{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T06:17:50Z","timestamp":1782973070691,"version":"3.54.5"},"reference-count":46,"publisher":"Royal Society of Chemistry (RSC)","issue":"35","license":[{"start":{"date-parts":[[2019,8,17]],"date-time":"2019-08-17T00:00:00Z","timestamp":1566000000000},"content-version":"am","delay-in-days":593,"URL":"http:\/\/rsc.li\/journals-terms-of-use"}],"funder":[{"DOI":"10.13039\/100011102","name":"Seventh Framework Programme","doi-asserted-by":"crossref","award":["606889"],"award-info":[{"award-number":["606889"]}],"id":[{"id":"10.13039\/100011102","id-type":"DOI","asserted-by":"crossref"}]}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["Phys. Chem. Chem. Phys."],"abstract":"<p>\n                    Saturation takes place during the oxygen plasma pulse when\n                    <sup>1<\/sup>\n                    O atoms oxidize the methyl-covered alumina surface to produce surface hydroxyls and CH\n                    <sub>2<\/sub>\n                    O as by-product.\n                  <\/p>","DOI":"10.1039\/c8cp03495h","type":"journal-article","created":{"date-parts":[[2018,8,17]],"date-time":"2018-08-17T11:34:20Z","timestamp":1534505660000},"page":"22783-22795","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":23,"title":["First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina"],"prefix":"10.1039","volume":"20","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-4234-1204","authenticated-orcid":false,"given":"Glen N.","family":"Fomengia","sequence":"first","affiliation":[{"name":"Tyndall National Institute"},{"name":"University College Cork"},{"name":"Cork"},{"name":"Ireland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5224-8580","authenticated-orcid":false,"given":"Michael","family":"Nolan","sequence":"additional","affiliation":[{"name":"Tyndall National Institute"},{"name":"University College Cork"},{"name":"Cork"},{"name":"Ireland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5573-5694","authenticated-orcid":false,"given":"Simon D.","family":"Elliott","sequence":"additional","affiliation":[{"name":"Schr\u00f6dinger"},{"name":"New York"},{"name":"USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"292","published-online":{"date-parts":[[2018]]},"reference":[{"key":"C8CP03495H-(cit2)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"050801","DOI":"10.1116\/1.3609974","volume":"29","author":"Profijt","year":"2011","journal-title":"J. Vac. Sci. Technol., A"},{"key":"C8CP03495H-(cit3)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"023534","DOI":"10.1063\/1.2214438","volume":"100","author":"Langereis","year":"2006","journal-title":"J. Appl. Phys."},{"key":"C8CP03495H-(cit4)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"L5","DOI":"10.1116\/1.1938981","volume":"23","author":"Heil","year":"2005","journal-title":"J. Vac. Sci. Technol., A"},{"key":"C8CP03495H-(cit5)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"6506","DOI":"10.1021\/la010103a","volume":"17","author":"Rahtu","year":"2001","journal-title":"Langmuir"},{"key":"C8CP03495H-(cit6)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"331","DOI":"10.1021\/nn901013r","volume":"4","author":"Loscutoff","year":"2010","journal-title":"ACS Nano"},{"key":"C8CP03495H-(cit7)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"131505","DOI":"10.1063\/1.2357886","volume":"89","author":"Heil","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"C8CP03495H-(cit8)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1357","DOI":"10.1116\/1.2753846","volume":"25","author":"Heil","year":"2007","journal-title":"J. Vac. Sci. Technol., A"},{"key":"C8CP03495H-(cit9)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"371","DOI":"10.3390\/nano8060371","volume":"8","author":"Khan","year":"2018","journal-title":"Nanomaterials"},{"key":"C8CP03495H-(cit10)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"eaao5031","DOI":"10.1126\/sciadv.aao5031","volume":"4","author":"Jadwiszczak","year":"2018","journal-title":"Sci. Adv."},{"key":"C8CP03495H-(cit11)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"115020","DOI":"10.1088\/0960-1317\/26\/11\/115020","volume":"26","author":"Oh","year":"2016","journal-title":"J. Micromech. Microeng."},{"key":"C8CP03495H-(cit12)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"042112","DOI":"10.1063\/1.2240736","volume":"89","author":"Hoex","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"C8CP03495H-(cit13)\/*[position()=1]","first-page":"7517","volume":"17","author":"Lu","year":"2005","journal-title":"J. Phys.: Condens. Matter"},{"key":"C8CP03495H-(cit14)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17322","DOI":"10.1039\/C5CP01912E","volume":"17","author":"Weckman","year":"2015","journal-title":"Phys. Chem. Chem. Phys."},{"key":"C8CP03495H-(cit15)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3246","DOI":"10.1039\/b405776g","volume":"14","author":"Elliott","year":"2004","journal-title":"J. Mater. Chem."},{"key":"C8CP03495H-(cit16)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5367","DOI":"10.1002\/adma.201504043","volume":"28","author":"Elliott","year":"2015","journal-title":"Adv. Mater."},{"key":"C8CP03495H-(cit17)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"350","DOI":"10.1021\/la201136k","volume":"28","author":"Rai","year":"2012","journal-title":"Langmuir"},{"key":"C8CP03495H-(cit18)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4511","DOI":"10.1016\/j.surfcoat.2012.02.038","volume":"206","author":"Musschoot","year":"2012","journal-title":"Surf. Coat. Technol."},{"key":"C8CP03495H-(cit19)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"976","DOI":"10.1002\/pssc.200982891","volume":"7","author":"Verlaan","year":"2010","journal-title":"Phys. Status Solidi C"},{"key":"C8CP03495H-(cit20)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"011607","DOI":"10.1063\/1.4939654","volume":"108","author":"Vandalon","year":"2016","journal-title":"Appl. Phys. Lett."},{"key":"C8CP03495H-(cit21)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"G165","DOI":"10.1149\/1.2737629","volume":"154","author":"van Hemmen","year":"2007","journal-title":"J. Electrochem. Soc."},{"key":"C8CP03495H-(cit22)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"F69","DOI":"10.1149\/1.2177047","volume":"153","author":"Kim","year":"2006","journal-title":"J. Electrochem. Soc."},{"key":"C8CP03495H-(cit23)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"639","DOI":"10.1021\/cm0304546","volume":"16","author":"Groner","year":"2004","journal-title":"Chem. Mater."},{"key":"C8CP03495H-(cit24)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3764","DOI":"10.1021\/cm0608903","volume":"18","author":"Elliott","year":"2006","journal-title":"Chem. Mater."},{"key":"C8CP03495H-(cit25)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"103302","DOI":"10.1063\/1.2924406","volume":"103","author":"Heil","year":"2008","journal-title":"J. Appl. Phys."},{"key":"C8CP03495H-(cit26)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"131505","DOI":"10.1063\/1.2357886","volume":"89","author":"Heil","year":"2006","journal-title":"Appl. Phys. Lett."},{"key":"C8CP03495H-(cit27)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3248","DOI":"10.1021\/cm703667h","volume":"20","author":"Kwon","year":"2008","journal-title":"Chem. Mater."},{"key":"C8CP03495H-(cit28)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"13732","DOI":"10.1021\/la101485a","volume":"26","author":"Rai","year":"2010","journal-title":"Langmuir"},{"key":"C8CP03495H-(cit29)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"231904","DOI":"10.1063\/1.2940598","volume":"92","author":"Langereis","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"C8CP03495H-(cit30)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4559","DOI":"10.1016\/j.tsf.2011.10.125","volume":"520","author":"Mastai","year":"2012","journal-title":"Thin Solid Films"},{"key":"C8CP03495H-(cit31)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"6311","DOI":"10.1039\/C5NR00900F","volume":"7","author":"Shirazi","year":"2015","journal-title":"Nanoscale"},{"key":"C8CP03495H-(cit32)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"121301","DOI":"10.1063\/1.1940727","volume":"97","author":"Puurunen","year":"2005","journal-title":"J. Appl. Phys."},{"key":"C8CP03495H-(cit33)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"11179","DOI":"10.1063\/1.1574798","volume":"118","author":"\u0141odziana","year":"2003","journal-title":"J. Chem. Phys."},{"key":"C8CP03495H-(cit34)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01A106","DOI":"10.1116\/1.4756906","volume":"31","author":"Profijt","year":"2013","journal-title":"J. Vac. Sci. Technol., A"},{"key":"C8CP03495H-(cit35)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1341","DOI":"10.1039\/C4CC08004A","volume":"51","author":"Fang","year":"2015","journal-title":"Chem. Commun."},{"key":"C8CP03495H-(cit36)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"207","DOI":"10.1016\/j.apsusc.2013.04.129","volume":"280","author":"Jeong","year":"2013","journal-title":"Appl. Surf. Sci."},{"key":"C8CP03495H-(cit37)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"015008","DOI":"10.1088\/0963-0252\/20\/1\/015008","volume":"20","author":"Tinck","year":"2011","journal-title":"Plasma Sources Sci. Technol."},{"key":"C8CP03495H-(cit38)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"11169","DOI":"10.1103\/PhysRevB.54.11169","volume":"54","author":"Kresse","year":"1996","journal-title":"Phys. Rev. B: Condens. Matter Mater. Phys."},{"key":"C8CP03495H-(cit39)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3865","DOI":"10.1103\/PhysRevLett.77.3865","volume":"77","author":"Perdew","year":"1996","journal-title":"Phys. Rev. Lett."},{"key":"C8CP03495H-(cit40)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17953","DOI":"10.1103\/PhysRevB.50.17953","volume":"50","author":"Bl\u00f6chl","year":"1994","journal-title":"Phys. Rev. B: Condens. Matter Mater. Phys."},{"key":"C8CP03495H-(cit41)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5188","DOI":"10.1103\/PhysRevB.13.5188","volume":"13","author":"Monkhorst","year":"1976","journal-title":"Phys. Rev. B: Solid State"},{"key":"C8CP03495H-(cit42)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17322","DOI":"10.1039\/C5CP01912E","volume":"17","author":"Weckman","year":"2015","journal-title":"Phys. Chem. Chem. Phys."},{"key":"C8CP03495H-(cit43)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5718","DOI":"10.1021\/jp049762x","volume":"108","author":"Heyman","year":"2004","journal-title":"J. Phys. Chem. B"},{"key":"C8CP03495H-(cit44)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"107","DOI":"10.1016\/S0169-4332(96)00513-2","volume":"107","author":"Lakomaa","year":"1996","journal-title":"Appl. Surf. Sci."},{"issue":"28","key":"C8CP03495H-(cit45)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"6599","DOI":"10.1021\/jp000454i","volume":"104","author":"Puurunen","year":"2000","journal-title":"J. Phys. Chem. B"},{"key":"C8CP03495H-(cit46)\/*[position()=1]","first-page":"3","volume":"2003","author":"Prechtl","year":"2003","journal-title":"IEEE Int. Electron Devices Meet."},{"key":"C8CP03495H-(cit47)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"175","DOI":"10.1149\/1.3633666","volume":"41","author":"Elliott","year":"2011","journal-title":"ECS Trans."}],"container-title":["Physical Chemistry Chemical Physics"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/en\/content\/articlepdf\/2018\/CP\/C8CP03495H","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T04:56:07Z","timestamp":1782968167000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.rsc.org\/cp\/article\/20\/35\/22783-22795\/598785"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018]]},"references-count":46,"journal-issue":{"issue":"35","published-print":{"date-parts":[[2018]]}},"URL":"https:\/\/doi.org\/10.1039\/c8cp03495h","relation":{"has-preprint":[{"id-type":"doi","id":"10.26434\/chemrxiv.6377372.v1","asserted-by":"object"}]},"ISSN":["1463-9076","1463-9084"],"issn-type":[{"value":"1463-9076","type":"print"},{"value":"1463-9084","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018]]},"assertion":[{"value":"This document is Similarity Check deposited","name":"similarity_check","explanation":{"URL":"https:\/\/www.crossref.org\/services\/similarity-check\/"},"group":{"name":"similarity_check","label":"SIMILARITY CHECK"}},{"value":"Supplementary Information","URL":"https:\/\/doi.org\/10.1039\/C8CP03495H","name":"related_data","group":{"name":"related_data","label":"RELATED DATA"}},{"value":"Glen N. Fomengia (ORCID)","URL":"http:\/\/orcid.org\/0000-0002-4234-1204","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Michael Nolan (ORCID)","URL":"http:\/\/orcid.org\/0000-0002-5224-8580","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Simon D. Elliott (ORCID)","URL":"http:\/\/orcid.org\/0000-0001-5573-5694","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Simon D. Elliott (ResearcherID)","URL":"http:\/\/www.researcherid.com\/rid\/F-9206-2012","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Single-blind","order":2,"name":"peer_review_method","group":{"name":"peer_review_method","label":"PEER REVIEW METHOD"}},{"value":"Received 2 June 2018; Accepted 17 August 2018; Accepted Manuscript published 17 August 2018; Advance Article published 24 August 2018; Version of Record published 12 September 2018","order":1,"name":"history","group":{"name":"publication_history","label":"PUBLICATION HISTORY"}}]}}