{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T18:40:22Z","timestamp":1783017622774,"version":"3.54.6"},"reference-count":55,"publisher":"Royal Society of Chemistry (RSC)","issue":"15","license":[{"start":{"date-parts":[[2022,4,6]],"date-time":"2022-04-06T00:00:00Z","timestamp":1649203200000},"content-version":"am","delay-in-days":460,"URL":"http:\/\/rsc.li\/journals-terms-of-use"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["21703158"],"award-info":[{"award-number":["21703158"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["21873073"],"award-info":[{"award-number":["21873073"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"}]}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["Phys. Chem. Chem. Phys."],"abstract":"<p>\n                    TMA can react with the sulfhydryl group on the surface to form CH\n                    <sub>4<\/sub>\n                    and H\n                    <sub>2<\/sub>\n                    S half-reaction involves the formations of CH\n                    <sub>4<\/sub>\n                    and H\n                    <sub>2<\/sub>\n                    S in Al\n                    <sub>2<\/sub>\n                    S\n                    <sub>3<\/sub>\n                    ALD.\n                  <\/p>","DOI":"10.1039\/d1cp00864a","type":"journal-article","created":{"date-parts":[[2021,4,6]],"date-time":"2021-04-06T09:22:04Z","timestamp":1617700924000},"page":"9594-9603","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Reaction mechanism of atomic layer deposition of aluminum sulfide using trimethylaluminum and hydrogen sulfide"],"prefix":"10.1039","volume":"23","author":[{"given":"Yanghong","family":"Yu","sequence":"first","affiliation":[{"name":"College of Chemistry and Materials Engineering"},{"name":"Wenzhou University"},{"name":"Wenzhou 325035"},{"name":"China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhongchao","family":"Zhou","sequence":"additional","affiliation":[{"name":"College of Chemistry and Materials Engineering"},{"name":"Wenzhou University"},{"name":"Wenzhou 325035"},{"name":"China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0455-3839","authenticated-orcid":false,"given":"Lina","family":"Xu","sequence":"additional","affiliation":[{"name":"College of Chemistry and Materials Engineering"},{"name":"Wenzhou University"},{"name":"Wenzhou 325035"},{"name":"China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9598-437X","authenticated-orcid":false,"given":"Yihong","family":"Ding","sequence":"additional","affiliation":[{"name":"College of Chemistry and Materials Engineering"},{"name":"Wenzhou University"},{"name":"Wenzhou 325035"},{"name":"China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6817-3790","authenticated-orcid":false,"given":"Guoyong","family":"Fang","sequence":"additional","affiliation":[{"name":"College of Chemistry and Materials Engineering"},{"name":"Wenzhou University"},{"name":"Wenzhou 325035"},{"name":"China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"292","published-online":{"date-parts":[[2021]]},"reference":[{"key":"D1CP00864A-(cit1)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5548","DOI":"10.1002\/anie.200301652","volume":"42","author":"Leskel\u00e4","year":"2003","journal-title":"Angew. Chem., Int. Ed."},{"key":"D1CP00864A-(cit2)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"121301","DOI":"10.1063\/1.1940727","volume":"97","author":"Puurunena","year":"2005","journal-title":"J. Appl. Phys."},{"key":"D1CP00864A-(cit3)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3521","DOI":"10.1039\/b803832e","volume":"18","author":"Zaera","year":"2008","journal-title":"J. Mater. Chem."},{"key":"D1CP00864A-(cit4)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"223","DOI":"10.1002\/adem.200800316","volume":"11","author":"Niinist\u00f6","year":"2009","journal-title":"Adv. Eng. Mater."},{"key":"D1CP00864A-(cit5)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"226","DOI":"10.1039\/B801151F","volume":"38","author":"Rolison","year":"2009","journal-title":"Chem. Soc. Rev."},{"key":"D1CP00864A-(cit6)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1021\/cr900056b","volume":"110","author":"George","year":"2010","journal-title":"Chem. Rev."},{"key":"D1CP00864A-(cit7)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5242","DOI":"10.1039\/c1cs15091j","volume":"40","author":"Detavernier","year":"2011","journal-title":"Chem. Soc. Rev."},{"key":"D1CP00864A-(cit8)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1017","DOI":"10.1002\/adma.201104129","volume":"24","author":"Marichy","year":"2012","journal-title":"Adv. Mater."},{"key":"D1CP00864A-(cit9)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3589","DOI":"10.1002\/adma.201200397","volume":"24","author":"Meng","year":"2012","journal-title":"Adv. Mater."},{"key":"D1CP00864A-(cit10)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"10941","DOI":"10.1039\/C4NR01954G","volume":"6","author":"Mackus","year":"2014","journal-title":"Nanoscale"},{"key":"D1CP00864A-(cit11)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1804","DOI":"10.1021\/cs501862h","volume":"5","author":"O\u2019Neill","year":"2015","journal-title":"ACS Catal."},{"key":"D1CP00864A-(cit12)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"12266","DOI":"10.1039\/C5NR02080H","volume":"7","author":"Palmstrom","year":"2015","journal-title":"Nanoscale"},{"key":"D1CP00864A-(cit13)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"10127","DOI":"10.1039\/C7TA02742G","volume":"5","author":"Meng","year":"2017","journal-title":"J. Mater. Chem. A"},{"key":"D1CP00864A-(cit14)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"908","DOI":"10.1021\/acsenergylett.9b00249","volume":"4","author":"Asundi","year":"2019","journal-title":"ACS Energy Lett."},{"key":"D1CP00864A-(cit15)\/*[position()=1]","doi-asserted-by":"publisher","DOI":"10.1002\/eem2.12132","author":"Cao","year":"2021","journal-title":"Energy Environ. Mater."},{"key":"D1CP00864A-(cit16)\/*[position()=1]","volume-title":"Atomic Layer Deposition for Nanotechnology","author":"Sherman","year":"2008","unstructured":"A. Sherman  ,  Atomic Layer Deposition for Nanotechnology ,  Ivoryton Press ,  2008"},{"key":"D1CP00864A-(cit17)\/*[position()=1]","volume-title":"Atomic Layer Deposition of Nanostructured Materials","author":"Pinna","year":"2012","unstructured":"N. Pinna   and  M.Knez ,  Atomic Layer Deposition of Nanostructured Materials ,  Wiley-VCH ,  2012"},{"key":"D1CP00864A-(cit18)\/*[position()=1]","doi-asserted-by":"crossref","DOI":"10.1002\/9781118747407","volume-title":"Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications","author":"K\u00e4\u00e4ri\u00e4inen","year":"2013","unstructured":"T. K\u00e4\u00e4ri\u00e4inen  ,  D.Cameron ,  L.-M.K\u00e4\u00e4ri\u00e4inen  and  A.Sherman ,  Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications , Second Edition,  Wiley-Scrivener ,  2013"},{"key":"D1CP00864A-(cit19)\/*[position()=1]","doi-asserted-by":"crossref","DOI":"10.1007\/978-1-4614-8054-9","volume-title":"Atomic Layer Deposition for Semiconductors","author":"Hwang","year":"2014","unstructured":"S. C. Hwang   and  Y. C.Yoo ,  Atomic Layer Deposition for Semiconductors ,  Springer ,  2014"},{"key":"D1CP00864A-(cit20)\/*[position()=1]","volume-title":"Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications","author":"Valdez","year":"2015","unstructured":"J. Valdez  ,  Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications ,  Nova Science Publishers ,  2015"},{"key":"D1CP00864A-(cit21)\/*[position()=1]","volume-title":"Principle and Application of Atomic Layer Deposition Technology, Chinese Edition","author":"Li","year":"2016","unstructured":"A.-D. Li  ,  Principle and Application of Atomic Layer Deposition Technology, Chinese Edition ,  Science Press ,  Beijing ,  2016"},{"key":"D1CP00864A-(cit22)\/*[position()=1]","doi-asserted-by":"crossref","DOI":"10.1002\/9783527694822","volume-title":"Atomic Layer Deposition in Energy Conversion Applications","author":"Bachmann","year":"2017","unstructured":"J. Bachmann  ,  Atomic Layer Deposition in Energy Conversion Applications ,  Wiley-VCH ,  2017"},{"key":"D1CP00864A-(cit23)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"341","DOI":"10.1021\/ar500360d","volume":"48","author":"Dasgupta","year":"2015","journal-title":"Acc. Chem. Res."},{"key":"D1CP00864A-(cit24)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2586","DOI":"10.1021\/cm900623v","volume":"21","author":"Yang","year":"2009","journal-title":"Chem. Mater."},{"issue":"17","key":"D1CP00864A-(cit25)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3973","DOI":"10.1021\/cm901228x","volume":"21","author":"Dasgupta","year":"2009","journal-title":"Chem. Mater."},{"key":"D1CP00864A-(cit26)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1029","DOI":"10.1021\/cm4031057","volume":"26","author":"Meng","year":"2014","journal-title":"Chem. Mater."},{"key":"D1CP00864A-(cit27)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3065","DOI":"10.1021\/cm403901y","volume":"26","author":"Kim","year":"2014","journal-title":"Chem. Mater."},{"key":"D1CP00864A-(cit28)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"10584","DOI":"10.1039\/C4NR02451F","volume":"6","author":"Tan","year":"2014","journal-title":"Nanoscale"},{"key":"D1CP00864A-(cit29)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"10963","DOI":"10.1021\/nn505480w","volume":"8","author":"Meng","year":"2014","journal-title":"ACS Nano"},{"key":"D1CP00864A-(cit30)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"313","DOI":"10.1021\/cm3027225","volume":"25","author":"Thimsen","year":"2013","journal-title":"Chem. Mater."},{"key":"D1CP00864A-(cit31)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9043","DOI":"10.1021\/acs.chemmater.7b02175","volume":"29","author":"Meng","year":"2017","journal-title":"Chem. Mater."},{"key":"D1CP00864A-(cit32)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01A139","DOI":"10.1116\/1.4903951","volume":"33","author":"Sinha","year":"2015","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D1CP00864A-(cit33)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01A113","DOI":"10.1116\/1.5003339","volume":"36","author":"Kuhs","year":"2018","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D1CP00864A-(cit34)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"8327","DOI":"10.1016\/j.jpowsour.2010.06.079","volume":"195","author":"Senoha","year":"2010","journal-title":"J. Power Sources"},{"key":"D1CP00864A-(cit35)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"074008","DOI":"10.1088\/0268-1242\/27\/7\/074008","volume":"27","author":"Elliott","year":"2012","journal-title":"Semicond. Sci. Technol."},{"key":"D1CP00864A-(cit36)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5367","DOI":"10.1002\/adma.201504043","volume":"28","author":"Elliott","year":"2016","journal-title":"Adv. Mater."},{"key":"D1CP00864A-(cit37)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"26892","DOI":"10.1039\/C5CP03707G","volume":"17","author":"Hu","year":"2015","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D1CP00864A-(cit38)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1016\/j.ccr.2016.05.011","volume":"322","author":"Fang","year":"2016","journal-title":"Coord. Chem. Rev."},{"key":"D1CP00864A-(cit39)\/*[position()=1]","first-page":"19454","volume":"117","author":"Huang","year":"2013","journal-title":"J. Phys. Chem. C"},{"key":"D1CP00864A-(cit40)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"16861","DOI":"10.1039\/C8CP00210J","volume":"20","author":"Shirazi","year":"2018","journal-title":"Phys. Chem. Chem. Phys."},{"issue":"11","key":"D1CP00864A-(cit41)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5871","DOI":"10.1021\/acs.jpcc.6b12242","volume":"121","author":"Goehry","year":"2017","journal-title":"J. Phys. Chem. C"},{"key":"D1CP00864A-(cit42)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17751","DOI":"10.1039\/C8CP02786B","volume":"20","author":"Sangiovanni","year":"2018","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D1CP00864A-(cit43)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3356","DOI":"10.1039\/C4DT03406F","volume":"44","author":"dos Santos","year":"2015","journal-title":"Dalton Trans."},{"key":"D1CP00864A-(cit44)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17121","DOI":"10.1021\/acs.jpcc.0c04872","volume":"124","author":"Ansari","year":"2020","journal-title":"J. Phys. Chem. C"},{"key":"D1CP00864A-(cit45)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"31223","DOI":"10.1039\/C6CP05842F","volume":"18","author":"Xu","year":"2016","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D1CP00864A-(cit46)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"11996","DOI":"10.1021\/ja801616u","volume":"130","author":"Mukhopadhyay","year":"2008","journal-title":"J. Am. Chem. Soc."},{"key":"D1CP00864A-(cit47)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"26436","DOI":"10.1021\/jp309974r","volume":"116","author":"Fang","year":"2012","journal-title":"J. Phys. Chem. C"},{"key":"D1CP00864A-(cit48)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"11856","DOI":"10.1039\/c3nr02086j","volume":"5","author":"Fang","year":"2013","journal-title":"Nanoscale"},{"key":"D1CP00864A-(cit49)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"215","DOI":"10.1007\/s00214-007-0310-x","volume":"120","author":"Zhao","year":"2007","journal-title":"Theor. Chem. Acc."},{"key":"D1CP00864A-(cit50)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"157","DOI":"10.1021\/ar700111a","volume":"41","author":"Zhao","year":"2008","journal-title":"Acc. Chem. Res."},{"key":"D1CP00864A-(cit51)\/*[position()=1]","volume-title":"Gaussian 09, Revision E.01","author":"Frisch","year":"2013","unstructured":"M. J. Frisch  ,  G. W.Trucks ,  H. B.Schlegel ,  G. E.Scuseria ,  M. A.Robb ,  J. R.Cheeseman ,  G.Scalmani ,  V.Barone ,  B.Mennucci ,  G. A.Petersson ,  H.Nakatsuji ,  M.Caricato ,  X.Li ,  H. P.Hratchian ,  A. F.Izmaylov ,  J.Bloino ,  G.Zheng ,  J. L.Sonnenberg ,  M.Hada ,  M.Ehara ,  K.Toyota ,  R.Fukuda ,  J.Hasegawa ,  M.Ishida ,  T.Nakajima ,  Y.Honda ,  O.Kitao ,  H.Nakai ,  T.Vreven ,  J. A.Montgomery, Jr. ,  J. E.Peralta ,  F.Ogliaro ,  M.Bearpark ,  J. J.Heyd ,  E.Brothers ,  K. N.Kudin ,  V. N.Staroverov ,  T.Keith ,  R.Kobayashi ,  J.Normand ,  K.Raghavachari ,  A.Rendell ,  J. C.Burant ,  S. S.Iyengar ,  J.Tomasi ,  M.Cossi ,  N.Rega ,  J. M.Millam ,  M.Klene ,  J. E.Knox ,  J. B.Cross ,  V.Bakken ,  C.Adamo ,  J.Jaramillo ,  R.Gomperts ,  R. E.Stratmann ,  O.Yazyev ,  A. J.Austin ,  R.Cammi ,  C.Pomelli ,  J. W.Ochterski ,  R. L.Martin ,  K.Morokuma ,  V. G.Zakrzewski ,  G. A.Voth ,  P.Salvador ,  J. J.Dannenberg ,  S.Dapprich ,  A. D.Daniels ,  O.Farkas ,  J. B.Foresman ,  J. V.Ortiz ,  J.Cioslowski  and  D. J.Fox ,  Gaussian 09, Revision E.01 ,  Gaussian, Inc. ,  Wallingford ,  2013"},{"key":"D1CP00864A-(cit52)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3246","DOI":"10.1039\/b405776g","volume":"14","author":"Elliott","year":"2004","journal-title":"J. Mater. Chem."},{"key":"D1CP00864A-(cit53)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1007\/s10832-004-5086-y","volume":"13","author":"Elliott","year":"2004","journal-title":"J. Electroceram."},{"key":"D1CP00864A-(cit54)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3304","DOI":"10.1063\/1.1473237","volume":"80","author":"Widjaja","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"D1CP00864A-(cit55)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1934","DOI":"10.1126\/science.278.5345.1934","volume":"278","author":"Klaus","year":"1997","journal-title":"Science"}],"container-title":["Physical Chemistry Chemical Physics"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/en\/content\/articlepdf\/2021\/CP\/D1CP00864A","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T17:38:24Z","timestamp":1783013904000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.rsc.org\/cp\/article\/23\/15\/9594-9603\/720925"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021]]},"references-count":55,"journal-issue":{"issue":"15","published-print":{"date-parts":[[2021,4,22]]}},"URL":"https:\/\/doi.org\/10.1039\/d1cp00864a","relation":{},"ISSN":["1463-9076","1463-9084"],"issn-type":[{"value":"1463-9076","type":"print"},{"value":"1463-9084","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021]]},"assertion":[{"value":"This document is Similarity Check deposited","name":"similarity_check","explanation":{"URL":"https:\/\/www.crossref.org\/services\/similarity-check\/"},"group":{"name":"similarity_check","label":"SIMILARITY CHECK"}},{"value":"Supplementary Information","URL":"https:\/\/doi.org\/10.1039\/D1CP00864A","name":"related_data","group":{"name":"related_data","label":"RELATED DATA"}},{"value":"Lina Xu (ORCID)","URL":"http:\/\/orcid.org\/0000-0002-0455-3839","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Lina Xu (ResearcherID)","URL":"http:\/\/www.researcherid.com\/rid\/I-7522-2016","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Yihong Ding (ORCID)","URL":"http:\/\/orcid.org\/0000-0001-9598-437X","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Guoyong Fang (ORCID)","URL":"http:\/\/orcid.org\/0000-0001-6817-3790","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Guoyong Fang (ResearcherID)","URL":"http:\/\/www.researcherid.com\/rid\/I-7524-2016","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Single-blind","order":2,"name":"peer_review_method","group":{"name":"peer_review_method","label":"PEER REVIEW METHOD"}},{"value":"Received 24 February 2021; Accepted 6 April 2021;  Accepted Manuscript published 6 April 2021;  Advance Article published 13 April 2021;  Version of Record published 22 April 2021","order":1,"name":"history","group":{"name":"publication_history","label":"PUBLICATION HISTORY"}}]}}