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In contrast, here we present a different growth mechanism for single-crystalline MoS\n                    <jats:sub>2<\/jats:sub>\n                    on c-plane sapphire via metal-organic chemical vapor deposition (MOCVD). We show that the initial nucleation generates not only 0\u00b0 and antiparallel 60\u00b0 domains but also low-angle twisted domains, consistent with the coincidence site lattice framework. However, these rotationally misoriented domains are observed to deterministically self-align and merge into energetically preferred 0\u00b0 domain during coalescence, yielding a continuous, unidirectional single-crystal. Additionally, by employing MoO\n                    <jats:sub>2<\/jats:sub>\n                    Cl\n                    <jats:sub>2<\/jats:sub>\n                    as a molybdenum precursor, we demonstrate that the growth of MoS\n                    <jats:sub>2<\/jats:sub>\n                    occurs in a self-limiting manner. This epitaxial strategy is substantiated by a carrier mobility of 66\u2009cm\n                    <jats:sup>2<\/jats:sup>\n                    \/Vs at room temperature and 749\u2009cm\n                    <jats:sup>2<\/jats:sup>\n                    \/Vs at low temperatures. Our approach offers a practical and reproducible scheme for MOCVD-based van der Waals epitaxy for 2D electronics.\n                  <\/jats:p>","DOI":"10.1038\/s41467-026-68320-8","type":"journal-article","created":{"date-parts":[[2026,1,21]],"date-time":"2026-01-21T10:03:06Z","timestamp":1768989786000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Self-aligned and self-limiting van der Waals epitaxy of monolayer MoS2 for scalable 2D electronics"],"prefix":"10.1038","volume":"17","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6804-7217","authenticated-orcid":false,"given":"Yoshiki","family":"Sakuma","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Keisuke","family":"Atsumi","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6176-5782","authenticated-orcid":false,"given":"Takanobu","family":"Hiroto","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jun","family":"Nara","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3519-4613","authenticated-orcid":false,"given":"Akihiro","family":"Ohtake","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuki","family":"Ono","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Takashi","family":"Matsumoto","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yukihiro","family":"Muta","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kai","family":"Takeda","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6134-4980","authenticated-orcid":false,"given":"Emi","family":"Kano","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Toshiki","family":"Yasuno","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xu","family":"Yang","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nobuyuki","family":"Ikarashi","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Asato","family":"Suzuki","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Michio","family":"Ikezawa","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shuhong","family":"Li","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8000-5164","authenticated-orcid":false,"given":"Tomonori","family":"Nishimura","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kaito","family":"Kanahashi","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1181-8644","authenticated-orcid":false,"given":"Kosuke","family":"Nagashio","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2026,1,21]]},"reference":[{"key":"68320_CR1","doi-asserted-by":"publisher","first-page":"501","DOI":"10.1038\/s41586-023-06145-x","volume":"620","author":"W Cao","year":"2023","unstructured":"Cao, W. et al. 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