{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,8]],"date-time":"2026-10-08T11:50:13Z","timestamp":1791460213350,"version":"4.3.4"},"reference-count":64,"publisher":"Royal Society of Chemistry (RSC)","issue":"38","license":[{"start":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T00:00:00Z","timestamp":1788825600000},"content-version":"vor","delay-in-days":250,"URL":"http:\/\/creativecommons.org\/licenses\/by\/3.0\/"}],"funder":[{"DOI":"10.13039\/501100014438","name":"Business Finland","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100014438","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100010663","name":"H2020 European Research Council","doi-asserted-by":"publisher","award":["101097815"],"award-info":[{"award-number":["101097815"]}],"id":[{"id":"10.13039\/100010663","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["Nanoscale"],"abstract":"<jats:p>Conformality of thin films for 3D lithium-ion microbatteries deposited by atomic\/molecular layer deposition (ALD\/MLD) depends on the propensity of the precursors to form oligomers.<\/jats:p>","DOI":"10.1039\/d6nr01994c","type":"journal-article","created":{"date-parts":[[2026,9,8]],"date-time":"2026-09-08T12:23:16Z","timestamp":1788870196000},"page":"20727-20739","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Conformality of atomic\/molecular layer deposited lithium terephthalate thin films"],"prefix":"10.1039","volume":"18","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-9978-210X","authenticated-orcid":false,"given":"Anish","family":"Philip","sequence":"first","affiliation":[{"name":"Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-0305-9644","authenticated-orcid":false,"given":"Milad","family":"Madadi","sequence":"additional","affiliation":[{"name":"Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7233-2093","authenticated-orcid":false,"given":"Joakim S.","family":"Jestil\u00e4","sequence":"additional","affiliation":[{"name":"Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4187-5447","authenticated-orcid":false,"given":"Antti J.","family":"Karttunen","sequence":"additional","affiliation":[{"name":"Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0000-4750-2233","authenticated-orcid":false,"given":"Jussi","family":"Kinnunen","sequence":"additional","affiliation":[{"name":"Chipmetrics Ltd, 80130, Joensuu, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1091-1169","authenticated-orcid":false,"given":"Maarit","family":"Karppinen","sequence":"additional","affiliation":[{"name":"Department of Chemistry and Materials Science, Aalto University, FI-00076 Espoo, Finland"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"292","published-online":{"date-parts":[[2026]]},"reference":[{"key":"D6NR01994C\/cit1\/1","doi-asserted-by":"crossref","first-page":"2200538","DOI":"10.1002\/adma.202200538","volume":"35","author":"Xia","year":"2023","journal-title":"Adv. Mater."},{"key":"D6NR01994C\/cit2\/1","doi-asserted-by":"crossref","first-page":"10","DOI":"10.1002\/aenm.201000002","volume":"1","author":"Oudenhoven","year":"2011","journal-title":"Adv. Energy Mater."},{"key":"D6NR01994C\/cit3\/1","doi-asserted-by":"crossref","first-page":"1601402","DOI":"10.1002\/aenm.201601402","volume":"7","author":"L\u00e9tiche","year":"2017","journal-title":"Adv. Energy Mater."},{"key":"D6NR01994C\/cit4\/1","doi-asserted-by":"crossref","first-page":"e2415693122","DOI":"10.1073\/pnas.2415693122","volume":"122","author":"Ke","year":"2025","journal-title":"Proc. Natl. Acad. Sci. U. S. A."},{"key":"D6NR01994C\/cit5\/1","doi-asserted-by":"crossref","first-page":"2100774","DOI":"10.1002\/advs.202100774","volume":"8","author":"Wu","year":"2021","journal-title":"Adv. Sci."},{"key":"D6NR01994C\/cit6\/1","doi-asserted-by":"crossref","first-page":"e202200359","DOI":"10.1002\/batt.202200359","volume":"6","author":"Su","year":"2023","journal-title":"Batteries Supercaps"},{"key":"D6NR01994C\/cit7\/1","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1021\/cr900056b","volume":"110","author":"George","year":"2010","journal-title":"Chem. Rev."},{"key":"D6NR01994C\/cit8\/1","doi-asserted-by":"crossref","first-page":"236","DOI":"10.1016\/j.mattod.2014.04.026","volume":"17","author":"Johnson","year":"2014","journal-title":"Mater. Today"},{"key":"D6NR01994C\/cit9\/1","doi-asserted-by":"crossref","first-page":"56793","DOI":"10.1021\/acsami.1c17519","volume":"13","author":"Madadi","year":"2021","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D6NR01994C\/cit10\/1","doi-asserted-by":"crossref","first-page":"6987","DOI":"10.1021\/acs.chemmater.5b02199","volume":"27","author":"Nisula","year":"2015","journal-title":"Chem. Mater."},{"key":"D6NR01994C\/cit11\/1","doi-asserted-by":"crossref","first-page":"41557","DOI":"10.1021\/acsami.0c11822","volume":"12","author":"Multia","year":"2020","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D6NR01994C\/cit12\/1","doi-asserted-by":"crossref","first-page":"2583","DOI":"10.1016\/j.joule.2018.11.012","volume":"2","author":"Zhao","year":"2018","journal-title":"Joule"},{"key":"D6NR01994C\/cit13\/1","doi-asserted-by":"crossref","first-page":"040801","DOI":"10.1116\/1.4804609","volume":"31","author":"Zhou","year":"2013","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D6NR01994C\/cit14\/1","doi-asserted-by":"crossref","first-page":"18326","DOI":"10.1039\/C7TA04449F","volume":"5","author":"Meng","year":"2017","journal-title":"J. Mater. Chem. A"},{"key":"D6NR01994C\/cit15\/1","doi-asserted-by":"crossref","first-page":"2200210","DOI":"10.1002\/admi.202200210","volume":"9","author":"Multia","year":"2022","journal-title":"Adv. Mater. Interfaces"},{"key":"D6NR01994C\/cit16\/1","doi-asserted-by":"crossref","first-page":"3889","DOI":"10.1039\/D0CS00156B","volume":"50","author":"Zhao","year":"2021","journal-title":"Chem. Soc. Rev."},{"key":"D6NR01994C\/cit17\/1","doi-asserted-by":"crossref","first-page":"24908","DOI":"10.1021\/acsami.2c03511","volume":"14","author":"Vandenbroucke","year":"2022","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D6NR01994C\/cit18\/1","doi-asserted-by":"crossref","first-page":"1176","DOI":"10.1039\/C5DT03840E","volume":"45","author":"Van De Kerckhove","year":"2016","journal-title":"Dalton Trans."},{"key":"D6NR01994C\/cit19\/1","doi-asserted-by":"crossref","first-page":"7027","DOI":"10.1039\/C8TA00804C","volume":"6","author":"Nisula","year":"2018","journal-title":"J. Mater. Chem. A"},{"key":"D6NR01994C\/cit20\/1","doi-asserted-by":"crossref","first-page":"2988","DOI":"10.1002\/chem.201605816","volume":"23","author":"Nisula","year":"2017","journal-title":"Chem. \u2013 Eur. J."},{"key":"D6NR01994C\/cit21\/1","doi-asserted-by":"crossref","first-page":"1591","DOI":"10.1039\/C9DT04572D","volume":"49","author":"Heiska","year":"2020","journal-title":"Dalton Trans."},{"key":"D6NR01994C\/cit22\/1","doi-asserted-by":"crossref","first-page":"120","DOI":"10.1038\/nmat2372","volume":"8","author":"Armand","year":"2009","journal-title":"Nat. Mater."},{"key":"D6NR01994C\/cit23\/1","doi-asserted-by":"crossref","first-page":"1276","DOI":"10.1021\/acs.nanolett.5b04604","volume":"16","author":"Nisula","year":"2016","journal-title":"Nano Lett."},{"key":"D6NR01994C\/cit24\/1","doi-asserted-by":"crossref","first-page":"18225","DOI":"10.1002\/chem.201703704","volume":"23","author":"Penttinen","year":"2017","journal-title":"Chem. \u2013 Eur. J."},{"key":"D6NR01994C\/cit25\/1","doi-asserted-by":"crossref","first-page":"32385","DOI":"10.1021\/acsami.6b12244","volume":"8","author":"Talin","year":"2016","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D6NR01994C\/cit26\/1","doi-asserted-by":"crossref","first-page":"120","DOI":"10.1016\/S1388-2481(02)00556-8","volume":"5","author":"Hart","year":"2003","journal-title":"Electrochem. Commun."},{"key":"D6NR01994C\/cit27\/1","doi-asserted-by":"crossref","first-page":"8402","DOI":"10.1021\/acsaem.0c01029","volume":"3","author":"Ashby","year":"2020","journal-title":"ACS Appl. Energy Mater."},{"key":"D6NR01994C\/cit28\/1","doi-asserted-by":"crossref","first-page":"4286","DOI":"10.1021\/acsnano.7b08751","volume":"12","author":"Pearse","year":"2018","journal-title":"ACS Nano"},{"key":"D6NR01994C\/cit29\/1","doi-asserted-by":"crossref","first-page":"1900805","DOI":"10.1002\/admi.201900805","volume":"6","author":"Moitzheim","year":"2019","journal-title":"Adv. Mater. Interfaces"},{"key":"D6NR01994C\/cit30\/1","doi-asserted-by":"crossref","first-page":"296","DOI":"10.1016\/j.ensm.2020.05.001","volume":"30","author":"Meng","year":"2020","journal-title":"Energy Storage Mater."},{"key":"D6NR01994C\/cit31\/1","doi-asserted-by":"crossref","first-page":"1574","DOI":"10.1021\/acsaelm.3c01565","volume":"6","author":"Madadi","year":"2024","journal-title":"ACS Appl. Electron. Mater."},{"key":"D6NR01994C\/cit32\/1","doi-asserted-by":"crossref","first-page":"917","DOI":"10.1039\/D4CC05425C","volume":"61","author":"Philip","year":"2024","journal-title":"Chem. Commun."},{"key":"D6NR01994C\/cit33\/1","doi-asserted-by":"crossref","first-page":"010601","DOI":"10.1116\/1.4903941","volume":"33","author":"Gao","year":"2015","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D6NR01994C\/cit34\/1","doi-asserted-by":"crossref","first-page":"975","DOI":"10.1021\/acs.chemmater.4c02557","volume":"37","author":"Maue","year":"2025","journal-title":"Chem. Mater."},{"key":"D6NR01994C\/cit35\/1","doi-asserted-by":"crossref","first-page":"19638","DOI":"10.1021\/acs.jpcc.4c05987","volume":"128","author":"Pieters","year":"2024","journal-title":"J. Phys. Chem. C"},{"key":"D6NR01994C\/cit36\/1","doi-asserted-by":"crossref","first-page":"060804","DOI":"10.1116\/6.0000589","volume":"38","author":"S\u00f8nsteby","year":"2020","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D6NR01994C\/cit37\/1","doi-asserted-by":"crossref","first-page":"116704","DOI":"10.1016\/j.poly.2023.116704","volume":"247","author":"Sukhikh","year":"2024","journal-title":"Polyhedron"},{"key":"D6NR01994C\/cit38\/1","doi-asserted-by":"crossref","first-page":"3856","DOI":"10.1021\/ic061599s","volume":"46","author":"Popenova","year":"2007","journal-title":"Inorg. Chem."},{"key":"D6NR01994C\/cit39\/1","doi-asserted-by":"crossref","first-page":"7169","DOI":"10.1039\/C9CP06869D","volume":"22","author":"Pracht","year":"2020","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D6NR01994C\/cit40\/1","doi-asserted-by":"crossref","first-page":"2847","DOI":"10.1021\/acs.jctc.9b00143","volume":"15","author":"Grimme","year":"2019","journal-title":"J. Chem. Theory Comput."},{"key":"D6NR01994C\/cit41\/1","doi-asserted-by":"crossref","first-page":"5648","DOI":"10.1063\/1.464913","volume":"98","author":"Becke","year":"1993","journal-title":"J. Chem. Phys."},{"key":"D6NR01994C\/cit42\/1","doi-asserted-by":"crossref","first-page":"785","DOI":"10.1103\/PhysRevB.37.785","volume":"37","author":"Lee","year":"1988","journal-title":"Phys. Rev. B: Condens. Matter Mater. Phys."},{"key":"D6NR01994C\/cit43\/1","doi-asserted-by":"crossref","first-page":"3297","DOI":"10.1039\/b508541a","volume":"7","author":"Weigend","year":"2005","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D6NR01994C\/cit44\/1","doi-asserted-by":"crossref","first-page":"3098","DOI":"10.1103\/PhysRevA.38.3098","volume":"38","author":"Becke","year":"1988","journal-title":"Phys. Rev. A"},{"key":"D6NR01994C\/cit45\/1","doi-asserted-by":"crossref","first-page":"154122","DOI":"10.1063\/1.5090222","volume":"150","author":"Caldeweyher","year":"2019","journal-title":"J. Chem. Phys."},{"key":"D6NR01994C\/cit46\/1","doi-asserted-by":"crossref","first-page":"154104","DOI":"10.1063\/1.3382344","volume":"132","author":"Grimme","year":"2010","journal-title":"J. Chem. Phys."},{"key":"D6NR01994C\/cit47\/1","doi-asserted-by":"crossref","first-page":"4054","DOI":"10.1021\/acs.jctc.5b00359","volume":"11","author":"Liakos","year":"2015","journal-title":"J. Chem. Theory Comput."},{"key":"D6NR01994C\/cit48\/1","doi-asserted-by":"crossref","first-page":"034106","DOI":"10.1063\/1.4773581","volume":"138","author":"Riplinger","year":"2013","journal-title":"J. Chem. Phys."},{"key":"D6NR01994C\/cit49\/1","doi-asserted-by":"crossref","first-page":"224108","DOI":"10.1063\/5.0004608","volume":"152","author":"Neese","year":"2020","journal-title":"J. Chem. Phys."},{"key":"D6NR01994C\/cit50\/1","first-page":"73","volume":"2","author":"Neese","year":"2012","journal-title":"Wiley Interdiscip. Rev.: Comput. Mol. Sci."},{"key":"D6NR01994C\/cit51\/1","first-page":"e1327","volume":"8","author":"Neese","year":"2018","journal-title":"Wiley Interdiscip. Rev.: Comput. Mol. Sci."},{"key":"D6NR01994C\/cit52\/1","doi-asserted-by":"crossref","first-page":"1057","DOI":"10.1039\/b515623h","volume":"8","author":"Weigend","year":"2006","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D6NR01994C\/cit53\/1","doi-asserted-by":"crossref","first-page":"8645","DOI":"10.1039\/D1CP04758B","volume":"24","author":"Yim","year":"2022","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D6NR01994C\/cit54\/1","doi-asserted-by":"crossref","first-page":"015012","DOI":"10.1088\/0965-0393\/18\/1\/015012","volume":"18","author":"Stukowski","year":"2010","journal-title":"Modell. Simul. Mater. Sci. Eng."},{"key":"D6NR01994C\/cit55\/1","doi-asserted-by":"crossref","first-page":"8976","DOI":"10.1038\/s41598-018-27124-7","volume":"8","author":"Tanskanen","year":"2018","journal-title":"Sci. Rep."},{"key":"D6NR01994C\/cit56\/1","doi-asserted-by":"crossref","first-page":"6489","DOI":"10.1021\/acs.chemmater.4c00555","volume":"36","author":"Jussila","year":"2024","journal-title":"Chem. Mater."},{"key":"D6NR01994C\/cit57\/1","doi-asserted-by":"crossref","first-page":"529","DOI":"10.1016\/j.jallcom.2014.04.186","volume":"610","author":"Park","year":"2014","journal-title":"J. Alloys Compd."},{"key":"D6NR01994C\/cit58\/1","doi-asserted-by":"crossref","first-page":"14508","DOI":"10.1039\/D2DT02279F","volume":"51","author":"Philip","year":"2022","journal-title":"Dalton Trans."},{"key":"D6NR01994C\/cit59\/1","doi-asserted-by":"crossref","first-page":"021302","DOI":"10.1063\/1.5060967","volume":"6","author":"Cremers","year":"2019","journal-title":"Appl. Phys. Rev."},{"key":"D6NR01994C\/cit60\/1","doi-asserted-by":"crossref","first-page":"2402608","DOI":"10.1002\/smll.202402608","volume":"20","author":"Philip","year":"2024","journal-title":"Small"},{"key":"D6NR01994C\/cit61\/1","doi-asserted-by":"crossref","first-page":"012401","DOI":"10.1116\/6.0002249","volume":"41","author":"Jain","year":"2023","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D6NR01994C\/cit62\/1","doi-asserted-by":"crossref","first-page":"23107","DOI":"10.1039\/D0CP03358H","volume":"22","author":"Yim","year":"2020","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D6NR01994C\/cit63\/1","doi-asserted-by":"crossref","first-page":"2083","DOI":"10.1021\/acsaom.6c00229","volume":"4","author":"Saltarelli","year":"2026","journal-title":"ACS Appl. Opt. Mater."},{"key":"D6NR01994C\/cit64\/1","doi-asserted-by":"crossref","first-page":"205301","DOI":"10.1063\/1.5028178","volume":"123","author":"Ylilammi","year":"2018","journal-title":"J. Appl. Phys."}],"container-title":["Nanoscale"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/NR\/article-pdf\/doi\/10.1039\/D6NR01994C\/0\/D6NR01994C.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,10,8]],"date-time":"2026-10-08T10:55:16Z","timestamp":1791456916000},"score":1,"resource":{"primary":{"URL":"http:\/\/pubs.rsc.org\/NR\/article-lookup\/doi\/10.1039\/D6NR01994C"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026]]},"references-count":64,"journal-issue":{"issue":"38","published-print":{"date-parts":[[2026,10,8]]}},"URL":"https:\/\/doi.org\/10.1039\/d6nr01994c","relation":{},"ISSN":["2040-3364","2040-3372"],"issn-type":[{"value":"2040-3364","type":"print"},{"value":"2040-3372","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026]]}}}