{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,12,4]],"date-time":"2025-12-04T01:27:04Z","timestamp":1764811624188,"version":"3.37.3"},"reference-count":196,"publisher":"Royal Society of Chemistry (RSC)","issue":"38","license":[{"start":{"date-parts":[[2021,9,18]],"date-time":"2021-09-18T00:00:00Z","timestamp":1631923200000},"content-version":"am","delay-in-days":626,"URL":"http:\/\/rsc.li\/journals-terms-of-use"}],"funder":[{"name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","award":["SFRH\/BD\/144984\/2019","UIDB\/50011\/2020","UIDP\/50011\/2020","UIDB\/50008\/2020"],"award-info":[{"award-number":["SFRH\/BD\/144984\/2019","UIDB\/50011\/2020","UIDP\/50011\/2020","UIDB\/50008\/2020"]}]}],"content-domain":{"domain":["rsc.org"],"crossmark-restriction":true},"short-container-title":["J. Mater. Chem. C"],"abstract":"<p>Working in concert, diamond layers and high-<italic>\u03ba<\/italic> films impart opportunities for high performance MOS devices. Optimization hinges on their interfacial quality inciting investigation into diamond surface terminations and ALD parameters to ensure success.<\/p>","DOI":"10.1039\/d0tc02063j","type":"journal-article","created":{"date-parts":[[2020,9,18]],"date-time":"2020-09-18T09:15:38Z","timestamp":1600420538000},"page":"13127-13153","update-policy":"https:\/\/doi.org\/10.1039\/rsc_crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["Atomic layer deposition of high-<i>\u03ba<\/i> layers on polycrystalline diamond for MOS devices: a review"],"prefix":"10.1039","volume":"8","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5161-4630","authenticated-orcid":false,"given":"Aneeta","family":"Jaggernauth","sequence":"first","affiliation":[{"name":"CICECO"},{"name":"Department of Materials and Ceramic Engineering"},{"name":"University of Aveiro"},{"name":"3810-193 Aveiro"},{"name":"Portugal"}]},{"given":"Joana C.","family":"Mendes","sequence":"additional","affiliation":[{"name":"Instituto de Telecomunica\u00e7\u00f5es"},{"name":"Campus Universit\u00e1rio de Santiago"},{"name":"3810-193 Aveiro"},{"name":"Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2584-1792","authenticated-orcid":false,"given":"Rui F.","family":"Silva","sequence":"additional","affiliation":[{"name":"CICECO"},{"name":"Department of Materials and Ceramic Engineering"},{"name":"University of Aveiro"},{"name":"3810-193 Aveiro"},{"name":"Portugal"}]}],"member":"292","published-online":{"date-parts":[[2020]]},"reference":[{"key":"D0TC02063J-(cit1)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"332","DOI":"10.1002\/cvde.201402012","volume":"20","author":"Puurunen","year":"2014","journal-title":"Chem. Vap. Deposition"},{"key":"D0TC02063J-(cit2)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5548","DOI":"10.1002\/anie.200301652","volume":"42","author":"Leskel\u00e4","year":"2003","journal-title":"Angew. Chem., Int. Ed."},{"key":"D0TC02063J-(cit3)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1032","DOI":"10.1038\/35023243","volume":"406","author":"Kingon","year":"2000","journal-title":"Nature"},{"key":"D0TC02063J-(cit4)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.mser.2014.11.001","volume":"88","author":"Robertson","year":"2015","journal-title":"Mater. Sci. Eng., R"},{"key":"D0TC02063J-(cit5)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"093002","DOI":"10.1088\/1361-6641\/aa7ade","volume":"32","author":"Biyikli","year":"2017","journal-title":"Semicond. Sci. Technol."},{"key":"D0TC02063J-(cit6)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1063\/1.2062940","volume":"788","author":"Senzaki","year":"2005","journal-title":"AIP Conf. Proc."},{"key":"D0TC02063J-(cit7)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1785","DOI":"10.1116\/1.591472","volume":"18","author":"Robertson","year":"2000","journal-title":"J. Vac. Sci. Technol., B"},{"key":"D0TC02063J-(cit8)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"030101","DOI":"10.7567\/JJAP.54.030101","volume":"54","author":"Fujita","year":"2015","journal-title":"Jpn. J. Appl. Phys."},{"key":"D0TC02063J-(cit9)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1002\/aelm.201600501","volume":"4","author":"Tsao","year":"2018","journal-title":"Adv. Electron. Mater."},{"key":"D0TC02063J-(cit10)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2155","DOI":"10.1109\/TPEL.2013.2268900","volume":"29","author":"Millan","year":"2014","journal-title":"IEEE Trans. Power Electron."},{"author":"Kaminski","key":"D0TC02063J-(cit11)\/*[position()=1]","unstructured":"N. Kaminski  ,  13th European Conference on Power Electronics and Applications, 2009 , 2009, pp. 1\u20139"},{"key":"D0TC02063J-(cit12)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"317","DOI":"10.1038\/nature10677","volume":"479","author":"Del Alamo","year":"2011","journal-title":"Nature"},{"key":"D0TC02063J-(cit13)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1002\/admi.201700300","volume":"4","author":"Tripathi","year":"2017","journal-title":"Adv. Mater. Interfaces"},{"key":"D0TC02063J-(cit14)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"22","DOI":"10.1016\/S1369-7021(07)70349-8","volume":"11","author":"Wort","year":"2008","journal-title":"Mater. Today"},{"key":"D0TC02063J-(cit15)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"374017","DOI":"10.1088\/0022-3727\/43\/37\/374017","volume":"43","author":"Gracio","year":"2010","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D0TC02063J-(cit16)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"168","DOI":"10.1016\/j.diamond.2016.03.013","volume":"65","author":"Shikata","year":"2016","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit17)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1195","DOI":"10.1007\/s12613-019-1843-4","volume":"26","author":"Yuan","year":"2019","journal-title":"Int. J. Miner., Metall. Mater."},{"key":"D0TC02063J-(cit18)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"813","DOI":"10.3390\/s18030813","volume":"18","author":"Liu","year":"2018","journal-title":"Sensors"},{"key":"D0TC02063J-(cit19)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"147","DOI":"10.1016\/j.mssp.2018.01.007","volume":"78","author":"Umezawa","year":"2018","journal-title":"Mater. Sci. Semicond. Process."},{"key":"D0TC02063J-(cit20)\/*[position()=1]","first-page":"1","volume":"215","author":"Geis","year":"2018","journal-title":"Phys. Status Solidi A"},{"key":"D0TC02063J-(cit21)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"236","DOI":"10.1016\/j.mattod.2014.04.026","volume":"17","author":"Johnson","year":"2014","journal-title":"Mater. Today"},{"key":"D0TC02063J-(cit22)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2231","DOI":"10.1116\/1.1622676","volume":"21","author":"Kim","year":"2003","journal-title":"J. Vac. Sci. Technol., B"},{"key":"D0TC02063J-(cit23)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"121301","DOI":"10.1063\/1.1940727","volume":"97","author":"Puurunen","year":"2005","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit24)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1021\/cr900056b","volume":"110","author":"George","year":"2010","journal-title":"Chem. Rev."},{"key":"D0TC02063J-(cit25)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"213","DOI":"10.1016\/j.cej.2014.07.105","volume":"259","author":"Xie","year":"2015","journal-title":"Chem. Eng. J."},{"key":"D0TC02063J-(cit26)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3246","DOI":"10.1039\/b405776g","volume":"14","author":"Elliott","year":"2004","journal-title":"J. Mater. Chem."},{"key":"D0TC02063J-(cit27)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"045304","DOI":"10.1063\/1.5025008","volume":"8","author":"Jin","year":"2018","journal-title":"AIP Adv."},{"key":"D0TC02063J-(cit28)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"014102","DOI":"10.1063\/1.4774042","volume":"84","author":"Larrabee","year":"2013","journal-title":"Rev. Sci. Instrum."},{"key":"D0TC02063J-(cit29)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"245","DOI":"10.1002\/cvde.200306243","volume":"9","author":"Sundqvist","year":"2003","journal-title":"Chem. Vap. Deposition"},{"key":"D0TC02063J-(cit30)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1016\/j.tsf.2017.02.047","volume":"627","author":"Henke","year":"2017","journal-title":"Thin Solid Films"},{"key":"D0TC02063J-(cit31)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2750","DOI":"10.1016\/j.tsf.2011.11.081","volume":"520","author":"Ozgit","year":"2012","journal-title":"Thin Solid Films"},{"key":"D0TC02063J-(cit32)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4878","DOI":"10.1063\/1.1787624","volume":"96","author":"Puurunen","year":"2004","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit33)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"236","DOI":"10.1016\/S0169-4332(96)00989-0","volume":"112","author":"Kukli","year":"1997","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit34)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4350","DOI":"10.1021\/cm020357x","volume":"14","author":"Hausmann","year":"2002","journal-title":"Chem. Mater."},{"key":"D0TC02063J-(cit35)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"224","DOI":"10.1007\/s11837-018-3156-x","volume":"71","author":"McDonnell","year":"2018","journal-title":"JOM"},{"key":"D0TC02063J-(cit36)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"143","DOI":"10.1002\/cvde.200306289","volume":"10","author":"Pore","year":"2004","journal-title":"Chem. Vap. Deposition"},{"key":"D0TC02063J-(cit37)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"20170037","DOI":"10.1098\/rsta.2017.0037","volume":"376","author":"Putkonen","year":"2018","journal-title":"Philos. Trans. R. Soc., A"},{"key":"D0TC02063J-(cit38)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"16342","DOI":"10.1016\/j.ceramint.2018.06.041","volume":"44","author":"Ko","year":"2018","journal-title":"Ceram. Int."},{"key":"D0TC02063J-(cit39)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"17447","DOI":"10.1016\/j.ceramint.2018.06.212","volume":"44","author":"Kim","year":"2018","journal-title":"Ceram. Int."},{"key":"D0TC02063J-(cit40)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"277","DOI":"10.1002\/cvde.19960020612","volume":"2","author":"Riihel\u00e4","year":"1996","journal-title":"Chem. Vap. Deposition"},{"key":"D0TC02063J-(cit41)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"71","DOI":"10.1016\/j.tsf.2013.06.050","volume":"542","author":"Kim","year":"2013","journal-title":"Thin Solid Films"},{"key":"D0TC02063J-(cit42)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"204","DOI":"10.1016\/j.jorganchem.2017.03.003","volume":"847","author":"Karunarathne","year":"2017","journal-title":"J. Organomet. Chem."},{"key":"D0TC02063J-(cit43)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"537","DOI":"10.1021\/acsami.6b11613","volume":"9","author":"Song","year":"2016","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D0TC02063J-(cit44)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"124504","DOI":"10.1063\/1.4769404","volume":"112","author":"Hiraiwa","year":"2012","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit45)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"439","DOI":"10.1038\/nature02751","volume":"430","author":"Strobel","year":"2004","journal-title":"Nature"},{"key":"D0TC02063J-(cit46)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01AA01","DOI":"10.7567\/JJAP.56.01AA01","volume":"56","author":"Kasu","year":"2017","journal-title":"Jpn. J. Appl. Phys."},{"key":"D0TC02063J-(cit47)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"025104","DOI":"10.1063\/1.4955469","volume":"120","author":"Verona","year":"2016","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit48)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"469","DOI":"10.1016\/j.carbon.2016.09.050","volume":"110","author":"Rivero","year":"2016","journal-title":"Carbon N. Y."},{"key":"D0TC02063J-(cit49)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"S34","DOI":"10.1088\/0268-1242\/18\/3\/305","volume":"18","author":"Williams","year":"2003","journal-title":"Semicond. Sci. Technol."},{"key":"D0TC02063J-(cit50)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"025701","DOI":"10.1143\/APEX.5.025701","volume":"5","author":"Kasu","year":"2012","journal-title":"Appl. Phys. Express"},{"key":"D0TC02063J-(cit51)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"090112","DOI":"10.1143\/JJAP.51.090114","volume":"51","author":"Hirama","year":"2012","journal-title":"Jpn. J. Appl. Phys."},{"key":"D0TC02063J-(cit52)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"107846","DOI":"10.1016\/j.diamond.2020.107846","volume":"106","author":"Ren","year":"2020","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit53)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"202112","DOI":"10.1063\/1.4832455","volume":"103","author":"Russell","year":"2013","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit54)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"144890","DOI":"10.1016\/j.apsusc.2019.144890","volume":"509","author":"Xing","year":"2020","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit55)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1965","DOI":"10.1039\/b910206j","volume":"134","author":"Luong","year":"2009","journal-title":"Analyst"},{"key":"D0TC02063J-(cit56)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2935","DOI":"10.1039\/C4CP04022H","volume":"17","author":"Macpherson","year":"2015","journal-title":"Phys. Chem. Chem. Phys."},{"key":"D0TC02063J-(cit57)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4778","DOI":"10.1039\/C6TC00087H","volume":"4","author":"Yuan","year":"2016","journal-title":"J. Mater. Chem. C"},{"key":"D0TC02063J-(cit58)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9956","DOI":"10.1021\/acsomega.8b01104","volume":"3","author":"Sankaran","year":"2018","journal-title":"ACS Omega"},{"key":"D0TC02063J-(cit59)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"075303","DOI":"10.1063\/1.4913258","volume":"117","author":"Sankaran","year":"2015","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit60)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"171907","DOI":"10.1063\/1.4875059","volume":"104","author":"Chatterjee","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit61)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"456","DOI":"10.1016\/j.apsusc.2017.07.132","volume":"426","author":"Cicala","year":"2017","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit62)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4642","DOI":"10.1063\/1.367249","volume":"83","author":"Sitch","year":"1998","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit63)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1307","DOI":"10.1016\/j.diamond.2008.03.028","volume":"17","author":"Shah","year":"2008","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit64)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5","DOI":"10.1016\/j.apsusc.2014.04.161","volume":"311","author":"Oliveira","year":"2014","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit65)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"443","DOI":"10.1140\/epjb\/e2013-40528-x","volume":"86","author":"Ashcheulov","year":"2013","journal-title":"Eur. Phys. J. B"},{"key":"D0TC02063J-(cit66)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2043","DOI":"10.1016\/j.diamond.2005.08.044","volume":"14","author":"Saito","year":"2005","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit67)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"626","DOI":"10.1016\/j.electacta.2015.04.124","volume":"179","author":"Kavan","year":"2015","journal-title":"Electrochim. Acta"},{"key":"D0TC02063J-(cit68)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"54","DOI":"10.1016\/j.diamond.2019.01.028","volume":"93","author":"Mortet","year":"2019","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit69)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"742","DOI":"10.1016\/0925-9635(93)90215-N","volume":"2","author":"Gheeraert","year":"1993","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit70)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"163","DOI":"10.1016\/j.diamond.2018.07.013","volume":"88","author":"Mortet","year":"2018","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit71)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1155\/2012\/218393","volume":"2012","author":"Srikanth","year":"2012","journal-title":"Int. J. Electrochem."},{"key":"D0TC02063J-(cit72)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"763","DOI":"10.1016\/S0925-9635(96)00668-1","volume":"6","author":"Wurzinger","year":"1997","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit73)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"789","DOI":"10.1016\/0925-9635(92)90102-T","volume":"1","author":"Janssen","year":"1992","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit74)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"603","DOI":"10.1109\/LED.2015.2423971","volume":"36","author":"Kovi","year":"2015","journal-title":"IEEE Electron Device Lett."},{"key":"D0TC02063J-(cit75)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"89","DOI":"10.1016\/j.diamond.2016.02.001","volume":"64","author":"Neto","year":"2016","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit76)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"105","DOI":"10.1016\/j.diamond.2007.11.005","volume":"17","author":"May","year":"2008","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit77)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"95","DOI":"10.1103\/PhysRevB.61.14095","volume":"61","author":"Ferrari","year":"2000","journal-title":"Phys. Rev. B: Condens. Matter Mater. Phys."},{"key":"D0TC02063J-(cit78)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"114","DOI":"10.1016\/j.diamond.2016.10.016","volume":"70","author":"Wang","year":"2016","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit79)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1302","DOI":"10.1109\/LED.2017.2727879","volume":"38","author":"Ren","year":"2017","journal-title":"IEEE Electron Device Lett."},{"key":"D0TC02063J-(cit80)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1704","DOI":"10.1109\/LED.2018.2870668","volume":"39","author":"Fu","year":"2018","journal-title":"IEEE Electron Device Lett."},{"key":"D0TC02063J-(cit81)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"031914","DOI":"10.1063\/1.2432996","volume":"90","author":"Michaelson","year":"2007","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit82)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"112107","DOI":"10.1063\/1.2889947","volume":"92","author":"Hirama","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit83)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2477","DOI":"10.1098\/rsta.2004.1452","volume":"362","author":"Ferrari","year":"2004","journal-title":"Philos. Trans. R. Soc., A"},{"key":"D0TC02063J-(cit84)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"26381","DOI":"10.1021\/acsami.6b08083","volume":"8","author":"Buijnsters","year":"2016","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D0TC02063J-(cit85)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1205","DOI":"10.1007\/s10008-007-0473-3","volume":"12","author":"Szunerits","year":"2008","journal-title":"J. Solid State Electrochem."},{"key":"D0TC02063J-(cit86)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"6626","DOI":"10.1021\/acs.nanolett.5b02429","volume":"15","author":"Park","year":"2015","journal-title":"Nano Lett."},{"key":"D0TC02063J-(cit87)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"101","DOI":"10.1016\/j.apsusc.2013.03.041","volume":"276","author":"Torrengo","year":"2013","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit88)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"313","DOI":"10.1016\/j.apsusc.2018.09.171","volume":"465","author":"Li","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit89)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"630","DOI":"10.1016\/j.diamond.2010.01.014","volume":"19","author":"Ghodbane","year":"2010","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit90)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"109046","DOI":"10.1016\/j.vacuum.2019.109046","volume":"172","author":"Wei","year":"2020","journal-title":"Vacuum"},{"key":"D0TC02063J-(cit91)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4168","DOI":"10.1021\/acs.jpcc.8b11232","volume":"123","author":"Wan","year":"2019","journal-title":"J. Phys. Chem. C"},{"key":"D0TC02063J-(cit92)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"234103","DOI":"10.1063\/1.2939561","volume":"98","author":"Shpilman","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit93)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"787","DOI":"10.1016\/j.diamond.2006.01.002","volume":"15","author":"Ye","year":"2006","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit94)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"223711","DOI":"10.1063\/1.4881524","volume":"115","author":"Daicho","year":"2014","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit95)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"065026","DOI":"10.1063\/1.5037925","volume":"8","author":"Ren","year":"2018","journal-title":"AIP Adv."},{"key":"D0TC02063J-(cit96)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1063\/1.4901961","volume":"105","author":"Kovi","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit97)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"61","DOI":"10.1149\/06905.0061ecst","volume":"69","author":"Kovi","year":"2015","journal-title":"ECS Trans."},{"key":"D0TC02063J-(cit98)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"013503","DOI":"10.1063\/1.5126359","volume":"116","author":"Ren","year":"2020","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit99)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"219","DOI":"10.1016\/j.diamond.2018.11.019","volume":"91","author":"Saha","year":"2019","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit100)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"932","DOI":"10.1016\/j.diamond.2010.02.026","volume":"19","author":"Kueck","year":"2010","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit101)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"215304","DOI":"10.1063\/1.4921824","volume":"117","author":"Hiraiwa","year":"2015","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit102)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"013510","DOI":"10.1063\/1.4884828","volume":"105","author":"Kawarada","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit103)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"041301","DOI":"10.7567\/JJAP.55.041301","volume":"55","author":"Kasu","year":"2016","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit104)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"072101","DOI":"10.1063\/1.4865929","volume":"104","author":"Takahashi","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit105)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"86","DOI":"10.1016\/j.diamond.2018.03.002","volume":"84","author":"Geis","year":"2018","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit106)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"100046","DOI":"10.1016\/j.mne.2020.100046","volume":"6","author":"Sun","year":"2020","journal-title":"Micro Nano Eng."},{"key":"D0TC02063J-(cit107)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"102113","DOI":"10.1063\/1.4825071","volume":"3","author":"Yang","year":"2013","journal-title":"AIP Adv."},{"key":"D0TC02063J-(cit108)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"42368","DOI":"10.1038\/srep42368","volume":"7","author":"Kawarada","year":"2017","journal-title":"Sci. Rep."},{"key":"D0TC02063J-(cit109)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1186\/s11671-015-0883-6","volume":"10","author":"Fei","year":"2015","journal-title":"Nanoscale Res. Lett."},{"key":"D0TC02063J-(cit110)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9794","DOI":"10.1039\/C8TC03640C","volume":"6","author":"Park","year":"2018","journal-title":"J. Mater. Chem. C"},{"key":"D0TC02063J-(cit111)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"221","DOI":"10.1016\/j.apsusc.2015.01.005","volume":"330","author":"Huang","year":"2015","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit112)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"50","DOI":"10.1016\/j.mssp.2018.10.001","volume":"90","author":"Wang","year":"2019","journal-title":"Mater. Sci. Semicond. Process."},{"key":"D0TC02063J-(cit113)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1028","DOI":"10.1016\/j.apsusc.2019.03.139","volume":"481","author":"Song","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit114)\/*[position()=1]","first-page":"1","volume":"6","author":"Li","year":"2019","journal-title":"Adv. Mater. Interfaces"},{"key":"D0TC02063J-(cit115)\/*[position()=1]","first-page":"1","volume":"99","author":"Wang","year":"2019","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit116)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"128104","DOI":"10.1088\/1674-1056\/25\/12\/128104","volume":"25","author":"Tian","year":"2016","journal-title":"Chin. Phys. B"},{"key":"D0TC02063J-(cit117)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01B125","DOI":"10.1116\/1.4971991","volume":"35","author":"Henkel","year":"2017","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D0TC02063J-(cit118)\/*[position()=1]","first-page":"265","volume":"28","author":"Robertson","year":"2004","journal-title":"Eur. Phys. J.: Appl. Phys."},{"key":"D0TC02063J-(cit119)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"224502","DOI":"10.1063\/1.4985066","volume":"121","author":"Liu","year":"2017","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit120)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"124504","DOI":"10.1063\/1.4962851","volume":"120","author":"Liu","year":"2016","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit121)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"27379","DOI":"10.1021\/acs.jpcc.7b06491","volume":"121","author":"Thian","year":"2017","journal-title":"J. Phys. Chem. C"},{"key":"D0TC02063J-(cit122)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"125991","DOI":"10.1016\/j.surfcoat.2020.125991","volume":"397","author":"Jaggernauth","year":"2020","journal-title":"Surf. Coat. Technol."},{"key":"D0TC02063J-(cit123)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2367","DOI":"10.1002\/pssa.201431178","volume":"211","author":"Pi\u00f1ero","year":"2014","journal-title":"Phys. Status Solidi A"},{"key":"D0TC02063J-(cit124)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"584","DOI":"10.3390\/nano8080584","volume":"8","author":"Guti\u00e9rrez","year":"2018","journal-title":"Nanomaterials"},{"key":"D0TC02063J-(cit125)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41598-016-0001-8","volume":"6","author":"Matsumoto","year":"2016","journal-title":"Sci. Rep."},{"key":"D0TC02063J-(cit126)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"30564","DOI":"10.1021\/acsami.6b09596","volume":"8","author":"Aria","year":"2016","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D0TC02063J-(cit127)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"052810","DOI":"10.1063\/1.4967406","volume":"146","author":"Zhang","year":"2017","journal-title":"J. Chem. Phys."},{"key":"D0TC02063J-(cit128)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"01A148","DOI":"10.1116\/1.4938481","volume":"34","author":"Atanasov","year":"2016","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D0TC02063J-(cit129)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"7367","DOI":"10.1039\/C8TC01476K","volume":"6","author":"Oh","year":"2018","journal-title":"J. Mater. Chem. C"},{"key":"D0TC02063J-(cit130)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"eaau0480","DOI":"10.1126\/sciadv.aau0480","volume":"4","author":"Yin","year":"2018","journal-title":"Sci. Adv."},{"key":"D0TC02063J-(cit131)\/*[position()=1]","first-page":"53","volume":"5","author":"Schilir\u00f2","year":"2019","journal-title":"C"},{"key":"D0TC02063J-(cit132)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"239","DOI":"10.1016\/j.apsusc.2019.06.192","volume":"492","author":"Lin","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit133)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"758","DOI":"10.1016\/j.apsusc.2018.08.034","volume":"463","author":"Kwak","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit134)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1088\/2053-1583\/3\/3\/035027","volume":"3","author":"Jeong","year":"2016","journal-title":"2D Mater."},{"key":"D0TC02063J-(cit135)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"203102","DOI":"10.1063\/1.2928228","volume":"92","author":"Lee","year":"2008","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit136)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"055704","DOI":"10.1088\/1361-6528\/ab4e44","volume":"31","author":"Zhu","year":"2020","journal-title":"Nanotechnology"},{"key":"D0TC02063J-(cit137)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"102103","DOI":"10.1063\/1.5018403","volume":"112","author":"Pham","year":"2018","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit138)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"15848","DOI":"10.1021\/acsami.7b01618","volume":"9","author":"Zheng","year":"2017","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D0TC02063J-(cit139)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"195602","DOI":"10.1088\/1361-6528\/aab0fb","volume":"29","author":"Shin","year":"2018","journal-title":"Nanotechnology"},{"key":"D0TC02063J-(cit140)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"104110","DOI":"10.1063\/1.4766408","volume":"112","author":"McDonnell","year":"2012","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit141)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3526","DOI":"10.1021\/am300595f","volume":"4","author":"Wang","year":"2012","journal-title":"ACS Appl. Mater. Interfaces"},{"key":"D0TC02063J-(cit142)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"10134","DOI":"10.1039\/C9TC03381E","volume":"7","author":"Raymakers","year":"2019","journal-title":"J. Mater. Chem. C"},{"key":"D0TC02063J-(cit143)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"295","DOI":"10.1016\/j.susc.2016.01.003","volume":"650","author":"Zhu","year":"2016","journal-title":"Surf. Sci."},{"key":"D0TC02063J-(cit144)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1063\/1.4930945","volume":"107","author":"Chandran","year":"2015","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit145)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1709","DOI":"10.1002\/pssa.201200025","volume":"209","author":"Tiwari","year":"2012","journal-title":"Phys. Status Solidi A"},{"key":"D0TC02063J-(cit146)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"261","DOI":"10.1016\/j.diamond.2018.11.028","volume":"91","author":"Alcantar-Pe\u00f1a","year":"2019","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit147)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1973","DOI":"10.1021\/ar200317y","volume":"45","author":"Paci","year":"2012","journal-title":"Acc. Chem. Res."},{"key":"D0TC02063J-(cit148)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5981","DOI":"10.1016\/j.electacta.2009.03.011","volume":"54","author":"Poghossian","year":"2009","journal-title":"Electrochim. Acta"},{"key":"D0TC02063J-(cit149)\/*[position()=1]","first-page":"1","author":"Jin","year":"2019","journal-title":"Surf. Interface Anal."},{"key":"D0TC02063J-(cit150)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1609","DOI":"10.1002\/pssa.201200470","volume":"209","author":"Man","year":"2012","journal-title":"Phys. Status Solidi A"},{"key":"D0TC02063J-(cit151)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"200","DOI":"10.1016\/j.apsusc.2016.04.166","volume":"395","author":"Pinero","year":"2017","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit152)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1362","DOI":"10.1016\/j.diamond.2008.03.013","volume":"17","author":"Strobel","year":"2008","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit153)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5818","DOI":"10.1016\/j.electacta.2009.05.037","volume":"54","author":"Wang","year":"2009","journal-title":"Electrochim. Acta"},{"key":"D0TC02063J-(cit154)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"408","DOI":"10.1016\/j.apsusc.2017.10.065","volume":"433","author":"Navas","year":"2018","journal-title":"Appl. Surf.\nSci."},{"key":"D0TC02063J-(cit155)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"055503","DOI":"10.7567\/APEX.10.055503","volume":"10","author":"Kageura","year":"2017","journal-title":"Appl. Phys. Express"},{"key":"D0TC02063J-(cit156)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"174106","DOI":"10.1063\/1.3251789","volume":"95","author":"Shpilman","year":"2009","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit157)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"219","DOI":"10.1016\/0039-6028(92)90473-J","volume":"262","author":"Zheng","year":"1992","journal-title":"Surf. Sci."},{"key":"D0TC02063J-(cit158)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"795","DOI":"10.1021\/jp063383h","volume":"111","author":"Petrini","year":"2007","journal-title":"J. Phys. Chem. C"},{"key":"D0TC02063J-(cit159)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3035","DOI":"10.1016\/j.susc.2009.08.014","volume":"603","author":"Yang","year":"2009","journal-title":"Surf. Sci."},{"key":"D0TC02063J-(cit160)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"185","DOI":"10.1016\/j.diamond.2007.12.003","volume":"17","author":"Liang","year":"2008","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit161)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1007\/s11051-018-4442-9","volume":"21","author":"Weimer","year":"2019","journal-title":"J. Nanopart. Res."},{"key":"D0TC02063J-(cit162)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1395","DOI":"10.1063\/1.1650551","volume":"84","author":"Saito","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit163)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"4212","DOI":"10.1063\/1.339092","volume":"62","author":"Li","year":"1987","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit164)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9157","DOI":"10.1103\/PhysRevB.60.9157","volume":"60","author":"Zhao","year":"1999","journal-title":"Phys. Rev. B: Condens. Matter Mater. Phys."},{"key":"D0TC02063J-(cit165)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3398","DOI":"10.1149\/1.1392485","volume":"146","author":"Kim","year":"1999","journal-title":"J. Electrochem. Soc."},{"key":"D0TC02063J-(cit166)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1021","DOI":"10.1149\/1.1836575","volume":"143","author":"Lopes","year":"1996","journal-title":"J. Electrochem. Soc."},{"key":"D0TC02063J-(cit167)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"9846","DOI":"10.1016\/j.matpr.2017.10.176","volume":"5","author":"Roy","year":"2018","journal-title":"Mater. Today Proc."},{"key":"D0TC02063J-(cit168)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"473","DOI":"10.1016\/j.carbon.2013.11.023","volume":"68","author":"Thomas","year":"2014","journal-title":"Carbon N. Y."},{"key":"D0TC02063J-(cit169)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"25","DOI":"10.1016\/j.carbon.2017.12.077","volume":"130","author":"Mandal","year":"2018","journal-title":"Carbon N. Y."},{"key":"D0TC02063J-(cit170)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"033715","DOI":"10.1063\/1.3544310","volume":"109","author":"Weber","year":"2011","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit171)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"091604","DOI":"10.1063\/1.4867652","volume":"104","author":"Werner","year":"2014","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit172)\/*[position()=1]","first-page":"17","volume":"43","author":"Giera\u0142towska","year":"2013","journal-title":"Opt. Appl."},{"key":"D0TC02063J-(cit173)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"N189","DOI":"10.1149\/2.0091710jss","volume":"6","author":"Gaskins","year":"2017","journal-title":"ECS J. Solid State Sci. Technol."},{"key":"D0TC02063J-(cit174)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"472","DOI":"10.1063\/1.1487923","volume":"81","author":"Cho","year":"2002","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit175)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"245102","DOI":"10.1088\/0022-3727\/47\/24\/245102","volume":"47","author":"Liu","year":"2014","journal-title":"J. Phys. D: Appl. Phys."},{"key":"D0TC02063J-(cit176)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"3382","DOI":"10.1109\/TED.2019.2924135","volume":"66","author":"Yang","year":"2019","journal-title":"IEEE Trans. Electron Devices"},{"key":"D0TC02063J-(cit177)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"096502","DOI":"10.7567\/JJAP.57.096502","volume":"57","author":"Zhang","year":"2018","journal-title":"Jpn. J. Appl. Phys."},{"key":"D0TC02063J-(cit178)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"e190","DOI":"10.1038\/am.2015.57","volume":"7","author":"Yim","year":"2015","journal-title":"NPG Asia Mater."},{"key":"D0TC02063J-(cit179)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"634","DOI":"10.1016\/j.apsusc.2018.09.239","volume":"469","author":"Lee","year":"2019","journal-title":"Appl. Surf. Sci."},{"key":"D0TC02063J-(cit180)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"125017","DOI":"10.1088\/0268-1242\/30\/12\/125017","volume":"30","author":"Ramanan","year":"2015","journal-title":"Semicond. Sci. Technol."},{"key":"D0TC02063J-(cit181)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"074113","DOI":"10.1063\/1.2716399","volume":"101","author":"Hegde","year":"2007","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit182)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"G185","DOI":"10.1149\/1.3598172","volume":"158","author":"Wang","year":"2011","journal-title":"J. Electrochem. Soc."},{"key":"D0TC02063J-(cit183)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2563","DOI":"10.1016\/j.tsf.2008.09.007","volume":"517","author":"Kim","year":"2009","journal-title":"Thin Solid Films"},{"key":"D0TC02063J-(cit184)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"291","DOI":"10.1016\/j.matchemphys.2016.09.054","volume":"184","author":"Wang","year":"2016","journal-title":"Mater. Chem. Phys."},{"key":"D0TC02063J-(cit185)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"0","DOI":"10.1063\/1.4931123","volume":"107","author":"Mar\u00e9chal","year":"2015","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit186)\/*[position()=1]","first-page":"1","volume":"101","author":"Liu","year":"2012","journal-title":"Appl. Phys. Lett."},{"key":"D0TC02063J-(cit187)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"55","DOI":"10.1016\/j.diamond.2014.10.004","volume":"54","author":"Liu","year":"2015","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit188)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"084108","DOI":"10.1063\/1.4819108","volume":"114","author":"Liu","year":"2013","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit189)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"5243","DOI":"10.1063\/1.1361065","volume":"89","author":"Wilk","year":"2001","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit190)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"1620","DOI":"10.1103\/PhysRevLett.44.1620","volume":"44","author":"Kraut","year":"1980","journal-title":"Phys. Rev. Lett."},{"key":"D0TC02063J-(cit191)\/*[position()=1]","first-page":"301302","volume":"2014","author":"Afanas\u2019ev","year":"2014","journal-title":"Adv. Condens. Matter Phys."},{"key":"D0TC02063J-(cit192)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"050821","DOI":"10.1116\/1.4818426","volume":"31","author":"Robertson","year":"2013","journal-title":"J. Vac. Sci. Technol., A"},{"key":"D0TC02063J-(cit193)\/*[position()=1]","first-page":"2","volume":"4","author":"Liu","year":"2014","journal-title":"Sci. Rep."},{"key":"D0TC02063J-(cit194)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"161599","DOI":"10.1063\/1.5002176","volume":"123","author":"Wu","year":"2018","journal-title":"J. Appl. Phys."},{"key":"D0TC02063J-(cit195)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"208","DOI":"10.1016\/j.diamond.2018.06.005","volume":"87","author":"Romanyuk","year":"2018","journal-title":"Diamond Relat. Mater."},{"key":"D0TC02063J-(cit196)\/*[position()=1]","doi-asserted-by":"crossref","first-page":"2294","DOI":"10.1021\/acs.nanolett.6b05023","volume":"17","author":"Chou","year":"2017","journal-title":"Nano Lett."}],"container-title":["Journal of Materials Chemistry C"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/pubs.rsc.org\/en\/content\/articlepdf\/2020\/TC\/D0TC02063J","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,4,17]],"date-time":"2024-04-17T18:19:44Z","timestamp":1713377984000},"score":1,"resource":{"primary":{"URL":"https:\/\/xlink.rsc.org\/?DOI=D0TC02063J"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2020]]},"references-count":196,"journal-issue":{"issue":"38","published-print":{"date-parts":[[2020,10,8]]}},"URL":"https:\/\/doi.org\/10.1039\/d0tc02063j","relation":{},"ISSN":["2050-7526","2050-7534"],"issn-type":[{"type":"print","value":"2050-7526"},{"type":"electronic","value":"2050-7534"}],"subject":[],"published":{"date-parts":[[2020]]},"assertion":[{"value":"This document is Similarity Check deposited","name":"similarity_check","explanation":{"URL":"https:\/\/www.crossref.org\/services\/similarity-check\/"},"group":{"name":"similarity_check","label":"SIMILARITY CHECK"}},{"value":"Aneeta Jaggernauth (ORCID)","URL":"http:\/\/orcid.org\/0000-0002-5161-4630","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Rui F. Silva (ORCID)","URL":"http:\/\/orcid.org\/0000-0002-2584-1792","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Rui F. Silva (ResearcherID)","URL":"http:\/\/www.researcherid.com\/rid\/B-8208-2008","name":"identifier","group":{"name":"author_identifiers","label":"IDENTIFIERS"}},{"value":"Single-blind","order":2,"name":"peer_review_method","group":{"name":"peer_review_method","label":"PEER REVIEW METHOD"}},{"value":"Received 28 April 2020; Accepted 6 September 2020;  Advance Article published 18 September 2020;  Version of Record published 8 October 2020","order":1,"name":"history","group":{"name":"publication_history","label":"PUBLICATION HISTORY"}}]}}