{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,4]],"date-time":"2026-10-04T23:51:24Z","timestamp":1791157884609,"version":"4.1.0"},"reference-count":53,"publisher":"Springer Science and Business Media LLC","issue":"1","license":[{"start":{"date-parts":[[2026,7,4]],"date-time":"2026-07-04T00:00:00Z","timestamp":1783123200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"},{"start":{"date-parts":[[2026,10,5]],"date-time":"2026-10-05T00:00:00Z","timestamp":1791158400000},"content-version":"vor","delay-in-days":93,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Sci Rep"],"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>\n                    This paper presents a proposed tri-axis optomechanical accelerometer integrating a monolithic single-proof-mass MEMS suspension with an engineered metal\u2013insulator\u2013metal (MIM) plasmonic platform. The device utilizes a modified frog-arm spring system, optimized via finite element simulations to provide near-identical peak displacements (\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:200\\:nm$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    ) and mechanical sensitivities (\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:{S}_{M}\\approx\\:100\\:nm\/g$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    ) within a\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\pm\\:2\\:g$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    range, operating across a bandwidth of\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:473\\:Hz$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    . Structural stability is verified through pre-stressed analysis, showing negligible warpage (\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:1\\:nm$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    ) and a substantial safety factor (\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:{10}^{4}$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    ), while maintaining minimal axis interference with cross-axis coupling\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:&lt;0.2\\text{\\%}$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    . The optical transduction, analyzed through finite-difference time-domain (FDTD) methods, employs a Hybrid Plasmonic Waveguide (HPW) configuration to induce a pronounced Fano-type resonance with an insertion loss of\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:-6.29\\:dB$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    across the visible-to-near-infrared spectrum (\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:500-1500\\:nm$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    ). By adopting an asymmetric structural architecture, the sensor generates direction-sensitive signatures characterized through a Bidirectional Optical Sensitivity Matrix, which maps nanoscale displacements to simultaneous wavelength and intensity modulation. This framework facilitates the discrimination of acceleration polarities (\u00b1\u2009X, \u00b1Y, \u00b1Z) and yields a balanced tri-axis Full Scale Normalized Optical Sensitivity (FS-NOS)  of\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:0.002\\:{nm}^{-1}$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    . Systematic noise analysis reveals a NEA of\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:\\approx\\:0.78\\:\\mu\\:g\/\\sqrt{Hz}$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    , supporting sub-\u00b5g resolution, while the minimum optical resolution for the Y-axis is calculated as\n                    <jats:inline-formula>\n                      <jats:tex-math>$$\\:61.07\\:\\mu\\:g$$<\/jats:tex-math>\n                    <\/jats:inline-formula>\n                    . Furthermore, a sequential hierarchical decoupling approach is proposed to reconstruct 3D acceleration vectors from superimposed optical outputs. This work establishes a versatile framework for developing high-resolution, all-optical, EMI-immune plasmonic MOEMS tailored for precision inertial sensing.\n                  <\/jats:p>","DOI":"10.1038\/s41598-026-60918-8","type":"journal-article","created":{"date-parts":[[2026,7,4]],"date-time":"2026-07-04T08:35:21Z","timestamp":1783154121000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["A tri-axis optomechanical accelerometer with plasmonic MIM waveguide and structural direction-dependent optical signatures"],"prefix":"10.1038","volume":"16","author":[{"given":"Hengameh","family":"Farrokhi","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sedighe Babaei","family":"Sedaghat","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2026,7,4]]},"reference":[{"issue":"2","key":"60918_CR1","doi-asserted-by":"publisher","first-page":"41","DOI":"10.18596\/jotcsa.1388464","volume":"6","author":"CE Akbaba","year":"2023","unstructured":"Akbaba, C. E. & Tanr\u0131kulu, M. Y. MEMS capacitive accelerometer: A review. Adana Alparslan T\u00fcrke\u015f Sci. Technol. Univ. J. Sci. 6 (2), 41\u201358. https:\/\/doi.org\/10.18596\/jotcsa.1388464 (2023).","journal-title":"Adana Alparslan T\u00fcrke\u015f Sci. Technol. Univ. J. Sci."},{"key":"60918_CR2","doi-asserted-by":"publisher","unstructured":"Mohammed, Z., Elfadel, I. & Rasras, M. (eds), Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers, Micromachines, 9(11), 1\u201321 (2018). https:\/\/doi.org\/10.3390\/mi9110602","DOI":"10.3390\/mi9110602"},{"key":"60918_CR3","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-023-05604-9","author":"S Ghasemi","year":"2024","unstructured":"Ghasemi, S., Sotoudeh, B. & Pazhooh, M. Design and simulation of a novel MEMS\u2013based single proof mass three\u2013axis piezo\u2013capacitive accelerometer. Microsyst. Technol. https:\/\/doi.org\/10.1007\/s00542-023-05604-9 (2024).","journal-title":"Microsyst. Technol."},{"key":"60918_CR4","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-025-05926-w","author":"M Pazhooh","year":"2025","unstructured":"Pazhooh, M. & Ghasemi, S. Design and simulation of a MEMS decoupled single proof mass three\u2011axis capacitive accelerometer with ultra\u2011low cross\u2011axis error. Microsyst. Technol. https:\/\/doi.org\/10.1007\/s00542-025-05926-w (2025).","journal-title":"Microsyst. Technol."},{"issue":"8","key":"60918_CR5","doi-asserted-by":"publisher","DOI":"10.3390\/mi15081011","volume":"15","author":"C Xin","year":"2024","unstructured":"Xin, C., Xu, Y., Zhang, Z. & Li, M. Micro-opto-electro-mechanical systems for high-precision displacement sensing: A review. Micromachines 15(8), 1011. https:\/\/doi.org\/10.3390\/mi15081011 (2024).","journal-title":"Micromachines"},{"issue":"3","key":"60918_CR6","doi-asserted-by":"publisher","first-page":"200045","DOI":"10.29026\/oea.2021.200045","volume":"4","author":"Q Lu","year":"2021","unstructured":"Lu, Q. et al. Review of micromachined optical accelerometers: from mg to sub-\u00b5g. Opto-Electron Adv. 4 (3), 200045\u2013200045. https:\/\/doi.org\/10.29026\/oea.2021.200045 (2021).","journal-title":"Opto-Electron Adv."},{"issue":"7","key":"60918_CR7","doi-asserted-by":"publisher","first-page":"6232","DOI":"10.1109\/JSEN.2022.3149662","volume":"22","author":"B Malayappan","year":"2022","unstructured":"Malayappan, B., Lakshmi, U. P., Rao, B. V. V. S. N. P., Ramaswamy, K. & Pattnaik, P. K. Sensing techniques and interrogation methods in optical MEMS accelerometers: A review. IEEE Sens. J. 22(7), 6232\u20136246. https:\/\/doi.org\/10.1109\/JSEN.2022.3149662 (2022).","journal-title":"IEEE Sens. J."},{"issue":"2","key":"60918_CR8","doi-asserted-by":"publisher","DOI":"10.1002\/lpor.202300713","volume":"18","author":"M Zhao","year":"2024","unstructured":"Zhao, M. et al. Optical interferometric MEMS accelerometers. Laser Photonics Rev. 18(2), 2300713. https:\/\/doi.org\/10.1002\/lpor.202300713 (2024).","journal-title":"Laser Photonics Rev."},{"issue":"14","key":"60918_CR9","doi-asserted-by":"publisher","DOI":"10.3390\/s20144054","volume":"20","author":"C Wang","year":"2020","unstructured":"Wang, C. et al. Micromachined accelerometers with sub-\u00b5g\/\u221aHz noise floor: A review. Sensors 20(14), 4054. https:\/\/doi.org\/10.3390\/s20144054 (2020).","journal-title":"Sensors"},{"key":"60918_CR10","doi-asserted-by":"publisher","unstructured":"Divya, J., Selvendran, S., Raja, A. S. & Sivasubramanian, A. Surface plasmon based plasmonic sensors: A review on their past, present and future. Biosens. Bioelectron. X. 11, 100175. https:\/\/doi.org\/10.1016\/j.biosx.2022.100175 (2022).","DOI":"10.1016\/j.biosx.2022.100175"},{"issue":"24","key":"60918_CR11","doi-asserted-by":"publisher","DOI":"10.1016\/j.heliyon.2024.e40923","volume":"10","author":"S Khani","year":"2024","unstructured":"Khani, S. & Rezaei, P. Optical sensors based on plasmonic nano-structures: A review. Heliyon 10(24), e40923. https:\/\/doi.org\/10.1016\/j.heliyon.2024.e40923 (2024).","journal-title":"Heliyon"},{"issue":"6","key":"60918_CR12","doi-asserted-by":"publisher","first-page":"4257","DOI":"10.1007\/s11468-024-02562-4","volume":"20","author":"MA Butt","year":"2024","unstructured":"Butt, M. A. Review of innovative cavity designs in metal\u2013insulator-metal waveguide-based plasmonic sensors. Plasmonics 20(6), 4257\u20134276. https:\/\/doi.org\/10.1007\/s11468-024-02562-4 (2024).","journal-title":"Plasmonics"},{"issue":"4","key":"60918_CR13","doi-asserted-by":"publisher","DOI":"10.1002\/appl.202200099","volume":"2","author":"MA Butt","year":"2023","unstructured":"Butt, M. A. Metal-insulator\u2010metal waveguide\u2010based plasmonic sensors: Fantasy or truth\u2014A critical review. Applied Research 2(4), e202200099. https:\/\/doi.org\/10.1002\/appl.202200099 (2023).","journal-title":"Applied Research"},{"key":"60918_CR14","doi-asserted-by":"publisher","unstructured":"Butt, M. A. Plasmonic Sensors Based on a Metal\u2013Insulator\u2013Metal Waveguide\u2014What Do We Know So Far? Sensors 24, 7158. https:\/\/doi.org\/10.3390\/s24227158 (2024).","DOI":"10.3390\/s24227158"},{"key":"60918_CR15","doi-asserted-by":"publisher","unstructured":"Farokhi, H. & BabaeiSedaghat, S. High-sensitivity plasmonic glucose sensor based MIM \u2013waveguide with a drop cavity and ring resonator for industrial applications. Results Opt. 24, 101032. https:\/\/doi.org\/10.1016\/j.rio.2026.101032 (2026).","DOI":"10.1016\/j.rio.2026.101032"},{"issue":"1","key":"60918_CR16","doi-asserted-by":"publisher","first-page":"181","DOI":"10.1109\/JSEN.2022.3216079","volume":"23","author":"X Yang","year":"2023","unstructured":"Yang, X., Xia, D., Li, J. & Chu, Q. Highly sensitive micro-opto-electromechanical systems accelerometer based on MIM waveguide wavelength modulation. IEEE Sens. J. 23(1), 181\u2013188. https:\/\/doi.org\/10.1109\/JSEN.2022.3216079 (2023).","journal-title":"IEEE Sens. J."},{"issue":"22","key":"60918_CR17","doi-asserted-by":"publisher","first-page":"38690","DOI":"10.1364\/OE.538089","volume":"32","author":"X Zhang","year":"2024","unstructured":"Zhang, X., Tian, H. & Song, J. Nanoscale dual-axis accelerometer based on a cross-shaped MIM waveguide structure. Opt. Express 32(22), 38690. https:\/\/doi.org\/10.1364\/OE.538089 (2024).","journal-title":"Opt. Express"},{"key":"60918_CR18","doi-asserted-by":"publisher","first-page":"142","DOI":"10.1007\/s11082-026-08734-2","volume":"58","author":"H Farrokhi","year":"2026","unstructured":"Farrokhi, H. & Babaei Sedaghat, S. Single-axis plasmonic accelerometer based on wavelength modulation in a metal\u2013insulator\u2013metal (MIM) waveguide. Opt. Quantum Electron. 58, 142. https:\/\/doi.org\/10.1007\/s11082-026-08734-2 (2026).","journal-title":"Opt. Quantum Electron."},{"issue":"1","key":"60918_CR19","doi-asserted-by":"publisher","first-page":"303","DOI":"10.1109\/JLT.2020.3023038","volume":"39","author":"K Huang","year":"2021","unstructured":"Huang, K. et al. A proposal for a high-sensitivity optical MEMS accelerometer with a double-mode modulation system. J. Lightwave Technol. 39(1), 303\u2013309. https:\/\/doi.org\/10.1109\/JLT.2020.3023038 (2021).","journal-title":"J. Lightwave Technol."},{"issue":"12","key":"60918_CR20","doi-asserted-by":"publisher","first-page":"13156","DOI":"10.1109\/JSEN.2021.3072333","volume":"21","author":"M Taghavi","year":"2021","unstructured":"Taghavi, M. et al. A dual-axis MOEMS accelerometer. IEEE Sens. J. 21(12), 13156\u201313164. https:\/\/doi.org\/10.1109\/JSEN.2021.3072333 (2021).","journal-title":"IEEE Sens. J."},{"issue":"24","key":"60918_CR21","doi-asserted-by":"publisher","first-page":"14639","DOI":"10.1109\/JSEN.2020.3006220","volume":"20","author":"Y Nie","year":"2020","unstructured":"Nie, Y. et al. A proposal to enhance high-frequency optical MEMS accelerometer sensitivity based on a one-dimensional photonic crystal wavelength modulation system. IEEE Sens. J. 20(24), 14639\u201314645. https:\/\/doi.org\/10.1109\/JSEN.2020.3006220 (2020).","journal-title":"IEEE Sens. J."},{"issue":"2","key":"60918_CR22","doi-asserted-by":"publisher","DOI":"10.3390\/chips4020028","volume":"4","author":"AH Elsayed","year":"2025","unstructured":"Elsayed, A. H., Abozyd, S., Toraya, A., Mansour, M. A. & Gaber, N. On the implementation of a micromachining compatible MOEMS tri-axial accelerometer. Chips 4(2), 28. https:\/\/doi.org\/10.3390\/chips4020028 (2025).","journal-title":"Chips"},{"issue":"15","key":"60918_CR23","doi-asserted-by":"publisher","first-page":"14779","DOI":"10.1109\/JSEN.2022.3184979","volume":"22","author":"M Rahimi","year":"2022","unstructured":"Rahimi, M., Malekmohammad, M., Taghavi, M., Noori, M. & Parsanasab, G.-M.M. Design and fabrication of a differential MOEMS accelerometer based on Fabry\u2013P\u00e9rot micro-cavities. IEEE Sens. J. 22(15), 14779\u201314785. https:\/\/doi.org\/10.1109\/JSEN.2022.3184979 (2022).","journal-title":"IEEE Sens. J."},{"key":"60918_CR24","doi-asserted-by":"publisher","first-page":"113371","DOI":"10.1016\/j.optlastec.2025.113371","volume":"191","author":"C Zhuang","year":"2025","unstructured":"Zhuang, C. et al. A MEMS fiber-optic Fabry-Perot accelerometer with spectral-phase demodulation. Opt. Laser Technol. 191, 113371. https:\/\/doi.org\/10.1016\/j.optlastec.2025.113371 (2025).","journal-title":"Opt. Laser Technol."},{"key":"60918_CR25","doi-asserted-by":"publisher","DOI":"10.1515\/ntrev-2024-0137","volume":"14","author":"M Khodadadi","year":"2025","unstructured":"Khodadadi, M., Nozhat, N. & Nasari, H. A comprehensive review on hybrid plasmonic waveguides: Structures, applications, challenges, and future perspectives. Nanotechnology Reviews 14, 20240137. https:\/\/doi.org\/10.1515\/ntrev-2024-0137 (2025).","journal-title":"Nanotechnology Reviews"},{"key":"60918_CR26","doi-asserted-by":"publisher","unstructured":"Azizollah Ganji, B., Babaei Sedaghat, S., Roncaglia, A., Belsito, L. & Ansari, R. Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer. J. MicroNanolithography MEMS MOEMS. 17 (1). https:\/\/doi.org\/10.1117\/1.JMM.17.1.015002 (2018).","DOI":"10.1117\/1.JMM.17.1.015002"},{"key":"60918_CR27","doi-asserted-by":"publisher","first-page":"27","DOI":"10.1016\/j.sse.2018.07.004","volume":"148","author":"B Azizollah Ganji","year":"2018","unstructured":"Azizollah Ganji, B., Babaei Sedaghat, S., Roncaglia, A. & Belsito, L. Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer. Solid-State Electron. 148, 27\u201334. https:\/\/doi.org\/10.1016\/j.sse.2018.07.004 (2018).","journal-title":"Solid-State Electron."},{"key":"60918_CR28","doi-asserted-by":"publisher","first-page":"1061","DOI":"10.1007\/s00542-017-3461-2","volume":"24","author":"S Babaei Sedaghat","year":"2018","unstructured":"Babaei Sedaghat, S., Azizollah Ganji, B. & Ansari, R. Design and modeling of a frog-shape MEMS capacitive microphone using SOI technology. Microsyst. Technol. 24, 1061\u20131070. https:\/\/doi.org\/10.1007\/s00542-017-3461-2 (2018).","journal-title":"Microsyst. Technol."},{"issue":"1","key":"60918_CR29","doi-asserted-by":"publisher","first-page":"217","DOI":"10.1007\/s00542-018-3951-x","volume":"25","author":"S Babaei Sedaghat","year":"2018","unstructured":"Babaei Sedaghat, S. & Azizollah Ganji, B. A novel MEMS capacitive microphone using spring-type diaphragm. Microsyst. Technol. 25(1), 217\u2013224. https:\/\/doi.org\/10.1007\/s00542-018-3951-x (2018).","journal-title":"Microsyst. Technol."},{"key":"60918_CR30","doi-asserted-by":"publisher","unstructured":"Shubham, S. et al. A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported w. Micromachines 13 (12). https:\/\/doi.org\/10.3390\/mi13122100 (2022).","DOI":"10.3390\/mi13122100"},{"issue":"15","key":"60918_CR31","doi-asserted-by":"publisher","first-page":"6226","DOI":"10.1109\/JSEN.2019.2908881","volume":"19","author":"M Ahmadian","year":"2019","unstructured":"Ahmadian, M. & Jafari, K. A graphene-based wide-band MEMS accelerometer sensor dependent on wavelength modulation. IEEE Sens. J. 19(15), 6226\u20136232. https:\/\/doi.org\/10.1109\/JSEN.2019.2908881 (2019).","journal-title":"IEEE Sens. J."},{"issue":"6","key":"60918_CR32","doi-asserted-by":"publisher","first-page":"917","DOI":"10.1088\/0960-1317\/12\/6\/324","volume":"12","author":"K-S Chen","year":"2002","unstructured":"Chen, K.-S. & Ou, K.-S. Modification of curvature-based thin-film residual stress measurement for MEMS applications. J. Micromech. Microeng. 12(6), 917\u2013924. https:\/\/doi.org\/10.1088\/0960-1317\/12\/6\/324 (2002).","journal-title":"J. Micromech. Microeng."},{"key":"60918_CR33","unstructured":"Carter, J. et al. PolyMUMPs Design Handbook. (2004)."},{"issue":"3","key":"60918_CR34","doi-asserted-by":"publisher","first-page":"206","DOI":"10.1109\/JMEMS.2002.1007399","volume":"11","author":"VT Srikar","year":"2002","unstructured":"Srikar, V. T. & Senturia, S. D. The reliability of microelectromechanical systems (MEMS) in shock environments. J. Microelectromech. Syst. 11(3), 206\u2013214. https:\/\/doi.org\/10.1109\/JMEMS.2002.1007399 (2002).","journal-title":"J. Microelectromech. Syst."},{"key":"60918_CR35","doi-asserted-by":"publisher","DOI":"10.1007\/s12596-026-03102-5","author":"H Farokhi","year":"2026","unstructured":"Farokhi, H. & Babaei Sedaghat, S. A simple Fano resonance-based MIM plasmonic waveguide for refractive index sensing and blood plasma biosensing. J. Opt. https:\/\/doi.org\/10.1007\/s12596-026-03102-5 (2026).","journal-title":"J. Opt."},{"key":"60918_CR36","doi-asserted-by":"publisher","unstructured":"Knudsen, E. I. & Konishi, M. Mechanisms of Sound Localization in the Barn Owl (Tyto alba), J. Comp. Physiol. A, 133(1), 13\u201321 (1979). https:\/\/doi.org\/10.1007\/BF00657672","DOI":"10.1007\/BF00657672"},{"issue":"6","key":"60918_CR37","doi-asserted-by":"publisher","first-page":"663","DOI":"10.1109\/PROC.1964.3047","volume":"52","author":"RW Beatty","year":"1964","unstructured":"Beatty, R. W. Insertion loss concepts. Proc. IEEE 52(6), 663\u2013671. https:\/\/doi.org\/10.1109\/PROC.1964.3047 (1964).","journal-title":"Proc. IEEE"},{"issue":"21","key":"60918_CR38","doi-asserted-by":"publisher","first-page":"5474","DOI":"10.1109\/JLT.2019.2934776","volume":"37","author":"K Huang","year":"2019","unstructured":"Huang, K., Yu, M., Cheng, L., Liu, J. & Cao, L. A proposal for an optical MEMS accelerometer with high sensitivity based on wavelength modulation system. J. Light. Technol. 37(21), 5474\u20135478. https:\/\/doi.org\/10.1109\/JLT.2019.2934776 (2019).","journal-title":"J. Light. Technol."},{"issue":"11","key":"60918_CR39","doi-asserted-by":"publisher","first-page":"768","DOI":"10.1038\/nphoton.2012.245","volume":"6","author":"AG Krause","year":"2012","unstructured":"Krause, A. G., Winger, M., Blasius, T. D., Lin, Q. & Painter, O. A high-resolution microchip optomechanical accelerometer. Nat. Photonics 6(11), 768\u2013772. https:\/\/doi.org\/10.1038\/nphoton.2012.245 (2012).","journal-title":"Nat. Photonics"},{"issue":"5","key":"60918_CR40","doi-asserted-by":"publisher","first-page":"055005","DOI":"10.1088\/1681-7575\/ac1402","volume":"58","author":"JR Pratt","year":"2021","unstructured":"Pratt, J. R., Schlamminger, S., Seifert, F. & Newell, D. B. Verification of an in situ calibrated optomechanical accelerometer for use as a strong ground motion seismic reference. Metrologia 58055005. https:\/\/doi.org\/10.1088\/1681-7575\/ac1402 (2021).","journal-title":"Metrologia"},{"issue":"12","key":"60918_CR41","doi-asserted-by":"publisher","first-page":"1653","DOI":"10.1109\/JSEN.2007.908964","volume":"7","author":"MA Perez","year":"2007","unstructured":"Perez, M. A. & Shkel, A. M. Design and Demonstration of a Bulk Micromachined Fabry\u2013P\u00e9rot \u00b5g\u2013Resolution Accelerometer. IEEE Sens. J. 7 (12), 1653\u20131662. https:\/\/doi.org\/10.1109\/JSEN.2007.908964 (2007).","journal-title":"IEEE Sens. J."},{"issue":"9","key":"60918_CR42","doi-asserted-by":"publisher","DOI":"10.1002\/adom.201701152","volume":"6","author":"J Chen","year":"2018","unstructured":"Chen, J., Gan, F., Wang, Y. & Li, G. Plasmonic sensing and modulation based on Fano resonances. Adv. Opt. Mater. 6(9), 1701152. https:\/\/doi.org\/10.1002\/adom.201701152 (2018).","journal-title":"Adv. Opt. Mater."},{"key":"60918_CR43","doi-asserted-by":"publisher","unstructured":"Chakravarthi, K. S. S. et al. UV-Visible Spectroscopy: A Comprehensive Review on Instrumentation, 12, 19, (2023). https:\/\/doi.org\/10.20959\/wjpr202319-30171","DOI":"10.20959\/wjpr202319-30171"},{"key":"60918_CR44","doi-asserted-by":"publisher","unstructured":"Saha, S., Sur, A., Bain, S. & Hasan, T. T. Development of a Low-Cost Spectrometer for Educational Applications, in 13th International Conference on Electrical and Computer Engineering (ICECE), Dhaka, Bangladesh, IEEE, 236\u2013240 (2024). https:\/\/doi.org\/10.1109\/ICECE64886.2024.11025119","DOI":"10.1109\/ICECE64886.2024.11025119"},{"issue":"8","key":"60918_CR45","doi-asserted-by":"publisher","first-page":"4131","DOI":"10.1109\/JSEN.2019.2963538","volume":"20","author":"F Ghanipoor","year":"2020","unstructured":"Ghanipoor, F., Hashemi, M. & Salarieh, H. Toward calibration of low-precision MEMS IMU using a nonlinear model and TUKF. IEEE Sens. 20(8), 4131\u20134138. https:\/\/doi.org\/10.1109\/JSEN.2019.2963538 (2020).","journal-title":"IEEE Sens."},{"key":"60918_CR46","doi-asserted-by":"publisher","unstructured":"Khani, S. & Hayati, M. High resolution refractive index and temperature sensor with Fano resonance in disk and parenthesis-shaped plasmonic cavities. Results Opt. 19, 100816. https:\/\/doi.org\/10.1016\/j.rio.2025.100816 (2025).","DOI":"10.1016\/j.rio.2025.100816"},{"issue":"19","key":"60918_CR47","doi-asserted-by":"publisher","DOI":"10.1364\/OL.34.002912","volume":"34","author":"P Kwee","year":"2009","unstructured":"Kwee, P., Willke, B. & Danzmann, K. Shot-noise-limited laser power stabilization with a high-power photodiode array. Opt. Lett. 34(19), 2912. https:\/\/doi.org\/10.1364\/OL.34.002912 (2009).","journal-title":"Opt. Lett."},{"issue":"6","key":"60918_CR48","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1109\/JSTQE.2018.2840339","volume":"24","author":"A Dorodnyy","year":"2018","unstructured":"Dorodnyy, A. et al. Plasmonic photodetectors. IEEE J. Sel. Top. Quantum Electron. 24(6), 1\u201313. https:\/\/doi.org\/10.1109\/JSTQE.2018.2840339 (2018).","journal-title":"IEEE J. Sel. Top. Quantum Electron."},{"key":"60918_CR49","doi-asserted-by":"publisher","DOI":"10.1002\/pssa.202000751","author":"J Liu","year":"2021","unstructured":"Liu, J., Cristoloveanu, S. & Wan, J. A review on the recent progress of silicon-on\u2010insulator\u2010based photodetectors. Phys. Status Solidi A https:\/\/doi.org\/10.1002\/pssa.202000751 (2021).","journal-title":"Phys. Status Solidi A"},{"issue":"13","key":"60918_CR50","doi-asserted-by":"publisher","first-page":"12491","DOI":"10.1021\/acsnano.4c10964","volume":"19","author":"Y Yang","year":"2025","unstructured":"Yang, Y. et al. Nanofabrication for nanophotonics. ACS Nano 19(13), 12491\u201312605. https:\/\/doi.org\/10.1021\/acsnano.4c10964 (2025).","journal-title":"ACS Nano"},{"issue":"24","key":"60918_CR51","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202102756","volume":"8","author":"S Luo","year":"2021","unstructured":"Luo, S., Hoff, B. H., Maier, S. A. & De Mello, J. C. Scalable fabrication of metallic nanogaps at the sub-10 nm level. Adv. Sci. 8(24), 2102756. https:\/\/doi.org\/10.1002\/advs.202102756 (2021).","journal-title":"Adv. Sci."},{"issue":"1","key":"60918_CR52","doi-asserted-by":"publisher","first-page":"503","DOI":"10.1021\/acsnano.0c05290","volume":"15","author":"Z-J Zhao","year":"2021","unstructured":"Zhao, Z.-J. et al. Large-area nanogap-controlled 3D nanoarchitectures fabricated via layer-by-layer nanoimprint. ACS Nano 15(1), 503\u2013514. https:\/\/doi.org\/10.1021\/acsnano.0c05290 (2021).","journal-title":"ACS Nano"},{"issue":"1","key":"60918_CR53","doi-asserted-by":"publisher","DOI":"10.1038\/s41598-025-96200-6","volume":"15","author":"J Cha","year":"2025","unstructured":"Cha, J., Lee, G., Lee, D., Kim, D.-S. & Kim, S. A progressive wafer scale approach for sub-10 nm nanogap structures. Sci. Rep. 15(1), 11323. https:\/\/doi.org\/10.1038\/s41598-025-96200-6 (2025).","journal-title":"Sci. Rep."}],"container-title":["Scientific Reports"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.nature.com\/articles\/s41598-026-60918-8","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41598-026-60918-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/s41598-026-60918-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,10,4]],"date-time":"2026-10-04T23:00:24Z","timestamp":1791154824000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.nature.com\/articles\/s41598-026-60918-8"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,7,4]]},"references-count":53,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2026,12]]}},"alternative-id":["60918"],"URL":"https:\/\/doi.org\/10.1038\/s41598-026-60918-8","relation":{},"ISSN":["2045-2322"],"issn-type":[{"value":"2045-2322","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,7,4]]},"assertion":[{"value":"4 May 2026","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"30 June 2026","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"4 July 2026","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"The authors declare no competing interests.","order":1,"name":"Ethics","label":"Competing interests","group":{"name":"EthicsHeading","label":"Declarations"}}],"article-number":"30743"}}