{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,20]],"date-time":"2026-07-20T13:49:38Z","timestamp":1784555378914,"version":"3.55.0"},"reference-count":52,"publisher":"Royal Society of Chemistry (RSC)","issue":"5","license":[{"start":{"date-parts":[[2023,1,5]],"date-time":"2023-01-05T00:00:00Z","timestamp":1672876800000},"content-version":"am","delay-in-days":369,"URL":"http:\/\/rsc.li\/journals-terms-of-use"}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["Phys. Chem. Chem. Phys."],"abstract":"<jats:p>\n                    A comprehensive study of all reaction products formed during the etching of Si in HF\/HNO\n                    <jats:sub>3<\/jats:sub>\n                    and HF\/HNO\n                    <jats:sub>3<\/jats:sub>\n                    \/H\n                    <jats:sub>2<\/jats:sub>\n                    SiF\n                    <jats:sub>6<\/jats:sub>\n                    mixtures is presented. Covering a maximum of mixing possibilities, functional relationships to the composition of the etchant are established.\n                  <\/jats:p>","DOI":"10.1039\/d1cp05418j","type":"journal-article","created":{"date-parts":[[2022,1,5]],"date-time":"2022-01-05T03:21:37Z","timestamp":1641352897000},"page":"3094-3108","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["Comprehensive stoichiometric studies on the reaction of silicon in HF\/HNO\n                    <sub>3<\/sub>\n                    and HF\/HNO\n                    <sub>3<\/sub>\n                    \/H\n                    <sub>2<\/sub>\n                    SiF\n                    <sub>6<\/sub>\n                    mixtures"],"prefix":"10.1039","volume":"24","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-2448-6856","authenticated-orcid":false,"given":"Anja","family":"Rietig","sequence":"first","affiliation":[{"name":"Brandenburg University of Technology Cottbus-Senftenberg, Department of Physical Chemistry, 01968 Senftenberg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5979-6977","authenticated-orcid":false,"given":"Thomas","family":"Langner","sequence":"additional","affiliation":[{"name":"Brandenburg University of Technology Cottbus-Senftenberg, Department of Physical Chemistry, 01968 Senftenberg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1325-1111","authenticated-orcid":false,"given":"J\u00f6rg","family":"Acker","sequence":"additional","affiliation":[{"name":"Brandenburg University of Technology Cottbus-Senftenberg, Department of Physical Chemistry, 01968 Senftenberg, Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"292","published-online":{"date-parts":[[2022]]},"reference":[{"issue":"6","key":"D1CP05418J\/cit1\/1","doi-asserted-by":"crossref","first-page":"505","DOI":"10.1149\/1.2427397","volume":"106","author":"Robbins","year":"1959","journal-title":"J. Electrochem. Soc."},{"issue":"2","key":"D1CP05418J\/cit2\/1","doi-asserted-by":"crossref","first-page":"108","DOI":"10.1149\/1.2427617","volume":"107","author":"Robbins","year":"1960","journal-title":"J. Electrochem. Soc."},{"issue":"4","key":"D1CP05418J\/cit3\/1","doi-asserted-by":"crossref","first-page":"365","DOI":"10.1149\/1.2428090","volume":"108","author":"Schwarz","year":"1961","journal-title":"J. Electrochem. Soc."},{"issue":"12","key":"D1CP05418J\/cit4\/1","first-page":"1903","volume":"123","author":"Robbins","year":"1970","journal-title":"J. Electrochem. Soc."},{"key":"D1CP05418J\/cit5\/1","doi-asserted-by":"crossref","first-page":"810","DOI":"10.1149\/1.2427519","volume":"107\/10","author":"Turner","year":"1960","journal-title":"J. Electrochem. Soc."},{"key":"D1CP05418J\/cit7\/1","doi-asserted-by":"crossref","first-page":"178","DOI":"10.1149\/1.1390775","volume":"2\/4","author":"Kooij","year":"1999","journal-title":"Electrochem. Solid State"},{"issue":"12","key":"D1CP05418J\/cit8\/1","doi-asserted-by":"crossref","first-page":"C843","DOI":"10.1149\/1.2116727","volume":"152","author":"Steinert","year":"2005","journal-title":"J. Electrochem. Soc."},{"issue":"23","key":"D1CP05418J\/cit9\/1","doi-asserted-by":"crossref","first-page":"11377","DOI":"10.1021\/jp0608168","volume":"110","author":"Steinert","year":"2006","journal-title":"J. Phys. Chem. B"},{"issue":"5","key":"D1CP05418J\/cit10\/1","doi-asserted-by":"crossref","first-page":"2133","DOI":"10.1021\/jp066348j","volume":"111","author":"Steinert","year":"2007","journal-title":"J. Phys. Chem. C"},{"issue":"3","key":"D1CP05418J\/cit11\/1","doi-asserted-by":"crossref","first-page":"14139","DOI":"10.1021\/jp801937z","volume":"112","author":"Steinert","year":"2008","journal-title":"J. Phys. Chem. C"},{"key":"D1CP05418J\/cit12\/1","doi-asserted-by":"crossref","first-page":"22002","DOI":"10.1039\/C9CP04429A","volume":"21","author":"Rietig","year":"2019","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D1CP05418J\/cit13\/1","doi-asserted-by":"crossref","first-page":"1990","DOI":"10.1039\/c1ja10033e","volume":"26","author":"Hoffmann","year":"2011","journal-title":"J. Anal. At. Spectrom."},{"key":"D1CP05418J\/cit14\/1","doi-asserted-by":"crossref","first-page":"37","DOI":"10.1149\/1.2425322","volume":"109","author":"Klein","year":"1962","journal-title":"J. Electrochem. Soc."},{"key":"D1CP05418J\/cit15\/1","first-page":"131","volume-title":"Electrochemistry of Silicon and Its Oxide","author":"Zhang","year":"2001","unstructured":"X. G.Zhang ,  Electrochemistry of Silicon and Its Oxide ,  Kluwer Academic\/Plenum Publishers ,  New York, United States ,  2001 ,  pp. 131\u2013166"},{"key":"D1CP05418J\/cit16\/1","doi-asserted-by":"crossref","first-page":"20380","DOI":"10.1021\/jp305621h","volume":"116","author":"Acker","year":"2012","journal-title":"J. Phys. Chem. C"},{"issue":"13","key":"D1CP05418J\/cit17\/1","doi-asserted-by":"crossref","first-page":"1693","DOI":"10.1063\/1.111834","volume":"64","author":"Kelly","year":"1994","journal-title":"Appl. Phys. Lett."},{"issue":"4","key":"D1CP05418J\/cit18\/1","doi-asserted-by":"crossref","first-page":"2044","DOI":"10.1021\/jp4105757","volume":"118","author":"Gondek","year":"2014","journal-title":"J. Phys. Chem. C"},{"key":"D1CP05418J\/cit19\/1","doi-asserted-by":"crossref","first-page":"23","DOI":"10.1002\/3527600272.ch2","volume-title":"The Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications","author":"Lehmann","year":"2002","unstructured":"V.Lehmann ,  The Chemical Dissolution of Silicon ,  The Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications ,  Wiley-VCH ,  Weinheim, Germany ,  2002 ;  pp. 23\u201338"},{"issue":"8","key":"D1CP05418J\/cit20\/1","doi-asserted-by":"crossref","first-page":"995","DOI":"10.1063\/1.106485","volume":"60","author":"Fathauer","year":"1992","journal-title":"Appl. Phys. Lett."},{"issue":"15","key":"D1CP05418J\/cit21\/1","doi-asserted-by":"crossref","first-page":"1863","DOI":"10.1063\/1.107162","volume":"60","author":"Shih","year":"1992","journal-title":"Appl. Phys. Lett."},{"issue":"1","key":"D1CP05418J\/cit22\/1","doi-asserted-by":"crossref","first-page":"436","DOI":"10.1063\/1.365833","volume":"82","author":"Winton","year":"1997","journal-title":"J. Appl. Phys."},{"issue":"6","key":"D1CP05418J\/cit23\/1","first-page":"1270","volume":"5","author":"Kolasinski","year":"2003","journal-title":"Chem. Phys."},{"key":"D1CP05418J\/cit24\/1","doi-asserted-by":"crossref","first-page":"982","DOI":"10.3390\/nano11040982","volume":"11","author":"Sch\u00f6nekerl","year":"2021","journal-title":"Nanomaterials"},{"key":"D1CP05418J\/cit25\/1","doi-asserted-by":"crossref","first-page":"2545","DOI":"10.3390\/nano10122545","volume":"10","author":"Sch\u00f6nekerl","year":"2020","journal-title":"Nanomaterials"},{"key":"D1CP05418J\/cit26\/1","doi-asserted-by":"crossref","first-page":"856","DOI":"10.1063\/1.104512","volume":"58","author":"Lehmann","year":"1991","journal-title":"Appl. Phys. Lett."},{"key":"D1CP05418J\/cit27\/1","doi-asserted-by":"crossref","first-page":"5509","DOI":"10.1016\/j.electacta.2008.03.009","volume":"53","author":"Chartier","year":"2008","journal-title":"Electrochim. Acta"},{"key":"D1CP05418J\/cit28\/1","doi-asserted-by":"crossref","first-page":"402","DOI":"10.1149\/1.2428873","volume":"105","author":"Turner","year":"1958","journal-title":"J. Electrochem. Soc."},{"key":"D1CP05418J\/cit29\/1","doi-asserted-by":"crossref","first-page":"109","DOI":"10.1016\/0039-6028(66)90071-9","volume":"4","author":"Memming","year":"1966","journal-title":"Surf. Sci."},{"key":"D1CP05418J\/cit30\/1","doi-asserted-by":"crossref","first-page":"412003","DOI":"10.1088\/0957-4484\/27\/41\/412003","volume":"27","author":"Toor","year":"2016","journal-title":"Nanotechnology"},{"key":"D1CP05418J\/cit31\/1","doi-asserted-by":"crossref","first-page":"1296","DOI":"10.1149\/1.1837587","volume":"144","author":"Kooij","year":"1997","journal-title":"J. Electrochem. Soc."},{"key":"D1CP05418J\/cit32\/1","doi-asserted-by":"crossref","first-page":"1904","DOI":"10.1016\/j.susc.2008.08.031","volume":"603","author":"Kolasinski","year":"2009","journal-title":"Surf. Sci."},{"key":"D1CP05418J\/cit33\/1","doi-asserted-by":"crossref","first-page":"22098","DOI":"10.1021\/jp108169b","volume":"114","author":"Kolasinski","year":"2010","journal-title":"J. Phys. Chem. C"},{"key":"D1CP05418J\/cit34\/1","doi-asserted-by":"crossref","first-page":"5714","DOI":"10.1002\/ejic.201200674","author":"Lippold","year":"2012","journal-title":"Eur. J. Inorg. Chem."},{"key":"D1CP05418J\/cit35\/1","doi-asserted-by":"crossref","first-page":"6174","DOI":"10.1002\/ejic.201402708","author":"Sicsic","year":"2014","journal-title":"Eur. J. Inorg. Chem."},{"key":"D1CP05418J\/cit36\/1","doi-asserted-by":"crossref","first-page":"279","DOI":"10.1515\/zpch-1928-13422","volume":"134","author":"Abel","year":"1928","journal-title":"Z. Phys. Chem., Stoechiom. Verwandtschaftsl."},{"key":"D1CP05418J\/cit37\/1","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1515\/zpch-1928-13609","volume":"136","author":"Abel","year":"1928","journal-title":"Z. Phys. Chem., Stoechiom. Verwandtschaftsl."},{"key":"D1CP05418J\/cit38\/1","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1515\/zpch-1928-13205","volume":"132","author":"Abel","year":"1928","journal-title":"Z. Phys. Chem., Stoechiom. Verwandtschaftsl."},{"key":"D1CP05418J\/cit39\/1","first-page":"1183","volume":"63","author":"Schmid","year":"1959","journal-title":"Z. Elektrochem. Ber. Bunsenges. Phys. Chem."},{"key":"D1CP05418J\/cit40\/1","first-page":"1192","volume":"63","author":"Schmid","year":"1959","journal-title":"Z. Elektrochem. Ber. Bunsenges. Phys. Chem."},{"key":"D1CP05418J\/cit41\/1","first-page":"531","volume":"65","author":"Schmid","year":"1961","journal-title":"Z. Elektrochem. Ber. Bunsenges. Phys. Chem."},{"key":"D1CP05418J\/cit42\/1","doi-asserted-by":"crossref","first-page":"677","DOI":"10.1002\/bbpc.19640680714","volume":"68","author":"Schmid","year":"1964","journal-title":"Z. Elektrochem. Ber. Bunsenges. Phys. Chem."},{"key":"D1CP05418J\/cit43\/1","first-page":"89","volume":"73","author":"Schmid","year":"1969","journal-title":"Z. Elektrochem. Ber. Bunsenges. Phys. Chem."},{"key":"D1CP05418J\/cit44\/1","doi-asserted-by":"crossref","first-page":"277","DOI":"10.1002\/(SICI)1099-0682(19990202)1999:2<277::AID-EJIC277>3.0.CO;2-#","author":"Balbaud","year":"1999","journal-title":"Eur. J. Inorg. Chem."},{"key":"D1CP05418J\/cit45\/1","doi-asserted-by":"crossref","first-page":"366","DOI":"10.1002\/jrs.5769","volume":"51","author":"Langner","year":"2020","journal-title":"J. Raman Spectrosc."},{"key":"D1CP05418J\/cit46\/1","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1016\/j.elecom.2013.01.005","volume":"29","author":"Lange","year":"2013","journal-title":"Electrochem. Commun."},{"issue":"2","key":"D1CP05418J\/cit47\/1","doi-asserted-by":"crossref","first-page":"109","DOI":"10.1134\/S1066362217020011","volume":"59","author":"Ustinov","year":"2017","journal-title":"Radiochemistry"},{"key":"D1CP05418J\/cit48\/1","doi-asserted-by":"crossref","first-page":"109","DOI":"10.1002\/jbt.10029","volume":"16","author":"Nedospasov","year":"2002","journal-title":"J. Biochem. Mol. Toxicol."},{"issue":"3","key":"D1CP05418J\/cit49\/1","doi-asserted-by":"crossref","first-page":"548","DOI":"10.1021\/es020828g","volume":"37","author":"Rivera-Figueroa","year":"2003","journal-title":"Environ. Sci. Technol."},{"key":"D1CP05418J\/cit50\/1","doi-asserted-by":"crossref","first-page":"1111","DOI":"10.1007\/BF00899454","volume":"83","author":"Abel","year":"1952","journal-title":"Monatsh. Chem."},{"key":"D1CP05418J\/cit51\/1","doi-asserted-by":"crossref","first-page":"332","DOI":"10.1002\/zaac.19512650417","volume":"265","author":"Berg","year":"1951","journal-title":"Z. Anorg. Allg. Chem."},{"key":"D1CP05418J\/cit52\/1","doi-asserted-by":"crossref","first-page":"117","DOI":"10.1002\/zaac.19522690305","volume":"269","author":"Berg","year":"1952","journal-title":"Z. Anorg. Allg. Chem."},{"key":"D1CP05418J\/cit53\/1","doi-asserted-by":"crossref","first-page":"213","DOI":"10.1002\/zaac.19522690409","volume":"269","author":"Berg","year":"1952","journal-title":"Z. Anorg. Allg. Chem."}],"container-title":["Physical Chemistry Chemical Physics"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/en\/content\/articlepdf\/2022\/CP\/D1CP05418J","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T05:21:45Z","timestamp":1782969705000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.rsc.org\/cp\/article\/24\/5\/3094-3108\/722918"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022]]},"references-count":52,"journal-issue":{"issue":"5","published-print":{"date-parts":[[2022,2,2]]}},"URL":"https:\/\/doi.org\/10.1039\/d1cp05418j","relation":{},"ISSN":["1463-9076","1463-9084"],"issn-type":[{"value":"1463-9076","type":"print"},{"value":"1463-9084","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022]]}}}