{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2023,1,5]],"date-time":"2023-01-05T05:54:38Z","timestamp":1672898078223},"reference-count":31,"publisher":"Springer Science and Business Media LLC","issue":"1","license":[{"start":{"date-parts":[[2016,5,19]],"date-time":"2016-05-19T00:00:00Z","timestamp":1463616000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"},{"start":{"date-parts":[[2016,5,19]],"date-time":"2016-05-19T00:00:00Z","timestamp":1463616000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Sci Rep"],"abstract":"<jats:title>Abstract<\/jats:title><jats:p>High-Q semi-2D-photonic crystal cavities with a tapered edge and side-coupled bus waveguide are demonstrated. With a quadratic design, the unloaded cavity presents a theoretical ultrahigh quality factor up to 6.7\u2009\u00d7\u200910<jats:sup>7<\/jats:sup> for the condition that there are mere 34 holes in the propagated direction, which is pretty close to the 2D and 1D counterpart. Combined with a side-coupled bus waveguide, an all-pass-type cavity with a loaded quality factor (Q) of over 2.4\u2009\u00d7\u200910<jats:sup>4<\/jats:sup> and an extinction ratio over 10\u2009dB are experimentally demonstrated. An experimental loaded Q up to 1.1\u2009\u00d7\u200910<jats:sup>5<\/jats:sup> are also achieved by tuning the coupling between the cavity and the bus waveguide, which is much larger than any reported surface-mode cavity. This cavity is quite suitable for sensors, filters and especially optomechanical devices thanks to the mechanical stability of the cavity and flexibility of the bus waveguide.<\/jats:p>","DOI":"10.1038\/srep26038","type":"journal-article","created":{"date-parts":[[2016,5,20]],"date-time":"2016-05-20T20:23:30Z","timestamp":1463775810000},"update-policy":"http:\/\/dx.doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["High-Q side-coupled semi-2D-photonic crystal cavity"],"prefix":"10.1038","volume":"6","author":[{"given":"Jianhao","family":"Zhang","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Weixi","family":"Liu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yaocheng","family":"Shi","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sailing","family":"He","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","published-online":{"date-parts":[[2016,5,19]]},"reference":[{"key":"BFsrep26038_CR1","doi-asserted-by":"publisher","first-page":"944","DOI":"10.1038\/nature02063","volume":"425","author":"Y Akahane","year":"2003","unstructured":"Akahane, Y., Asano, T., Song, B. S. & Noda, S. High-Q photonic nanocavity in a two-dimensional photonic crystal. Nature 425, 944 (2003).","journal-title":"Nature"},{"key":"BFsrep26038_CR2","doi-asserted-by":"publisher","first-page":"207","DOI":"10.1038\/nmat1320","volume":"4","author":"BS Song","year":"2005","unstructured":"Song, B. S., Noda, S., Asano, T. & Akahane, Y. Ultra-high-Q photonic doubleheterostructure nanocavity. Nat. Mat. 4, 207 (2005).","journal-title":"Nat. Mat."},{"key":"BFsrep26038_CR3","doi-asserted-by":"publisher","first-page":"49","DOI":"10.1038\/nphoton.2006.51","volume":"1","author":"T Tanabe","year":"2007","unstructured":"Tanabe, T., Notomi, M., Kuramochi, E., Shinya, A. & Taniyama, H. Trapping and delaying photons for one nanosecond in an ultrasmall high-Q photonic-crystal nanocavity. Nat. Photon. 1, 49 (2007).","journal-title":"Nat. Photon."},{"key":"BFsrep26038_CR4","doi-asserted-by":"publisher","first-page":"11095","DOI":"10.1364\/OE.16.011095","volume":"16","author":"M Notomi","year":"2008","unstructured":"Notomi, M., Kuramochi, E. & Taniyama, H. Ultrahigh-Q Nanocavity with 1D Photonic Gap. Opt. Exp. 16, 11095 (2008).","journal-title":"Opt. Exp"},{"key":"BFsrep26038_CR5","doi-asserted-by":"publisher","first-page":"121106","DOI":"10.1063\/1.3107263","volume":"94","author":"PB Deotare","year":"2009","unstructured":"Deotare, P. B., McCutcheon, M. W., Frank, I. W., Khan, M. & Lon\u010dar, M. High quality factor photonic crystal nanobeam cavities. Appl. Phys. Lett. 94, 121106 (2009).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR6","doi-asserted-by":"publisher","first-page":"18529","DOI":"10.1364\/OE.19.018529","volume":"19","author":"Q Quan","year":"2011","unstructured":"Quan, Q. & Lon\u010dar, M. Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities. Opt. Exp. 19, 18529 (2011).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR7","doi-asserted-by":"publisher","first-page":"203102","DOI":"10.1063\/1.3429125","volume":"96","author":"Q Quan","year":"2010","unstructured":"Quan, Q., Deotare, P. B. & Lon\u010dar, M. Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide. Appl. Phys. Lett. 96, 203102 (2010).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR8","doi-asserted-by":"publisher","first-page":"063108","DOI":"10.1063\/1.4893026","volume":"105","author":"D Yang","year":"2014","unstructured":"Yang, D. et al. High sensitivity and high Q-factor nanoslotted parallel quadrabeam photonic crystal cavity for real-time and label-free sensing. Appl. Phys. Lett. 105, 063108 (2014).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR9","doi-asserted-by":"publisher","first-page":"26908","DOI":"10.1364\/OE.21.026908","volume":"21","author":"P Xu","year":"2013","unstructured":"Xu, P. et al. Slotted photonic crystal nanobeam cavity with parabolic modulated width stack for refractive index sensing. Opt. Exp. 21, 26908 (2013).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR10","doi-asserted-by":"publisher","first-page":"32225","DOI":"10.1364\/OE.21.032225","volume":"21","author":"Q Quan","year":"2013","unstructured":"Quan, Q. et al. Single particle detection in CMOS compatible photonic crystal nanobeam cavities. Opt. Exp. 21, 32225 (2013).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR11","doi-asserted-by":"publisher","first-page":"261105","DOI":"10.1063\/1.4923322","volume":"106","author":"C Wang","year":"2015","unstructured":"Wang, C., Quan, Q., Kita, S., Li, Y. & Lon\u010dar, M. Single-nanoparticle detection with slot-mode photonic crystal cavities. Appl. Phys. Lett. 106, 261105 (2015).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR12","doi-asserted-by":"publisher","first-page":"2523","DOI":"10.1364\/OL.35.002523","volume":"35","author":"J J\u00e1gersk\u00e1","year":"2010","unstructured":"J\u00e1gersk\u00e1, J., Zhang, H., Diao, Z., Thomas, N. L. & Houdr\u00e9, R. Refractive index sensing with an air-slot photonic crystal nanocavity. Opt. Lett. 35, 2523 (2010).","journal-title":"Opt. Lett."},{"key":"BFsrep26038_CR13","doi-asserted-by":"publisher","first-page":"123601","DOI":"10.1103\/PhysRevLett.110.123601","volume":"110","author":"N Descharmes","year":"2013","unstructured":"Descharmes, N., Dharanipathy, U. P., Diao, Z., Tonin, M. & Houdr\u00e9, R. Observation of Backaction and Self-Induced Trapping in a Planar Hollow Photonic Crystal Cavity. Phys. Rev. Lett. 110, 123601 (2013).","journal-title":"Phys. Rev. Lett."},{"key":"BFsrep26038_CR14","doi-asserted-by":"publisher","first-page":"297","DOI":"10.1038\/nphoton.2011.51","volume":"5","author":"B Ellis","year":"2011","unstructured":"Ellis, B. et al. Ultralow-threshold electrically pumped quantumdot photonic-crystal nanocavity laser. Nat. Photon. 5, 297 (2011).","journal-title":"Nat. Photon."},{"key":"BFsrep26038_CR15","doi-asserted-by":"publisher","first-page":"1444","DOI":"10.1126\/science.1100968","volume":"305","author":"H Park","year":"2004","unstructured":"Park, H. et al. Electrically Driven Single-Cell Photonic Crystal Laser. Science 305, 1444 (2004).","journal-title":"Science"},{"key":"BFsrep26038_CR16","doi-asserted-by":"publisher","first-page":"200","DOI":"10.1038\/nature03119","volume":"432","author":"T Yoshie","year":"2004","unstructured":"Yoshie, T. et al. Vacuum Rabi splitting with a single quantum dot in a photonic crystal nanocavity. Nature 432, 200 (2004).","journal-title":"Nature"},{"key":"BFsrep26038_CR17","doi-asserted-by":"publisher","first-page":"7368","DOI":"10.1364\/OE.14.007368","volume":"14","author":"H Chen","year":"2006","unstructured":"Chen, H., Tsia, K. K. & Poon, A. W. Surface modes in two-dimensional photonic crystal slabs with a flat dielectric margin. Opt. Exp. 14, 7368 (2006).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR18","doi-asserted-by":"publisher","first-page":"041108","DOI":"10.1063\/1.2432228","volume":"90","author":"Z Zhang","year":"2007","unstructured":"Zhang, Z. et al. Optical filter based on two-dimensional photonic crystal surface-mode cavity in amorphous silicon-on-silica structure. Appl. Phys. Lett. 90, 041108 (2007).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR19","doi-asserted-by":"publisher","first-page":"1225","DOI":"10.1364\/JOSAB.24.001225","volume":"24","author":"S Xiao","year":"2007","unstructured":"Xiao, S. & Qiu, M. Optical microcavities based on surface modes in two-dimensional photonic crystals and silicon-on-insulator photonic crystals. J. Opt. Soc. Am. B. 24, 1225 (2007).","journal-title":"J. Opt. Soc. Am. B"},{"key":"BFsrep26038_CR20","doi-asserted-by":"publisher","first-page":"2461","DOI":"10.1016\/j.optcom.2010.02.011","volume":"283","author":"J Wang","year":"2010","unstructured":"Wang, J., Song, Y., Yan, W. & Qiu, M. High-Q photonic crystal surface-mode cavities on crystalline SOI structures. Opt. Comm. 283, 2461 (2010).","journal-title":"Opt. Comm."},{"key":"BFsrep26038_CR21","doi-asserted-by":"publisher","first-page":"3861","DOI":"10.1364\/OE.21.003861","volume":"21","author":"WS Fegadolli","year":"2013","unstructured":"Fegadolli, W. S., Oliveira, J. E. B., Almedida, V. R. & Scherer, A. Compact and low power consumption tunable photonic crystal nanobeam cavity. Opt. Exp. 21, 3861 (2013).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR22","doi-asserted-by":"publisher","first-page":"470","DOI":"10.1021\/ph5004863","volume":"2","author":"WS Fegadolli","year":"2015","unstructured":"Fegadolli, W. S. et al. Thermally Controllable Silicon Photonic Crystal Nanobeam Cavity without Surface Cladding for Sensing Applications. ACS. Photon. 2, 470 (2015).","journal-title":"ACS. Photon."},{"key":"BFsrep26038_CR23","doi-asserted-by":"publisher","first-page":"416","DOI":"10.1038\/nphoton.2007.96","volume":"1","author":"M Eichenfield","year":"2007","unstructured":"Eichenfield, M., Michael, C. P., Perahia, R. & Painter, O. Actuation of micro-optomechanical systems via cavity-enhanced optical dipole forces. Nat. Photon. 1, 416 (2007).","journal-title":"Nat. Photon."},{"key":"BFsrep26038_CR24","doi-asserted-by":"publisher","first-page":"633","DOI":"10.1038\/nature08584","volume":"462","author":"GS Wiederhecker","year":"2009","unstructured":"Wiederhecker, G. S., Chen, L., Gondarenko, A. & Lipson, M. Controlling photonic structures using optical forces. Nature 462, 633 (2009).","journal-title":"Nature"},{"key":"BFsrep26038_CR25","doi-asserted-by":"publisher","first-page":"464","DOI":"10.1038\/nphoton.2009.116","volume":"3","author":"M Li","year":"2009","unstructured":"Li, M. et al. Tunable bipolar optical interactions between guided lightwaves. Nat. Photon. 3, 464\u2013468 (2009).","journal-title":"Nat. Photon."},{"key":"BFsrep26038_CR26","doi-asserted-by":"publisher","first-page":"12424","DOI":"10.1364\/OE.17.012424","volume":"17","author":"WHP Pernice","year":"2009","unstructured":"Pernice, W. H. P., Li, M. & Tang, H. X. Optomechanical coupling in photonic crystal supported nanomechanical waveguides. Opt. Exp. 17, 12424 (2009).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR27","doi-asserted-by":"publisher","first-page":"550","DOI":"10.1038\/nature08061","volume":"459","author":"M Eichenfield","year":"2009","unstructured":"Eichenfield, M., Camacho, R., Chan, J., Vahala, K. J. & Painter, O. A picogram- and nanometre-scale photonic-crystal optomechanical cavity. Nature 459, 550 (2009).","journal-title":"Nature"},{"key":"BFsrep26038_CR28","doi-asserted-by":"publisher","first-page":"846","DOI":"10.1038\/ncomms1830","volume":"3","author":"PB Deotare","year":"2012","unstructured":"Deotare, P. B. et al. All optical reconfiguration of optomechanical filters. Nat. Comm. 3, 846 (2012).","journal-title":"Nat. Comm."},{"key":"BFsrep26038_CR29","doi-asserted-by":"publisher","first-page":"6259","DOI":"10.1364\/OE.14.006259","volume":"14","author":"L Martinez","year":"2006","unstructured":"Martinez, L. & Lipson, M. High confinement suspended micro-ring resonators in silicon-on-insulator. Opt. Exp. 14, 6259 (2006).","journal-title":"Opt. Exp."},{"key":"BFsrep26038_CR30","doi-asserted-by":"publisher","first-page":"051110","DOI":"10.1063\/1.3078522","volume":"94","author":"S Koseki","year":"2009","unstructured":"Koseki, S., Zhang, B., Greve, K. D. & Yamamoto, Y. Monlithic integration of quantum dot containing microdisk microcavities coupled to air-suspended waveguides. Appl. Phys. Lett. 94, 051110 (2009).","journal-title":"Appl. Phys. Lett."},{"key":"BFsrep26038_CR31","doi-asserted-by":"publisher","first-page":"47","DOI":"10.1002\/lpor.201100017","volume":"1","author":"W Bogaerts*","year":"2012","unstructured":"Bogaerts*, W. et al. Silicon Ring Resonators. Laser. Photon. Rev. 1, 47 (2012).","journal-title":"Photon. Rev."}],"container-title":["Scientific Reports"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.nature.com\/articles\/srep26038","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/srep26038.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/www.nature.com\/articles\/srep26038.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,1,4]],"date-time":"2023-01-04T15:08:24Z","timestamp":1672844904000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.nature.com\/articles\/srep26038"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2016,5,19]]},"references-count":31,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2016,9,19]]}},"alternative-id":["BFsrep26038"],"URL":"https:\/\/doi.org\/10.1038\/srep26038","relation":{},"ISSN":["2045-2322"],"issn-type":[{"value":"2045-2322","type":"electronic"}],"subject":[],"published":{"date-parts":[[2016,5,19]]},"assertion":[{"value":"5 January 2016","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"26 April 2016","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"19 May 2016","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"The authors declare no competing financial interests.","order":1,"name":"Ethics","group":{"name":"EthicsHeading","label":"Competing interests"}}],"article-number":"26038"}}