{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,30]],"date-time":"2026-09-30T16:12:02Z","timestamp":1790784722885,"version":"4.1.0"},"reference-count":47,"publisher":"Royal Society of Chemistry (RSC)","issue":"47","license":[{"start":{"date-parts":[[2022,10,27]],"date-time":"2022-10-27T00:00:00Z","timestamp":1666828800000},"content-version":"vor","delay-in-days":299,"URL":"http:\/\/creativecommons.org\/licenses\/by-nc\/3.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["NSAF Joint Fund of China Academy of Engineering Physics"],"award-info":[{"award-number":["NSAF Joint Fund of China Academy of Engineering Physics"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52075129"],"award-info":[{"award-number":["52075129"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["RSC Adv."],"abstract":"<jats:p>The increased reaction species concentration and ambient temperature improved plasma cleaning ability<\/jats:p>","DOI":"10.1039\/d2ra05901k","type":"journal-article","created":{"date-parts":[[2022,10,27]],"date-time":"2022-10-27T04:58:01Z","timestamp":1666846681000},"page":"30754-30763","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Influence of reactive oxygen species concentration and ambient temperature on the evolution of chemical bonds during plasma cleaning: a molecular dynamics simulation"],"prefix":"10.1039","volume":"12","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-5427-876X","authenticated-orcid":false,"given":"Yuhai","family":"Li","sequence":"first","affiliation":[{"name":"School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China"},{"name":"Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yilan","family":"Jiang","sequence":"additional","affiliation":[{"name":"Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xujie","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8626-4431","authenticated-orcid":false,"given":"Qingshun","family":"Bai","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hao","family":"Liu","sequence":"additional","affiliation":[{"name":"Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jingxuan","family":"Wang","sequence":"additional","affiliation":[{"name":"Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Peng","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China"},{"name":"Chongqing Research Institute, Harbin Institute of Technology, Chongqing 401135, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lihua","family":"Lu","sequence":"additional","affiliation":[{"name":"School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150000, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaodong","family":"Yuan","sequence":"additional","affiliation":[{"name":"Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"292","published-online":{"date-parts":[[2022]]},"reference":[{"key":"D2RA05901K\/cit1\/1","first-page":"331","volume":"79","author":"B\u00f3nov\u00e1","year":"2015","journal-title":"Appl. Surf. Sci."},{"key":"D2RA05901K\/cit2\/1","doi-asserted-by":"crossref","first-page":"1600027","DOI":"10.1002\/ppap.201600027","volume":"14","author":"Boselli","year":"2017","journal-title":"Plasma Processes Polym."},{"key":"D2RA05901K\/cit3\/1","doi-asserted-by":"crossref","first-page":"98","DOI":"10.1002\/ppap.201400052","volume":"12","author":"Zille","year":"2015","journal-title":"Plasma Processes Polym."},{"key":"D2RA05901K\/cit4\/1","doi-asserted-by":"crossref","first-page":"076023","DOI":"10.1088\/1741-4326\/ac555c","volume":"62","author":"Li","year":"2022","journal-title":"Nucl. Fusion"},{"key":"D2RA05901K\/cit5\/1","first-page":"92372","volume-title":"Laser-Induced Damage in Optical Materials: 2014","volume":"9237","author":"Pryatel","year":"2014","unstructured":"J. A.Pryatel ,  W. H.Gourdin ,  S. C.Frieders ,  G. S.Ruble  and  M. V.Monticelli ,  Laser-Induced Damage in Optical Materials: 2014 ,  2014 , vol.  9237 ,  p. 92372H"},{"key":"D2RA05901K\/cit6\/1","doi-asserted-by":"crossref","first-page":"1682","DOI":"10.1364\/AO.52.001682","volume":"52","author":"Howard","year":"2013","journal-title":"Appl. Optics"},{"key":"D2RA05901K\/cit7\/1","doi-asserted-by":"crossref","first-page":"1027","DOI":"10.1116\/1.573115","volume":"3","author":"Vig","year":"1985","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D2RA05901K\/cit8\/1","doi-asserted-by":"crossref","first-page":"1056","DOI":"10.1016\/j.ijleo.2011.07.030","volume":"123","author":"Ye","year":"2012","journal-title":"Optik"},{"key":"D2RA05901K\/cit9\/1","doi-asserted-by":"crossref","first-page":"630","DOI":"10.1007\/s10971-022-05725-z","volume":"101","author":"Huang","year":"2022","journal-title":"J. Sol-Gel Sci. Technol"},{"key":"D2RA05901K\/cit10\/1","doi-asserted-by":"crossref","first-page":"034011","DOI":"10.1088\/0022-3727\/44\/3\/034011","volume":"44","author":"Petersson","year":"2010","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D2RA05901K\/cit11\/1","doi-asserted-by":"crossref","first-page":"0567","DOI":"10.1116\/1.1318069","volume":"11","author":"O'Kane","year":"1974","journal-title":"J. Vac. Sci. Technol."},{"key":"D2RA05901K\/cit12\/1","doi-asserted-by":"crossref","first-page":"126","DOI":"10.1017\/S1431927699000094","volume":"5","author":"Isabell","year":"1999","journal-title":"Microsc. Microanal."},{"key":"D2RA05901K\/cit13\/1","doi-asserted-by":"crossref","first-page":"152358","DOI":"10.1016\/j.apsusc.2021.152358","volume":"581","author":"Li","year":"2021","journal-title":"Appl. Surf. Sci."},{"key":"D2RA05901K\/cit14\/1","doi-asserted-by":"crossref","first-page":"176","DOI":"10.1016\/S0257-8972(97)00143-6","volume":"97","author":"Petasch","year":"1997","journal-title":"Surf. Coat. Technol."},{"key":"D2RA05901K\/cit15\/1","doi-asserted-by":"crossref","first-page":"026008","DOI":"10.1088\/1741-4326\/aa96b8","volume":"58","author":"Yan","year":"2017","journal-title":"Nucl. Fusion"},{"key":"D2RA05901K\/cit16\/1","doi-asserted-by":"crossref","first-page":"2754","DOI":"10.1088\/0022-3727\/34\/18\/307","volume":"34","author":"Shenton","year":"2001","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D2RA05901K\/cit17\/1","doi-asserted-by":"crossref","first-page":"289","DOI":"10.1016\/B978-0-12-815577-6.00008-6","volume-title":"Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques","author":"Thanu","year":"2019","unstructured":"D. P. R.Thanu ,  E. S.Srinadhu ,  M. R.Zhao ,  N. V.Dole  and  M.Keswani ,  Developments in Surface Contamination and Cleaning: Applications of Cleaning Techniques ,  Elsevier Inc. ,  Tucson ,  2019 ,  pp. 289\u2013353"},{"key":"D2RA05901K\/cit18\/1","doi-asserted-by":"crossref","first-page":"3658","DOI":"10.1016\/j.apsusc.2006.07.075","volume":"253","author":"Hyoun","year":"2007","journal-title":"Appl. Surf. Sci."},{"key":"D2RA05901K\/cit19\/1","doi-asserted-by":"crossref","first-page":"065013","DOI":"10.1088\/0963-0252\/23\/6\/065013","volume":"23","author":"Kelly","year":"2014","journal-title":"Plasma Sources Sci. Technol."},{"key":"D2RA05901K\/cit20\/1","doi-asserted-by":"crossref","first-page":"083001","DOI":"10.1088\/0022-3727\/49\/8\/083001","volume":"49","author":"Ono","year":"2016","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D2RA05901K\/cit21\/1","doi-asserted-by":"crossref","first-page":"39901","DOI":"10.1039\/C4RA05936K","volume":"4","author":"Takamatsu","year":"2014","journal-title":"RSC Adv."},{"key":"D2RA05901K\/cit22\/1","first-page":"305","volume":"24","author":"Grace","year":"2003","journal-title":"Sci. Technol."},{"key":"D2RA05901K\/cit23\/1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41699-020-00197-7","volume":"5","author":"Marinov","year":"2021","journal-title":"npj 2D Mater. Appl."},{"key":"D2RA05901K\/cit24\/1","doi-asserted-by":"crossref","first-page":"1356","DOI":"10.1021\/acsanm.8b02249","volume":"2","author":"Ferrah","year":"2019","journal-title":"ACS Appl. Nano Mater."},{"key":"D2RA05901K\/cit25\/1","doi-asserted-by":"crossref","first-page":"173","DOI":"10.1007\/BF01459695","volume":"15","author":"Normand","year":"1995","journal-title":"Plasma Chem. Plasma Process."},{"key":"D2RA05901K\/cit26\/1","doi-asserted-by":"crossref","first-page":"1014","DOI":"10.1016\/j.cej.2018.07.039","volume":"352","author":"Park","year":"2018","journal-title":"Chem. Eng. J."},{"key":"D2RA05901K\/cit27\/1","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1007\/s11090-008-9140-4","volume":"28","author":"Mafra","year":"2008","journal-title":"Plasma Chem. Plasma Process."},{"key":"D2RA05901K\/cit28\/1","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1007\/s11090-010-9263-2","volume":"31","author":"Bernardelli","year":"2011","journal-title":"Plasma Chem. Plasma Process."},{"key":"D2RA05901K\/cit29\/1","doi-asserted-by":"crossref","first-page":"725","DOI":"10.1116\/1.1366707","volume":"19","author":"Callahan","year":"2001","journal-title":"J. Vac. Sci. Technol., B"},{"key":"D2RA05901K\/cit30\/1","doi-asserted-by":"crossref","first-page":"054903","DOI":"10.1063\/5.0011769","volume":"128","author":"Samaei","year":"2020","journal-title":"J. Appl. Phys."},{"key":"D2RA05901K\/cit31\/1","doi-asserted-by":"crossref","first-page":"135","DOI":"10.1016\/j.vacuum.2019.02.011","volume":"163","author":"Li","year":"2019","journal-title":"Vacuum"},{"key":"D2RA05901K\/cit32\/1","doi-asserted-by":"crossref","first-page":"9396","DOI":"10.1021\/jp004368u","volume":"105","author":"van Duin","year":"2001","journal-title":"J. Phys. Chem. A"},{"key":"D2RA05901K\/cit33\/1","doi-asserted-by":"crossref","first-page":"83","DOI":"10.1103\/PhysRev.122.83","volume":"122","author":"Hagstrum","year":"1961","journal-title":"Phys. Rev."},{"key":"D2RA05901K\/cit34\/1","doi-asserted-by":"crossref","first-page":"16","DOI":"10.1007\/s11705-015-1545-z","volume":"10","author":"Han","year":"2016","journal-title":"Front. Chem. Sci. Eng."},{"key":"D2RA05901K\/cit35\/1","doi-asserted-by":"crossref","first-page":"055506","DOI":"10.1088\/2058-6272\/abe926","volume":"23","author":"Lv","year":"2021","journal-title":"Plasma Sci. Technol."},{"key":"D2RA05901K\/cit36\/1","doi-asserted-by":"crossref","first-page":"355401","DOI":"10.1088\/1361-6463\/aad4ec","volume":"51","author":"Cui","year":"2018","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D2RA05901K\/cit37\/1","doi-asserted-by":"crossref","first-page":"2100124","DOI":"10.1002\/ppap.202100124","volume":"18","author":"Tian","year":"2021","journal-title":"Plasma Processes Polym."},{"key":"D2RA05901K\/cit38\/1","doi-asserted-by":"crossref","first-page":"064012","DOI":"10.1088\/2058-6272\/ac69b6","volume":"24","author":"Li","year":"2022","journal-title":"Plasma Sci. Technol."},{"key":"D2RA05901K\/cit39\/1","doi-asserted-by":"crossref","first-page":"103518","DOI":"10.1063\/1.4997331","volume":"24","author":"Zhao","year":"2017","journal-title":"Phys. Plasmas"},{"key":"D2RA05901K\/cit40\/1","doi-asserted-by":"crossref","first-page":"064003","DOI":"10.1088\/0963-0252\/24\/6\/064003","volume":"24","author":"Belmonte","year":"2015","journal-title":"Plasma Sources Sci. Technol."},{"key":"D2RA05901K\/cit41\/1","doi-asserted-by":"crossref","first-page":"146","DOI":"10.13182\/FST15-139","volume":"69","author":"Manes","year":"2016","journal-title":"Fusion Sci. Technol."},{"key":"D2RA05901K\/cit42\/1","doi-asserted-by":"crossref","first-page":"055014","DOI":"10.1088\/0963-0252\/22\/5\/055014","volume":"22","author":"Verreycken","year":"2013","journal-title":"Plasma Sources Sci. Technol."},{"key":"D2RA05901K\/cit43\/1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1007\/s00894-014-2561-5","volume":"21","author":"Zhang","year":"2015","journal-title":"J. Mol. Model."},{"key":"D2RA05901K\/cit44\/1","doi-asserted-by":"crossref","first-page":"359","DOI":"10.1093\/protein\/15.5.359","volume":"15","author":"Torshin","year":"2002","journal-title":"Protein Eng., Des. Sel."},{"key":"D2RA05901K\/cit45\/1","doi-asserted-by":"crossref","first-page":"163","DOI":"10.1039\/a827163z","volume":"27","author":"Alkorta","year":"1998","journal-title":"Chem. Soc. Rev."},{"key":"D2RA05901K\/cit46\/1","doi-asserted-by":"crossref","first-page":"269","DOI":"10.1002\/jcc.540090310","volume":"9","author":"Vedan","year":"1988","journal-title":"J. Comput. Chem."},{"key":"D2RA05901K\/cit47\/1","doi-asserted-by":"crossref","first-page":"144257","DOI":"10.1016\/j.apsusc.2019.144257","volume":"503","author":"Li","year":"2020","journal-title":"Appl. Surf. Sci."}],"container-title":["RSC Advances"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/en\/content\/articlepdf\/2022\/RA\/D2RA05901K","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,1]],"date-time":"2026-07-01T05:23:04Z","timestamp":1782883384000},"score":1,"resource":{"primary":{"URL":"https:\/\/pubs.rsc.org\/ra\/article\/12\/47\/30754-30763\/784494"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2022]]},"references-count":47,"journal-issue":{"issue":"47","published-print":{"date-parts":[[2022,10,24]]}},"URL":"https:\/\/doi.org\/10.1039\/d2ra05901k","relation":{},"ISSN":["2046-2069"],"issn-type":[{"value":"2046-2069","type":"electronic"}],"subject":[],"published":{"date-parts":[[2022]]}}}