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Consequently, controlling the crystal structure of these materials is essential for fine-tuning their performance, e.g., linear and nonlinear optical, as well as charge transport properties. While various phase-switching TMD materials are available, their transitions are often irreversible. Here, we investigate the mechanism of a light-induced reversible phase transition in mono- and bilayer rhenium disulfide (ReS\n                    <jats:sub>2<\/jats:sub>\n                    ). Our observations, based on transmission electron microscopy, nonlinear spectroscopy, and density functional theory, reveal a transition from the ground\n                    <jats:inline-formula>\n                      <jats:alternatives>\n                        <jats:tex-math>$${\\rm{T}}^{\\prime\\prime}$$<\/jats:tex-math>\n                        <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\">\n                          <mml:msup>\n                            <mml:mrow>\n                              <mml:mi>T<\/mml:mi>\n                            <\/mml:mrow>\n                            <mml:mrow>\n                              <mml:mo>\u2033<\/mml:mo>\n                            <\/mml:mrow>\n                          <\/mml:msup>\n                        <\/mml:math>\n                      <\/jats:alternatives>\n                    <\/jats:inline-formula>\n                    (double-distorted T) to the metastable\n                    <jats:inline-formula>\n                      <jats:alternatives>\n                        <jats:tex-math>$${\\rm{H}}^{\\prime}$$<\/jats:tex-math>\n                        <mml:math xmlns:mml=\"http:\/\/www.w3.org\/1998\/Math\/MathML\">\n                          <mml:msup>\n                            <mml:mrow>\n                              <mml:mi>H<\/mml:mi>\n                            <\/mml:mrow>\n                            <mml:mrow>\n                              <mml:mo>\u2032<\/mml:mo>\n                            <\/mml:mrow>\n                          <\/mml:msup>\n                        <\/mml:math>\n                      <\/jats:alternatives>\n                    <\/jats:inline-formula>\n                    (distorted H) phase under femtosecond laser irradiation or influence of highly-energetic electrons. We show that the formation of sulfur vacancies facilitates this phenomenon. Our findings pave the way toward manipulating the crystal structure of ReS\n                    <jats:sub>2<\/jats:sub>\n                    and possibly its heterostructures.\n                  <\/jats:p>","DOI":"10.1038\/s41699-025-00524-w","type":"journal-article","created":{"date-parts":[[2025,1,13]],"date-time":"2025-01-13T22:49:56Z","timestamp":1736808596000},"update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Defect-assisted reversible phase transition in mono- and few-layer ReS2"],"prefix":"10.1038","volume":"9","author":[{"given":"George","family":"Zograf","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1772-6778","authenticated-orcid":false,"given":"Andrew B.","family":"Yankovich","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bet\u00fcl","family":"K\u00fc\u00e7\u00fck\u00f6z","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Abhay V.","family":"Agrawal","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3781-1881","authenticated-orcid":false,"given":"Alexander Yu.","family":"Polyakov","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Joachim","family":"Ciers","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fredrik","family":"Eriksson","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"\u212bsa","family":"Haglund","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2516-6061","authenticated-orcid":false,"given":"Paul","family":"Erhart","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2535-4174","authenticated-orcid":false,"given":"Tomasz J.","family":"Antosiewicz","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3791-9569","authenticated-orcid":false,"given":"Eva","family":"Olsson","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4266-3721","authenticated-orcid":false,"given":"Timur O.","family":"Shegai","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2025,1,14]]},"reference":[{"key":"524_CR1","doi-asserted-by":"publisher","first-page":"666","DOI":"10.1126\/science.1102896","volume":"306","author":"KS Novoselov","year":"2004","unstructured":"Novoselov, K. 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