI":"10.1063\/1.3650714"},{"key":"1427_CR30","unstructured":"Bender, C. M. & Orszag, S. A. Advanced Mathematical Methods for Scientists and Engineers I: Asymptotic Methods and Perturbation Theory (Springer Science & Business Media, 2013)."},{"key":"1427_CR31","unstructured":"Nayfeh A. H. & Mook D. T. Nonlinear vibrations, stability, and dynamics of structures and mechanisms. NASA STI\/Recon Technical Report N. 93, 25838 (1992)."},{"key":"1427_CR32","doi-asserted-by":"crossref","unstructured":"Miao, T. et al. A million-order effective quality factor MEMS resonator by mechanical pumping. In 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 1\u20134 (IEEE, 2020)","DOI":"10.1109\/INERTIAL48129.2020.9090052"},{"key":"1427_CR33","doi-asserted-by":"crossref","unstructured":"Lecun Y., Bottou L., Bengio Y. & Haffner P. Gradient-based learning applied to document recognition. In Proceedings of the IEEE, 86, 2278\u20132324 (1998).","DOI":"10.1109\/5.726791"}],"container-title":["Microsystems &amp; Nanoengineering"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.nature.com\/articles\/s41378-026-01427-6.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41378-026-01427-6","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41378-026-01427-6.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T07:52:10Z","timestamp":1788853930000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.nature.com\/articles\/s41378-026-01427-6"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,9,8]]},"references-count":33,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2026,12]]}},"alternative-id":["1427"],"URL":"https:\/\/doi.org\/10.1038\/s41378-026-01427-6","relation":{},"ISSN":["2055-7434"],"issn-type":[{"value":"2055-7434","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,9,8]]},"assertion":[{"value":"13 April 2026","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"10 July 2026","order":2,"name":"revised","label":"Revised","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"27 July 2026","order":3,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"8 September 2026","order":4,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"The authors declare no competing interests.","order":1,"name":"Ethics","label":"Conflict of interest","group":{"name":"EthicsHeading","label":"Ethics"}}],"article-number":"316"}}