{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,11,1]],"date-time":"2026-11-01T15:16:17Z","timestamp":1793546177375,"version":"4.5.0"},"reference-count":32,"publisher":"Springer Science and Business Media LLC","issue":"1","license":[{"start":{"date-parts":[[2024,1,27]],"date-time":"2024-01-27T00:00:00Z","timestamp":1706313600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"},{"start":{"date-parts":[[2024,1,27]],"date-time":"2024-01-27T00:00:00Z","timestamp":1706313600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Nat Commun"],"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>\n                    Simultaneously generating various motion modes with high strains in piezoelectric devices is highly desired for high-technology fields to achieve multi-functionalities. However, traditional approach for designing multi-degrees-of-freedom systems is to bond together several multilayer piezoelectric stacks, which generally leads to cumbersome and complicated structures. Here, we proposed a transparent piezo metasurface to achieve various types of strains in a wide frequency range. As an example, we designed a ten-unit piezo metasurface, which can produce high strains (\n                    <jats:italic>\u03b5<\/jats:italic>\n                    <jats:sub>3<\/jats:sub>\n                    \u2009=\u20090.76%), and generate linear motions along X-, Y- and Z-axis, rotary motions around X-, Y- and Z-axis as well as coupled modes. An adaptive lens based on the proposed piezo metasurface was demonstrated. It can realize a wide range of focal length (35.82\u2009cm ~ \u221e) and effective image stabilization with relatively large displacements (5.05 \u03bcm along Y-axis) and tilt angles (44.02\u2032 around Y-axis). This research may benefit the miniaturization and integration of multi-degrees-of-freedom systems.\n                  <\/jats:p>","DOI":"10.1038\/s41467-024-45088-3","type":"journal-article","created":{"date-parts":[[2024,1,27]],"date-time":"2024-01-27T06:02:48Z","timestamp":1706335368000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":40,"title":["Designing transparent piezoelectric metasurfaces for adaptive optics"],"prefix":"10.1038","volume":"15","author":[{"given":"Liao","family":"Qiao","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3492-2148","authenticated-orcid":false,"given":"Xiangyu","family":"Gao","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0001-2228-3633","authenticated-orcid":false,"given":"Kaile","family":"Ren","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chaorui","family":"Qiu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jinfeng","family":"Liu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Haonan","family":"Jin","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuxiang","family":"Dong","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhuo","family":"Xu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4572-0322","authenticated-orcid":false,"given":"Fei","family":"Li","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2024,1,27]]},"reference":[{"key":"45088_CR1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-023-36243-3","volume":"14","author":"S Zhang","year":"2023","unstructured":"Zhang, S. et al. Piezo robotic hand for motion manipulation from micro to macro. Nat. Commun. 14, 500 (2023).","journal-title":"Nat. Commun."},{"key":"45088_CR2","doi-asserted-by":"publisher","first-page":"21","DOI":"10.1016\/j.mechatronics.2007.07.010","volume":"18","author":"WM Kuo","year":"2008","unstructured":"Kuo, W. M., Chuang, S. F., Nian, C. Y. & Tarng, Y. S. Precision nano-alignment system using machine vision with motion controlled by piezoelectric motor. Mechatronics 18, 21\u201334 (2008).","journal-title":"Mechatronics"},{"key":"45088_CR3","doi-asserted-by":"publisher","first-page":"149","DOI":"10.1038\/s41551-022-00965-4","volume":"7","author":"T Kim","year":"2023","unstructured":"Kim, T. et al. Deep brain stimulation by blood-brain-barrier-crossing piezoelectric nanoparticles generating current and nitric oxide under focused ultrasound. Nat. Biomed. Eng. 7, 149\u2013163 (2023).","journal-title":"Nat. Biomed. Eng."},{"key":"45088_CR4","doi-asserted-by":"crossref","unstructured":"Li, Z. et al. Coding piezoelectric metasurfaces. Adv. Funct. Mater. 32, 2209173 (2022).","DOI":"10.1002\/adfm.202209173"},{"key":"45088_CR5","doi-asserted-by":"publisher","first-page":"371","DOI":"10.1126\/science.abn7711","volume":"376","author":"X Liu","year":"2022","unstructured":"Liu, X. et al. Ferroelectric crystals with giant electro-optic property enabling ultracompact Q-switches. Science 376, 371\u2013377 (2022).","journal-title":"Science"},{"key":"45088_CR6","doi-asserted-by":"publisher","first-page":"eabm4389","DOI":"10.1126\/sciadv.abm4389","volume":"8","author":"HJ Zhao","year":"2022","unstructured":"Zhao, H. J., Xue, S., Hussherr, M. D., Teixeira, A. P. & Fussenegger, M. Autonomous push button-controlled rapid insulin release from a piezoelectrically activated subcutaneous cell implant. Sci. Adv. 8, eabm4389 (2022).","journal-title":"Sci. Adv."},{"key":"45088_CR7","doi-asserted-by":"publisher","first-page":"165","DOI":"10.1038\/s41551-018-0201-6","volume":"2","author":"XE Yu","year":"2018","unstructured":"Yu, X. E. et al. Needle-shaped ultrathin piezoelectric microsystem for guided tissue targeting via mechanical sensing. Nat. Biomed. Eng. 2, 165\u2013172 (2018).","journal-title":"Nat. Biomed. Eng."},{"key":"45088_CR8","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-022-29798-0","volume":"13","author":"C Meng","year":"2022","unstructured":"Meng, C., Thrane, P., Ding, F. & Bozhevolnyi, S. I. Full-range birefringence control with piezoelectric MEMS-based metasurfaces. Nat. Commun. 13, 2071 (2022).","journal-title":"Nat. Commun."},{"key":"45088_CR9","doi-asserted-by":"publisher","first-page":"17059","DOI":"10.1038\/micronano.2017.59","volume":"3","author":"XY Jiang","year":"2017","unstructured":"Jiang, X. Y. et al. Monolithic ultrasound fingerprint sensor. Microsyst. Nanoeng. 3, 17059 (2017).","journal-title":"Microsyst. Nanoeng."},{"key":"45088_CR10","doi-asserted-by":"publisher","first-page":"234","DOI":"10.1038\/s41563-018-0268-1","volume":"18","author":"HC Cui","year":"2019","unstructured":"Cui, H. C. et al. Three-dimensional printing of piezoelectric materials with designed anisotropy and directional response. Nat. Mater. 18, 234 (2019).","journal-title":"Nat. Mater."},{"key":"45088_CR11","doi-asserted-by":"publisher","first-page":"26","DOI":"10.1038\/s41928-018-0189-7","volume":"2","author":"MD Han","year":"2019","unstructured":"Han, M. D. et al. Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants. Nat. Electron. 2, 26\u201335 (2019).","journal-title":"Nat. Electron."},{"key":"45088_CR12","doi-asserted-by":"publisher","first-page":"8","DOI":"10.1142\/S2010135X23500029","volume":"13","author":"Y Gu","year":"2023","unstructured":"Gu, Y., Zhang, F., Wu, W. & Liu, Z. Microstructure regulation and failure mechanism study of BaTiO3-based dielectrics for MLCC application. J. Adv. Dielectr. 13, 8 (2023).","journal-title":"J. Adv. Dielectr."},{"key":"45088_CR13","doi-asserted-by":"publisher","first-page":"2107236","DOI":"10.1002\/adma.202107236","volume":"34","author":"Z Li","year":"2022","unstructured":"Li, Z. et al. Designing artificial vibration modes of piezoelectric devices using programmable, 3D ordered structure with piezoceramic strain units. Adv. Mater. 34, 2107236 (2022).","journal-title":"Adv. Mater."},{"key":"45088_CR14","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-022-34231-7","volume":"13","author":"J Liu","year":"2022","unstructured":"Liu, J. et al. Miniaturized electromechanical devices with multi-vibration modes achieved by orderly stacked structure with piezoelectric strain units. Nat. Commun. 13, 6567 (2022).","journal-title":"Nat. Commun."},{"key":"45088_CR15","doi-asserted-by":"publisher","first-page":"32902","DOI":"10.1063\/5.0079737","volume":"120","author":"X Gao","year":"2022","unstructured":"Gao, X. et al. A robust, low-voltage driven millirobot based on transparent ferroelectric crystals. Appl. Phys. Lett. 120, 32902 (2022).","journal-title":"Appl. Phys. Lett."},{"key":"45088_CR16","doi-asserted-by":"publisher","first-page":"1965","DOI":"10.1007\/s12541-020-00393-x","volume":"21","author":"X Zhong","year":"2020","unstructured":"Zhong, X., Liu, C., Di, Z. & Fang, H. Optimization and experiment of two-dimensional parallel decoupling image stabilization mechanism. Int. J. Precis. Eng. Man. 21, 1965\u20131974 (2020).","journal-title":"Int. J. Precis. Eng. Man."},{"key":"45088_CR17","doi-asserted-by":"publisher","first-page":"446","DOI":"10.1109\/TUFFC.2013.2588","volume":"60","author":"JG Chen","year":"2013","unstructured":"Chen, J. G., Liu, G. X., Li, X. T., Chen, Z. J. & Dong, S. X. High-temperature actuation performance of BiScO3-PbTiO3 ceramics and their multilayer configuration. IEEE T. Ultrason. Ferr. 60, 446\u2013450 (2013).","journal-title":"IEEE T. Ultrason. Ferr."},{"key":"45088_CR18","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1038\/s41598-018-36799-x","volume":"9","author":"MH Chung","year":"2019","unstructured":"Chung, M. H. et al. Enhanced output performance on LbL multilayer PVDF-TrFE piezoelectric films for charging supercapacitor. Sci. Rep. -Uk. 9, 6 (2019).","journal-title":"Sci. Rep. -Uk."},{"key":"45088_CR19","doi-asserted-by":"publisher","first-page":"2001155","DOI":"10.1002\/advs.202001155","volume":"7","author":"Z Li","year":"2020","unstructured":"Li, Z. et al. Designing ordered structure with piezoceramic actuation units (OSPAU) for generating continual nanostep motion. Adv. Sci. 7, 2001155 (2020).","journal-title":"Adv. Sci."},{"key":"45088_CR20","doi-asserted-by":"publisher","first-page":"x1782","DOI":"10.1126\/sciadv.aax1782","volume":"5","author":"J Yang","year":"2019","unstructured":"Yang, J. et al. Designing electromechanical metamaterial with full nonzero piezoelectric coefficients. Sci. Adv. 5, x1782 (2019).","journal-title":"Sci. Adv."},{"key":"45088_CR21","doi-asserted-by":"publisher","first-page":"1786","DOI":"10.1109\/TUFFC.2019.2928371","volume":"66","author":"L Qiao","year":"2019","unstructured":"Qiao, L. et al. Temperature dependence of elastic, piezoelectric, and dielectric matrixes of [001]-poled rhombohedral PIN-PMN-PT single crystals. IEEE T. Ultrason. Ferr. 66, 1786\u20131792 (2019).","journal-title":"IEEE T. Ultrason. Ferr."},{"key":"45088_CR22","doi-asserted-by":"publisher","first-page":"5641","DOI":"10.1016\/j.ceramint.2019.11.009","volume":"46","author":"L Qiao","year":"2020","unstructured":"Qiao, L. et al. Full characterization for material constants of a promising KNN-based lead-free piezoelectric ceramic. Ceram. Int. 46, 5641\u20135644 (2020).","journal-title":"Ceram. Int."},{"key":"45088_CR23","doi-asserted-by":"publisher","first-page":"4152","DOI":"10.1002\/adfm.201101253","volume":"21","author":"F Carpi","year":"2011","unstructured":"Carpi, F., Frediani, G., Turco, S. & De Rossi, D. Bioinspired tunable lens with muscle-like electroactive elastomers. Adv. Funct. Mater. 21, 4152\u20134158 (2011).","journal-title":"Adv. Funct. Mater."},{"key":"45088_CR24","doi-asserted-by":"publisher","first-page":"1323","DOI":"10.1007\/s00542-012-1538-5","volume":"18","author":"C Kim","year":"2012","unstructured":"Kim, C. et al. Design of a new triple electro-magnetic optical image stabilization actuator to compensate for hand trembling. Microsyst. Technol. 18, 1323\u20131334 (2012).","journal-title":"Microsyst. Technol."},{"key":"45088_CR25","doi-asserted-by":"publisher","first-page":"5931","DOI":"10.1364\/OE.15.005931","volume":"15","author":"HW Ren","year":"2007","unstructured":"Ren, H. W. & Wu, S. T. Variable-focus liquid lens. Opt. Express 15, 5931\u20135936 (2007).","journal-title":"Opt. Express"},{"key":"45088_CR26","doi-asserted-by":"crossref","unstructured":"E. E. Aktakka, R. L. P. A 6-DOF piezoelectric micro vibratory stage based on multi-axis distributed-electrode of PZT\/Si unimorph T-beams. In Transducers & Eursensors XXVI, 1583\u20131586 (IEEE, 2013).","DOI":"10.1109\/Transducers.2013.6627085"},{"key":"45088_CR27","doi-asserted-by":"publisher","first-page":"883","DOI":"10.1007\/s00542-006-0206-z","volume":"12","author":"H Xu","year":"2006","unstructured":"Xu, H., Ono, T., Zhang, D. & Esashi, M. Fabrication and characterizations of a monolithic PZT microstage. Microsyst. Technol. 12, 883\u2013890 (2006).","journal-title":"Microsyst. Technol."},{"key":"45088_CR28","doi-asserted-by":"publisher","first-page":"314","DOI":"10.1016\/j.precisioneng.2005.11.002","volume":"30","author":"S Chen","year":"2006","unstructured":"Chen, S. & Culpepper, M. L. Design of a six-axis micro-scale nanopositioner\u2014\u03bcHexFlex. Precis. Eng. 30, 314\u2013324 (2006).","journal-title":"Precis. Eng."},{"key":"45088_CR29","doi-asserted-by":"publisher","first-page":"340","DOI":"10.1016\/j.sna.2008.04.018","volume":"147","author":"D Mukhopadhyay","year":"2008","unstructured":"Mukhopadhyay, D., Dong, J., Pengwang, E. & Ferreira, P. A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage. Sens. Actuat. A Phys. 147, 340\u2013351 (2008).","journal-title":"Sens. Actuat. A Phys."},{"key":"45088_CR30","doi-asserted-by":"publisher","first-page":"124","DOI":"10.1016\/j.pmatsci.2014.03.006","volume":"65","author":"E Sun","year":"2014","unstructured":"Sun, E. & Cao, W. Relaxor-based ferroelectric single crystals: Growth, domain engineering, characterization and applications. Prog. Mater. Sci. 65, 124\u2013210 (2014).","journal-title":"Prog. Mater. Sci."},{"key":"45088_CR31","doi-asserted-by":"publisher","first-page":"350","DOI":"10.1038\/s41586-019-1891-y","volume":"577","author":"C Qiu","year":"2020","unstructured":"Qiu, C. et al. Transparent ferroelectric crystals with ultrahigh piezoelectricity. Nature 577, 350\u2013354 (2020).","journal-title":"Nature"},{"key":"45088_CR32","doi-asserted-by":"publisher","first-page":"3057","DOI":"10.1109\/TUFFC.2022.3175853","volume":"69","author":"N Hao","year":"2022","unstructured":"Hao, N. et al. Review on piezoelectric actuators based on high-performance piezoelectric materials. IEEE Trans. Ultrason. Ferr. 69, 3057\u20133069 (2022).","journal-title":"IEEE Trans. Ultrason. Ferr."}],"container-title":["Nature Communications"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.nature.com\/articles\/s41467-024-45088-3.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41467-024-45088-3","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41467-024-45088-3.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,1,27]],"date-time":"2024-01-27T06:08:29Z","timestamp":1706335709000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.nature.com\/articles\/s41467-024-45088-3"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,1,27]]},"references-count":32,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2024,12]]}},"alternative-id":["45088"],"URL":"https:\/\/doi.org\/10.1038\/s41467-024-45088-3","relation":{"has-preprint":[{"id-type":"doi","id":"10.21203\/rs.3.rs-3132823\/v1","asserted-by":"object"}]},"ISSN":["2041-1723"],"issn-type":[{"value":"2041-1723","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,1,27]]},"assertion":[{"value":"2 July 2023","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"15 January 2024","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"27 January 2024","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"The authors declare no competing interests.","order":1,"name":"Ethics","group":{"name":"EthicsHeading","label":"Competing interests"}}],"article-number":"805"}}