{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,11,12]],"date-time":"2024-11-12T15:10:21Z","timestamp":1731424221986,"version":"3.28.0"},"reference-count":3,"publisher":"Institution of Engineering and Technology (IET)","issue":"15","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Electron. Lett."],"published-print":{"date-parts":[[1994,7,21]]},"DOI":"10.1049\/el:19940843","type":"journal-article","created":{"date-parts":[[2002,7,26]],"date-time":"2002-07-26T11:10:43Z","timestamp":1027681843000},"page":"1209-1210","source":"Crossref","is-referenced-by-count":0,"title":["Novel ELFIN (\n            <u>e<\/u>\n            mbedded-metal-\n            <u>l<\/u>\n            ayer process for\n            <u>f<\/u>\n            ully\n            <u>i<\/u>\n            ntegrated\n            <u>N<\/u>\n            OR) cell for 16\/64 Mbit flash EEPROM"],"prefix":"10.1049","volume":"30","author":[{"given":"Y.","family":"Kawazu","sequence":"first","affiliation":[{"name":"Semiconductor Technology Laboratory, Oki Electric Industry Co. Ltd., 550-5 Higashiasakawa-cho, Hachioji-shi, Tokyo, 193, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"Hayashi","sequence":"additional","affiliation":[{"name":"Semiconductor Technology Laboratory, Oki Electric Industry Co. Ltd., 550-5 Higashiasakawa-cho, Hachioji-shi, Tokyo, 193, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"M.","family":"Ohno","sequence":"additional","affiliation":[{"name":"Semiconductor Technology Laboratory, Oki Electric Industry Co. Ltd., 550-5 Higashiasakawa-cho, Hachioji-shi, Tokyo, 193, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"T.","family":"Ono","sequence":"additional","affiliation":[{"name":"LSI Process Technology Division, Oki Electric Industry Co. Ltd., 550-1 Higashiasakawa-cho, Hachioji-shi, Tokyo, 193, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"A.","family":"Uchiyama","sequence":"additional","affiliation":[{"name":"LSI Process Technology Division, Oki Electric Industry Co. Ltd., 550-1 Higashiasakawa-cho, Hachioji-shi, Tokyo, 193, Japan"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"265","reference":[{"key":"10.1049\/el:19940843_r1","first-page":"552","author":"Masuoka","year":"1987","journal-title":"IEEE IEDM Tech. Dig."},{"key":"10.1049\/el:19940843_r2","first-page":"599","author":"Onoda","year":"1992","journal-title":"IEEE IEDM Tech. Dig."},{"key":"10.1049\/el:19940843_r3","first-page":"991","author":"Kume","year":"1992","journal-title":"IEEE IEDM Tech. Dig."}],"container-title":["Electronics Letters"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/digital-library.theiet.org\/content\/journals\/10.1049\/el_19940843?crawler=true&mimetype=application\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,11,12]],"date-time":"2024-11-12T14:29:53Z","timestamp":1731421793000},"score":1,"resource":{"primary":{"URL":"http:\/\/digital-library.theiet.org\/doi\/10.1049\/el%3A19940843"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1994,7,21]]},"references-count":3,"journal-issue":{"issue":"15","published-print":{"date-parts":[[1994,7,21]]}},"alternative-id":["10.1049\/el:19940843"],"URL":"https:\/\/doi.org\/10.1049\/el:19940843","relation":{},"ISSN":["0013-5194","1350-911X"],"issn-type":[{"type":"print","value":"0013-5194"},{"type":"electronic","value":"1350-911X"}],"subject":[],"published":{"date-parts":[[1994,7,21]]}}}